JPS6192791U - - Google Patents
Info
- Publication number
- JPS6192791U JPS6192791U JP17672084U JP17672084U JPS6192791U JP S6192791 U JPS6192791 U JP S6192791U JP 17672084 U JP17672084 U JP 17672084U JP 17672084 U JP17672084 U JP 17672084U JP S6192791 U JPS6192791 U JP S6192791U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- turbo
- molecular pump
- axial direction
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は従来の５軸制御形ターボ分子ポンプの
縦断面図、第２図は従来の玉軸受方式のターボ分
子ポンプの縦断面図、第３図は本考案の一実施例
を示す縦断面図である。
１…つり鐘ロータ、２…動翼、３…ケーシング
、４…静翼、５…インナーロータ、６…駆動モー
タ、７…吸込口、８…吐出口、９…ラジアル軸受
、１０…スラスト軸受、１０ａ…スラストヨーク
、１０ｂ…下ステータ、１０ｃ…上ステータ、１
１…ラジアル変位センサ、１２…スラスト変位セ
ンサ、１３…玉軸受、１４…ピボツト軸、１５…
大気ダンパ軸受、１６…端板駆動モータ。
Figure 1 is a vertical cross-sectional view of a conventional five-axis controlled turbo molecular pump, Figure 2 is a vertical cross-sectional view of a conventional ball bearing type turbo molecular pump, and Figure 3 is a vertical cross-sectional view showing an embodiment of the present invention. It is a diagram. DESCRIPTION OF SYMBOLS 1... Hanging rotor, 2... Moving blade, 3... Casing, 4... Stationary blade, 5... Inner rotor, 6... Drive motor, 7... Suction port, 8... Discharge port, 9... Radial bearing, 10... Thrust bearing, 10a...Thrust yoke, 10b...Lower stator, 10c...Upper stator, 1
DESCRIPTION OF SYMBOLS 1... Radial displacement sensor, 12... Thrust displacement sensor, 13... Ball bearing, 14... Pivot shaft, 15...
Atmospheric damper bearing, 16...end plate drive motor.
Claims (1)
、かつピボツト形軸受に支承されたロータ外周面
に、それぞれ軸方向に多段に設けた静翼と動翼を
備えるターボ分子ポンプにおいて、つり鏡ロータ
上部に大気ダンパ方式のピボツト軸受、外周下部
に軸方向に作用する２分割以上した磁気軸受を備
えたことを特徴とするターボ分子ポンプ。 ２ 実用新案登録請求の範囲第１項において磁気
軸受を３分割以上にして軸方向と径方向兼用の軸
受を設けたことを特徴とするターボ分子ポンプ。[Claims for Utility Model Registration] 1. A turbo-molecular pump comprising stator vanes and rotor blades provided in multiple stages in the axial direction on a casing surface and the outer circumferential surface of a rotor housed within the casing and supported by a pivot bearing. A turbo-molecular pump characterized in that it is equipped with an atmospheric damper type pivot bearing on the upper part of the hanging mirror rotor, and a magnetic bearing divided into two or more parts that acts in the axial direction on the lower part of the outer periphery. 2. A turbo-molecular pump as set forth in claim 1 of the utility model registration claim, characterized in that the magnetic bearing is divided into three or more parts to provide a bearing that can be used both in the axial direction and in the radial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17672084U JPS6192791U (en) | 1984-11-22 | 1984-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17672084U JPS6192791U (en) | 1984-11-22 | 1984-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6192791U true JPS6192791U (en) | 1986-06-16 |
Family
ID=30734313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17672084U Pending JPS6192791U (en) | 1984-11-22 | 1984-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6192791U (en) |
-
1984
- 1984-11-22 JP JP17672084U patent/JPS6192791U/ja active Pending
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