EP1130269A3 - Turbo-molecular pump - Google Patents

Turbo-molecular pump Download PDF

Info

Publication number
EP1130269A3
EP1130269A3 EP01102551A EP01102551A EP1130269A3 EP 1130269 A3 EP1130269 A3 EP 1130269A3 EP 01102551 A EP01102551 A EP 01102551A EP 01102551 A EP01102551 A EP 01102551A EP 1130269 A3 EP1130269 A3 EP 1130269A3
Authority
EP
European Patent Office
Prior art keywords
turbo
molecular pump
elastically deformable
stator
spacer rings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01102551A
Other languages
German (de)
French (fr)
Other versions
EP1130269B1 (en
EP1130269A2 (en
Inventor
Peter Fahrenbach
Armin Blecker
Wolfgang Bremer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1130269A2 publication Critical patent/EP1130269A2/en
Publication of EP1130269A3 publication Critical patent/EP1130269A3/en
Application granted granted Critical
Publication of EP1130269B1 publication Critical patent/EP1130269B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Abstract

Die Erfindung beschreibt eine Turbomolekularpumpe mit Rotor- (4) und Statorscheiben (6), wobei die Statorscheiben durch Distanzringen (8) auf Abstand gehalten werden und mit diesen zusammen das Statorpaket bilden. Zwischen mindestens zwei der Distanzringe (8) befindet sich jeweils ein elastisch verformbares metallisches Element (16). In mindestens einem Distanzring (12) kann eine axiale Nut (14) eingearbeitet sein, in welcher sich das elastisch verformbare Element (16) befindet.The invention describes a turbomolecular pump with rotor (4) and stator disks (6), the stator disks being kept at a distance by spacer rings (8) and together they form the stator package. Between at least two the spacer rings (8) each have an elastically deformable metallic Element (16). An axial groove (14) can be incorporated in at least one spacer ring (12) be in which the elastically deformable element (16) is located.

EP01102551A 2000-03-02 2001-02-06 Turbo-molecular pump Expired - Lifetime EP1130269B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10010371 2000-03-02
DE10010371A DE10010371A1 (en) 2000-03-02 2000-03-02 Turbomolecular pump

Publications (3)

Publication Number Publication Date
EP1130269A2 EP1130269A2 (en) 2001-09-05
EP1130269A3 true EP1130269A3 (en) 2002-10-30
EP1130269B1 EP1130269B1 (en) 2006-09-13

Family

ID=7633364

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01102551A Expired - Lifetime EP1130269B1 (en) 2000-03-02 2001-02-06 Turbo-molecular pump

Country Status (4)

Country Link
US (1) US6454525B2 (en)
EP (1) EP1130269B1 (en)
JP (1) JP2001271786A (en)
DE (2) DE10010371A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20030420A1 (en) * 2003-06-05 2004-12-06 Varian Spa METHOD FOR THE IMPLEMENTATION OF STATORS FOR VACUUM PUMPS AND STATORS SO OBTAINED
DE10331932B4 (en) 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbo molecular pump
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
WO2012165105A1 (en) * 2011-06-03 2012-12-06 エドワーズ株式会社 Vacuum pump
DE202011109517U1 (en) 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102014118083A1 (en) * 2014-12-08 2016-06-09 Pfeiffer Vacuum Gmbh TURBO MOLECULAR PUMP
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
FR3135306A1 (en) * 2022-05-05 2023-11-10 Pfeiffer Vacuum Turbomolecular vacuum pump and assembly process

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
US3749528A (en) * 1970-04-01 1973-07-31 Snecma Vacuum pumps
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
EP0478882A1 (en) * 1990-09-29 1992-04-08 Leybold Aktiengesellschaft Stator for a turbomolecular pump
EP0540970A1 (en) * 1991-11-04 1993-05-12 Alcatel Cit Spacer element with adjustable thickness

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US760776A (en) * 1903-09-09 1904-05-24 Ben J Campbell Fluid-viscosity motor or turbine.
DE1503704C3 (en) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar BLADE FOR A WHEEL AND OR GUIDE WHEEL OF A TURBOMOLECULAR PUMP
CH583856A5 (en) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
NO821262L (en) * 1982-04-19 1983-10-20 Regnor Pedersen ITEMS FOR USE IN BUILDING THE VIBRATION DUMPING REMOVAL DEVICES.
JPS61148932U (en) * 1985-03-08 1986-09-13
DE3891263T1 (en) * 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov TURBOMOLECULAR VACUUM PUMP
JPH0348162A (en) * 1989-04-24 1991-03-01 Fuji Electric Co Ltd Speed motor detector
JPH0465992U (en) * 1990-10-15 1992-06-09
US5149066A (en) * 1991-02-11 1992-09-22 Aeroflex International Incorporated Isolator with improved symmetrical response to shock and vibration forces
JPH04330397A (en) * 1991-04-30 1992-11-18 Fujitsu Ltd Turbo molecular pump
JP2579864B2 (en) * 1992-04-23 1997-02-12 ダイジョー株式会社 Elastic structure
JPH07180739A (en) * 1994-12-06 1995-07-18 Daijiyoo Kk Elastic structural body

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
US3749528A (en) * 1970-04-01 1973-07-31 Snecma Vacuum pumps
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
EP0478882A1 (en) * 1990-09-29 1992-04-08 Leybold Aktiengesellschaft Stator for a turbomolecular pump
EP0540970A1 (en) * 1991-11-04 1993-05-12 Alcatel Cit Spacer element with adjustable thickness

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 007, no. 071 (M - 202) 24 March 1983 (1983-03-24) *

Also Published As

Publication number Publication date
DE50110975D1 (en) 2006-10-26
US6454525B2 (en) 2002-09-24
EP1130269B1 (en) 2006-09-13
EP1130269A2 (en) 2001-09-05
US20010019694A1 (en) 2001-09-06
JP2001271786A (en) 2001-10-05
DE10010371A1 (en) 2001-09-06

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