WO2012172990A1 - Rotor et pompe à vide - Google Patents

Rotor et pompe à vide Download PDF

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Publication number
WO2012172990A1
WO2012172990A1 PCT/JP2012/064125 JP2012064125W WO2012172990A1 WO 2012172990 A1 WO2012172990 A1 WO 2012172990A1 JP 2012064125 W JP2012064125 W JP 2012064125W WO 2012172990 A1 WO2012172990 A1 WO 2012172990A1
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WO
WIPO (PCT)
Prior art keywords
rotor
load change
cylindrical body
joined
cylindrical
Prior art date
Application number
PCT/JP2012/064125
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English (en)
Japanese (ja)
Inventor
樺澤　剛志
拓也 松尾
Original Assignee
エドワーズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=47356981&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2012172990(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by エドワーズ株式会社 filed Critical エドワーズ株式会社
Priority to EP12800506.3A priority Critical patent/EP2722528B1/fr
Priority to CN201280026312.9A priority patent/CN103562554B/zh
Priority to JP2013520501A priority patent/JP6047091B2/ja
Publication of WO2012172990A1 publication Critical patent/WO2012172990A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps

Definitions

  • the present invention relates to a rotor and a vacuum pump, and more particularly, to a rotor having a load change mitigation structure for mitigating a load change at a joint, and a vacuum pump including the rotor.
  • turbo molecular pumps and thread groove pumps are frequently used to realize a high vacuum environment.
  • a structure that allows the vacuum pump to perform an exhaust function is housed in a casing forming an exterior body having an intake port and an exhaust port.
  • the structure that exhibits the exhaust function is roughly divided into a rotating part (rotor part) that is rotatably arranged and a fixed part (stator part) fixed to the casing.
  • the rotating part is composed of a rotating shaft and a rotating body fixed to the rotating shaft, and the rotating body is provided with radially arranged rotating blades (moving blades) in multiple stages. .
  • stator blades stator blades
  • the turbo molecular pump is provided with a motor for rotating the rotating shaft at a high speed.
  • gas is sucked from the intake port due to the interaction between the rotating blade and the stator blade. And exhausted from the exhaust port.
  • the rotating part is usually made of a metal such as aluminum or an aluminum alloy.
  • a cylindrical rotating part that rotates at a high speed is a lighter and stronger fiber-reinforced composite material (fiber-reinforced plastic material, Fiber Reinforced Plastics (hereinafter referred to as FRP material).
  • fibers used for the FRP material include aramid fibers (AFRP), boron fibers (BFRP), glass fibers (GFRP), carbon fibers (CFRP), and polyethylene fibers (DFRP).
  • the cylindrical rotating part disposed at the lower part of the rotating part of the vacuum pump is a cylindrical rotating part formed of a light and strong FRP material
  • the lightening and enlargement of the cylindrical part can be realized. Therefore, the exhaust performance of the vacuum pump in which the cylindrical rotating part is disposed can be improved.
  • a rotating part (rotating blade) made of metal such as an aluminum alloy and a cylindrical rotating part formed of FRP material are generally used as a rotor (rotating).
  • Part 80 (800) is arranged on the inner side and the cylindrical rotating part 9 is arranged on the outer side, and a guide is provided at the lower part of the rotating part and bonded by means such as press-fitting, bonding, or a combination of press-fitting and bonding. Is done.
  • the temperature of the rotor of the vacuum pump may rise from room temperature to around 150 ° C. depending on operating conditions. Since it has such a wide temperature range, a large thermal stress is generated due to the difference in thermal expansion between the two types of materials at high temperatures. Since the aluminum alloy has a thermal expansion coefficient many times higher than that of the FRP material, when the temperature rises with the operation time, the inner metal rotating part expands more and more with the temperature rise. On the other hand, since the cylindrical rotating part formed of the FRP material joined to the outside does not expand so much, very large stress is generated on the contact surface of the joining part during operation.
  • Patent Document 1 in a composite molecular pump composed of a turbo molecular pump part and a thread groove pump part, the rotor of the turbo molecular pump part is made of metal, and the cylindrical rotor of the thread groove pump part and the rotor of the turbo molecular pump part are It describes an invention in which the support plate (5) for joining the cylindrical rotors of the thread groove pump part is formed of a fiber reinforced plastic material (FRP).
  • FRP fiber reinforced plastic material
  • a member (support) having a thermal expansion coefficient intermediate between the metal and FRP is provided between the metal rotor of the turbo molecular pump unit and the cylindrical rotor formed of FRP. The thermal stress due to the difference in thermal expansion described above is relieved across the plate.
  • Patent Document 2 as a method of manufacturing the above-described cylindrical rotating part with FRP material, a filament winding method in which a fiber bundle is wound and hardened with a resin, or fibers are embedded in resin (impregnated in advance).
  • the sheet winding method in which the sheet is wound is described.
  • the filament winding method is made of a composite material of an organic base material based on a resin filled with reinforcing fiber (FRP) such as glass fiber or carbon fiber.
  • FRP reinforcing fiber
  • the holbeck cart downstream rotor segment (5c) made by continuously winding around a core is described.
  • the load in the vicinity of the joint is reduced by devising the winding condition of the FRP, such as intentionally reducing the Young's modulus of the material so that the value becomes small.
  • Patent Document 1 and Patent Document 2 described above are intended to alleviate the burden on the entire joint portion of the metal rotating portion of the vacuum pump and the rotating portion of the cylindrical body formed of the FRP material. For this reason, in Patent Document 1 and Patent Document 2 described above, in the cylindrical body (cylindrical rotating portion) formed of the FRP material, the load actually comes into contact with the metal rotor disposed inside the cylindrical body. No consideration is given to a sudden load change that occurs at the boundary between the applied portion and the portion that is not loaded because it is not in contact with the metal rotor.
  • the strength in the direction in which no fibers are contained is almost the same as that before the fibers are added, or the strength may be reduced as a result of stress concentration. Further, because of the anisotropy as described above, the cylindrical body formed of the FRP material may be deformed with a slight load in the axial direction or the radial direction in which no fiber is contained.
  • the vacuum pump in which the cylindrical rotating part manufactured by such FRP material is included may be disposed in an environment in which corrosive gas (for example, halogen gas) is exhausted.
  • a corrosion-resistant surface treatment is performed on the surface (part) through which the gas flows by electroless nickel plating or the like.
  • Other examples of the corrosion-resistant surface treatment include vapor deposition methods such as physical vapor deposition (PVD), chemical vapor deposition (CVD), sputtering, ion plating, and electrodeposition coating.
  • the anti-corrosion surface treatment surface anti-corrosion coating
  • a joining part where the metallic rotating part of the vacuum pump and the cylindrical rotating part formed of the FRP material are joined, If a large load change occurs in the axial direction at the boundary portion between the non-joined portion where both are not joined, and the boundary portion between the joined portion and the non-joined portion is partially greatly deformed, that portion (joined portion)
  • the corrosion resistant surface coating of) may be damaged due to cracking of the plating on the interface.
  • An object of the present invention is to provide a rotor having a structure for mitigating a load change at a joint portion with a rotating body (rotor) of a vacuum pump, and a vacuum pump that includes the rotor and has improved exhaust performance. .
  • the invention according to claim 1 is a rotor which is disposed in a vacuum pump and to which a cylindrical body made of a different material is joined, and has a load change mitigation structure on a surface in contact with the cylindrical body.
  • the load change mitigation structure is formed on the outer diameter surface of the rotor gradually from the end surface side where the cylindrical body is joined to the rotor toward the center of the cylindrical body.
  • the rotor according to claim 1, wherein the rotor has a gently tapered structure formed to have a small diameter.
  • the load change mitigating structure is formed on the outer diameter surface of the rotor gradually from the center of the cylindrical body toward the end surface side where the cylindrical body is joined to the rotor.
  • the rotor according to claim 1 or 2 wherein the rotor has a gently tapered structure formed so as to have a small diameter.
  • the taper angle of the taper structure is smaller than the angle at which the cylindrical body gradually decreases in diameter from the end face side joined to the rotor toward the center of the cylindrical body.
  • a rotor according to claim 2 is provided.
  • the taper angle of the taper structure is smaller than the angle at which the cylindrical body gradually decreases in diameter from the center of the cylindrical body toward the end face side joined to the rotor.
  • a rotor according to claim 3 is provided.
  • the end point on the end face side where the cylindrical body of the tapered structure is joined to the rotor is formed in a curved shape.
  • the rotor according to any one of items 5 is provided.
  • the invention according to claim 7 is characterized in that the taper structure is formed in a position where the load change mitigation structure does not share a contact surface where the rotor and the cylindrical body come into contact.
  • a rotor according to any one of claims 6 is provided.
  • the load change mitigation structure is formed on the outer diameter surface of the rotor, gradually from the end surface side where the cylindrical body is joined to the rotor toward the center of the cylindrical body.
  • the rotor according to claim 1 wherein the rotor has a gently curved structure formed to have a small diameter.
  • the load change mitigation structure is formed on the outer diameter surface of the rotor gradually from the center of the cylindrical body toward the end surface side where the cylindrical body is joined to the rotor.
  • the invention according to claim 10 is characterized in that the load change mitigating structure is formed so that the curved structure is formed so as not to share a contact surface where the rotor and the cylindrical body contact.
  • a rotor according to claim 9 is provided.
  • the invention according to claim 11 is a vacuum pump comprising a thread groove type pump part and a rotor to which a cylindrical body formed of a different material is joined, wherein the rotor is according to claims 1 to 10.
  • a vacuum pump characterized by being the rotor according to any one of the above.
  • a rotor having a structure for reducing a load change at a joint portion with a rotating body of a vacuum pump, and a vacuum pump including the rotor and having improved exhaust performance.
  • a vacuum pump is provided with a thermal stress or the like at a joining portion where a cylindrical rotating portion formed of an FRP material or the like is joined to a metallic rotating portion such as an aluminum alloy. It has a load change relaxation structure that relaxes the load change caused by. More specifically, a gentle taper is installed at the boundary between the rotating part and the cylindrical rotating part.
  • FIG. 1 is a diagram illustrating a schematic configuration example of a turbo molecular pump 1 including a load change relaxation structure according to the first embodiment of the present invention.
  • FIG. 1 shows a cross section of the turbo molecular pump 1 in the axial direction.
  • a casing 2 that forms an exterior body of the turbo molecular pump 1 has a substantially cylindrical shape, and constitutes a casing of the turbo molecular pump 1 together with a base 3 provided at a lower portion (exhaust port 6 side) of the casing 2. is doing.
  • the gas transfer mechanism which is a structure which makes the turbo molecular pump 1 exhibit an exhaust function is accommodated.
  • This gas transfer mechanism is roughly composed of a rotating part arranged rotatably and a fixed part fixed to the casing.
  • An inlet 4 for introducing gas into the turbo molecular pump 1 is formed at the end of the casing 2.
  • a flange portion 5 is formed on the end surface of the casing 2 on the intake port 4 side so as to project to the outer peripheral side.
  • the base 3 is formed with an exhaust port 6 for exhausting gas from the turbo molecular pump 1.
  • the rotating part is provided on the shaft 7 which is a rotating shaft, the rotor 8 disposed on the shaft 7, a plurality of rotating blades 8a provided on the rotor 8, and the exhaust port 6 side (screw groove type pump part). It is comprised from the cylindrical rotation part 9 grade
  • the shaft 7 and the rotor 8 constitute a rotor part.
  • Each rotor blade 8a is composed of blades extending radially from the shaft 7 at a predetermined angle from a plane perpendicular to the axis of the shaft 7.
  • the cylindrical rotating unit 9 is formed of a cylindrical member having a cylindrical shape concentric with the rotation axis of the rotor 8.
  • a motor unit 20 for rotating the shaft 7 at a high speed is provided in the middle of the shaft 7 in the axial direction, and is included in the stator column 10. Further, on the intake port 4 side and the exhaust port 6 side with respect to the motor portion 20 of the shaft 7, a radial magnetic bearing device 30 for rotatably supporting the shaft 7 in a radial direction (radial direction) without contact, 31 is provided at the lower end of the shaft 7 with an axial magnetic bearing device 40 for rotatably supporting the shaft 7 in an axial direction (axial direction) without contact.
  • a fixing portion is formed on the inner peripheral side of the housing.
  • the fixed portion includes a plurality of fixed blades 50 provided on the intake port 4 side (turbo molecular pump portion), a thread groove spacer 60 provided on the inner peripheral surface of the casing 2, and the like.
  • Each fixed wing 50 is composed of a blade that is inclined by a predetermined angle from a plane perpendicular to the axis of the shaft 7 and extends from the inner peripheral surface of the housing toward the shaft 7.
  • the fixed wings 50 at each stage are separated and fixed by a spacer 70 having a cylindrical shape.
  • the fixed blades 50 and the rotary blades 8a are alternately arranged and formed in a plurality of stages in the axial direction.
  • a spiral groove is formed on the surface facing the cylindrical rotating portion 9.
  • the thread groove spacer 60 faces the outer peripheral surface of the cylindrical rotating part 9 with a predetermined clearance, and when the cylindrical rotating part 9 rotates at a high speed, the gas compressed by the turbo molecular pump 1 is converted into the cylindrical rotating part. With the rotation of 9, it is sent to the exhaust port 6 while being guided by a thread groove (spiral groove). That is, the thread groove is a flow path for transporting gas.
  • the screw groove spacer 60 and the cylindrical rotating portion 9 are opposed to each other with a predetermined clearance to constitute a gas transfer mechanism that transfers gas through the screw groove.
  • the direction of the spiral groove formed in the thread groove spacer 60 is the direction toward the exhaust port 6 when the gas is transported in the spiral groove in the rotational direction of the rotor 8. Further, the depth of the spiral groove becomes shallower as it approaches the exhaust port 6, and the gas transported through the spiral groove is compressed as it approaches the exhaust port 6. As described above, the gas sucked from the intake port 4 is compressed by the turbo molecular pump unit, and further compressed by the thread groove type pump unit, and discharged from the exhaust port 6.
  • process gases such as halogen gas, fluorine gas, chlorine gas, or bromine gas
  • corrosion-resistant surface treatments such as electroless nickel plating are applied to the locations (components) where the gas comes into contact to prevent corrosion due to the gas.
  • the turbo molecular pump 1 according to the first embodiment of the present invention configured as described above has a load change mitigation structure at a boundary portion (joint portion) between the rotor 8 and the cylindrical rotating portion 9.
  • FIG. 2 is an enlarged view of a portion A (joint portion) in FIG. 1, and is a conceptual diagram of the load change mitigation structure according to the first embodiment of the present invention.
  • the turbo molecular pump 1 according to the first embodiment of the present invention has a load change mitigation structure at a boundary portion where the rotor 8 and the cylindrical rotating part 9 are joined. It has a gentle taper (line segment ⁇ ). This taper can be formed by forming the outer diameter of the rotor 8 so that it gradually decreases from the end face side of the cylindrical rotating portion 9 toward the center. The angle represented by ⁇ 1 in FIG.
  • the deformation angle (reduction angle) of the cylindrical rotating portion 9 that is deformed by the thermal expansion of the rotor 8 when the taper as the load change relaxation structure is not provided (FIG. 9). Is shown.
  • the angle represented by ⁇ 2 in FIG. 2 indicates the taper angle of the taper provided as the load change relaxation structure.
  • the width indicated by t in FIG. 2 indicates the taper length of the taper as the load change mitigating structure according to the first embodiment of the present invention, that is, the projected length of the line segment ⁇ .
  • the width indicated by t0 in FIG. 2 indicates the interference width between the cylindrical rotating portion 9 and the rotor 8. That is, it is the difference between the outer diameter of the rotor 8 that is a part disposed on the inner side and the inner diameter of the cylindrical rotating part 9 that is a part disposed on the outer side.
  • the taper angle ⁇ 1 of the cylindrical rotating portion 9 is an angle (generally several degrees) that is much smaller than the taper angle (15 degrees to 30 degrees).
  • the taper angle that is normally given is not effective as a countermeasure against load change due to thermal expansion. Therefore, the taper angle ⁇ 2 according to the load change mitigation structure of the first embodiment is much smaller than the angle at which the material, that is, the FRP itself forming the cylindrical rotating portion 9 is deformed. That is, as shown in FIG.
  • the rotor 8 is provided with a taper having a taper angle ⁇ ⁇ b> 2 that is an angle smaller than the angle ⁇ ⁇ b> 1 at which the cylindrical rotating portion 9 is deformed.
  • the taper functions as a relaxation mechanism that reduces the load so that the shape of the cylindrical rotating portion 9 is gently deformed.
  • the taper angle ⁇ 2 is set to 5 degrees or less as an example.
  • the angle ⁇ 1 varies depending on the thickness of the cylindrical rotating part 9, the material forming the cylindrical rotating part 9, the fiber content of the material, the winding angle of the fibers contained in the material, and the like. Therefore, it is desirable to appropriately change the value of the taper angle ⁇ 2.
  • the deformation of the cylindrical rotating part 9 becomes smooth due to the taper as the load change relaxation structure.
  • a sudden load change due to thermal stress at the boundary between the rotor 8 and the cylindrical rotating part 9 can be reduced.
  • damage such as cracking of the corrosion-resistant coating that occurs because it cannot cope with a sudden load change.
  • the taper length t (projection length of the line segment ⁇ ) provided in the rotor 8 is configured to be sufficiently long. More specifically, the contact surface where the rotor 8 and the cylindrical rotating unit 9 come into contact with each other is not shared, and the outer surface of the rotor 8 and the inner surface of the cylindrical rotating unit 9 are between the rotor 8 and the cylindrical rotating unit 9.
  • the taper (line segment ⁇ ) is extended to the position where the gap 90 is formed. Note that the length necessary for the taper (taper length t: line segment ⁇ ) becomes longer when the rotor 8 disposed on the inner side has a higher force that causes thermal expansion at a high temperature and pushes it outward.
  • the interference width t0 that is, the condition that the part sharing the contact surface where the rotor 8 and the cylindrical rotating part 9 are in contact with each other, that is, the condition that the temperature becomes the highest is obtained. It is desirable to determine the taper length t.
  • the turbo molecular pump 1 having the load change relaxation structure according to the first embodiment of the present invention With the above-described configuration, in the turbo molecular pump 1 having the load change relaxation structure according to the first embodiment of the present invention, the deformation of the cylindrical rotating part 9 becomes smooth due to the taper as the load change relaxation structure. A sudden load change due to thermal stress at the boundary between the rotor 8 and the cylindrical rotating part 9 can be reduced. As a result, it is possible to prevent damage such as cracking of the corrosion-resistant coating that occurs because it cannot cope with a sudden load change. Further, the turbo molecular pump 1 having the load change relaxation structure according to the first embodiment of the present invention can be applied as a measure for preventing the deformation even when the turbo molecular pump 1 is significantly deformed by centrifugal force in addition to thermal expansion. .
  • FIG. 3 is a view for explaining a load change relaxation structure according to Modification 1 of the first embodiment of the present invention.
  • a rotor 81 according to the first modification of the first embodiment of the present invention and a rotor 80 having a conventional shape are shown in parallel for comparison with the rotor 81.
  • a two-dot chain line on the rotor 81 indicates the position of the end of the conventional rotor 80.
  • the rotor 81 according to the load change mitigation structure of the first modification includes a curved portion (curve ⁇ ) and a tapered portion (line segment ⁇ ) at the contact portion with the cylindrical rotating portion 9.
  • the load change mitigation structure is provided by extending the joint portion of the rotor 80 having the conventional shape.
  • the load change mitigation structure may be provided without extending the joint portion.
  • FIG. 4 is a view for explaining a load change relaxation structure according to Modification 2 of the first embodiment of the present invention.
  • FIG. 4 shows a rotor 82 according to Modification 2 of the first embodiment of the present invention, and a two-dot chain line on the rotor 82 indicates the position of the end of the conventional rotor 80.
  • the rotor 82 according to the load change mitigation structure of Modification 2 has a corner R (curve ⁇ ) at the contact portion with the cylindrical rotating portion 9.
  • the load change mitigation structure is provided by extending the joint portion of the rotor 80 having the conventional shape, but the load change mitigation structure may be provided without extending the joint portion.
  • FIG. 5 is a view for explaining a load change relaxation structure according to Modification 3 of the first embodiment of the present invention.
  • FIG. 5 shows a rotor 83 according to Modification 3 of the first embodiment of the present invention, and a two-dot chain line on the rotor 83 indicates the position of the end of the conventional rotor 80.
  • the rotor 83 according to the load change mitigation structure of the third modification has a lower portion (exhaust port 6 side) where the cylindrical rotating portion 9 is joined and in contact with the cylindrical rotating portion 9, as shown in FIG. It has a thin plate portion 84 formed thinner than the mouth 4 side.
  • the above-described thin plate portion 84 is bent toward the inner diameter side to form the bent thin plate portion 85, so that The contact portion has a corner R (curve ⁇ ).
  • the boundary portion between the rotor 83 (flexible thin plate portion 85) and the cylindrical rotating portion 9 is formed.
  • a sudden change in load due to thermal stress can be moderated.
  • the joint portion of the rotor 80 having the conventional shape is extended to provide the load change mitigating structure.
  • the load change mitigating structure may be provided without extending the joint portion.
  • FIG. 6 is a view for explaining a load change relaxation structure according to Modification 4 of the first embodiment of the present invention.
  • FIG. 6A shows a rotor 801 according to the fourth modification of the first embodiment of the present invention, and has a taper (line segment ⁇ ) at a contact portion with the cylindrical rotating portion 9.
  • FIG. 6B shows a rotor 802 according to the fourth modification of the first embodiment of the present invention.
  • a curved portion (curve ⁇ ) and a tapered portion (line segment) are formed at the contact portion with the cylindrical rotating portion 9. ⁇ ).
  • FIG. 6C shows a rotor 803 according to the fourth modification of the first embodiment of the present invention, and has a corner R (curve ⁇ ) at a contact portion with the cylindrical rotating portion 9.
  • the boundary between the rotors 801, 802, 803 and the cylindrical rotating part 9 according to the load change mitigation structure of the fourth modified example is obtained. Sudden load changes due to thermal stress can be moderated. As a result, it is possible to prevent damage such as cracking of the corrosion-resistant coating that occurs because it cannot cope with a sudden load change.
  • FIG. 7 is a figure for demonstrating the load change mitigation structure which concerns on 2nd Embodiment of this invention.
  • FIG. 7A shows a rotor 8001 according to the second embodiment of the present invention, and the upper portion of the contact portion with the cylindrical rotating portion 9 also has a taper.
  • a conventional rotor 8000 is shown in FIG.
  • a load change mitigation structure is also provided on the upper part of the contact portion, and the taper angle thereof is the material, that is, the FRP that forms the cylindrical rotating portion 9. It is formed at an angle that is much smaller than the angle at which it deforms.
  • the rotor 8001 is provided with a taper having an angle smaller than the angle at which the cylindrical rotating portion 9 is deformed.
  • the taper functions as a relaxation mechanism that reduces the load so that the shape of the cylindrical rotating portion 9 is gently deformed.
  • the taper angle is set to 5 degrees or less as an example. However, it is desirable to appropriately change the thickness of the cylindrical rotating part 9 or the material forming the cylindrical rotating part 9, the fiber content of the material, the winding angle of the fibers contained in the material, and the like.
  • the cylindrical rotating unit 9 is deformed by the upper taper in the contact direction as the load change relaxation structure. Since it becomes smooth, a sudden load change due to thermal stress at the boundary between the rotor 8001 and the cylindrical rotating portion 9 can be reduced. As a result, it is possible to prevent damage such as cracking of the corrosion-resistant coating that occurs because it cannot cope with a sudden load change.
  • the turbo-molecular pump 1 having the load change relaxation structure according to the second embodiment of the present invention can be applied as a measure for preventing the deformation even when the turbo molecular pump 1 is significantly deformed by centrifugal force in addition to thermal expansion. .
  • the boundary portion (contact portion) between the rotor 8001 and the cylindrical rotating portion 9 is not necessarily tapered (straight line). That is, since it is desirable to provide R instead of corners at the portion where the taper starts in the rotor 8001 (the portion where the straight line intersects the straight line), the boundary portion for buffering the load is configured to have a gentle curve. Good. Moreover, you may make it the structure which provides the said taper or R-shaped gentle curve only in upper part. Further, the load change relaxation structure according to the second embodiment of the present invention may be combined with each of the embodiments and modifications of the lower load change relaxation structure shown in the first embodiment.
  • FIG. 8 shows a schematic configuration diagram of a thread groove type pump 100 according to a third embodiment of the present invention.
  • description is abbreviate
  • the boundary portion (A portion) between the rotor 8 and the cylindrical rotating portion 9 is the same as in the first embodiment and the second embodiment.
  • the described load change mitigation structure can be formed, and each modification described above can be applied.
  • the rotor 8 is made of an aluminum alloy and the cylindrical rotating part 9 is made of a cylindrical body formed of FRP.
  • the present invention is not limited to this, and the difference in thermal expansion at high temperatures. As long as two kinds of materials that cause a large thermal stress can be applied.
  • the rotor 8 is made of an aluminum alloy and the cylindrical rotating portion 9 is formed as a cylindrical body formed of titanium alloy, precipitation strengthened stainless steel, or the like, the configurations of the above-described embodiments and modifications can be applied. it can.
  • the deformation of the cylindrical rotating portion 9 is smoothed by the taper as the load change mitigating structure, and the rotor 8 and the cylindrical rotating portion 9 are smoothed.
  • a sudden load change at the boundary can be mitigated. That is, according to the configuration of each embodiment and each modification of the present invention, a rotating body is configured by disposing a lighter cylindrical rotating portion 9 made of a different material (such as FRP material) on the aluminum alloy rotor 8. Therefore, it is possible to provide a vacuum pump with improved rotational performance and improved exhaust performance as compared with the prior art.
  • the load change mitigation function at the boundary portion between the rotor 8 and the cylindrical rotating portion 9 is improved, so that the load may change abruptly. It is possible to provide the rotor 8 that can prevent the corrosion-resistant coating from being damaged. As a result, when the rotor 8 is disposed, the corrosion resistance is improved as compared with the conventional vacuum pump, and thus a vacuum pump with improved reliability and durability can be provided.

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
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Abstract

L'invention porte sur une pompe à vide. Le but de l'invention consiste à réaliser : un corps cylindrique ayant une structure d'amortissement du changement de charge destinée à amortir le changement de charge dans une section limite entre un rotor et une partie rotative cylindrique ; et une pompe à vide ayant une performance de rotation améliorée (en d'autres termes, une performance de refoulement), une meilleure fiabilité et une meilleure durabilité, comparativement à la technique antérieure, grâce au fait qu'elle incorpore intérieurement ce corps cylindrique. La structure d'amortissement de changement de charge destinée à amortir le changement de charge grâce à la contrainte thermique est réalisée dans une section de jonction dans laquelle une partie rotative métallique (en alliage d'aluminium ou analogue) est réunie à une partie rotative cylindrique formée d'une matière différente (FRP ou équivalent). Plus précisément, une configuration ayant l'une des caractéristiques suivantes est disposée dans la section limite entre la partie rotative et la partie rotative cylindrique : une conicité modérée, une partie courbe et une partie effilée ou un coin (R).
PCT/JP2012/064125 2011-06-16 2012-05-31 Rotor et pompe à vide WO2012172990A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP12800506.3A EP2722528B1 (fr) 2011-06-16 2012-05-31 Ensemble rotor et pompe à vide équipée de celui-ci
CN201280026312.9A CN103562554B (zh) 2011-06-16 2012-05-31 转子和真空泵
JP2013520501A JP6047091B2 (ja) 2011-06-16 2012-05-31 ロータ及び真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-133869 2011-06-16
JP2011133869 2011-06-16

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CN103562554A (zh) 2014-02-05
EP2722528A1 (fr) 2014-04-23
JPWO2012172990A1 (ja) 2015-02-23
JP6047091B2 (ja) 2016-12-21
EP2722528B1 (fr) 2018-05-30
CN103562554B (zh) 2016-12-21
EP2722528A4 (fr) 2014-12-03

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