JPS62114195U - - Google Patents
Info
- Publication number
- JPS62114195U JPS62114195U JP18467685U JP18467685U JPS62114195U JP S62114195 U JPS62114195 U JP S62114195U JP 18467685 U JP18467685 U JP 18467685U JP 18467685 U JP18467685 U JP 18467685U JP S62114195 U JPS62114195 U JP S62114195U
- Authority
- JP
- Japan
- Prior art keywords
- oil bearing
- oil
- rotor
- pump chamber
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の一実施例を示す一部を破断し
たターボ分子ポンプの断面図であり、第２図はそ
の要部の拡大断面図である。第３図は改良実施例
に係るターボ分子ポンプの一部を示す拡大断面図
である。第４図は従来例を示すターボ分子ポンプ
の要部拡大断面図である。
Ｐ……ポンプ室、Ｍ……機械室、Ｒ……ロータ
、Ｓ……駆動軸、１……ポンプ本体、２……オイ
ルタンク、３……不活性ガス供給手段、４……ポ
ンプベース、５……モータハウジング、９……オ
イル軸受、１２……押え板、２０……ガス供給系
路、２７……供給口、２９……オイル通路、３０
……給油口。
FIG. 1 is a partially cutaway sectional view of a turbomolecular pump showing an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of the main parts thereof. FIG. 3 is an enlarged sectional view showing a part of a turbomolecular pump according to an improved embodiment. FIG. 4 is an enlarged sectional view of a main part of a conventional turbo-molecular pump. P...Pump room, M...Machine room, R...Rotor, S...Drive shaft, 1...Pump body, 2...Oil tank, 3...Inert gas supply means, 4...Pump base, 5... Motor housing, 9... Oil bearing, 12... Holding plate, 20... Gas supply line, 27... Supply port, 29... Oil passage, 30
...Refueling port.
Claims (1)
る一方、機械室内で該駆動軸をオイル軸受により
軸支し、かつポンプ室に隣接する側のオイル軸受
に不活性ガスを供給して該オイル軸受に給油され
る油のポンプ室への漏出を防止するようにしたタ
ーボ分子ポンプにおいて、前記オイル軸受に対す
る不活性ガスの供給口をロータ側から該オイル軸
受に向けて設けるとともに、このオイル軸受に対
する給油口を反ロータ側に設けたことを特徴とす
るターボ分子ポンプ。 While the rotor is fixed to a drive shaft extending into the pump chamber, the drive shaft is supported by an oil bearing in the machine room, and an inert gas is supplied to the oil bearing adjacent to the pump chamber to support the oil bearing. In a turbo molecular pump configured to prevent oil supplied to the oil bearing from leaking into the pump chamber, an inert gas supply port for the oil bearing is provided from the rotor side toward the oil bearing, and the oil supply port for the oil bearing is provided. A turbo molecular pump characterized by having a mouth on the side opposite to the rotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18467685U JPS62114195U (en) | 1985-11-30 | 1985-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18467685U JPS62114195U (en) | 1985-11-30 | 1985-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62114195U true JPS62114195U (en) | 1987-07-20 |
Family
ID=31132575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18467685U Pending JPS62114195U (en) | 1985-11-30 | 1985-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62114195U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5874898A (en) * | 1981-10-29 | 1983-05-06 | Shimadzu Corp | Molecular turbo-pump |
| JPS5910353U (en) * | 1982-07-08 | 1984-01-23 | 岡部 謙司 | Extendable excavator boom |
-
1985
- 1985-11-30 JP JP18467685U patent/JPS62114195U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5874898A (en) * | 1981-10-29 | 1983-05-06 | Shimadzu Corp | Molecular turbo-pump |
| JPS5910353U (en) * | 1982-07-08 | 1984-01-23 | 岡部 謙司 | Extendable excavator boom |