JPS62114197U - - Google Patents

Info

Publication number
JPS62114197U
JPS62114197U JP1985197023U JP19702385U JPS62114197U JP S62114197 U JPS62114197 U JP S62114197U JP 1985197023 U JP1985197023 U JP 1985197023U JP 19702385 U JP19702385 U JP 19702385U JP S62114197 U JPS62114197 U JP S62114197U
Authority
JP
Japan
Prior art keywords
pump
gas
room
line
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985197023U
Other languages
Japanese (ja)
Other versions
JPH06630Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985197023U priority Critical patent/JPH06630Y2/en
Publication of JPS62114197U publication Critical patent/JPS62114197U/ja
Application granted granted Critical
Publication of JPH06630Y2 publication Critical patent/JPH06630Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す一部を破断し
たターボ分子ポンプの断面図であり、第２図はそ
の要部の拡大断面図である。第３図は改良実施例
に係るターボ分子ポンプの一部を示す拡大断面図
である。第４図は従来例を示すターボ分子ポンプ
の要部拡大断面図である。 Ｐ……ポンプ室、Ｍ……機械室、１……ポンプ
本体、２……オイルタンク、３……不活性ガス供
給手段、４……ポンプベース、５……モータハウ
ジング、９……オイル軸受、１２……押え板、１
３……軸貫通部、２４……ガス流入系路、２４Ａ
……始端、２４ｂ……終端、２７……切換弁。 FIG. 1 is a partially cutaway sectional view of a turbomolecular pump showing an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of the main parts thereof. FIG. 3 is an enlarged sectional view showing a part of a turbomolecular pump according to an improved embodiment. FIG. 4 is an enlarged sectional view of a main part of a conventional turbo-molecular pump. P...Pump room, M...Machine room, 1...Pump body, 2...Oil tank, 3...Inert gas supply means, 4...Pump base, 5...Motor housing, 9...Oil bearing , 12... Pressing plate, 1
3...Shaft penetration part, 24...Gas inflow system path, 24A
...Starting end, 24b...Terminal end, 27...Switching valve.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 機械室にガスパージ用の不活性ガスを供給する
ガス供給系路と、ポンプ室を大気リークさせる大
気導入系路とを、切換可能な二つの流出ポートを
有する単一の切換弁の流出ポートにその始端を接
続したガス流入系路で共用するようにしたターボ
分子ポンプであつて、不活性ガス又は大気をポン
プ内に流入する前記ガス流入系路の終端を、前記
機械室と前記ポンプ室との軸貫通部に設けたこと
を特徴とするターボ分子ポンプ。 The gas supply line that supplies inert gas for gas purge to the machine room and the atmosphere introduction line that leaks the pump room to the atmosphere are connected to the outlet port of a single switching valve that has two switchable outlet ports. A turbo-molecular pump whose starting end is shared by a gas inflow line connected to the pump, wherein the end of the gas inflow line through which inert gas or atmospheric air flows into the pump is connected to the machine room and the pump room. A turbo molecular pump characterized by being installed in the shaft penetrating part.
JP1985197023U 1985-12-20 1985-12-20 Turbo molecular pump Expired - Lifetime JPH06630Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985197023U JPH06630Y2 (en) 1985-12-20 1985-12-20 Turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985197023U JPH06630Y2 (en) 1985-12-20 1985-12-20 Turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS62114197U true JPS62114197U (en) 1987-07-20
JPH06630Y2 JPH06630Y2 (en) 1994-01-05

Family

ID=31156370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985197023U Expired - Lifetime JPH06630Y2 (en) 1985-12-20 1985-12-20 Turbo molecular pump

Country Status (1)

Country Link
JP (1) JPH06630Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020084302A1 (en) * 2018-10-25 2020-04-30 Edwards Limited Oil feed assembly for a vacuum pump having a venting conduit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5874898A (en) * 1981-10-29 1983-05-06 Shimadzu Corp Molecular turbo-pump
JPS60157994U (en) * 1984-03-30 1985-10-21 株式会社島津製作所 turbo molecular pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5874898A (en) * 1981-10-29 1983-05-06 Shimadzu Corp Molecular turbo-pump
JPS60157994U (en) * 1984-03-30 1985-10-21 株式会社島津製作所 turbo molecular pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020084302A1 (en) * 2018-10-25 2020-04-30 Edwards Limited Oil feed assembly for a vacuum pump having a venting conduit
CN112912629A (en) * 2018-10-25 2021-06-04 爱德华兹有限公司 Oil supply assembly for a vacuum pump having a breather conduit
CN112912629B (en) * 2018-10-25 2023-09-01 爱德华兹有限公司 Oil supply assembly for vacuum pump with venting conduit

Also Published As

Publication number Publication date
JPH06630Y2 (en) 1994-01-05

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