JPH0452996U - - Google Patents
Info
- Publication number
- JPH0452996U JPH0452996U JP9703890U JP9703890U JPH0452996U JP H0452996 U JPH0452996 U JP H0452996U JP 9703890 U JP9703890 U JP 9703890U JP 9703890 U JP9703890 U JP 9703890U JP H0452996 U JPH0452996 U JP H0452996U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic member
- casing
- turbo
- molecular pump
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係るターボ分子ポンプの全体
を示す断面図、第２図は同じく本考案におけるタ
ーボ分子ポンプの要部を示す断面図、第３図は従
来のターボ分子ポンプを示す断面図である。
１…ポンプケーシング、４…静翼、７…球面ス
パイラル溝軸受、１３…回転体、１４…動翼、２
１…回転軸、２２…第１のマグネツト、２３…第
１の円板状ホルダー、２４…第２の円板状ホルダ
ー、２５…第２のマグネツト。
Fig. 1 is a cross-sectional view showing the entire turbo-molecular pump according to the present invention, Fig. 2 is a cross-sectional view showing the main parts of the turbo-molecular pump according to the present invention, and Fig. 3 is a cross-sectional view showing a conventional turbo-molecular pump. It is. DESCRIPTION OF SYMBOLS 1... Pump casing, 4... Stationary blade, 7... Spherical spiral groove bearing, 13... Rotating body, 14... Moving blade, 2
DESCRIPTION OF SYMBOLS 1... Rotating shaft, 22... First magnet, 23... First disc-shaped holder, 24... Second disc-shaped holder, 25... Second magnet.
補正 平１．９．４
実用新案登録請求の範囲を次のように補正する
。Amendment 1991.9.4 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
軸線方向に多段に設けられた静翼をその内部に
有するケーシングと、このケーシング内に回転自
在に設けられグリース潤滑の球面スパイラル溝軸
受によつて下端部が軸支された回転軸と、この回
転軸上に固定され前記静翼の一部がその内側に臨
む動翼を有する回転体とを備え、前記回転軸の上
端部に磁極面が下方に露呈する第１の磁性部材を
設け、この磁性部材に対向する第２の磁性部材を
前記ケーシング内に固定し、この磁性部材と前記
第１の磁性部材との間に磁気空隙を形成したこと
を特徴とするターボ分子ポンプ。[Scope of Claim for Utility Model Registration] A casing having stator blades provided in multiple stages in the axial direction, and a lower end being pivotally supported by a grease-lubricated spherical spiral groove bearing rotatably provided within the casing. a rotating body fixed on the rotating shaft and having moving blades with a part of the stator vanes facing inside thereof, the first rotating body having a magnetic pole face exposed downward at the upper end of the rotating shaft; A turbo comprising: a magnetic member; a second magnetic member facing the magnetic member is fixed within the casing; and a magnetic gap is formed between the magnetic member and the first magnetic member. molecular pump.
Claims (1)
有するケーシングと、このケーシング内に回転自
在に設けられ球面スパイラル溝軸受によつて下端
部が軸支された回転軸と、この回転軸上に固定さ
れ前記静翼の一部がその内側に臨む動翼を有する
回転体とを備えたターボ分子ポンプにおいて、前
記回転軸の上端部に第１の磁性部材を設け、この
磁性部材に対向する第２の磁性部材を前記ケーシ
ング内に固定し、この磁性部材と前記第１の磁性
部材との間に磁気空隙を形成したことを特徴とす
るターボ分子ポンプ。 a casing having stator blades provided in multiple stages in the axial direction; a rotating shaft rotatably provided within the casing and having its lower end supported by a spherical spiral groove bearing; A turbo-molecular pump comprising a rotating body that is fixed and has rotor blades with a part of the stator vanes facing inside, a first magnetic member being provided at the upper end of the rotating shaft, and a first magnetic member facing the magnetic member. A turbo-molecular pump characterized in that a second magnetic member is fixed within the casing, and a magnetic gap is formed between this magnetic member and the first magnetic member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9703890U JPH0452996U (en) | 1990-09-13 | 1990-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9703890U JPH0452996U (en) | 1990-09-13 | 1990-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0452996U true JPH0452996U (en) | 1992-05-06 |
Family
ID=31837078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9703890U Pending JPH0452996U (en) | 1990-09-13 | 1990-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452996U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4995389A (en) * | 1973-01-19 | 1974-09-10 |
-
1990
- 1990-09-13 JP JP9703890U patent/JPH0452996U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4995389A (en) * | 1973-01-19 | 1974-09-10 |