EP1130269A2 - Turbo-molecular pump - Google Patents

Turbo-molecular pump Download PDF

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Publication number
EP1130269A2
EP1130269A2 EP01102551A EP01102551A EP1130269A2 EP 1130269 A2 EP1130269 A2 EP 1130269A2 EP 01102551 A EP01102551 A EP 01102551A EP 01102551 A EP01102551 A EP 01102551A EP 1130269 A2 EP1130269 A2 EP 1130269A2
Authority
EP
European Patent Office
Prior art keywords
stator
elastically deformable
spacer rings
turbomolecular pump
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01102551A
Other languages
German (de)
French (fr)
Other versions
EP1130269B1 (en
EP1130269A3 (en
Inventor
Peter Fahrenbach
Armin Blecker
Wolfgang Bremer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1130269A2 publication Critical patent/EP1130269A2/en
Publication of EP1130269A3 publication Critical patent/EP1130269A3/en
Application granted granted Critical
Publication of EP1130269B1 publication Critical patent/EP1130269B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of claim 1.
  • the active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are.
  • the rotor and stator disks generally each have an inner one Support ring, which is equipped with the blades on the outside.
  • the shovels of the rotor disks which rotate at high speed, result in interaction with the stator blades the pump effect.
  • Through spacer rings which are on the outer circumference between the stator disks, they are spaced maintained that the rotor disks can rotate between them without contact.
  • Stator disks and spacer rings together form the stator, which is centered by the inner wall of the pump housing and z. B. with springs in addition is axially compressed so that the stator washers and the spacer rings form a firm bond.
  • the disadvantage of this solution is a very poor thermal conductivity of the O-ring material. This creates the inside that occurs during pump operation Insufficient heat to the housing and the lower part of the pump submitted. In addition, the lack of corrosion resistance of the O-ring material causes Problems pumping aggressive media. In addition, that the O-rings are not on the high vacuum side due to the high outgassing rate can be used.
  • the invention has set itself the task of presenting an arrangement which Manufacturing tolerances that the individual components of the stator packs of turbomolecular pumps cling, balances. They are said to have the disadvantages of conventional Arrangements, such as when using O-rings, are avoided become.
  • the inventive arrangement is intended to continue compared to FR 26 83 277 some advantages, such as. B. greater freedom in the choice of materials and influence thermal conductivity.
  • the assembly of a turbomolecular pump Manufacturing tolerances balanced Due to the arrangement according to the invention, the assembly of a turbomolecular pump Manufacturing tolerances balanced. This creates a fixed one Design with precise distances between rotor and stator components. Time consuming Adjustments are no longer necessary.
  • the elastic metallic elements can be used in all areas of the pump, especially on the high vacuum side, be used. Through the use of suitable metallic materials resistance to aggressive media can be ensured. Disruptive Degassing, especially on the high vacuum side, is avoided. By metallic Contact can achieve targeted heat conduction. Furthermore there is the possibility of this through special design and choice of material to vary.
  • the rotor disks 4 of a turbomolecular pump are attached to the rotor shaft 2.
  • the stator disks 6, which are each held at a distance by spacer rings 8 are attached between the rotor disks.
  • Rotor disks 4 and stator disks 6 are provided with gas-producing structures and work together the pumping effect.
  • Stator disks and spacer rings together form the stator package, which is centered on the inner wall of the pump housing 10.
  • Between at least two of the spacer rings 8 are each elastically deformable metallic Elements 16. These form together with the spacer rings and the stator disks the stator package.
  • An axial can be in at least one of the spacer rings Groove 14 may be incorporated, in which there is an elastically deformable element 16.
  • an element can be wavy bent wire exist.
  • the element 16 consists of a wavy wire.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Pump has rotor (4) and stator (6) plates arranged alternately in series and distance rings (8) for stator plates forming stator packet with stator plates. An elastically deformable metal element (16) is arranged between at least two of distance rings and forms part of stator packet. An axial groove (14) machined into at least no distance ring accommodates an elastically deformable metal element.

Description

Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a turbomolecular pump according to the preamble of claim 1.

Die aktiven Pumpelemente einer Turbomolekularpumpe bestehen aus mit Schaufeln versehenen Rotor- und Statorscheiben, die abwechselnd hintereinander angeordnet sind. Die Rotor- und Statorscheiben weisen im allgemeinen jeweils einen inneren Tragring auf, welcher auf der Außenseite mit den Schaufeln bestückt ist. Die Schaufeln der Rotorscheiben, welche mit hoher Geschwindigkeit umlaufen, ergeben im Zusammenwirken mit den Statorschaufeln den Pumpeffekt. Durch Distanzringe, welche am äußeren Umfang zwischen den Statorscheiben liegen, werden diese so auf Abstand gehalten, dass die Rotorscheiben zwischen ihnen berührungsfrei rotieren können. Statorscheiben und Distanzringe bilden so gemeinsam den Stator, welcher durch die Innenwand des Pumpengehäuses zentriert wird und z. B. mit Federn zusätzlich axial so zusammengedrückt wird, dass die Statorscheiben und die Distanzringe einen festen Verbund bilden.The active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are. The rotor and stator disks generally each have an inner one Support ring, which is equipped with the blades on the outside. The shovels of the rotor disks, which rotate at high speed, result in interaction with the stator blades the pump effect. Through spacer rings, which are on the outer circumference between the stator disks, they are spaced maintained that the rotor disks can rotate between them without contact. Stator disks and spacer rings together form the stator, which is centered by the inner wall of the pump housing and z. B. with springs in addition is axially compressed so that the stator washers and the spacer rings form a firm bond.

Um die notwendige präzise Montage eines solchen Stapels von Scheiben, Distanzringen und anderen Bauteilen erfolgreich durchzuführen, müssen zum Ausgleich von Fertigungstoleranzen wiederholte Justierungen vorgenommen werden. Dies führt zu einem erhöhten Zeitaufwand für Fertigungs- und Montagearbeiten.To the necessary precise assembly of such a stack of washers, spacer rings and other components must be carried out successfully to compensate for Manufacturing tolerances repeated adjustments are made. this leads to an increased expenditure of time for manufacturing and assembly work.

Durch Einfügen eines O-Ringes, z. B. aus Viton, zwischen dem letzten, der Vorvakuumseite zugewandten Distanzring und dem Unterteil der Pumpe wird seither ein teilweiser Ausgleich der Fertigungstoleranzen herbeigeführt.By inserting an O-ring, e.g. B. from Viton, between the last, the fore-vacuum side facing spacer ring and the lower part of the pump has since been a partial one Compensation of the manufacturing tolerances brought about.

Der Nachteil dieser Lösung besteht in einer sehr schlechten Wärmeleitfähigkeit des O-Ring-Materials. Dadurch wird die während des Pumpbetriebes im Inneren entstehende Wärme nur unzulänglich an das Gehäuse und an das Unterteil der Pumpe abgegeben. Außerdem verursacht die mangelnde Korrosionsbeständigkeit des O-Ring-Materials Probleme beim Abpumpen von aggressiven Medien. Dazu kommt, dass die O-Ringe wegen der hohen Ausgasungsrate nicht auf der Hochvakuumseite einsetzbar sind.The disadvantage of this solution is a very poor thermal conductivity of the O-ring material. This creates the inside that occurs during pump operation Insufficient heat to the housing and the lower part of the pump submitted. In addition, the lack of corrosion resistance of the O-ring material causes Problems pumping aggressive media. In addition, that the O-rings are not on the high vacuum side due to the high outgassing rate can be used.

Eine weitere Lösung des Problems, die Montage- und Wartungsarbeiten zu vereinfachen, wird in der FR 26 83 277 vorgeschlagen. Hier ist an dem oberen, der Hochvakuumseite zugewandten Zwischenring eine spitze, schneidenförmige Kante angebracht. Diese verformt sich beim Stapeln der Statorbauteile und gleicht somit die durch Toleranzen gegebenen Unterschiede aus. Dazu ist es notwendig, dass das Material dieses Bauteils weicher sein muss als dasjenige des Distanzringes selbst.Another solution to the problem of simplifying assembly and maintenance work, is proposed in FR 26 83 277. Here is on the top, the high vacuum side facing intermediate ring attached a pointed, cutting edge. This deforms when the stator components are stacked and thus resembles the one differences given by tolerances. To do this, it is necessary that The material of this component must be softer than that of the spacer ring itself.

Die Erfindung hat sich zur Aufgabe gestellt, eine Anordnung vorzustellen, welche Fertigungstoleranzen, die den einzelnen Bauteilen der Statorpakete von Turbomolekularpumpen anhaften, ausgleicht. Durch sie sollen die Nachteile, welche bei herkömmlichen Anordnungen, wie bei der Verwendung von O-Ringen, bestehen, vermieden werden. Die erfinderische Anordnung soll weiterhin gegenüber der FR 26 83 277 einige Vorteile, wie z. B. größere Freiheit bei der Materialwahl und Beeinflussbarkeit der Wärmeleitfähigkeit, aufweisen.The invention has set itself the task of presenting an arrangement which Manufacturing tolerances that the individual components of the stator packs of turbomolecular pumps cling, balances. They are said to have the disadvantages of conventional Arrangements, such as when using O-rings, are avoided become. The inventive arrangement is intended to continue compared to FR 26 83 277 some advantages, such as. B. greater freedom in the choice of materials and influence thermal conductivity.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 - 4 stellen weitere Ausgestaltungsformen der Erfindung dar.The task is characterized by the characterizing features of the first claim solved. Claims 2-4 represent further embodiments of the invention.

Durch die erfindungsgemäße Anordnung werden bei der Montage einer Turbomolekularpumpe Fertigungstoleranzen ausgeglichen. Dadurch entsteht eine festgefügte Bauform mit präzisen Abständen zwischen Rotor- und Statorbauteilen. Zeitaufwendige Justierungen sind nicht mehr notwendig. Die elastischen metallischen Elemente können in allen Bereichen der Pumpe, insbesondere auch auf der Hochvakuumseite, eingesetzt werden. Durch die Verwendung von geeigneten metallischen Werkstoffen kann Beständigkeit gegenüber aggressiven Medien sichergestellt werden. Störende Entgasungen, besonders auf der Hochvakuumseite, werden vermieden. Durch metallischen Kontakt kann eine gezielte Wärmeleitung erreicht werden. Darüber hinaus besteht die Möglichkeit, diese durch besondere Formgebung und Materialwahl noch zu variieren. Due to the arrangement according to the invention, the assembly of a turbomolecular pump Manufacturing tolerances balanced. This creates a fixed one Design with precise distances between rotor and stator components. Time consuming Adjustments are no longer necessary. The elastic metallic elements can be used in all areas of the pump, especially on the high vacuum side, be used. Through the use of suitable metallic materials resistance to aggressive media can be ensured. Disruptive Degassing, especially on the high vacuum side, is avoided. By metallic Contact can achieve targeted heat conduction. Furthermore there is the possibility of this through special design and choice of material to vary.

Anhand der Fig. 1 und 2 soll die Erfindung näher erläutert werden.The invention will be explained in more detail with reference to FIGS. 1 and 2.

Es zeigen:

Fig. 1
einen Teil einer Turbomolekularpumpe mit der erfinderischen Anordnung
Fig. 2
eine perspektivische Darstellung der erfinderischen Anordnung
Show it:
Fig. 1
part of a turbomolecular pump with the inventive arrangement
Fig. 2
a perspective view of the inventive arrangement

Auf der Rotorwelle 2 sind die Rotorscheiben 4 einer Turbomolekularpumpe befestigt. Die Statorscheiben 6, welche jeweils durch Distanzringe 8 auf Abstand gehalten werden, sind zwischen den Rotorscheiben angebracht. Rotorscheiben 4 und Statorscheiben 6 sind mit gasfördernden Strukturen versehen und bewirken zusammen den Pumpeffekt. Statorscheiben und Distanzringe bilden gemeinsam das Statorpaket, welches an der Innenwand des Pumpengehäuses 10 zentriert ist. Zwischen mindestens zwei der Distanzringe 8 befinden sich jeweils elastisch verformbare metallische Elemente 16. Diese bilden zusammen mit den Distanzringen und den Statorscheiben das Statorpaket. In mindestens einem der Distanzringe kann eine axiale Nut 14 eingearbeitet sein, in welcher sich ein elastisch verformbares Element 16 befindet. Dieses kann aus mehreren Teilen bestehen oder auch einstückig ausgebildet sein. In einer speziellen Ausführungsform kann ein solches Element aus einem wellenförmig gebogenen Draht bestehen. Bei Montage der Pumpe, insbesondere des Statorpaketes, werden durch Verformung des Elementes 16 Fertigungstoleranzen ausgeglichen. In einer bevorzugten Ausführungsform besteht das Element 16 aus einem wellenförmig gebogenen Draht.The rotor disks 4 of a turbomolecular pump are attached to the rotor shaft 2. The stator disks 6, which are each held at a distance by spacer rings 8 are attached between the rotor disks. Rotor disks 4 and stator disks 6 are provided with gas-producing structures and work together the pumping effect. Stator disks and spacer rings together form the stator package, which is centered on the inner wall of the pump housing 10. Between at least two of the spacer rings 8 are each elastically deformable metallic Elements 16. These form together with the spacer rings and the stator disks the stator package. An axial can be in at least one of the spacer rings Groove 14 may be incorporated, in which there is an elastically deformable element 16. This can consist of several parts or can be made in one piece his. In a special embodiment, such an element can be wavy bent wire exist. When installing the pump, especially the Stator package, by deforming the element 16 manufacturing tolerances balanced. In a preferred embodiment, the element 16 consists of a wavy wire.

Claims (4)

Turbomolekularpumpe mit Rotor- (4) und Statorscheiben (6), welche abwechselnd hintereinander angeordnet sind, wobei die Statorscheiben durch Distanzringe (8) auf Abstand gehalten werden und mit diesen zusammen das Statorpaket bilden, dadurch gekennzeichnet, dass zwischen mindestens zwei der Distanzringe (8) sich jeweils ein elastisch verformbares metallisches Element (16) befindet und dieses ebenfalls einen Teil des Statorpaketes bildet.Turbomolecular pump with rotor (4) and stator disks (6), which are arranged alternately one behind the other, the stator disks being kept at a distance by spacer rings (8) and together forming the stator pack, characterized in that between at least two of the spacer rings (8 ) there is in each case an elastically deformable metallic element (16) and this likewise forms part of the stator package. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass in mindestens einem der Distanzringe (12) eine axiale Nut (14) eingearbeitet ist, in welcher sich ein elastisch verformbares metallisches Element (16) befindet.Turbomolecular pump according to claim 1, characterized in that an axial groove (14) is incorporated in at least one of the spacer rings (12), in which an elastically deformable metallic element (16) is located. Turbomolekularpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass das elastisch verformbare metallische Element (16) aus einem wellenförmig gebogenen Draht besteht.Turbomolecular pump according to claim 1 or 2, characterized in that the elastically deformable metallic element (16) consists of a wave-shaped bent wire. Turbomolekularpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das elastisch verformbare metallische Element (16) aus mehreren Teilen besteht.Turbomolecular pump according to one of the preceding claims, characterized in that the elastically deformable metallic element (16) consists of several parts.
EP01102551A 2000-03-02 2001-02-06 Turbo-molecular pump Expired - Lifetime EP1130269B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10010371A DE10010371A1 (en) 2000-03-02 2000-03-02 Turbomolecular pump
DE10010371 2000-03-02

Publications (3)

Publication Number Publication Date
EP1130269A2 true EP1130269A2 (en) 2001-09-05
EP1130269A3 EP1130269A3 (en) 2002-10-30
EP1130269B1 EP1130269B1 (en) 2006-09-13

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ID=7633364

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EP01102551A Expired - Lifetime EP1130269B1 (en) 2000-03-02 2001-02-06 Turbo-molecular pump

Country Status (4)

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US (1) US6454525B2 (en)
EP (1) EP1130269B1 (en)
JP (1) JP2001271786A (en)
DE (2) DE10010371A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
EP2607706A3 (en) * 2011-12-23 2014-04-09 Oerlikon Leybold Vacuum GmbH Vacuum pump
EP3032107A3 (en) * 2014-12-08 2016-08-31 Pfeiffer Vacuum Gmbh Turbomolecular pump
EP3497337B1 (en) 2016-08-08 2022-11-23 Edwards Limited Vacuum pump

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20030420A1 (en) * 2003-06-05 2004-12-06 Varian Spa METHOD FOR THE IMPLEMENTATION OF STATORS FOR VACUUM PUMPS AND STATORS SO OBTAINED
DE10331932B4 (en) 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbo molecular pump
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
WO2012165105A1 (en) * 2011-06-03 2012-12-06 エドワーズ株式会社 Vacuum pump
FR3135306B1 (en) * 2022-05-05 2024-05-10 Pfeiffer Vacuum Turbomolecular vacuum pump and assembly process

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Publication number Priority date Publication date Assignee Title
FR2683277A1 (en) 1991-11-04 1993-05-07 Cit Alcatel ADJUSTABLE THICKNESS SPACER.

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
US8562293B2 (en) 2007-10-11 2013-10-22 Oerlikon Leybold Vacuum Gmbh Multi-stage pump rotor for a turbomolecular pump
EP2607706A3 (en) * 2011-12-23 2014-04-09 Oerlikon Leybold Vacuum GmbH Vacuum pump
EP3032107A3 (en) * 2014-12-08 2016-08-31 Pfeiffer Vacuum Gmbh Turbomolecular pump
EP3497337B1 (en) 2016-08-08 2022-11-23 Edwards Limited Vacuum pump

Also Published As

Publication number Publication date
EP1130269B1 (en) 2006-09-13
US20010019694A1 (en) 2001-09-06
JP2001271786A (en) 2001-10-05
US6454525B2 (en) 2002-09-24
EP1130269A3 (en) 2002-10-30
DE50110975D1 (en) 2006-10-26
DE10010371A1 (en) 2001-09-06

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