JPS60164685U - vacuum equipment - Google Patents

vacuum equipment

Info

Publication number
JPS60164685U
JPS60164685U JP5264084U JP5264084U JPS60164685U JP S60164685 U JPS60164685 U JP S60164685U JP 5264084 U JP5264084 U JP 5264084U JP 5264084 U JP5264084 U JP 5264084U JP S60164685 U JPS60164685 U JP S60164685U
Authority
JP
Japan
Prior art keywords
vacuum
silencer
vacuum equipment
air source
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5264084U
Other languages
Japanese (ja)
Other versions
JPS6332935Y2 (en
Inventor
藪中　文春
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP5264084U priority Critical patent/JPS60164685U/en
Publication of JPS60164685U publication Critical patent/JPS60164685U/en
Application granted granted Critical
Publication of JPS6332935Y2 publication Critical patent/JPS6332935Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例を示す真空装置の概略的な
構成図、第２図はこの考案の他の実施例を示す概略的な
構成図、第３図は従来の真空装置の概略的な構成図であ
る。 １・・・・・・真空容器、２・・・・・・真空排気装置
、３・・曲真空弁、４・・・・・・吸気弁、５・・曲消
音器、６・・曲圧縮空気源、７・・・・・・３方向弁。 なお、図中、同一符号は同一、又は相当部分を示す。 °＼　　［−］　　ノ　　第１゛１ −一上 ）−２）− ＋＋　　、　　− １（ １２Fig. 1 is a schematic block diagram of a vacuum device showing one embodiment of this invention, Fig. 2 is a schematic block diagram showing another embodiment of this invention, and Fig. 3 is a schematic diagram of a conventional vacuum device. This is a typical configuration diagram. 1... Vacuum container, 2... Vacuum exhaust device, 3... Curved vacuum valve, 4... Intake valve, 5... Curved silencer, 6... Curved compression. Air source, 7...3-way valve. In addition, in the figures, the same reference numerals indicate the same or equivalent parts. °＼ [-] ノ 1゛1 -1) -2) - ++ , - 1 ( 12

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）真空容器と、真空容器内部を真空排気する真空排
気装置と、真空容器内部に空気を吸気する吸気弁と、吸
気時の騒音を減少させる消音器とで構成された真空装置
において、前記消音器に圧縮空気源を接続したことを特
徴とする真空装置。(1) In a vacuum device comprising a vacuum container, a vacuum evacuation device that evacuates the inside of the vacuum container, an intake valve that sucks air into the vacuum container, and a silencer that reduces noise during intake, A vacuum device characterized by connecting a compressed air source to a silencer. （２）消音器と圧縮空気源との間に３方向弁を挿入して
接続した実用新案登録請求の範囲第１項記載の真空装置
。(2) The vacuum device according to claim 1, which is a registered utility model, in which a three-way valve is inserted and connected between the muffler and the compressed air source.
JP5264084U 1984-04-12 1984-04-12 vacuum equipment Granted JPS60164685U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5264084U JPS60164685U (en) 1984-04-12 1984-04-12 vacuum equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5264084U JPS60164685U (en) 1984-04-12 1984-04-12 vacuum equipment

Publications (2)

Publication Number Publication Date
JPS60164685U true JPS60164685U (en) 1985-11-01
JPS6332935Y2 JPS6332935Y2 (en) 1988-09-02

Family

ID=30572773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5264084U Granted JPS60164685U (en) 1984-04-12 1984-04-12 vacuum equipment

Country Status (1)

Country Link
JP (1) JPS60164685U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926521A (en) * 1972-07-05 1974-03-09
JPS5136130U (en) * 1974-09-11 1976-03-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926521A (en) * 1972-07-05 1974-03-09
JPS5136130U (en) * 1974-09-11 1976-03-17

Also Published As

Publication number Publication date
JPS6332935Y2 (en) 1988-09-02

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