JPS6024057U - Exhaust equipment for electron microscopes, etc. - Google Patents
Exhaust equipment for electron microscopes, etc.Info
- Publication number
- JPS6024057U JPS6024057U JP11687983U JP11687983U JPS6024057U JP S6024057 U JPS6024057 U JP S6024057U JP 11687983 U JP11687983 U JP 11687983U JP 11687983 U JP11687983 U JP 11687983U JP S6024057 U JPS6024057 U JP S6024057U
- Authority
- JP
- Japan
- Prior art keywords
- regulating valve
- valve
- electron microscopes
- exhaust equipment
- buffer tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は従来装置を説明するためのブロック
図、第３図は本考案の一実施例装置を示すブロック図で
ある。
１：被排気系、２，１６：真空計、３：第１主弁、４，
９：油拡散ポンプ、５．１０，１２：バッファタンク、
６：ロータリーポンプ、７：第２主弁、８，１１：調整
弁、１３：第１調整弁、１４：第２調整弁、１５：第３
調整弁。1 and 2 are block diagrams for explaining a conventional device, and FIG. 3 is a block diagram showing an embodiment of the device of the present invention. 1: Exhaust system, 2, 16: Vacuum gauge, 3: First main valve, 4,
9: Oil diffusion pump, 5.10, 12: Buffer tank,
6: rotary pump, 7: second main valve, 8, 11: regulating valve, 13: first regulating valve, 14: second regulating valve, 15: third
Regulating valve.
Claims (1)
、該油拡散ポンプに第１調整弁を介して接続されるバッ
ファタンクと、該バッファタンクに第２調整弁と第３調
整弁を介して接続されたロータリーポンプとを備え、該
ロータリーポンプが第２主弁を介して被排気系に接続さ
れ、前記油拡散ポンプが第２調整弁を介してバッファタ
ンクに接続されると共に第３調整弁を介してロータリー
ポンプに接続されるよう構成された電子顕微鏡等の排気
装置。an oil diffusion pump connected to the pumped system via a first main valve; a buffer tank connected to the oil diffusion pump via a first regulating valve; and a second regulating valve and a third regulating valve connected to the buffer tank. a rotary pump connected via a valve, the rotary pump is connected to the evacuated system via a second main valve, the oil diffusion pump is connected to a buffer tank via a second regulating valve, and An exhaust device for an electron microscope or the like configured to be connected to a rotary pump via a third regulating valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11687983U JPS6024057U (en) | 1983-07-27 | 1983-07-27 | Exhaust equipment for electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11687983U JPS6024057U (en) | 1983-07-27 | 1983-07-27 | Exhaust equipment for electron microscopes, etc. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6024057U true JPS6024057U (en) | 1985-02-19 |
Family
ID=30269263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11687983U Pending JPS6024057U (en) | 1983-07-27 | 1983-07-27 | Exhaust equipment for electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6024057U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02140971U (en) * | 1989-04-20 | 1990-11-26 | ||
| JP2016537542A (en) * | 2013-09-26 | 2016-12-01 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | Exhaust method of film chamber |
-
1983
- 1983-07-27 JP JP11687983U patent/JPS6024057U/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02140971U (en) * | 1989-04-20 | 1990-11-26 | ||
| JP2016537542A (en) * | 2013-09-26 | 2016-12-01 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | Exhaust method of film chamber |
| US10844877B2 (en) | 2013-09-26 | 2020-11-24 | Inficon Gmbh | Evacuation of a film chamber |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6024057U (en) | Exhaust equipment for electron microscopes, etc. | |
| JPS5945848U (en) | Exhaust operation display device for vacuum equipment | |
| JPS60110972U (en) | Exhaust equipment for electron microscopes, etc. | |
| JPS60110685U (en) | Exhaust system using turbo molecular pump | |
| JPS60140764U (en) | plasma processing equipment | |
| JPS58107560U (en) | Electron microscope exhaust system | |
| JPS59126193U (en) | Vacuum exhaust equipment | |
| JPS58120554U (en) | Exhaust system for electron microscopes, etc. | |
| JPS60114303U (en) | guide device | |
| JPS6015647U (en) | Conduit structure for pressure gauge | |
| JPS60163663U (en) | Vacuum exhaust equipment for electron microscopes, etc. | |
| JPS60149365U (en) | car cleaner | |
| JPS60169552U (en) | oil sampling jig | |
| JPS60159272U (en) | Shaft sealing device | |
| JPS59172237U (en) | Turbocharger lubricating oil return device | |
| JPS606222U (en) | Vacuum processing equipment | |
| JPS5845987U (en) | Automatic vacuum exhaust system switching mechanism | |
| JPS614070U (en) | gate valve | |
| JPS5825897U (en) | Gas filling equipment for electrical and mechanical equipment | |
| JPS58161145U (en) | cylinder liner | |
| JPS58101249U (en) | data access processing device | |
| JPS6018464U (en) | refrigerator | |
| JPS60132455U (en) | Exhaust equipment for vacuum evaporation | |
| JPS59174205U (en) | 2 intake/exhaust ports | |
| JPS60127422U (en) | Cooling water drain chamber of an engine with water-cooled piston |