JPH0213195U - - Google Patents
Info
- Publication number
- JPH0213195U JPH0213195U JP8788988U JP8788988U JPH0213195U JP H0213195 U JPH0213195 U JP H0213195U JP 8788988 U JP8788988 U JP 8788988U JP 8788988 U JP8788988 U JP 8788988U JP H0213195 U JPH0213195 U JP H0213195U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- control line
- outside
- exhaust pipe
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
図面は本考案の一実施例を示し、第１図は縦断
面図、第２図は斜視図である。
１……ハウジング、２１，２２……ロータ、３
１，３２……タービン翼、８１，８２……制御線
、１３……排気配管、１５……気密導入端子、１
８……排気口、５１１，５１２……ラジアル磁気
軸受、５２１，５２２……スラスト磁気軸受。
The drawings show an embodiment of the present invention, with FIG. 1 being a longitudinal sectional view and FIG. 2 being a perspective view. 1... Housing, 21, 2 2 ... Rotor, 3
1 , 3 2 ... Turbine blade, 8 1 , 8 2 ... Control line, 13 ... Exhaust pipe, 15 ... Airtight introduction terminal, 1
8...Exhaust port, 51 1 , 51 2 ...Radial magnetic bearing, 52 1 , 52 2 ...Thrust magnetic bearing.
Claims (1)
させてなる左右一対のロータを配し、両ロータと
対応する各ステータとの間にそれぞれ独立したタ
ービン翼を構成して、吸気したガスを並列排気し
た後、排気配管を通じて共通の排気口から外部へ
排出し得るようにしたものにおいて、前記ハウジ
ングに、外部から一方の磁気軸受に制御線を導入
するための気密導入端子を設け、この気密導入端
子より導入した制御線の一部を、前記排気配管を
通じて他方の磁気軸受に導いていることを特徴と
するターボ分子ポンプ。 A pair of left and right rotors suspended and supported by active magnetic bearings is placed inside the housing, and independent turbine blades are constructed between both rotors and the corresponding stators to exhaust the intake gas in parallel. After that, the housing can be discharged to the outside from a common exhaust port through an exhaust pipe, and the housing is provided with an airtight introduction terminal for introducing a control line from the outside to one of the magnetic bearings, and this airtight introduction terminal A turbo-molecular pump characterized in that a part of the control line introduced from the second side is guided to the other magnetic bearing through the exhaust pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8788988U JPH0213195U (en) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8788988U JPH0213195U (en) | 1988-06-30 | 1988-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0213195U true JPH0213195U (en) | 1990-01-26 |
Family
ID=31312478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8788988U Pending JPH0213195U (en) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213195U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015117697A (en) * | 2013-12-18 | 2015-06-25 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum pump |
-
1988
- 1988-06-30 JP JP8788988U patent/JPH0213195U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015117697A (en) * | 2013-12-18 | 2015-06-25 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum pump |