KR20030045597A - 진공 펌프 - Google Patents

진공 펌프 Download PDF

Info

Publication number
KR20030045597A
KR20030045597A KR1020020073978A KR20020073978A KR20030045597A KR 20030045597 A KR20030045597 A KR 20030045597A KR 1020020073978 A KR1020020073978 A KR 1020020073978A KR 20020073978 A KR20020073978 A KR 20020073978A KR 20030045597 A KR20030045597 A KR 20030045597A
Authority
KR
South Korea
Prior art keywords
cylindrical body
rotor shaft
pump
outer cylindrical
rotor
Prior art date
Application number
KR1020020073978A
Other languages
English (en)
Korean (ko)
Inventor
노나카마나부
미와타도오루
가바사와다카시
Original Assignee
비오씨 에드워즈 테크놀로지스 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 비오씨 에드워즈 테크놀로지스 리미티드 filed Critical 비오씨 에드워즈 테크놀로지스 리미티드
Publication of KR20030045597A publication Critical patent/KR20030045597A/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
KR1020020073978A 2001-12-04 2002-11-26 진공 펌프 KR20030045597A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001370627A JP2003172291A (ja) 2001-12-04 2001-12-04 真空ポンプ
JPJP-P-2001-00370627 2001-12-04

Publications (1)

Publication Number Publication Date
KR20030045597A true KR20030045597A (ko) 2003-06-11

Family

ID=19179820

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020073978A KR20030045597A (ko) 2001-12-04 2002-11-26 진공 펌프

Country Status (6)

Country Link
US (1) US20030103847A1 (fr)
EP (1) EP1318308A3 (fr)
JP (1) JP2003172291A (fr)
KR (1) KR20030045597A (fr)
CN (1) CN1429994A (fr)
TW (1) TW200300819A (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194083A (ja) * 2003-09-16 2006-07-27 Boc Edwards Kk ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ
JP2006077714A (ja) * 2004-09-10 2006-03-23 Boc Edwards Kk ダンパ及び真空ポンプ
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
JP5056152B2 (ja) 2007-05-15 2012-10-24 株式会社島津製作所 ターボ分子ポンプ
JP5284940B2 (ja) * 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
EP2623791B1 (fr) * 2010-09-28 2019-12-04 Edwards Japan Limited Pompe d'évacuation
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
EP2722528B1 (fr) * 2011-06-16 2018-05-30 Edwards Japan Limited Ensemble rotor et pompe à vide équipée de celui-ci
US9982682B2 (en) 2012-09-26 2018-05-29 Edwards Japan Limited Rotor and vacuum pump equipped with same
JP6353195B2 (ja) * 2013-05-09 2018-07-04 エドワーズ株式会社 固定円板および真空ポンプ
KR102185479B1 (ko) * 2013-09-30 2020-12-02 에드워즈 가부시키가이샤 나사 홈 펌프 기구, 상기 나사 홈 펌프 기구를 이용한 진공 펌프, 및 상기 나사 홈 펌프 기구에 이용되는 로터, 외주측 스테이터 및 내주측 스테이터
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
GB2579665B (en) * 2018-12-12 2021-05-19 Edwards Ltd Multi-stage turbomolecular pump

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
WO1987007590A1 (fr) * 1986-06-12 1987-12-17 Wilke Engelbart Procede et dispositif pour la gazeification des liquides en fines bulles et sur une grande surface
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
US5639373A (en) * 1995-08-11 1997-06-17 Zenon Environmental Inc. Vertical skein of hollow fiber membranes and method of maintaining clean fiber surfaces while filtering a substrate to withdraw a permeate
US5248424A (en) * 1990-08-17 1993-09-28 Zenon Environmental Inc. Frameless array of hollow fiber membranes and method of maintaining clean fiber surfaces while filtering a substrate to withdraw a permeate
US5922201A (en) * 1992-02-12 1999-07-13 Mitsubishi Rayon Co., Ltd. Hollow fiber membrane module
US5480553A (en) * 1992-02-12 1996-01-02 Mitsubishi Rayon Co., Ltd. Hollow fiber membrane module
JPH08100779A (ja) * 1994-10-04 1996-04-16 Matsushita Electric Ind Co Ltd 真空ポンプ
US6656356B2 (en) * 1998-10-09 2003-12-02 Zenon Environmental Inc. Aerated immersed membrane system
DE69624492T2 (de) * 1995-08-11 2003-06-26 Zenon Environmental Inc Vertikaler strang von hohlfasermembranen und verfahren zur aufrechterhaltung sauberer faseroberflächen
US5944997A (en) * 1995-08-11 1999-08-31 Zenon Environmental Inc. System for maintaining a clean skein of hollow fibers while filtering suspended solids
US6193890B1 (en) * 1995-08-11 2001-02-27 Zenon Environmental Inc. System for maintaining a clean skein of hollow fibers while filtering suspended solids
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
JP3866399B2 (ja) * 1997-12-16 2007-01-10 住友重機械工業株式会社 膜ろ過装置及びその運転方法
JPH11210674A (ja) * 1998-01-27 1999-08-03 Ebara Corp ターボ分子ポンプ
US6280626B1 (en) * 1998-08-12 2001-08-28 Mitsubishi Rayon Co., Ltd. Membrane separator assembly and method of cleaning the assembly utilizing gas diffuser underneath the assembly
EP1119522B1 (fr) * 1998-10-09 2004-04-14 Zenon Environmental Inc. Systeme d'aeration cyclique pour modules a diaphragmes immerges
US6550747B2 (en) * 1998-10-09 2003-04-22 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US6319411B1 (en) * 1998-10-09 2001-11-20 Zenon Environmental Inc. Method of maintaining clean vertical skeins of hollow fiber membranes and system therefor
JP2001248587A (ja) * 1999-12-28 2001-09-14 Kashiyama Kogyo Kk 複合型真空ポンプ
JP2001323892A (ja) * 2000-05-16 2001-11-22 Shimadzu Corp ターボ型真空機器

Also Published As

Publication number Publication date
JP2003172291A (ja) 2003-06-20
EP1318308A2 (fr) 2003-06-11
TW200300819A (en) 2003-06-16
CN1429994A (zh) 2003-07-16
US20030103847A1 (en) 2003-06-05
EP1318308A3 (fr) 2003-12-03

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Legal Events

Date Code Title Description
N231 Notification of change of applicant
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid