JPS622153U - - Google Patents
Info
- Publication number
- JPS622153U JPS622153U JP9404085U JP9404085U JPS622153U JP S622153 U JPS622153 U JP S622153U JP 9404085 U JP9404085 U JP 9404085U JP 9404085 U JP9404085 U JP 9404085U JP S622153 U JPS622153 U JP S622153U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- flow path
- oil
- mass spectrometer
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000000344 soap Substances 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
Description
第１図はこの考案の一実施例を示した構成図、
第２図はソープシヨンポンプの接続位置を変えた
実施例の構成図である。
１…分析室、２…質量分析計の分析管、７…オ
イルレスターボ分子ポンプ、１０…ゲートバルブ
、１１…冷却トラツプ、１２…油拡散ポンプ、１
５…油回転ポンプ、２１…ソープシヨンポンプ、
Ｅ，Ｅ′…分岐流路。
Figure 1 is a configuration diagram showing an embodiment of this invention.
FIG. 2 is a configuration diagram of an embodiment in which the connection position of the soap pump is changed. DESCRIPTION OF SYMBOLS 1...Analysis chamber, 2...Analysis tube of mass spectrometer, 7...Oilless turbo molecular pump, 10...Gate valve, 11...Cooling trap, 12...Oil diffusion pump, 1
5...oil rotary pump, 21...soaption pump,
E, E'... Branch flow path.
Claims (1)
排気部と、油回転ポンプの吸気部とが、オイルレ
スターボ分子ポンプとゲートバルブと冷却トラツ
プと油拡散ポンプをこの順で備えた流路で接続さ
れ、ソープシヨンポンプまたはダイヤフラムポン
プ等のオイルレスポンプが、切換手段を備えた分
岐流路によつて上記流路に接続されており、分析
室の真空度を１０−１１Ｔｏｒｒ以下に設定しう
るようになつていることを特徴とする質量分析計
を利用したガス中の極微量不純物分析装置。 The exhaust part of the analysis chamber to which the analysis tube of the mass spectrometer is connected and the intake part of the oil rotary pump form a flow path equipped with an oil-less turbo molecular pump, a gate valve, a cooling trap, and an oil diffusion pump in this order. An oilless pump such as a soap pump or a diaphragm pump is connected to the above flow path by a branch flow path equipped with a switching means, and the degree of vacuum in the analysis chamber is set to 10 −11 Torr or less. An ultra-trace impurity analyzer in gas using a mass spectrometer, which is characterized by being able to perform
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9404085U JPH047558Y2 (en) | 1985-06-20 | 1985-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9404085U JPH047558Y2 (en) | 1985-06-20 | 1985-06-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622153U true JPS622153U (en) | 1987-01-08 |
| JPH047558Y2 JPH047558Y2 (en) | 1992-02-27 |
Family
ID=30652244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9404085U Expired JPH047558Y2 (en) | 1985-06-20 | 1985-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047558Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4906319B2 (en) * | 2005-11-17 | 2012-03-28 | 能美防災株式会社 | Gas detector |
-
1985
- 1985-06-20 JP JP9404085U patent/JPH047558Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH047558Y2 (en) | 1992-02-27 |