JPS58120554U - Exhaust system for electron microscopes, etc. - Google Patents
Exhaust system for electron microscopes, etc.Info
- Publication number
- JPS58120554U JPS58120554U JP1787782U JP1787782U JPS58120554U JP S58120554 U JPS58120554 U JP S58120554U JP 1787782 U JP1787782 U JP 1787782U JP 1787782 U JP1787782 U JP 1787782U JP S58120554 U JPS58120554 U JP S58120554U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust pipe
- pump
- elastic body
- exhaust system
- electron microscopes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Vibration Prevention Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来例を示すための図、第２図は本案の一実施
例を示すための図、第３図は本案の他の実施例を示すた
めの図である。
、１：鏡体、２：架台、３：ハネ、４ａ、 ４ｂ：支
柱、５：床、６：主排気管、８：分子ポンプ、１０：べ
口二ズ、１２． １３ａ、 １３ｂ：保護部材、１４
：中間体。FIG. 1 is a diagram showing a conventional example, FIG. 2 is a diagram showing one embodiment of the present invention, and FIG. 3 is a diagram showing another embodiment of the present invention. , 1: Mirror body, 2: Frame, 3: Hanging, 4a, 4b: Strut, 5: Floor, 6: Main exhaust pipe, 8: Molecular pump, 10: Double mouth, 12. 13a, 13b: protection member, 14
: Intermediate.
Claims (1)
して該排気管に接続され前記鏡体内を真空排気するため
のターボ分子ポンプ或いはクライオポンプと、真空排気
された際に前記ベローズが圧縮されることを防ぐため排
気管とポンプ本体との間に挿入された弾性体とよりなる
装置において、前記弾性体を介して前記ポンプ側から前
記排気管゛に伝達される音波を反射するため前記弾性体
の中間に該弾性体より密度の大きい材質より成る部材又
は層が備えられていることを特徴とする電子顕微鏡等に
おける排気系。a mirror body, an exhaust pipe connected to the mirror body, a turbo molecular pump or a cryopump connected to the exhaust pipe via a bellows for evacuating the mirror body, and the bellows when evacuated. A device consisting of an elastic body inserted between an exhaust pipe and a pump body to prevent the pump from being compressed, which reflects sound waves transmitted from the pump side to the exhaust pipe via the elastic body. An exhaust system for an electron microscope or the like, characterized in that a member or layer made of a material having a higher density than the elastic body is provided in the middle of the elastic body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1787782U JPS58120554U (en) | 1982-02-10 | 1982-02-10 | Exhaust system for electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1787782U JPS58120554U (en) | 1982-02-10 | 1982-02-10 | Exhaust system for electron microscopes, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58120554U true JPS58120554U (en) | 1983-08-17 |
| JPS6314372Y2 JPS6314372Y2 (en) | 1988-04-22 |
Family
ID=30030154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1787782U Granted JPS58120554U (en) | 1982-02-10 | 1982-02-10 | Exhaust system for electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58120554U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06342759A (en) * | 1991-06-07 | 1994-12-13 | Semiconductor Energy Lab Co Ltd | Filling method for reactive gas |
| JP2003049771A (en) * | 2001-08-03 | 2003-02-21 | Boc Edwards Technologies Ltd | Connection structure for vacuum pump, and vacuum pump |
| JP2016018621A (en) * | 2014-07-07 | 2016-02-01 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
-
1982
- 1982-02-10 JP JP1787782U patent/JPS58120554U/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06342759A (en) * | 1991-06-07 | 1994-12-13 | Semiconductor Energy Lab Co Ltd | Filling method for reactive gas |
| JP2003049771A (en) * | 2001-08-03 | 2003-02-21 | Boc Edwards Technologies Ltd | Connection structure for vacuum pump, and vacuum pump |
| JP4672204B2 (en) * | 2001-08-03 | 2011-04-20 | エドワーズ株式会社 | Vacuum pump connection structure and vacuum pump |
| JP2016018621A (en) * | 2014-07-07 | 2016-02-01 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6314372Y2 (en) | 1988-04-22 |
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