EP2722528B1 - Ensemble rotor et pompe à vide équipée de celui-ci - Google Patents

Ensemble rotor et pompe à vide équipée de celui-ci Download PDF

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Publication number
EP2722528B1
EP2722528B1 EP12800506.3A EP12800506A EP2722528B1 EP 2722528 B1 EP2722528 B1 EP 2722528B1 EP 12800506 A EP12800506 A EP 12800506A EP 2722528 B1 EP2722528 B1 EP 2722528B1
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EP
European Patent Office
Prior art keywords
rotor
cylindrical
load variation
relaxation structure
rotating portion
Prior art date
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Application number
EP12800506.3A
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German (de)
English (en)
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EP2722528A1 (fr
EP2722528A4 (fr
Inventor
Takashi Kabasawa
Takuya Matsuo
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Edwards Japan Ltd
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Edwards Japan Ltd
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps

Definitions

  • the present invention relates to a rotor assembly and a vacuum pump, and more particularly to a rotor assembly having a load variation relaxation structure that relaxes load variations in a joined section and to a vacuum pump including such a rotor assembly.
  • turbomolecular pumps and spiral-groove pumps are widely used for creating high-vacuum environment.
  • Those structural components demonstrating a discharge function in the vacuum pumps are accommodated inside a casing provided with an inlet port and an outlet port.
  • Those structural components demonstrating a discharge function can be generally constituted by a rotating portion (rotor portion) that is disposed rotationally and a stator portion fixed to the casing.
  • the rotating portion is constituted by a rotating shaft and a rotating body fixed to the rotating shaft, and rotating blades (dynamic blades) disposed radially are provided in multiple stages at the rotating body.
  • Stator blades are provided alternately with the rotating blades in multiple stages at the stator portion.
  • the turbomolecular pump is also provided with a motor for rotating the rotating shaft at a high speed, and where the rotating shaft is rotated at a high speed by the motor, a gas is sucked in from the inlet port and discharged from the outlet port by the interaction of the rotating blades and the stator blades.
  • the rotating portion is usually manufactured from a metal such as aluminum or an aluminum alloy.
  • a cylindrical rotating portion that rotates at a high speed is sometimes manufactured from lightweight and strong fiber-reinforced composite materials (fibers reinforced plastics; referred to as FRP hereinbelow) with the object of improving performance (in particular, to enable rotation at a higher speed).
  • the fibers used for the FRP can be aramid fibers (AFRP), boron fibers (BFRP), glass fibers (GFRP), carbon fibers (CFRP), and polyethylene fibers (DFRP).
  • a cylindrical rotating portion provided below the rotating portion of the vacuum pump is formed from a lightweight and strong FRP, the cylindrical portion can be reduced in weight and increased in size. Therefore, the discharge performance of the vacuum pump equipped with such cylindrical rotating portion can be increased.
  • the rotating portion (rotating blade) made from a metal such as an aluminum alloy and a cylindrical rotating portion formed from a FRP are typically joined, as shown in FIGS. 9A and 9B , by installing a guide below the rotating portion, such that a rotor (rotating portion) 80 (800) is provided on the inner side and a cylindrical rotating portion 9 is provided on the outer side, and press fitting or bonding, or press fitting and bonding.
  • the temperature of the rotor of the vacuum pump can rise from normal temperature to about 150°C. Because of such a wide temperature range, large thermal stresses are generated by the difference in thermal expansion between the two materials at a high temperature.
  • Japanese Patent No. 3098139 describes a composite molecular pump constituted by a turbomolecular pump portion and a spiral-groove pump portion, in which a rotor of the turbomolecular pump portion is made from a metal, whereas a cylindrical rotor of the spiral-groove pump portion and a support plate (5) joining the rotor of the turbomolecular pump portion and the cylindrical rotor of the spiral-groove pump portion is made from a fiber-reinforced plastic (FRP).
  • FRP fiber-reinforced plastic
  • a member (support plate) having a thermal expansion coefficient between those of the metal and FRP is inserted between the metallic rotor of the turbomolecular pump portion and the cylindrical rotor made from the FRP, and thermal stresses caused by the aforementioned difference in thermal expansions are relaxed.
  • Japanese Patent Application Publication No. 2004-278512 describes a filament winding method by which a fiber bundle is wound and fixed with a resin and a sheet winding method by which a sheet obtained by embedding (immersing) fibers in a resin in advance is wound as a method for manufacturing the above-described cylindrical rotating portion from a FRP.
  • This document describes a Holweck type skirt downstream rotor segment (5c) fabricated from a composite material of an organic base material based on a resin loaded with reinforcing fibers (FRP) such as glass fibers and carbon fibers and produced by continuously winding on a core by the filament winding method.
  • FRP reinforcing fibers
  • a load in the vicinity of a joined section is relaxed by optimizing FRP winding conditions, for example, by winding the fibers obliquely, or by setting a larger content ratio for the resin than for the fibers and reducing intentionally the Young's modulus of the material so as to decrease the load generated when the material expands from the inner side due to thermal expansion.
  • a FRP is used for the cylindrical body portion of rotating blades of a vacuum pump
  • fibers strengthening a material are wound in the circumferential direction to ensure resistance to a load created by a centrifugal force applied in the circumferential direction.
  • the fibers bear the load applied to the cylindrical body and, therefore, the strength of the cylindrical body is increased.
  • the resin joining the fibers bears the load applied to the cylindrical body.
  • the strength in the direction in which the fibers are not inserted is practically the same as that before the fibers have been inserted, or the strength can even decrease as a result of stress concentration.
  • the cylindrical body formed from the FRP can be deformed even by a slight load in the axial direction or radial direction in which the fibers are not inserted.
  • a vacuum pump including such a cylindrical rotating portion manufactured from a FRP is sometimes provided in an environment in which a corrosive gas (for example, a halogen gas) is discharged.
  • a corrosive gas for example, a halogen gas
  • the surface of the portions (parts) where such gas flows is subjected to anticorrosive surface treatment such as electroless nickel plating.
  • anticorrosive surface treatment include vapor deposition processes such as physical vapor deposition (PVD), chemical vapor deposition (CVD), sputtering, and ion plating, and electrodeposition coating.
  • the anticorrosive surface treatment anticorrosive coating on the surface
  • the anticorrosive surface coating in this portion can be damaged due to cracking of a plated layer on a boundary surface.
  • the invention as in claim 1 provides a rotor assembly for a vacuum pump comprising a rotor joined to a cylindrical rotor body having an inner diameter, the rotor being formed from a different material to the cylindrical rotor body joined to the rotor, characterized in that the rotor has a load variation relaxation structure provided at a surface of the rotor that is in contact with the inner diameter of the cylindrical rotor body, wherein at least a part of an outer diameter of an outer diametrical surface where the rotor joins to the cylindrical rotor body with interference at the load variation relaxation structure decreases gradually from an end surface side of the cylindrical rotor body where the cylindrical body is joined to the rotor toward a center of the cylindrical rotor body.
  • the invention as in claim 3 provides a rotor assembly for a vacuum pump comprising a rotor joined to a cylindrical rotor body having an inner diameter, the rotor being formed from a different material to the cylindrical rotor body joined to the rotor, characterized in that the rotor has a load variation relaxation structure provided at a surface of the rotor that is in contact with the inner diameter of the cylindrical rotor body, wherein at least a part of an outer diameter of an outer diametrical surface where the rotor joins to the cylindrical rotor body with interference at the load variation relaxation structure decreases gradually from a center of the cylindrical rotor body toward an end surface side of the cylindrical rotor body where the cylindrical body is joined to the rotor.
  • the invention as in claim 2 and 4 provides the rotor according to claim 1 or 3, wherein the load variation relaxation structure is a gradual taper structure.
  • the invention as in claim 5 provides the rotor according to any one of claims 2 to 4, wherein the load variation relaxation structure is configured such that an end point of the taper structure on the end surface side where the cylindrical body is joined to the rotor is formed in a curved shape.
  • the invention as in claim 6 provides the rotor according to any one of claims 2 to 5, wherein the load variation relaxation structure is configured such that the taper structure is extended to a position where the rotor and the cylindrical body do not have a contact surface in common.
  • the invention as in claim 7 provides the rotor according to claim 1, wherein the load variation relaxation structure is a gradual curved structure formed at an outer diametrical surface of the rotor such that an outer diameter of the rotor decreases gradually from an end surface side where the cylindrical body is joined to the rotor toward a center of the cylindrical body.
  • the invention as in claim 8 provides the rotor according to claim 3, wherein the load variation relaxation structure is a gradual curved structure formed at an outer diametrical surface of the rotor such that an outer diameter of the rotor decreases gradually from a center of the cylindrical body toward an end surface side where the cylindrical body is joined to the rotor.
  • the invention as in claim 9 provides the rotor assembly according to claim 7 or 8, wherein the load variation relaxation structure is configured such that the curved structure is extended to a position where the rotor and the cylindrical body do not have a contact surface in common.
  • the invention provides a vacuum pump including a spiral-groove pump portion and a rotor joined to a cylindrical body formed from a different material, wherein the rotor is the rotor of any one of claims 1 to 9.
  • a rotor having a relaxation structure for load variations in a joined section with a rotating body of a vacuum pump, and also a vacuum pump that includes the rotor and has improved discharge performance.
  • the vacuum pump has a load variation relaxation structure that relaxes load variations caused by thermal stresses or the like in a joined section in which the cylindrical rotating portion formed from a FRP or the like is joined to a metallic rotating portion made from an aluminum alloy or the like.
  • a gentle taper is provided in a boundary portion of the rotating portion and the cylindrical rotating portion.
  • a first embodiment is explained using the so-called composite turbomolecular pump equipped with a turbomolecular pump portion and a spiral-groove pump portion as an example of a vacuum pump.
  • a turbomolecular pump 1 explained by way of example has provided therein a rotor 8 manufactured from an aluminum alloy and a cylindrical rotor portion 9 manufactured from a FRP.
  • FIG. 1 shows a schematic configuration example of the turbomolecular pump 1 provided with a load variation relaxation structure according to the first embodiment of the present invention.
  • FIG. 1 shows a cross section in the axial line direction of the turbomolecular pump 1.
  • a casing 2 forming a casing of the turbomolecular pump 1 has a substantially cylindrical shape and constitutes, together with a base 3 provided below (outlet port 6 side) the casing 2, a housing of the turbomolecular pump 1.
  • a gas transfer mechanism which is a structural component demonstrating a discharge function in the turbomolecular pump 1, is accommodated inside the housing.
  • the gas transfer mechanism is mainly constituted by a rotationally disposed rotor portion and a stator portion fixed to the housing.
  • An inlet port 4 for introducing a gas into the turbomolecular pump 1 is formed in an end section of the casing 2.
  • a flange portion 5 projecting to the outer peripheral side is formed in an end surface of the casing 2 on the inlet port 4 side.
  • An outlet port 6 for discharging the gas from the turbomolecular pump 1 is formed in the base 3.
  • the rotating portion is constituted by a shaft 7, which is a rotating shaft, a rotor 8 provided on the shaft 7, a plurality of rotating blades 8a provided at the rotor 8, and a cylindrical rotating portion 9 provided at the outlet port 6 side (spiral-groove pump portion).
  • a rotor portion is constituted by the shaft 7 and the rotor 8.
  • Each rotating blade 8a is constituted by a blade that extends radially from the shaft 7 and is inclined at a predetermined angle to a plane perpendicular to an axial line of the shaft 7.
  • the cylindrical rotating portion 9 is constituted by a cylindrical member having a cylindrical shape coaxial with the rotation axial line of the rotor 8.
  • a motor portion 20 for rotating the shaft 7 at a high speed is provided at the intermediate location in the axial line direction of the shaft 7 and included in a stator column 10.
  • radial magnetic bearing devices 30, 31 for rotationally supporting the shaft 7 in a radial direction in a contactless manner are provided at the inlet port 4 side and outlet port 6 side of the shaft 7 with respect to the motor portion 20, and an axial magnetic bearing device 40 for rotationally supporting the shaft 7 in the axial direction in a contactless manner is provided at a lower end of the shaft 7.
  • the stator portion is formed at an inner circumferential side of the housing.
  • the stator portion is constituted by a plurality of fixed blades 50 provided at the inlet port 4 side (turbomolecular pump portion) and a groove spacer 60 provided on an inner circumferential surface of the casing 2.
  • Each fixed blade 50 is constituted by a blade that extends from the inner circumferential surface of the housing toward the shaft 7 and is inclined at a predetermined angle to a plane perpendicular to the axial line of the shaft 7.
  • the fixed blades 50 of different stages are separated from each other by the spacer 70 having a cylindrical shape.
  • the fixed blades 50 and rotating blades 8a are disposed alternately in a plurality of stages in the axial direction.
  • a spiral groove is formed at a surface facing the cylindrical rotating portion 9.
  • the spiral groove spacer 60 faces an outer circumferential surface of the cylindrical rotating portion 9, with a predetermined clearance being left therebetween. Where the cylindrical rotating portion 9 rotates at a high speed, the gas compressed in the turbomolecular pump 1 is fed, while being guided by the groove (spiral groove), to the outlet port 6 side following the rotation of the cylindrical rotating portion 9. Thus, the spiral groove serves as a flow channel for transferring the gas.
  • the spiral groove spacer 60 and the cylindrical rotating portion 9 face each other, with a predetermined clearance being left therebetween, thereby constituting a gas transfer mechanism transferring the gas in the spiral groove.
  • the clearance should be as small as possible to reduce a force causing the gas to flow back to the inlet port 4 side.
  • a direction of the spiral groove formed in the spiral groove spacer 60 is such that where the gas is transferred in a rotation direction of the rotor 8 inside the spiral groove, this direction is toward the outlet port 6.
  • a depth of the spiral groove decreases as the outlet port 6 is approached, and the gas transferred in the spiral groove is compressed as the outlet port 6 is approached.
  • the gas is further compressed in the spiral-groove pump portion and discharged from the outlet port 6.
  • the turbomolecular pump 1 that is configured in the above-described manner and has provided therein the cylindrical rotating portion 9 manufactured using FRP is used in the semiconductor fabrication process including a large number of steps in which a semiconductor substrate is treated with a variety of process gases such as a halogen gas, a fluorine gas, a chlorine gas, or a bromine gas, the locations that come into contact with the gas (constituent parts) are subjected to anticorrosive surface treatment such as electroless nickel plating to prevent corrosion induced by the gases.
  • process gases such as a halogen gas, a fluorine gas, a chlorine gas, or a bromine gas
  • the turbomolecular pump 1 of the first embodiment of the present invention that has the above-described configuration has a load variation relaxation structure at a boundary portion (joined section) of the rotor 8 and the cylindrical rotating portion 9.
  • FIG. 2 is an enlarged view of portion A (joined section) in FIG. 1 which is a schematic view of the load variation relaxation structure according to the first embodiment of the present invention.
  • the turbomolecular pump 1 of the first embodiment of the present invention has a gradual taper (segment ⁇ ) as the load variation relaxation structure in a boundary portion where the rotor 8 and the cylindrical portion 9 are joined together.
  • This taper can be formed by forming an outer diameter of the rotor 8 such that degreases gradually from an end surface side of the cylindrical rotating portion 9 toward a center thereof.
  • An angle represented by ⁇ 1 in FIG. 2 indicates a deformation angle (diameter reduction angle) of the cylindrical rotating portion 9 deformed by thermal expansion of the rotor 8 when the taper serving as the load variation relaxation structure is not provided ( FIG. 9 ).
  • An angle represented by ⁇ 2 in FIG. 2 indicates a taper angle of the taper provided as the load variation relaxation structure.
  • a width represented by t in FIG. 2 indicates a taper length of the taper as the load variation relaxation structure according to the first embodiment of the present invention, that is, a projection length of the segment ⁇ .
  • a width represented by t0 in FIG. 2 indicates an interference width of the cylindrical rotation portion 9 and the rotor 8.
  • this width is a difference between the outer diameter of the rotor 8, which is a part provided on the inner side, and an inner diameter of the cylindrical rotating portion 9, which is a part provided on the outer side.
  • a taper having a taper angle of about 15 degrees to 30 degrees is provided at a portion to be inserted in order to facilitate the insertion.
  • the deformation angle ⁇ 1 of the cylindrical rotating portion 9 observed when the rotor 8 rotates at a high speed and undergoes thermal deformation is an angle (generally, several degrees) much smaller than the taper angle (15 degrees to 30 degrees), the usually provided taper angle, such as described hereinabove, fails to check load variations caused by thermal expansion.
  • the taper angle ⁇ 2 relating to the load variation relaxation structure of the first embodiment is set to be much smaller than the deformation angle of a material, that is, the FRP forming the cylindrical rotating portion 9.
  • a configuration is used in which the rotor 8 is provided with a taper having the taper angle ⁇ 2 which is smaller than the deformation angle ⁇ 1 of the cylindrical rotating portion 9.
  • the taper functions as a relaxation structure that relaxes the load, so that the shape of the cylindrical rotating portion 9 deformed smoothly.
  • the taper angle ⁇ 2 is set, for example, to a value equal to or less than 5 degrees.
  • the angle ⁇ 1 varies depending on the thickness of the cylindrical rotating portion 9, material constituting the cylindrical rotating portion 9, content of fibers in the material, and winding angle of the fibers contained in the material, it is desirable that the taper angle ⁇ 2 be changed as appropriate.
  • the deformation of the cylindrical rotating portion 9 is made smooth by the taper serving as the load variation relaxation structure. Therefore, rapid load variations caused by thermal stresses at the boundary of the rotor 8 and the cylindrical rotating portion 9 can be relaxed. As a result, damage such as cracking of the anticorrosive coating which is caused by failure to relax the rapid load variations can be prevented.
  • the load variation relaxation structure is configured such that the taper length t (projection length of the segment ⁇ ) of the taper provided at the rotor 8 is sufficiently large. More specifically, the taper (segment ⁇ ) is extended to a position where the rotor 8 and the cylindrical rotating portion 9 do not have a contact surface in common and a gap 90 is formed between the rotor 8 and the cylindrical rotating portion 9 by an outer surface of the rotor 8 and an inner surface of the cylindrical rotating portion 9.
  • taper length t segment ⁇
  • the length (taper length t : segment ⁇ ) necessary for the taper becomes larger when the rotor 8 provided in the inner side undergoes thermal expansion at a high temperature and a force causing outward expansion increases. Accordingly, when the aforementioned taper length t is determined, it is desirable that the taper length t be determined under the condition of increasing interference width t0, that is, a portion where the rotor 8 and the cylindrical rotating portion 9 have a contact surface in common, in other words, under the condition of the temperature rising to a maximum.
  • the deformation of the cylindrical rotating portion 9 is made smooth by the taper serving as the load variation relaxation structure. Therefore, rapid load variations caused by thermal stresses at the boundary of the rotor 8 and the cylindrical rotating portion 9 can be relaxed. As a result, damage such as cracking of the anticorrosive coating which is caused by failure to relax the rapid load variations can be prevented.
  • the turbomolecular pump 1 having the load variation relaxation structure according to the first embodiment of the present invention can be also used as a means for preventing the deformation when intensive deformations are also caused by a centrifugal force in addition to thermal expansion.
  • the boundary portion (contact portion) of the rotor 8 and the cylindrical rotating portion 9 should not necessarily be in a taper (linear) form. In other words, since it is desirable that a portion (portion where straight lines intersect) where the taper starts in the rotor 8 be rounded rather than angular, the boundary portion for buffering the load may be provided with a smooth curve.
  • FIG. 3 illustrates a load variation relaxation structure according to variation example 1 of the first embodiment of the present invention.
  • the rotor 81 according to variation example 1 of the first embodiment of the present invention is arranged side by side with a rotor 80 of a conventional shape selected for comparison with the rotor 81.
  • a two-dot-dash line on the rotor 81 indicates the end position of the conventional rotor 80.
  • the rotor 81 relating to the load variation relaxation structure of variation example 1 has a curved section (curve ⁇ ) and a taper section (segment ⁇ ) in a contact portion with the cylindrical rotating portion 9.
  • boundary portion of the rotor 81 and the cylindrical rotating portion 9 is thus constituted by a gentle curved section and taper section, rapid load variations caused by thermal stresses on the boundary of the rotor 81 and the cylindrical rotating portion 9 can be relaxed more effectively. As a result, the damage such as cracking of the anticorrosive coating that results from the failure to check such rapid load variations can be prevented.
  • FIG. 4 illustrates a load variation relaxation structure according to variation example 2 of the first embodiment of the present invention.
  • FIG. 4 shows a rotor 82 according to variation example 2 of the first embodiment of the present invention.
  • a two-dot-dash line on the rotor 82 indicates the end position of the conventional rotor 80.
  • the rotor 82 relating to the load variation relaxation structure of variation example 2 has a corner R (curve ⁇ ) in a contact portion with the cylindrical rotating portion 9.
  • boundary portion of the rotor 82 and the cylindrical rotating portion 9 is thus constituted by a gentle curved section, rapid load variations caused by thermal stresses on the boundary of the rotor 82 and the cylindrical rotating portion 9 can be relaxed more effectively. As a result, the damage such as cracking of the anticorrosive coating that results from the failure to check such rapid load variations can be prevented.
  • FIG. 5 illustrates a load variation relaxation structure according to variation example 3 of the first embodiment of the present invention.
  • FIG. 5 shows a rotor 83 according to variation example 3 of the first embodiment of the present invention.
  • a two-dot-dash line on the rotor 83 indicates the end position of the conventional rotor 80.
  • the lower section (outlet port 6 side) to which the cylindrical rotating portion 9 is to be joined and which is in contact with the cylindrical rotating portion 9 has a thin-sheet portion 84 that is formed thinner than the rotor on the inlet port 4 side.
  • a corner R (curve ⁇ ) is provided in the contact portion with the cylindrical rotating portion 9 by bending the aforementioned thin-sheet portion 84 radially inward to obtain a bent thin-sheet portion 85.
  • boundary portion of the rotor 83 (bent thin-sheet portion 85) and the cylindrical rotating portion 9 is thus constituted by a gentle curved section, rapid load variations caused by thermal stresses on the boundary of the rotor 83 (bent thin-sheet portion 85) and the cylindrical rotating portion 9 can be relaxed more effectively. As a result, the damage such as cracking of the anticorrosive coating that results from the failure to check such rapid load variations can be prevented.
  • FIG. 6 illustrates a load variation relaxation structure according to variation example 4 of the first embodiment of the present invention.
  • FIG. 6A shows a rotor 801 according to variation example 4 of the first embodiment of the present invention.
  • a taper (segment ⁇ ) is present in a contact portion with the cylindrical rotating portion 9.
  • FIG. 6B shows a rotor 802 according to variation example 4 of the first embodiment of the present invention.
  • a curved section curve ⁇
  • a taper section segment ⁇
  • FIG. 6C shows a rotor 803 according to variation example 4 of the first embodiment of the present invention.
  • a corner R (curve ⁇ ) is present in a contact portion with the cylindrical rotating portion 9.
  • FIG. 7 illustrates a load variation relaxation structure according to the second embodiment of the present invention.
  • FIG. 7A shows a rotor 8001 according to the second embodiment of the present invention.
  • This rotor has a taper also on the upper section of the contact portion with the cylindrical rotating portion 9.
  • FIG. 7B For reference, a conventional rotor 8000 is shown in FIG. 7B .
  • the load variation relaxation structure is also provided on the upper section of the contact portion.
  • the taper angle thereof is much less than the deformation angle of the material, that is, the FRP constituting the cylindrical rotating portion 9.
  • the rotor 8001 is provided with the taper having an angle less than the deformation angle of the cylindrical rotating portion 9. With such a configuration, the taper functions as a relaxation structure relaxing a load, so that the cylindrical rotating portion 9 is gently deformed.
  • this taper angle is, for example, equal to or less than 5 degrees. However, it is desirable that the taper angle be changed, as appropriate, according to the thickness of the cylindrical rotating portion 9, material constituting the cylindrical rotating portion 9, content of fibers in the material, and winding angle of the fibers contained in the material.
  • the deformation of the cylindrical rotating portion 9 is made smooth by the taper on the upper side in the contact direction, which serves as the load variation relaxation structure. Therefore, rapid load variations caused by thermal stresses at the boundary of the rotor 8001 and the cylindrical rotating portion 9 can be relaxed. As a result, damage such as cracking of the anticorrosive coating which is caused by failure to relax the rapid load variations can be prevented.
  • turbomolecular pump 1 having the load variation relaxation structure according to the second embodiment of the present invention can be also used as a means for preventing the deformation when intensive deformations are also caused by a centrifugal force in addition to thermal expansion.
  • the boundary portion (contact portion) of the rotor 8001 and the cylindrical rotating portion 9 should not necessarily be in a taper (linear) form.
  • the boundary portion for buffering the load may be provided with a smooth curve.
  • a configuration may be used in which the taper or rounded smooth curve is provided only on the upper side.
  • the load variation relaxation structure according to the second embodiment of the present invention may be combined with the embodiments and variation examples of the load variation relaxation structure on the lower side that is described in the first embodiment.
  • first embodiment and variation examples 1 to 4 thereof and the second embodiment are explained with reference to the so-called composite turbomolecular pump 1, which includes a turbomolecular pump portion and a spiral-groove pump portion, as an example of a vacuum pump, but such a configuration is not limiting, and the present invention can be also applied to a spiral-groove pump which does not have a turbomolecular pump portion.
  • FIG. 8 is a schematic configuration diagram of a spiral-groove pump 100 according to the third embodiment of the present invention. The explanation of features same as those in the above-described first embodiment and second embodiment of the present invention is omitted.
  • the load variation relaxation structure explained in the first embodiment and second embodiment is also formed in the boundary portion (portion A) of the rotor 8 and the cylindrical rotating portion 9. Furthermore, the above-described variation examples can be also used.
  • the rotor 8 is made from an aluminum alloy
  • the cylindrical rotating portion 9 is a cylindrical body formed from a FRP, but such selection of materials is not limiting, and any two materials for which large thermal stresses are generated by the difference in thermal expansion at a high temperature can be used.
  • the above-described embodiments and variation examples are also applicable to a configuration in which the rotor 8 is made from an aluminum alloy, and the cylindrical rotating portion 9 is a cylindrical body formed from a titanium alloy or a precipitation-hardened stainless steel.
  • the deformation of the cylindrical rotating portion 9 is made gentle by the taper serving as the load variation relaxation structure, and rapid load variations at the boundary of the rotor 8 and the cylindrical rotating portion 9 can be relaxed.
  • a rotating body can be configured by providing the cylindrical rotating portion 9 of a lighter, different material (FRP or the like) at the rotor 8 from an aluminum alloy. Therefore, it is possible to provide a vacuum pump with rotation performance and discharge performance improved over those in the related art.
  • the function of relaxing load variations in the boundary portion of the rotor 8 and the cylindrical rotating portion 9 is improved, thereby making it possible to provide the rotor 8 in which the anticorrosive coating can be prevented from damage caused by rapid variations in the load.
  • the rotor 8 it is possible to provide a vacuum pump in which corrosion resistance is improved and, therefore, reliability and durability are improved over those in the conventional vacuum pump.

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Claims (10)

  1. Ensemble rotor (8, 9) pour une pompe à vide (1) comprenant un rotor (8) relié à un corps de rotor cylindrique (9) possédant un diamètre intérieur, le rotor (8) étant formé d'un matériau différent du corps de rotor cylindrique (9) relié au rotor (8),
    caractérisé en ce que le rotor est pourvu d'une structure de relaxation de variation de charge au niveau d'une surface du rotor (8) qui est en contact avec le diamètre intérieur du corps de rotor cylindrique (9), dans lequel au moins une partie d'un diamètre extérieur d'une surface diamétrique extérieure où le rotor (8) rejoint le corps de rotor cylindrique (9) avec interférence au niveau de la structure de relaxation de variation de charge diminue progressivement depuis un côté de la surface d'extrémité du corps de rotor cylindrique (9) où le corps de rotor cylindrique (9) est relié au rotor (8) vers un centre du corps de rotor cylindrique (9).
  2. Ensemble rotor (8, 9) selon la revendication 1, dans lequel la structure de relaxation de variation de charge est une structure qui s'effile progressivement.
  3. Ensemble rotor (8, 9) pour une pompe à vide (1) comprenant un rotor (8) relié à un corps de rotor cylindrique (9) possédant un diamètre intérieur, le rotor (8) étant formé d'un matériau différent du corps de rotor cylindrique (9) relié au rotor (8),
    caractérisé en ce que le rotor est pourvu d'une structure de relaxation de variation de charge au niveau d'une surface du rotor (8) qui est en contact avec le diamètre intérieur du corps de rotor cylindrique (9), dans lequel au moins une partie d'un diamètre extérieur d'une surface diamétrique extérieure où le rotor (8) rejoint le corps de rotor cylindrique (9) avec interférence au niveau de la structure de relaxation de variation de charge diminue progressivement depuis un centre du corps de rotor cylindrique (9) vers un côté de la surface d'extrémité du corps de rotor cylindrique (9) où le corps de rotor cylindrique (9) est relié au rotor (8).
  4. Ensemble rotor (8, 9) selon la revendication 3, dans lequel la structure de relaxation de variation de charge est une structure qui s'effile progressivement.
  5. Ensemble rotor (8, 9) selon l'une quelconque des revendications 2 à 4, dans lequel la structure de relaxation de variation de charge est configurée de telle manière qu'un point d'extrémité de la structure qui s'effile du côté de la surface d'extrémité où le corps de rotor cylindrique (9) est relié au rotor (8) présente une forme courbée.
  6. Ensemble rotor (8, 9) selon l'une quelconque des revendications 2 à 5, dans lequel la structure de relaxation de variation de charge est configurée de telle manière que la structure qui s'effile s'étend vers une position où le rotor (8) et le corps de rotor cylindrique (9) n'ont pas de surface de contact commune.
  7. Ensemble rotor (8, 9) selon la revendication 1, dans lequel la structure de relaxation de variation de charge est une structure progressivement courbée.
  8. Ensemble rotor (8, 9) selon la revendication 3, dans lequel la structure de relaxation de variation de charge est une structure progressivement courbée.
  9. Ensemble rotor (8, 9) selon la revendication 7 ou 8, dans lequel la structure de relaxation de variation de charge est configurée de telle manière que la structure courbée s'étend vers une position où le rotor et le corps de rotor cylindrique (9) n'ont pas de surface de contact commune.
  10. Pompe à vide (1), comprenant :
    une portion de pompe à rainure en spirale et un ensemble rotor (8, 9) selon l'une quelconque des revendications précédentes.
EP12800506.3A 2011-06-16 2012-05-31 Ensemble rotor et pompe à vide équipée de celui-ci Active EP2722528B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011133869 2011-06-16
PCT/JP2012/064125 WO2012172990A1 (fr) 2011-06-16 2012-05-31 Rotor et pompe à vide

Publications (3)

Publication Number Publication Date
EP2722528A1 EP2722528A1 (fr) 2014-04-23
EP2722528A4 EP2722528A4 (fr) 2014-12-03
EP2722528B1 true EP2722528B1 (fr) 2018-05-30

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EP (1) EP2722528B1 (fr)
JP (1) JP6047091B2 (fr)
CN (1) CN103562554B (fr)
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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011119506A1 (de) * 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
JP6142630B2 (ja) * 2013-03-29 2017-06-07 株式会社島津製作所 真空ポンプ
JP6706553B2 (ja) * 2015-12-15 2020-06-10 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構

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JPS62152520A (ja) 1985-12-25 1987-07-07 Toshiba Corp 回転円筒を有する回転機
JPH074383A (ja) 1993-06-17 1995-01-10 Osaka Shinku Kiki Seisakusho:Kk 複合分子ポンプ
JPH07271241A (ja) 1994-03-25 1995-10-20 Fuji Xerox Co Ltd 電子写真感光ドラム用フランジ
JPH08219086A (ja) 1995-02-14 1996-08-27 Daikin Ind Ltd 回転体の支持構造
EP1101945A2 (fr) 1999-11-19 2001-05-23 The BOC Group plc Pompes à vide
DE19955517A1 (de) 1999-11-18 2001-05-23 Leybold Vakuum Gmbh Schnelllaufende Turbopumpe
EP1318308A2 (fr) 2001-12-04 2003-06-11 BOC Edwards Technologies, Limited Pompe à vide
JP2005180265A (ja) 2003-12-18 2005-07-07 Boc Edwards Kk 真空ポンプ
WO2005121561A1 (fr) 2004-06-07 2005-12-22 The Boc Group Plc Turbine de pompe a vide
JP2006291794A (ja) 2005-04-08 2006-10-26 Osaka Vacuum Ltd 真空ポンプのロータ
JP2007071139A (ja) 2005-09-08 2007-03-22 Osaka Vacuum Ltd 複合真空ポンプのロータ
DE102008056352A1 (de) 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
JP2011133869A (ja) 2009-11-26 2011-07-07 Sekisui Chem Co Ltd 液晶表示素子用スペーサ及び液晶表示素子
EP2589814A1 (fr) 2010-07-02 2013-05-08 Edwards Japan Limited Pompe a vide

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JPS63175317U (fr) * 1986-10-15 1988-11-14
JPH0749040Y2 (ja) * 1989-10-03 1995-11-13 株式会社荏原製作所 羽根車取付構造
JPH10196041A (ja) * 1997-01-08 1998-07-28 Nippon Light Metal Co Ltd ハニカムパネル
FR2845737B1 (fr) 2002-10-11 2005-01-14 Cit Alcatel Pompe turbomoleculaire a jupe composite
EP2108844A3 (fr) * 2008-03-26 2013-09-18 Ebara Corporation Pompe à vide turbomoléculaire

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JPS62152520A (ja) 1985-12-25 1987-07-07 Toshiba Corp 回転円筒を有する回転機
JPH074383A (ja) 1993-06-17 1995-01-10 Osaka Shinku Kiki Seisakusho:Kk 複合分子ポンプ
JP3098139B2 (ja) 1993-06-17 2000-10-16 株式会社大阪真空機器製作所 複合分子ポンプ
JPH07271241A (ja) 1994-03-25 1995-10-20 Fuji Xerox Co Ltd 電子写真感光ドラム用フランジ
JPH08219086A (ja) 1995-02-14 1996-08-27 Daikin Ind Ltd 回転体の支持構造
DE19955517A1 (de) 1999-11-18 2001-05-23 Leybold Vakuum Gmbh Schnelllaufende Turbopumpe
EP1101945A2 (fr) 1999-11-19 2001-05-23 The BOC Group plc Pompes à vide
EP1318308A2 (fr) 2001-12-04 2003-06-11 BOC Edwards Technologies, Limited Pompe à vide
JP2005180265A (ja) 2003-12-18 2005-07-07 Boc Edwards Kk 真空ポンプ
WO2005121561A1 (fr) 2004-06-07 2005-12-22 The Boc Group Plc Turbine de pompe a vide
JP2006291794A (ja) 2005-04-08 2006-10-26 Osaka Vacuum Ltd 真空ポンプのロータ
JP2007071139A (ja) 2005-09-08 2007-03-22 Osaka Vacuum Ltd 複合真空ポンプのロータ
DE102008056352A1 (de) 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
JP2011133869A (ja) 2009-11-26 2011-07-07 Sekisui Chem Co Ltd 液晶表示素子用スペーサ及び液晶表示素子
EP2589814A1 (fr) 2010-07-02 2013-05-08 Edwards Japan Limited Pompe a vide

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Also Published As

Publication number Publication date
CN103562554A (zh) 2014-02-05
EP2722528A1 (fr) 2014-04-23
JPWO2012172990A1 (ja) 2015-02-23
WO2012172990A1 (fr) 2012-12-20
JP6047091B2 (ja) 2016-12-21
CN103562554B (zh) 2016-12-21
EP2722528A4 (fr) 2014-12-03

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