JPH0250091U - - Google Patents
Info
- Publication number
- JPH0250091U JPH0250091U JP12666188U JP12666188U JPH0250091U JP H0250091 U JPH0250091 U JP H0250091U JP 12666188 U JP12666188 U JP 12666188U JP 12666188 U JP12666188 U JP 12666188U JP H0250091 U JPH0250091 U JP H0250091U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- rotating body
- casing
- boss
- moving blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図はこの考案の一実施例を示す断面図、第
２図は従来の実施例を示す断面図である。
図中、１はケーシング、１ｂはボス、２は吸入
口、３は回転体、６は吐出口、８は静翼、９は動
翼、１０はロータ、２００はボス、２００ａは軸
部である。なお、各図中同一符号は同一、または
相当部分を示す。
FIG. 1 is a sectional view showing an embodiment of this invention, and FIG. 2 is a sectional view showing a conventional embodiment. In the figure, 1 is a casing, 1b is a boss, 2 is an inlet, 3 is a rotating body, 6 is a discharge port, 8 is a stationary blade, 9 is a moving blade, 10 is a rotor, 200 is a boss, and 200a is a shaft part. . Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
下端には吐出口が夫々設けられたケーシング、こ
のケーシング内に軸方向に多段に設けられ静翼、
この静翼間に位置する動翼と、この動翼を外周に
設けたロータとを有する回転体、この回転体を駆
動する駆動源、上記ロータの下端を支承する球面
軸受、及び上記ロータ上端に軸心上に結合され、
上端が上記ボス部下面に近接する軸を備えたター
ボ分子ポンプ。 At the top end, there is an inlet with a boss formed in the center.
A casing with discharge ports provided at the lower end, stationary blades provided in multiple stages in the axial direction within this casing,
A rotating body having moving blades located between the stationary blades and a rotor having the moving blades provided on the outer periphery, a driving source for driving the rotating body, a spherical bearing supporting the lower end of the rotor, and a rotating body having the rotor at the upper end of the rotor. connected on the axis,
A turbo-molecular pump comprising a shaft whose upper end is close to the lower surface of the boss.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12666188U JPH0250091U (en) | 1988-09-27 | 1988-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12666188U JPH0250091U (en) | 1988-09-27 | 1988-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0250091U true JPH0250091U (en) | 1990-04-06 |
Family
ID=31378383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12666188U Pending JPH0250091U (en) | 1988-09-27 | 1988-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0250091U (en) |
-
1988
- 1988-09-27 JP JP12666188U patent/JPH0250091U/ja active Pending