EP1096152A2 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

Info

Publication number
EP1096152A2
EP1096152A2 EP00122662A EP00122662A EP1096152A2 EP 1096152 A2 EP1096152 A2 EP 1096152A2 EP 00122662 A EP00122662 A EP 00122662A EP 00122662 A EP00122662 A EP 00122662A EP 1096152 A2 EP1096152 A2 EP 1096152A2
Authority
EP
European Patent Office
Prior art keywords
stator
pump
rotor
disks
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00122662A
Other languages
German (de)
English (en)
Other versions
EP1096152A3 (fr
EP1096152B1 (fr
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1096152A2 publication Critical patent/EP1096152A2/fr
Publication of EP1096152A3 publication Critical patent/EP1096152A3/fr
Application granted granted Critical
Publication of EP1096152B1 publication Critical patent/EP1096152B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of claim 1.
  • the active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are.
  • the rotor and stator disks generally each have an inner one Support ring, which is equipped with blades on the outside.
  • the shovels of the Rotor disks that rotate at high speed result in interaction with the stator blades the pump effect.
  • spacer rings which on outer circumference between the stator disks, they are spaced maintained that the rotor disks can rotate between them without contact.
  • Stator disks and spacer rings together form the stator through the inner wall the pump housing is centered and z. B. with springs additionally axially is pressed together in such a way that the stator disks and the spacer rings form a firm Form a network.
  • the stator disks are divided into two for reasons of assembly and thus consist of two half disks.
  • the object of the invention is to present a turbomolecular pump, where the number of components is clear compared to conventional designs is reduced. This should reduce manufacturing costs and assembly times as well the maintenance work is simplified. Avoiding leaks within the pump, which is due to the division of the stator disks, belongs also for the task. An improvement in the heat conduction from the inside of the pump externally, what is strived for is the safety of pump operation contributes.
  • the arrangement according to the invention increases the number of components of a turbomolecular pump significantly reduced. This can simplify production and easier, time-saving assembly is made possible. Compliance with the necessary Tolerances are made considerably easier by the reduced number of components.
  • the radial centering and the axial fixation of the stator washers given by the invention per se and require no further adjustment work.
  • the heat generated during operation of the pump can be transported to the outside due to a compact design and the avoidance of heat conduction inhibitors Transitions between the parts of conventional construction significantly improved become.
  • by attaching cooling or heating elements in the area of the stator elements a very effective temperature control of the whole Pump structure, but especially the pump-active parts, depending depending on the operating conditions of the pump.
  • the suction opening is 1 and Gas outlet opening designated 2.
  • the rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6.
  • the rotor disks are on the rotor shaft 4 10 attached with clamps 24.
  • the one-piece stator elements 12 comprise each a part 17 of the cylindrical housing, the stator disks 14 and the spacer rings 16, which fix the distance between the stator disks. Between the individual stator elements 14, which one on the other in the axial direction are layered, there are sealing elements 20.
  • the stator elements become axial held together by means of screw connections 18 and on the lower part 22 of the Pump attached.
  • the rotor disks 10 are by means of clamping devices 24 attached to the rotor shaft 4.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Steroid Compounds (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP00122662A 1999-10-28 2000-10-18 Pompe turbo-moléculaire Expired - Lifetime EP1096152B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19951954A DE19951954A1 (de) 1999-10-28 1999-10-28 Turbomolekularpumpe
DE19951954 1999-10-28

Publications (3)

Publication Number Publication Date
EP1096152A2 true EP1096152A2 (fr) 2001-05-02
EP1096152A3 EP1096152A3 (fr) 2001-10-17
EP1096152B1 EP1096152B1 (fr) 2008-04-23

Family

ID=7927176

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00122662A Expired - Lifetime EP1096152B1 (fr) 1999-10-28 2000-10-18 Pompe turbo-moléculaire

Country Status (5)

Country Link
US (1) US6461123B1 (fr)
EP (1) EP1096152B1 (fr)
JP (1) JP2001153087A (fr)
AT (1) ATE393314T1 (fr)
DE (2) DE19951954A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023200A1 (fr) * 2008-08-28 2010-03-04 Oerlikon Leybold Vacuum Gmbh Ensemble stator-rotor pour une pompe à vide ainsi que pompe à vide
EP2896837A2 (fr) 2014-01-21 2015-07-22 Pfeiffer Vacuum Gmbh Procédé de fabrication d'un rotor pour une pompe à vide et rotor pour une pompe à vide

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
WO2012165105A1 (fr) * 2011-06-03 2012-12-06 エドワーズ株式会社 Pompe à vide
US9512853B2 (en) * 2013-03-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US9512848B2 (en) * 2011-09-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9083212B2 (en) * 2012-09-11 2015-07-14 Concepts Eti, Inc. Overhung turbine and generator system with turbine cartridge
CN114593075B (zh) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 一种分子泵

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168978A (en) * 1961-08-04 1965-02-09 Snecma Turbomolecular vacuum pump

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH618893A5 (fr) * 1977-04-29 1980-08-29 Buehler Ag Geb
US4562368A (en) * 1982-05-26 1985-12-31 Board Of Regents Brush mechanism for a homopolar generator
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS61275594A (ja) * 1985-05-29 1986-12-05 Nippon Soken Inc タ−ボ分子ポンプ
JPS61283794A (ja) * 1985-06-10 1986-12-13 Nippon Soken Inc タ−ボ分子ポンプ
JPS62173594U (fr) * 1986-03-22 1987-11-04
JPS63227991A (ja) * 1987-03-13 1988-09-22 Mitsubishi Electric Corp タ−ボ分子ポンプ
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
JPH05141389A (ja) * 1991-11-15 1993-06-08 Vacuum Prod Kk 真空ポンプ
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold Ag Reibungsvakuumpumpe mit Zwischeneinlaß
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
JP3400924B2 (ja) * 1997-03-05 2003-04-28 東芝テック株式会社 電動ポンプ
JP3452468B2 (ja) * 1997-08-15 2003-09-29 株式会社荏原製作所 ターボ分子ポンプ
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
FR2776029B1 (fr) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel Pompe turbomoleculaire
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168978A (en) * 1961-08-04 1965-02-09 Snecma Turbomolecular vacuum pump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023200A1 (fr) * 2008-08-28 2010-03-04 Oerlikon Leybold Vacuum Gmbh Ensemble stator-rotor pour une pompe à vide ainsi que pompe à vide
US8790070B2 (en) 2008-08-28 2014-07-29 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
EP2896837A2 (fr) 2014-01-21 2015-07-22 Pfeiffer Vacuum Gmbh Procédé de fabrication d'un rotor pour une pompe à vide et rotor pour une pompe à vide
DE102014100622A1 (de) 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe

Also Published As

Publication number Publication date
US6461123B1 (en) 2002-10-08
JP2001153087A (ja) 2001-06-05
DE50015120D1 (de) 2008-06-05
EP1096152A3 (fr) 2001-10-17
DE19951954A1 (de) 2001-05-03
EP1096152B1 (fr) 2008-04-23
ATE393314T1 (de) 2008-05-15

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