JPH0261198U - - Google Patents
Info
- Publication number
- JPH0261198U JPH0261198U JP13975088U JP13975088U JPH0261198U JP H0261198 U JPH0261198 U JP H0261198U JP 13975088 U JP13975088 U JP 13975088U JP 13975088 U JP13975088 U JP 13975088U JP H0261198 U JPH0261198 U JP H0261198U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- stator
- blades
- blade
- multiple stages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係るターボ分子ポンプの静翼
及び動翼部分を示す断面図、第２図ａはターボ分
子ポンプの吸引側静翼の展開図、第２図ｂは同図
ａのＥ―Ｅ断面矢視図、第３図は従来の玉軸受を
用いたターボ分子ポンプの構造を示す縦断面図、
第４図はロータが傾いた状態を示す図である。
図中、１……ケーシング、２……静翼、３……
動翼、４……ロータ胴、５……ロータ軸、６……
リング状板体。
Fig. 1 is a sectional view showing the stator vane and rotor blade portion of the turbo-molecular pump according to the present invention, Fig. 2 a is a developed view of the suction-side stator vane of the turbo-molecular pump, and Fig. 2 b is the E of the same figure a. - E cross-sectional view as seen from the arrow; Figure 3 is a vertical cross-sectional view showing the structure of a turbomolecular pump using conventional ball bearings;
FIG. 4 is a diagram showing a state in which the rotor is tilted. In the figure, 1...Casing, 2...Stator blade, 3...
Moving blade, 4... Rotor body, 5... Rotor shaft, 6...
Ring-shaped plate.
Claims (1)
を有するステータを具備し、該ロータを磁気軸受
にて支承し、前記ロータを回転することにより前
記ステータの静翼間をロータの動翼が通過する構
造の磁気軸受型ターボ分子ポンプにおいて、前記
動翼と静翼のクリアランスを吸気側を排気側より
大きくしたことを特徴とする磁気軸受型ターボ分
子ポンプ。 The rotor is equipped with a rotor having multiple stages of moving blades and a stator having multiple stages of stator blades, the rotor is supported by a magnetic bearing, and by rotating the rotor, the moving blades of the rotor are moved between the stator blades of the stator. 1. A magnetic bearing type turbo-molecular pump having a structure in which the rotor blades and the stator blades pass through each other, wherein the clearance between the rotor blade and the stator blade is made larger on the intake side than on the exhaust side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13975088U JPH0640955Y2 (en) | 1988-10-26 | 1988-10-26 | Magnetic bearing type turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13975088U JPH0640955Y2 (en) | 1988-10-26 | 1988-10-26 | Magnetic bearing type turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0261198U true JPH0261198U (en) | 1990-05-07 |
| JPH0640955Y2 JPH0640955Y2 (en) | 1994-10-26 |
Family
ID=31403301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13975088U Expired - Lifetime JPH0640955Y2 (en) | 1988-10-26 | 1988-10-26 | Magnetic bearing type turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640955Y2 (en) |
-
1988
- 1988-10-26 JP JP13975088U patent/JPH0640955Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0640955Y2 (en) | 1994-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0261198U (en) | ||
| JPH0465992U (en) | ||
| JPH031297U (en) | ||
| JPH0323696U (en) | ||
| JPS63162990U (en) | ||
| JPS6192791U (en) | ||
| JPS6110994U (en) | turbo molecular pump | |
| JPH0252996U (en) | ||
| JPS63140196U (en) | ||
| JPH0617036Y2 (en) | Turbo molecular pump | |
| JPH0452996U (en) | ||
| JPS62153423U (en) | ||
| JPS6413295U (en) | ||
| JPH0213195U (en) | ||
| JPS5935690U (en) | vacuum pump vane | |
| JPH0452998U (en) | ||
| JPH0449697U (en) | ||
| JPH0246093U (en) | ||
| JPH0252998U (en) | ||
| JPH02112997U (en) | ||
| JPS6429290U (en) | ||
| JPS63126590U (en) | ||
| JPH041694U (en) | ||
| JPS62184192U (en) | ||
| JPS63151993U (en) |