JPH0252997U - - Google Patents
Info
- Publication number
- JPH0252997U JPH0252997U JP13220188U JP13220188U JPH0252997U JP H0252997 U JPH0252997 U JP H0252997U JP 13220188 U JP13220188 U JP 13220188U JP 13220188 U JP13220188 U JP 13220188U JP H0252997 U JPH0252997 U JP H0252997U
- Authority
- JP
- Japan
- Prior art keywords
- drum
- motor rotor
- rotating shaft
- shaft
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係るターボ分子ポンプを示す
断面図、第２図は従来のターボ分子ポンプを示す
断面図である。
１…ポンプケーシング、４…静翼、７…球面ス
パイラル溝軸受、１０…駆動機構、１１…モータ
ロータ、１２…モータロータ、２１…回転軸、２
２…凹部、２３…フランジ、２４…回転体、２５
…動翼、２６…ボルト、２７…凸部。
FIG. 1 is a sectional view showing a turbo-molecular pump according to the present invention, and FIG. 2 is a sectional view showing a conventional turbo-molecular pump. DESCRIPTION OF SYMBOLS 1...Pump casing, 4...Stator blade, 7...Spherical spiral groove bearing, 10...Drive mechanism, 11...Motor rotor, 12...Motor rotor, 21...Rotating shaft, 2
2... recess, 23... flange, 24... rotating body, 25
... Moving blade, 26... Bolt, 27... Convex part.
Claims (1)
有するポンプケーシングと、このポンプケーシン
グ内に回転自在に設けられた回転軸と、この回転
軸上に固定されたモータロータおよびこのモータ
ロータの周囲に設けられたモータステータからな
る駆動機構と、この駆動機構と同一の軸線上に設
けられ前記静翼の一部がその内側に臨む動翼を有
する回転体とを備え、この回転体を前記回転軸の
先端部がその底面中央部に嵌合するキヤツプ状の
ドラムによつて形成し、このドラムの底面外周部
に対接するフランジを前記回転軸の先端部に設け
、このフランジを締結部材によつて前記ドラムに
固定したことを特徴とするターボ分子ポンプ。 A pump casing having stator vanes provided in multiple stages in the axial direction, a rotating shaft rotatably provided within the pump casing, a motor rotor fixed on the rotating shaft, and a motor rotor provided around the motor rotor. A rotating body is provided on the same axis as the driving mechanism and has moving blades with a part of the stator vanes facing inside, and the rotating body is connected to the rotating shaft. The shaft is formed by a cap-shaped drum whose tip fits into the center of the bottom surface of the drum, and a flange is provided at the tip of the rotary shaft, the flange facing the outer periphery of the bottom surface of the drum. A turbo molecular pump characterized by being fixed to a drum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13220188U JPH0252997U (en) | 1988-10-07 | 1988-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13220188U JPH0252997U (en) | 1988-10-07 | 1988-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252997U true JPH0252997U (en) | 1990-04-17 |
Family
ID=31388947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13220188U Pending JPH0252997U (en) | 1988-10-07 | 1988-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252997U (en) |
-
1988
- 1988-10-07 JP JP13220188U patent/JPH0252997U/ja active Pending