JPS62197793U - - Google Patents
Info
- Publication number
- JPS62197793U JPS62197793U JP8668186U JP8668186U JPS62197793U JP S62197793 U JPS62197793 U JP S62197793U JP 8668186 U JP8668186 U JP 8668186U JP 8668186 U JP8668186 U JP 8668186U JP S62197793 U JPS62197793 U JP S62197793U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- molecular pump
- pump device
- rotating body
- turbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図はこの考案の一実施例によるターボ分子
ポンプ装置を示す断面図、第２図はこの考案の他
の実施例によるターボ分子ポンプ装置を示す断面
図、第３図は従来のターボ分子ポンプ装置を示す
断面図である。
図において、１はロータ翼、２はステータ翼、
３はケーシング、４は電動機の回転子、５は電動
機のステータ、１１ａ，１１ｂは気体、１２は球
面型スパイラルみぞ軸受、１４はタツチダウン軸
受、１５は回転軸、１６はフランジ、１９ａ，１
９ｂは反撥型磁気軸受である。なお、各図中同一
符号は同一または相当部分を示す。
FIG. 1 is a cross-sectional view showing a turbo-molecular pump device according to one embodiment of this invention, FIG. 2 is a cross-sectional view showing a turbo-molecular pump device according to another embodiment of this invention, and FIG. 3 is a conventional turbo-molecular pump. FIG. 2 is a cross-sectional view showing the device. In the figure, 1 is a rotor blade, 2 is a stator blade,
3 is a casing, 4 is a rotor of the electric motor, 5 is a stator of the electric motor, 11a, 11b are gases, 12 is a spherical spiral groove bearing, 14 is a touch-down bearing, 15 is a rotating shaft, 16 is a flange, 19a, 1
9b is a repulsion type magnetic bearing. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
ータ翼と対向配置され回転時に流体を吸引するロ
ータ翼を有する回転体、上記回転体をその下部で
支承する球面型スパイラルみぞ軸受で形成した下
部軸受、および上記回転体をその上部で支承する
タツチダウン軸受を有する上部軸受を備えたター
ボ分子ポンプ装置において、上記ケーシングのフ
ランジ部に上記タツチダウン軸受を配置したこと
を特徴とするターボ分子ポンプ装置。 (2) 上部軸受は、回転体の半径方向の振れを防
止する磁気軸受を有する実用新案登録請求の範囲
第１項記載のターボ分子ポンプ装置。 (3) 磁気軸受は、反撥型磁気軸受である実用新
案登録請求の範囲第２項記載のターボ分子ポンプ
装置。[Claims for Utility Model Registration] (1) A casing having stator blades, a rotating body having rotor blades arranged opposite to the stator blades and sucking fluid during rotation, and a spherical spiral groove supporting the rotating body at its lower part. A turbo molecular pump device comprising a lower bearing formed of a bearing and an upper bearing having a touchdown bearing supporting the rotating body at the upper portion thereof, characterized in that the touchdown bearing is disposed in a flange portion of the casing. Molecular pump device. (2) The turbo-molecular pump device according to claim 1, wherein the upper bearing has a magnetic bearing that prevents the rotating body from wobbling in the radial direction. (3) The turbo-molecular pump device according to claim 2, wherein the magnetic bearing is a repulsion type magnetic bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8668186U JPS62197793U (en) | 1986-06-05 | 1986-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8668186U JPS62197793U (en) | 1986-06-05 | 1986-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197793U true JPS62197793U (en) | 1987-12-16 |
Family
ID=30943213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8668186U Pending JPS62197793U (en) | 1986-06-05 | 1986-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197793U (en) |
-
1986
- 1986-06-05 JP JP8668186U patent/JPS62197793U/ja active Pending
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