JPS62173594U - - Google Patents

Info

Publication number
JPS62173594U
JPS62173594U JP4198186U JP4198186U JPS62173594U JP S62173594 U JPS62173594 U JP S62173594U JP 4198186 U JP4198186 U JP 4198186U JP 4198186 U JP4198186 U JP 4198186U JP S62173594 U JPS62173594 U JP S62173594U
Authority
JP
Japan
Prior art keywords
vane ring
stator vane
plate portion
spacer
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4198186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4198186U priority Critical patent/JPS62173594U/ja
Publication of JPS62173594U publication Critical patent/JPS62173594U/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP4198186U 1986-03-22 1986-03-22 Pending JPS62173594U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4198186U JPS62173594U (fr) 1986-03-22 1986-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4198186U JPS62173594U (fr) 1986-03-22 1986-03-22

Publications (1)

Publication Number Publication Date
JPS62173594U true JPS62173594U (fr) 1987-11-04

Family

ID=30857477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4198186U Pending JPS62173594U (fr) 1986-03-22 1986-03-22

Country Status (1)

Country Link
JP (1) JPS62173594U (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219495A (ja) * 1990-02-16 1992-08-10 Varian Spa ターボ分子ポンプ用固定子
JP2001153087A (ja) * 1999-10-28 2001-06-05 Pfeiffer Vacuum Gmbh ターボ分子ポンプ
JP2005337028A (ja) * 2004-05-24 2005-12-08 Shimadzu Corp ターボ分子ポンプ
WO2006027961A1 (fr) * 2004-09-10 2006-03-16 Boc Edowards Japan Limited Aube fixe d'une pompe turbomoléculaire
JP2014173468A (ja) * 2013-03-07 2014-09-22 Shimadzu Corp 真空ポンプ
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
WO2021140330A1 (fr) * 2020-01-09 2021-07-15 Edwards Limited Pompe à vide
EP3916235A1 (fr) * 2020-05-27 2021-12-01 Pfeiffer Vacuum Technology AG Procédé de fabrication d'une pompe à vide

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219495A (ja) * 1990-02-16 1992-08-10 Varian Spa ターボ分子ポンプ用固定子
JP2001153087A (ja) * 1999-10-28 2001-06-05 Pfeiffer Vacuum Gmbh ターボ分子ポンプ
JP2005337028A (ja) * 2004-05-24 2005-12-08 Shimadzu Corp ターボ分子ポンプ
JP4517724B2 (ja) * 2004-05-24 2010-08-04 株式会社島津製作所 ターボ分子ポンプ
WO2006027961A1 (fr) * 2004-09-10 2006-03-16 Boc Edowards Japan Limited Aube fixe d'une pompe turbomoléculaire
JP2014173468A (ja) * 2013-03-07 2014-09-22 Shimadzu Corp 真空ポンプ
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
WO2021140330A1 (fr) * 2020-01-09 2021-07-15 Edwards Limited Pompe à vide
EP3916235A1 (fr) * 2020-05-27 2021-12-01 Pfeiffer Vacuum Technology AG Procédé de fabrication d'une pompe à vide
JP2021188612A (ja) * 2020-05-27 2021-12-13 プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト 真空ポンプを製造するための方法

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