JPS6218954U - - Google Patents
Info
- Publication number
- JPS6218954U JPS6218954U JP10998085U JP10998085U JPS6218954U JP S6218954 U JPS6218954 U JP S6218954U JP 10998085 U JP10998085 U JP 10998085U JP 10998085 U JP10998085 U JP 10998085U JP S6218954 U JPS6218954 U JP S6218954U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- vacuum
- liner tube
- communicates
- evacuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
Description
第１図は本考案の一実施例の構成図、第２図は
従来の排気系を説明するための構成図である。
１：試料室、２：ライナーチユーブ、３：観察
室、４，５：絞り、６：カメラ室、７：仕切り弁
、８：ターボ分子ポンプ、９，１７：油回転ポン
プ、１０，１１，１２，１６：バルブ、１３，１
４：イオンポンプ、１５：油拡散ポンプ、１８，
１９，２０，２１：リークバルブ、２２：排気管
、２３：バイパス管、２４：バイパス弁。
FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a block diagram for explaining a conventional exhaust system. 1: Sample chamber, 2: Liner tube, 3: Observation chamber, 4, 5: Aperture, 6: Camera room, 7: Gate valve, 8: Turbo molecular pump, 9, 17: Oil rotary pump, 10, 11, 12 , 16: Valve, 13, 1
4: Ion pump, 15: Oil diffusion pump, 18,
19, 20, 21: leak valve, 22: exhaust pipe, 23: bypass pipe, 24: bypass valve.
Claims (1)
的低真空に排気される第３の真空室の中間に位置
した第２の真空室を備え、該第２の真空室は差動
排気用絞りを有するライナーチユーブを介して第
１の真空室と連通していると共に、該第３の真空
室とは仕切り弁を介して連通しており、該ライナ
ーチユーブは排気管を介して真空ポンプに接続さ
れた装置において、該排気管と該第２の真空室と
を接続するためのバイパス管と、該バイパス管に
設けられたバイパス弁を備えたことを特徴とする
電子顕徴鏡等の排気系。 A second vacuum chamber is provided between a first vacuum chamber that is evacuated to a relatively high vacuum and a third vacuum chamber that is evacuated to a relatively low vacuum, and the second vacuum chamber is differentially pumped. The liner tube communicates with the first vacuum chamber via a liner tube having a diaphragm, and communicates with the third vacuum chamber via a gate valve, and the liner tube communicates with the vacuum pump via an exhaust pipe. An electronic microscope, etc., characterized in that the device is connected to an electronic microscope, comprising a bypass pipe for connecting the exhaust pipe and the second vacuum chamber, and a bypass valve provided in the bypass pipe. Exhaust system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998085U JPS6218954U (en) | 1985-07-18 | 1985-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998085U JPS6218954U (en) | 1985-07-18 | 1985-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6218954U true JPS6218954U (en) | 1987-02-04 |
Family
ID=30988585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10998085U Pending JPS6218954U (en) | 1985-07-18 | 1985-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6218954U (en) |
-
1985
- 1985-07-18 JP JP10998085U patent/JPS6218954U/ja active Pending
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