EP1130269A2 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

Info

Publication number
EP1130269A2
EP1130269A2 EP01102551A EP01102551A EP1130269A2 EP 1130269 A2 EP1130269 A2 EP 1130269A2 EP 01102551 A EP01102551 A EP 01102551A EP 01102551 A EP01102551 A EP 01102551A EP 1130269 A2 EP1130269 A2 EP 1130269A2
Authority
EP
European Patent Office
Prior art keywords
stator
elastically deformable
spacer rings
turbomolecular pump
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01102551A
Other languages
German (de)
English (en)
Other versions
EP1130269A3 (fr
EP1130269B1 (fr
Inventor
Peter Fahrenbach
Armin Blecker
Wolfgang Bremer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1130269A2 publication Critical patent/EP1130269A2/fr
Publication of EP1130269A3 publication Critical patent/EP1130269A3/fr
Application granted granted Critical
Publication of EP1130269B1 publication Critical patent/EP1130269B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of claim 1.
  • the active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are.
  • the rotor and stator disks generally each have an inner one Support ring, which is equipped with the blades on the outside.
  • the shovels of the rotor disks which rotate at high speed, result in interaction with the stator blades the pump effect.
  • Through spacer rings which are on the outer circumference between the stator disks, they are spaced maintained that the rotor disks can rotate between them without contact.
  • Stator disks and spacer rings together form the stator, which is centered by the inner wall of the pump housing and z. B. with springs in addition is axially compressed so that the stator washers and the spacer rings form a firm bond.
  • the disadvantage of this solution is a very poor thermal conductivity of the O-ring material. This creates the inside that occurs during pump operation Insufficient heat to the housing and the lower part of the pump submitted. In addition, the lack of corrosion resistance of the O-ring material causes Problems pumping aggressive media. In addition, that the O-rings are not on the high vacuum side due to the high outgassing rate can be used.
  • the invention has set itself the task of presenting an arrangement which Manufacturing tolerances that the individual components of the stator packs of turbomolecular pumps cling, balances. They are said to have the disadvantages of conventional Arrangements, such as when using O-rings, are avoided become.
  • the inventive arrangement is intended to continue compared to FR 26 83 277 some advantages, such as. B. greater freedom in the choice of materials and influence thermal conductivity.
  • the assembly of a turbomolecular pump Manufacturing tolerances balanced Due to the arrangement according to the invention, the assembly of a turbomolecular pump Manufacturing tolerances balanced. This creates a fixed one Design with precise distances between rotor and stator components. Time consuming Adjustments are no longer necessary.
  • the elastic metallic elements can be used in all areas of the pump, especially on the high vacuum side, be used. Through the use of suitable metallic materials resistance to aggressive media can be ensured. Disruptive Degassing, especially on the high vacuum side, is avoided. By metallic Contact can achieve targeted heat conduction. Furthermore there is the possibility of this through special design and choice of material to vary.
  • the rotor disks 4 of a turbomolecular pump are attached to the rotor shaft 2.
  • the stator disks 6, which are each held at a distance by spacer rings 8 are attached between the rotor disks.
  • Rotor disks 4 and stator disks 6 are provided with gas-producing structures and work together the pumping effect.
  • Stator disks and spacer rings together form the stator package, which is centered on the inner wall of the pump housing 10.
  • Between at least two of the spacer rings 8 are each elastically deformable metallic Elements 16. These form together with the spacer rings and the stator disks the stator package.
  • An axial can be in at least one of the spacer rings Groove 14 may be incorporated, in which there is an elastically deformable element 16.
  • an element can be wavy bent wire exist.
  • the element 16 consists of a wavy wire.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP01102551A 2000-03-02 2001-02-06 Pompe turbo-moléculaire Expired - Lifetime EP1130269B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10010371 2000-03-02
DE10010371A DE10010371A1 (de) 2000-03-02 2000-03-02 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1130269A2 true EP1130269A2 (fr) 2001-09-05
EP1130269A3 EP1130269A3 (fr) 2002-10-30
EP1130269B1 EP1130269B1 (fr) 2006-09-13

Family

ID=7633364

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01102551A Expired - Lifetime EP1130269B1 (fr) 2000-03-02 2001-02-06 Pompe turbo-moléculaire

Country Status (4)

Country Link
US (1) US6454525B2 (fr)
EP (1) EP1130269B1 (fr)
JP (1) JP2001271786A (fr)
DE (2) DE10010371A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
EP2607706A3 (fr) * 2011-12-23 2014-04-09 Oerlikon Leybold Vacuum GmbH Pompe à vide
EP3032107A3 (fr) * 2014-12-08 2016-08-31 Pfeiffer Vacuum Gmbh Pompe turbomoleculaire
EP3497337B1 (fr) 2016-08-08 2022-11-23 Edwards Limited Pompe a vide

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20030420A1 (it) * 2003-06-05 2004-12-06 Varian Spa Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
WO2012165105A1 (fr) * 2011-06-03 2012-12-06 エドワーズ株式会社 Pompe à vide
FR3135306B1 (fr) * 2022-05-05 2024-05-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé d’assemblage

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2683277A1 (fr) 1991-11-04 1993-05-07 Cit Alcatel Entretoise a epaisseur ajustable.

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US760776A (en) * 1903-09-09 1904-05-24 Ben J Campbell Fluid-viscosity motor or turbine.
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
FR2086525A5 (fr) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
CH583856A5 (fr) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
NO821262L (no) * 1982-04-19 1983-10-20 Regnor Pedersen Element for bruk ved oppbygging av vibrasjonsdempende fjaeranordninger.
JPS61148932U (fr) * 1985-03-08 1986-09-13
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
JPH0348162A (ja) * 1989-04-24 1991-03-01 Fuji Electric Co Ltd モータの速度検出装置
DE9013671U1 (de) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
JPH0465992U (fr) * 1990-10-15 1992-06-09
US5149066A (en) * 1991-02-11 1992-09-22 Aeroflex International Incorporated Isolator with improved symmetrical response to shock and vibration forces
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
JP2579864B2 (ja) * 1992-04-23 1997-02-12 ダイジョー株式会社 弾性構造体
JPH07180739A (ja) * 1994-12-06 1995-07-18 Daijiyoo Kk 弾性構造体

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2683277A1 (fr) 1991-11-04 1993-05-07 Cit Alcatel Entretoise a epaisseur ajustable.

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
US8562293B2 (en) 2007-10-11 2013-10-22 Oerlikon Leybold Vacuum Gmbh Multi-stage pump rotor for a turbomolecular pump
EP2607706A3 (fr) * 2011-12-23 2014-04-09 Oerlikon Leybold Vacuum GmbH Pompe à vide
EP3032107A3 (fr) * 2014-12-08 2016-08-31 Pfeiffer Vacuum Gmbh Pompe turbomoleculaire
EP3497337B1 (fr) 2016-08-08 2022-11-23 Edwards Limited Pompe a vide

Also Published As

Publication number Publication date
US20010019694A1 (en) 2001-09-06
US6454525B2 (en) 2002-09-24
DE10010371A1 (de) 2001-09-06
EP1130269A3 (fr) 2002-10-30
DE50110975D1 (de) 2006-10-26
EP1130269B1 (fr) 2006-09-13
JP2001271786A (ja) 2001-10-05

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