EP1096152A2 - Turbo molecular pump - Google Patents

Turbo molecular pump Download PDF

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Publication number
EP1096152A2
EP1096152A2 EP00122662A EP00122662A EP1096152A2 EP 1096152 A2 EP1096152 A2 EP 1096152A2 EP 00122662 A EP00122662 A EP 00122662A EP 00122662 A EP00122662 A EP 00122662A EP 1096152 A2 EP1096152 A2 EP 1096152A2
Authority
EP
European Patent Office
Prior art keywords
stator
pump
rotor
disks
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00122662A
Other languages
German (de)
French (fr)
Other versions
EP1096152B1 (en
EP1096152A3 (en
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1096152A2 publication Critical patent/EP1096152A2/en
Publication of EP1096152A3 publication Critical patent/EP1096152A3/en
Application granted granted Critical
Publication of EP1096152B1 publication Critical patent/EP1096152B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of claim 1.
  • the active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are.
  • the rotor and stator disks generally each have an inner one Support ring, which is equipped with blades on the outside.
  • the shovels of the Rotor disks that rotate at high speed result in interaction with the stator blades the pump effect.
  • spacer rings which on outer circumference between the stator disks, they are spaced maintained that the rotor disks can rotate between them without contact.
  • Stator disks and spacer rings together form the stator through the inner wall the pump housing is centered and z. B. with springs additionally axially is pressed together in such a way that the stator disks and the spacer rings form a firm Form a network.
  • the stator disks are divided into two for reasons of assembly and thus consist of two half disks.
  • the object of the invention is to present a turbomolecular pump, where the number of components is clear compared to conventional designs is reduced. This should reduce manufacturing costs and assembly times as well the maintenance work is simplified. Avoiding leaks within the pump, which is due to the division of the stator disks, belongs also for the task. An improvement in the heat conduction from the inside of the pump externally, what is strived for is the safety of pump operation contributes.
  • the arrangement according to the invention increases the number of components of a turbomolecular pump significantly reduced. This can simplify production and easier, time-saving assembly is made possible. Compliance with the necessary Tolerances are made considerably easier by the reduced number of components.
  • the radial centering and the axial fixation of the stator washers given by the invention per se and require no further adjustment work.
  • the heat generated during operation of the pump can be transported to the outside due to a compact design and the avoidance of heat conduction inhibitors Transitions between the parts of conventional construction significantly improved become.
  • by attaching cooling or heating elements in the area of the stator elements a very effective temperature control of the whole Pump structure, but especially the pump-active parts, depending depending on the operating conditions of the pump.
  • the suction opening is 1 and Gas outlet opening designated 2.
  • the rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6.
  • the rotor disks are on the rotor shaft 4 10 attached with clamps 24.
  • the one-piece stator elements 12 comprise each a part 17 of the cylindrical housing, the stator disks 14 and the spacer rings 16, which fix the distance between the stator disks. Between the individual stator elements 14, which one on the other in the axial direction are layered, there are sealing elements 20.
  • the stator elements become axial held together by means of screw connections 18 and on the lower part 22 of the Pump attached.
  • the rotor disks 10 are by means of clamping devices 24 attached to the rotor shaft 4.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Steroid Compounds (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

The turbo molecular pump has rotor discs (10) and stator discs (14) stacked in alternation within a cylindrical pump housing, cooperating for providing a pump effect. Each stator disc has a distance ring (16) which determines the distance between adjacent stator discs, with part (17) of the cylindrical housing forming an integral stator element (12). The rotor discs are attached to a rotor shaft (4) via clamp elements (24).

Description

Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a turbomolecular pump according to the preamble of claim 1.

Die aktiven Pumpelemente einer Turbomolekularpumpe bestehen aus mit Schaufeln versehenen Rotor- und Statorscheiben, die abwechselnd hintereinander angeordnet sind. Die Rotor- und Statorscheiben weisen im allgemeinen jeweils einen inneren Tragring auf, der auf der Außenseite mit Schaufeln bestückt ist. Die Schaufeln der Rotorscheiben, welche mit hoher Geschwindigkeit umlaufen, ergeben im Zusammenwirken mit den Statorschaufeln den Pumpeffekt. Durch Distanzringe, welche am äußeren Umfang zwischen den Statorscheiben liegen, werden diese so auf Abstand gehalten, dass die Rotorscheiben zwischen ihnen berührungsfrei rotieren können. Statorscheiben und Distanzringe bilden so gemeinsam den Stator, der durch die Innenwand des Pumpengehäuses zentriert wird und z. B. mit Federn zusätzlich axial so zusammengedrückt wird, dass die Statorscheiben und die Distanzringe einen festen Verbund bilden. Die Statorscheiben sind aus Gründen der Montage zweigeteilt und bestehen somit aus zwei Halbscheiben.The active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are. The rotor and stator disks generally each have an inner one Support ring, which is equipped with blades on the outside. The shovels of the Rotor disks that rotate at high speed result in interaction with the stator blades the pump effect. By spacer rings, which on outer circumference between the stator disks, they are spaced maintained that the rotor disks can rotate between them without contact. Stator disks and spacer rings together form the stator through the inner wall the pump housing is centered and z. B. with springs additionally axially is pressed together in such a way that the stator disks and the spacer rings form a firm Form a network. The stator disks are divided into two for reasons of assembly and thus consist of two half disks.

Diese herkömmliche Art einer Konstruktion von Turbomotekularpumpen ist jedoch mit einer Reihe von Nachteilen behaftet, welche zum großen Teil auf die hohe Anzahl der Bauteile zurückzuführen ist. Als Folge entstehen hohe Fertigungskosten und lange Montagezeiten, die sich wiederum auf die Reparatur- und Wartungsarbeiten nachteilig auswirken. Die exakte Einhaltung von Toleranzen, welche für einen sicheren Betrieb einer Turbomolekularpumpe notwendig sind, erfordert mit steigende Anzahl von Bauteilen einen extrem hohen Aufwand. Die radiale Zentnerung und die axiale Fixierung der Statorscheiben bedeuten zusätzliche Justierarbeiten. Die Tatsache, dass die Statorscheiben zum Zwecke der Montage zweigeteilt sind, zieht weitere Unsicherheiten bei den Toleranzen mit sich und bewirkt vor allem zusätzliche Undichtigkeiten innerhalb der Pumpe. Dadurch werden störende Rückströmungen ermöglicht, die die Wirksamkeit der Pumpe verringern. However, this conventional type of construction of turbo-molecular pumps is common a number of disadvantages, largely due to the high number of the components is due. As a result, there are high manufacturing costs and long Assembly times, which in turn affect the repair and maintenance work adversely affect. The exact observance of tolerances, which for a safe Operation of a turbomolecular pump are necessary with increasing numbers of components is extremely expensive. The radial centering and the Axial fixation of the stator disks means additional adjustment work. The fact, the fact that the stator disks are divided in two for the purpose of assembly, draws more Uncertainties in the tolerances and, above all, causes additional leaks inside the pump. This enables disruptive backflows which reduce the effectiveness of the pump.

Die Erfindung hat sich zur Aufgabe gestellt, eine Turbomolekularpumpe vorzustellen, bei der die Anzahl der Bauteile gegenüber herkömmlichen Konstruktionen deutlich reduziert ist. Dadurch sollen Fertigungskosten und Montagezeiten verringert sowie die Wartungsarbeiten vereinfacht werden. Vermeidung von Undichtigkeiten innerhalb der Pumpe, welche durch die Zweiteilung der Statorscheiben bedingt sind, gehört ebenfalls zur Aufgabenstellung. Eine Verbesserung der Wärmeleitung vom Pumpeninneren nach außen wird angestrebt, was zur Sicherheit des Pumpenbetriebs beiträgt.The object of the invention is to present a turbomolecular pump, where the number of components is clear compared to conventional designs is reduced. This should reduce manufacturing costs and assembly times as well the maintenance work is simplified. Avoiding leaks within the pump, which is due to the division of the stator disks, belongs also for the task. An improvement in the heat conduction from the inside of the pump externally, what is strived for is the safety of pump operation contributes.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 ― 4 stellen weitere Ausgestaltungsformen der Erfindung dar.The task is characterized by the characterizing features of the first claim solved. Claims 2-4 represent further embodiments of the invention.

Durch die erfindungsgemäße Anordnung wird die Anzahl der Bauteile einer Turbomolekularpumpe erheblich verringert. Dadurch kann die Fertigung vereinfacht und eine leichtere zeitsparende Montage ermöglicht werden. Die Einhaltung der notwendigen Toleranzen wird durch die reduzierte Anzahl von Bauteilen wesentlich erleichtert. Die radiale Zentrierung und die axiale Fixierung der Statorscheiben werden durch die Erfindung an sich vorgegeben und bedürfen keiner weiteren Justierarbeit. Der Transport der beim Betrieb der Pumpe entstehenden Wärme nach außen kann durch eine kompakte Bauweise und durch die Vermeidung von wärmeleitungshemmenden Übergängen zwischen den Teilen herkömmlicher Bauweise erheblich verbessert werden. Darüber hinaus kann durch Anbringen von Kühl- oder Heizelementen im Bereich der Statorelemente eine sehr wirksame Temperaturregelung des gesamten Pumpenaufbaues, besonders jedoch der pumpaktiven Teile, in Abhängigkeit von den Betriebsbedingungen der Pumpe erfolgen.The arrangement according to the invention increases the number of components of a turbomolecular pump significantly reduced. This can simplify production and easier, time-saving assembly is made possible. Compliance with the necessary Tolerances are made considerably easier by the reduced number of components. The radial centering and the axial fixation of the stator washers given by the invention per se and require no further adjustment work. The heat generated during operation of the pump can be transported to the outside due to a compact design and the avoidance of heat conduction inhibitors Transitions between the parts of conventional construction significantly improved become. In addition, by attaching cooling or heating elements in the area of the stator elements a very effective temperature control of the whole Pump structure, but especially the pump-active parts, depending depending on the operating conditions of the pump.

Wenn man die Rotorscheiben durch Klemmvorrichtungen einzeln nach einander auf der Welle befestigt und nicht, wie seither, als Scheibenpaket zusammen aufschrumpft oder aus dem Vollen erstellt, kann man die Statorbauteile als ganze Teile montieren, und sie müssen nicht vorher in der Mitte geteilt werden. Dadurch werden zusätzliche Undichtigkeiten innerhalb der Pumpe und somit störende Rückströmungen vermieden. If you open the rotor disks one by one by clamping devices attached to the shaft and not, as has been the case since, shrink-wrapped together or created from the solid, you can the stator components as whole parts mount, and they do not need to be divided in the middle beforehand. This will additional leaks within the pump and thus disturbing backflows avoided.

Anhand der Abbildung soll die Erfindung an einem Beispiel näher erläutert werden.Based on the figure, the invention will be explained in more detail using an example.

Bei der dargestellten Turbomolekularpumpe ist die Ansaugöffnung mit 1 und die Gasaustrittsöffnung mit 2 bezeichnet. Die Rotorwelle 4 ist in Lagern 8 und 9 fixiert und wird durch den Motor 6 angetrieben. Auf der Rotorwelle 4 sind die Rotorscheiben 10 mit Klemmvorrichtungen 24 befestigt. Die einstückigen Statorelemente 12 umfassen jeweils einen Teil 17 des zylindrischen Gehäuses, die Statorscheiben 14 sowie die Distanzringe 16, welche den Abstand zwischen den Statorscheiben fixieren. Zwischen den einzelnen Statorelementen 14, welche in axialer Richtung aufeinander geschichtet sind, befinden sich Dichtelemente 20. Die Statorelemente werden axial mit Hilfe von Verschraubungen 18 zusammen gehalten und auf dem Unterteil 22 der Pumpe befestigt. Die Rotorscheiben 10 sind mit Hilfe von Klemmvorrichtungen 24 auf der Rotorwelle 4 befestigt.In the turbomolecular pump shown, the suction opening is 1 and Gas outlet opening designated 2. The rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6. The rotor disks are on the rotor shaft 4 10 attached with clamps 24. The one-piece stator elements 12 comprise each a part 17 of the cylindrical housing, the stator disks 14 and the spacer rings 16, which fix the distance between the stator disks. Between the individual stator elements 14, which one on the other in the axial direction are layered, there are sealing elements 20. The stator elements become axial held together by means of screw connections 18 and on the lower part 22 of the Pump attached. The rotor disks 10 are by means of clamping devices 24 attached to the rotor shaft 4.

Claims (4)

Turbomolekularpumpe mit Rotor- (10) und Statorscheiben (14), welche abwechselnd hintereinander in einem zylindrischen Gehäuse angeordnet sind und durch ihr Zusammenwirken einen Pumpeffekt erzeugen, dadurch gekennzeichnet, dass jeweils eine Statorscheibe (14), ein Distanzring (16), welcher den Abstand zwischen den Statorscheiben fixiert, und ein Teil (17) des zylindrischen Gehäuses ein einstückiges Statorelement (12) bilden.Turbomolecular pump with rotor (10) and stator disks (14), which alternately are arranged one behind the other in a cylindrical housing and through their interaction produce a pumping effect, characterized in that each have a stator disc (14), a spacer ring (16) which defines the distance between fixed the stator and a part (17) of the cylindrical housing form an integral stator element (12). Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass zwischen den einzelnen Statorelementen (12) Dichtringe (20) angebracht sind.Turbomolecular pump according to claim 1, characterized in that between the individual stator elements (12) sealing rings (20) are attached. Turbomolekularpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die einzelnen Statorelemente (12) durch Verschraubungen (18) zusammen gehalten werden.Turbomolecular pump according to claim 1 or 2, characterized in that the individual stator elements (12) are held together by screw connections (18) become. Turbomolekularpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die Rotorscheiben (10) mit Hilfe von Klemmvorrichtungen (24) auf der Rotorwelle (4) befestigt sind.Turbomolecular pump according to one of the preceding claims, characterized in that that the rotor disks (10) with the aid of clamping devices (24) are attached to the rotor shaft (4).
EP00122662A 1999-10-28 2000-10-18 Turbo molecular pump Expired - Lifetime EP1096152B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19951954 1999-10-28
DE19951954A DE19951954A1 (en) 1999-10-28 1999-10-28 Turbomolecular pump

Publications (3)

Publication Number Publication Date
EP1096152A2 true EP1096152A2 (en) 2001-05-02
EP1096152A3 EP1096152A3 (en) 2001-10-17
EP1096152B1 EP1096152B1 (en) 2008-04-23

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ID=7927176

Family Applications (1)

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EP00122662A Expired - Lifetime EP1096152B1 (en) 1999-10-28 2000-10-18 Turbo molecular pump

Country Status (5)

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US (1) US6461123B1 (en)
EP (1) EP1096152B1 (en)
JP (1) JP2001153087A (en)
AT (1) ATE393314T1 (en)
DE (2) DE19951954A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023200A1 (en) * 2008-08-28 2010-03-04 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
EP2896837A2 (en) 2014-01-21 2015-07-22 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (en) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbo molecular pump
DE10331932B4 (en) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbo molecular pump
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE102008058149A1 (en) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pump, has rotor element arranged in pump housing, and stator rings surrounding rotor element, where rings exhibit attachment piece extending in longitudinal direction such that adjacent stator ring is arranged within piece
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
TWI424121B (en) * 2010-12-10 2014-01-21 Prosol Corp Turbo molecular pump with improved blade structures
WO2012165105A1 (en) * 2011-06-03 2012-12-06 エドワーズ株式会社 Vacuum pump
US9512848B2 (en) * 2011-09-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
US9512853B2 (en) * 2013-03-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9083212B2 (en) * 2012-09-11 2015-07-14 Concepts Eti, Inc. Overhung turbine and generator system with turbine cartridge
CN114593075B (en) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 Molecular pump

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023200A1 (en) * 2008-08-28 2010-03-04 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
US8790070B2 (en) 2008-08-28 2014-07-29 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
EP2896837A2 (en) 2014-01-21 2015-07-22 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump
DE102014100622A1 (en) 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump

Also Published As

Publication number Publication date
DE50015120D1 (en) 2008-06-05
EP1096152B1 (en) 2008-04-23
US6461123B1 (en) 2002-10-08
JP2001153087A (en) 2001-06-05
EP1096152A3 (en) 2001-10-17
DE19951954A1 (en) 2001-05-03
ATE393314T1 (en) 2008-05-15

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