JPS63100692U - - Google Patents
Info
- Publication number
- JPS63100692U JPS63100692U JP19576686U JP19576686U JPS63100692U JP S63100692 U JPS63100692 U JP S63100692U JP 19576686 U JP19576686 U JP 19576686U JP 19576686 U JP19576686 U JP 19576686U JP S63100692 U JPS63100692 U JP S63100692U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust hole
- drive unit
- unit housing
- housing
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図と第２図は、本考案の一実施例を示すタ
ーボ分子ポンプの各要部の概略断面図である。第
３図は一般的なターボ分子ポンプの構成を示す要
部の概略断面図である。
１……ベース、２……駆動部ハウジング、３…
…ロータシヤフト、４，５……モータ、６，７…
…ベアリング、８……ロータ、９……タンク、１
０……排気口、１１……導入通路、１２……排気
孔、１３……プラグ、Ｍ……機械室、Ｐ……ポン
プ室。
1 and 2 are schematic cross-sectional views of the main parts of a turbo-molecular pump showing an embodiment of the present invention. FIG. 3 is a schematic cross-sectional view of essential parts showing the configuration of a general turbo-molecular pump. 1...Base, 2...Drive unit housing, 3...
...Rotor shaft, 4, 5...Motor, 6,7...
...Bearing, 8...Rotor, 9...Tank, 1
0...Exhaust port, 11...Introduction passage, 12...Exhaust hole, 13...Plug, M...Machine room, P...Pump room.
Claims (1)
に、この駆動部ハウジングを貫通して該ハウジン
グ内の空間を外側のポンプ室に連通させる排気孔
を設け、かつこの排気孔を開・閉切換可能に構成
したことを特徴とするターボ分子ポンプ。 The drive unit housing that houses the rotor drive mechanism is provided with an exhaust hole that passes through the drive unit housing and communicates the space inside the housing with the pump chamber outside, and the exhaust hole can be switched between open and closed. A turbo molecular pump that is characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19576686U JPS63100692U (en) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19576686U JPS63100692U (en) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63100692U true JPS63100692U (en) | 1988-06-30 |
Family
ID=31153957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19576686U Pending JPS63100692U (en) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100692U (en) |
-
1986
- 1986-12-18 JP JP19576686U patent/JPS63100692U/ja active Pending