JPS6024057U - Exhaust equipment for electron microscopes, etc. - Google Patents
Exhaust equipment for electron microscopes, etc.Info
- Publication number
- JPS6024057U JPS6024057U JP11687983U JP11687983U JPS6024057U JP S6024057 U JPS6024057 U JP S6024057U JP 11687983 U JP11687983 U JP 11687983U JP 11687983 U JP11687983 U JP 11687983U JP S6024057 U JPS6024057 U JP S6024057U
- Authority
- JP
- Japan
- Prior art keywords
- regulating valve
- valve
- electron microscopes
- exhaust equipment
- buffer tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図及び第2図は従来装置を説明するためのブロック
図、第3図は本考案の一実施例装置を示すブロック図で
ある。
1:被排気系、2,16:真空計、3:第1主弁、4,
9:油拡散ポンプ、5.10,12:バッファタンク、
6:ロータリーポンプ、7:第2主弁、8,11:調整
弁、13:第1調整弁、14:第2調整弁、15:第3
調整弁。1 and 2 are block diagrams for explaining a conventional device, and FIG. 3 is a block diagram showing an embodiment of the device of the present invention. 1: Exhaust system, 2, 16: Vacuum gauge, 3: First main valve, 4,
9: Oil diffusion pump, 5.10, 12: Buffer tank,
6: rotary pump, 7: second main valve, 8, 11: regulating valve, 13: first regulating valve, 14: second regulating valve, 15: third
Regulating valve.
Claims (1)
、該油拡散ポンプに第1調整弁を介して接続されるバッ
ファタンクと、該バッファタンクに第2調整弁と第3調
整弁を介して接続されたロータリーポンプとを備え、該
ロータリーポンプが第2主弁を介して被排気系に接続さ
れ、前記油拡散ポンプが第2調整弁を介してバッファタ
ンクに接続されると共に第3調整弁を介してロータリー
ポンプに接続されるよう構成された電子顕微鏡等の排気
装置。an oil diffusion pump connected to the pumped system via a first main valve; a buffer tank connected to the oil diffusion pump via a first regulating valve; and a second regulating valve and a third regulating valve connected to the buffer tank. a rotary pump connected via a valve, the rotary pump is connected to the evacuated system via a second main valve, the oil diffusion pump is connected to a buffer tank via a second regulating valve, and An exhaust device for an electron microscope or the like configured to be connected to a rotary pump via a third regulating valve.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11687983U JPS6024057U (en) | 1983-07-27 | 1983-07-27 | Exhaust equipment for electron microscopes, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11687983U JPS6024057U (en) | 1983-07-27 | 1983-07-27 | Exhaust equipment for electron microscopes, etc. |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6024057U true JPS6024057U (en) | 1985-02-19 |
Family
ID=30269263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11687983U Pending JPS6024057U (en) | 1983-07-27 | 1983-07-27 | Exhaust equipment for electron microscopes, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6024057U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02140971U (en) * | 1989-04-20 | 1990-11-26 | ||
JP2016537542A (en) * | 2013-09-26 | 2016-12-01 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | Exhaust method of film chamber |
-
1983
- 1983-07-27 JP JP11687983U patent/JPS6024057U/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02140971U (en) * | 1989-04-20 | 1990-11-26 | ||
JP2016537542A (en) * | 2013-09-26 | 2016-12-01 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | Exhaust method of film chamber |
US10844877B2 (en) | 2013-09-26 | 2020-11-24 | Inficon Gmbh | Evacuation of a film chamber |
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