EP1318308A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP1318308A3
EP1318308A3 EP02258145A EP02258145A EP1318308A3 EP 1318308 A3 EP1318308 A3 EP 1318308A3 EP 02258145 A EP02258145 A EP 02258145A EP 02258145 A EP02258145 A EP 02258145A EP 1318308 A3 EP1318308 A3 EP 1318308A3
Authority
EP
European Patent Office
Prior art keywords
cylinders
vacuum pump
multiple cylinder
rotor shaft
constitute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02258145A
Other languages
German (de)
English (en)
Other versions
EP1318308A2 (fr
Inventor
Manabu Nonaka
Tooru Miwata
Takashi Kabasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Technologies Ltd filed Critical BOC Edwards Technologies Ltd
Publication of EP1318308A2 publication Critical patent/EP1318308A2/fr
Publication of EP1318308A3 publication Critical patent/EP1318308A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
EP02258145A 2001-12-04 2002-11-27 Pompe à vide Withdrawn EP1318308A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001370627A JP2003172291A (ja) 2001-12-04 2001-12-04 真空ポンプ
JP2001370627 2001-12-04

Publications (2)

Publication Number Publication Date
EP1318308A2 EP1318308A2 (fr) 2003-06-11
EP1318308A3 true EP1318308A3 (fr) 2003-12-03

Family

ID=19179820

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02258145A Withdrawn EP1318308A3 (fr) 2001-12-04 2002-11-27 Pompe à vide

Country Status (6)

Country Link
US (1) US20030103847A1 (fr)
EP (1) EP1318308A3 (fr)
JP (1) JP2003172291A (fr)
KR (1) KR20030045597A (fr)
CN (1) CN1429994A (fr)
TW (1) TW200300819A (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194083A (ja) * 2003-09-16 2006-07-27 Boc Edwards Kk ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ
JP2006077714A (ja) * 2004-09-10 2006-03-23 Boc Edwards Kk ダンパ及び真空ポンプ
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
JP5056152B2 (ja) * 2007-05-15 2012-10-24 株式会社島津製作所 ターボ分子ポンプ
JP5284940B2 (ja) * 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
EP3499045A1 (fr) * 2010-09-28 2019-06-19 Edwards Japan Limited Pompe d'évacuation
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
WO2012172990A1 (fr) * 2011-06-16 2012-12-20 エドワーズ株式会社 Rotor et pompe à vide
KR102106658B1 (ko) * 2012-09-26 2020-05-04 에드워즈 가부시키가이샤 로터, 및, 이 로터를 구비한 진공 펌프
JP6353195B2 (ja) * 2013-05-09 2018-07-04 エドワーズ株式会社 固定円板および真空ポンプ
CN105556128B (zh) * 2013-09-30 2019-07-09 埃地沃兹日本有限公司 螺纹槽泵机构、使用该螺纹槽泵机构的真空泵、及用于前述螺纹槽泵机构的转子、外周侧定子及内周侧定子
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
GB2579665B (en) * 2018-12-12 2021-05-19 Edwards Ltd Multi-stage turbomolecular pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
EP0805275A2 (fr) * 1996-05-03 1997-11-05 The BOC Group plc Pompes à vide
JPH11210674A (ja) * 1998-01-27 1999-08-03 Ebara Corp ターボ分子ポンプ
JP2001248587A (ja) * 1999-12-28 2001-09-14 Kashiyama Kogyo Kk 複合型真空ポンプ
JP2001323892A (ja) * 2000-05-16 2001-11-22 Shimadzu Corp ターボ型真空機器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
EP0309474B1 (fr) * 1986-06-12 1990-10-31 ENGELBART, Wilke, Dr. Procede et dispositif pour la gazeification des liquides en fines bulles et sur une grande surface
US5639373A (en) * 1995-08-11 1997-06-17 Zenon Environmental Inc. Vertical skein of hollow fiber membranes and method of maintaining clean fiber surfaces while filtering a substrate to withdraw a permeate
US5248424A (en) * 1990-08-17 1993-09-28 Zenon Environmental Inc. Frameless array of hollow fiber membranes and method of maintaining clean fiber surfaces while filtering a substrate to withdraw a permeate
WO1993015827A1 (fr) * 1992-02-12 1993-08-19 Mitsubishi Rayon Co., Ltd. Module de membranes a fils creux
US5922201A (en) * 1992-02-12 1999-07-13 Mitsubishi Rayon Co., Ltd. Hollow fiber membrane module
JPH08100779A (ja) * 1994-10-04 1996-04-16 Matsushita Electric Ind Co Ltd 真空ポンプ
US6193890B1 (en) * 1995-08-11 2001-02-27 Zenon Environmental Inc. System for maintaining a clean skein of hollow fibers while filtering suspended solids
KR100693944B1 (ko) * 1995-08-11 2007-03-12 제논 인바이런멘탈 인코포레이티드 수직한 중공사 멤브레인 다발 및 섬유 표면을 깨끗하게유지시키는 방법
US6656356B2 (en) * 1998-10-09 2003-12-02 Zenon Environmental Inc. Aerated immersed membrane system
US5944997A (en) * 1995-08-11 1999-08-31 Zenon Environmental Inc. System for maintaining a clean skein of hollow fibers while filtering suspended solids
JP3866399B2 (ja) * 1997-12-16 2007-01-10 住友重機械工業株式会社 膜ろ過装置及びその運転方法
US6280626B1 (en) * 1998-08-12 2001-08-28 Mitsubishi Rayon Co., Ltd. Membrane separator assembly and method of cleaning the assembly utilizing gas diffuser underneath the assembly
EP2204353A3 (fr) * 1998-10-09 2010-09-15 Zenon Technology Partnership Système d'aération cyclique pour modules de membranes submergés
US6319411B1 (en) * 1998-10-09 2001-11-20 Zenon Environmental Inc. Method of maintaining clean vertical skeins of hollow fiber membranes and system therefor
US6550747B2 (en) * 1998-10-09 2003-04-22 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
EP0805275A2 (fr) * 1996-05-03 1997-11-05 The BOC Group plc Pompes à vide
JPH11210674A (ja) * 1998-01-27 1999-08-03 Ebara Corp ターボ分子ポンプ
JP2001248587A (ja) * 1999-12-28 2001-09-14 Kashiyama Kogyo Kk 複合型真空ポンプ
JP2001323892A (ja) * 2000-05-16 2001-11-22 Shimadzu Corp ターボ型真空機器

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 13 30 November 1999 (1999-11-30) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 26 1 July 2002 (2002-07-01) *
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 03 3 April 2002 (2002-04-03) *

Also Published As

Publication number Publication date
JP2003172291A (ja) 2003-06-20
CN1429994A (zh) 2003-07-16
KR20030045597A (ko) 2003-06-11
EP1318308A2 (fr) 2003-06-11
US20030103847A1 (en) 2003-06-05
TW200300819A (en) 2003-06-16

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