JPH0246093U - - Google Patents
Info
- Publication number
- JPH0246093U JPH0246093U JP12589188U JP12589188U JPH0246093U JP H0246093 U JPH0246093 U JP H0246093U JP 12589188 U JP12589188 U JP 12589188U JP 12589188 U JP12589188 U JP 12589188U JP H0246093 U JPH0246093 U JP H0246093U
- Authority
- JP
- Japan
- Prior art keywords
- bell
- main shaft
- shaped impeller
- rotating main
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係るターボ分子ポンプ用ロー
タを具備するターボ分子ポンプの構造を示す断面
図、第２図はそのロータの断面図、第３図は従来
のターボ分子ポンプの構造を示す断面図である。
図中、１……ポンプケース、２……ロータ軸、
３……高周波モータ、４，５……ラジアル磁気軸
受、６……固定羽根、７……回転羽根、８……羽
根車、９，１０……径方向の間隙センサ、１１，
１２……非常時用のベアリング軸受、１３……ス
ラスト磁気軸受、１４……軸方向の間隙センサ。
Fig. 1 is a sectional view showing the structure of a turbomolecular pump equipped with a turbomolecular pump rotor according to the present invention, Fig. 2 is a sectional view of the rotor, and Fig. 3 is a sectional view showing the structure of a conventional turbomolecular pump. It is a diagram. In the figure, 1... pump case, 2... rotor shaft,
3... High frequency motor, 4, 5... Radial magnetic bearing, 6... Fixed blade, 7... Rotating blade, 8... Impeller, 9, 10... Radial gap sensor, 11,
12... Emergency bearing, 13... Thrust magnetic bearing, 14... Axial gap sensor.
Claims (1)
れた釣鐘形の羽根車を有する構造のターボ分子ポ
ンプ用ロータにおいて、該釣鐘形羽根車の上部に
前記回転主軸を所定量突出させたことを特徴とす
るターボ分子ポンプ用ロータの構造。 In a turbo-molecular pump rotor having a structure in which rotating blades are erected on the outer periphery and a bell-shaped impeller fixed to a rotating main shaft, the rotating main shaft is made to protrude by a predetermined amount from the upper part of the bell-shaped impeller. Features of the rotor structure for turbomolecular pumps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988125891U JP2509909Y2 (en) | 1988-09-26 | 1988-09-26 | Structure of rotor for turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988125891U JP2509909Y2 (en) | 1988-09-26 | 1988-09-26 | Structure of rotor for turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0246093U true JPH0246093U (en) | 1990-03-29 |
| JP2509909Y2 JP2509909Y2 (en) | 1996-09-04 |
Family
ID=31376899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988125891U Expired - Lifetime JP2509909Y2 (en) | 1988-09-26 | 1988-09-26 | Structure of rotor for turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2509909Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107285A (en) * | 1984-10-31 | 1986-05-26 | 財団法人鉄道総合技術研究所 | Display indication control system |
| JPS6371492U (en) * | 1986-10-28 | 1988-05-13 |
-
1988
- 1988-09-26 JP JP1988125891U patent/JP2509909Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107285A (en) * | 1984-10-31 | 1986-05-26 | 財団法人鉄道総合技術研究所 | Display indication control system |
| JPS6371492U (en) * | 1986-10-28 | 1988-05-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2509909Y2 (en) | 1996-09-04 |