JPS60110685U - Exhaust system using turbo molecular pump - Google Patents

Exhaust system using turbo molecular pump

Info

Publication number
JPS60110685U
JPS60110685U JP20190583U JP20190583U JPS60110685U JP S60110685 U JPS60110685 U JP S60110685U JP 20190583 U JP20190583 U JP 20190583U JP 20190583 U JP20190583 U JP 20190583U JP S60110685 U JPS60110685 U JP S60110685U
Authority
JP
Japan
Prior art keywords
pump
exhaust system
molecular pump
valve
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20190583U
Other languages
Japanese (ja)
Other versions
JPS6325340Y2 (en
Inventor
平野　治男
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP20190583U priority Critical patent/JPS60110685U/en
Publication of JPS60110685U publication Critical patent/JPS60110685U/en
Application granted granted Critical
Publication of JPS6325340Y2 publication Critical patent/JPS6325340Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図及び第２図は従来の排気系を説明するための構成
図、第３図は本考案の一実施例の構成図、第４図は一実
施例に使用される調整弁の一実施例の概略図、第５図は
他の実施例の構成図である。 １・・・・・・真空容器、２・・・・・・主弁、３・・
・・・・ターボ分子ポンプ、４・・・・・・リザーバタ
ンク、５・・・・・・油回転ポンプ、６・・・・・・リ
ーク弁、７・・・・・・第１調整弁、８．１１・・・・
・・第２調整弁、９・・・・・・リーク弁、１０・・・
・・・バイパス排気管。1 and 2 are configuration diagrams for explaining a conventional exhaust system, FIG. 3 is a configuration diagram of one embodiment of the present invention, and FIG. 4 is an implementation of a regulating valve used in one embodiment. A schematic diagram of an example, FIG. 5 is a block diagram of another embodiment. 1... Vacuum vessel, 2... Main valve, 3...
... Turbo molecular pump, 4 ... Reservoir tank, 5 ... Oil rotary pump, 6 ... Leak valve, 7 ... First regulating valve , 8.11...
...Second regulating valve, 9...Leak valve, 10...
...Bypass exhaust pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器に主弁を介して接続されたターボ分子ポンプと
、該ターボ分子ポンプの背圧側に接続された油回転ポン
プ及びリザーバタンクと、該ターボ分子ポンプをリーク
するリーク弁を備えた排気系において、前記リザーバタ
ンクとターボ分子ポンプ又は油回転ポンプとの間に開閉
弁を設け、該リザーバタンク内の圧力が前記ターボ分子
ポンプ内の圧力より高い場合には前記開閉弁を開状態に
するように構成したことを特徴とするターボ分子ポンプ
を用いた排気系。In an exhaust system equipped with a turbomolecular pump connected to a vacuum vessel via a main valve, an oil rotary pump and a reservoir tank connected to the back pressure side of the turbomolecular pump, and a leak valve for leaking the turbomolecular pump. , an on-off valve is provided between the reservoir tank and the turbo-molecular pump or the oil rotary pump, and when the pressure in the reservoir tank is higher than the pressure in the turbo-molecular pump, the on-off valve is opened. An exhaust system using a turbo-molecular pump characterized by the following configuration.
JP20190583U 1983-12-28 1983-12-28 Exhaust system using turbo molecular pump Granted JPS60110685U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20190583U JPS60110685U (en) 1983-12-28 1983-12-28 Exhaust system using turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20190583U JPS60110685U (en) 1983-12-28 1983-12-28 Exhaust system using turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS60110685U true JPS60110685U (en) 1985-07-26
JPS6325340Y2 JPS6325340Y2 (en) 1988-07-11

Family

ID=30764124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20190583U Granted JPS60110685U (en) 1983-12-28 1983-12-28 Exhaust system using turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS60110685U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118190U (en) * 1988-02-03 1989-08-09
JP2003258077A (en) * 2002-02-28 2003-09-12 Tokyo Electron Ltd Container for body to be treated and treatment system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118190U (en) * 1988-02-03 1989-08-09
JP2003258077A (en) * 2002-02-28 2003-09-12 Tokyo Electron Ltd Container for body to be treated and treatment system

Also Published As

Publication number Publication date
JPS6325340Y2 (en) 1988-07-11

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