JPS63140196U - - Google Patents
Info
- Publication number
- JPS63140196U JPS63140196U JP3178587U JP3178587U JPS63140196U JP S63140196 U JPS63140196 U JP S63140196U JP 3178587 U JP3178587 U JP 3178587U JP 3178587 U JP3178587 U JP 3178587U JP S63140196 U JPS63140196 U JP S63140196U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic bearing
- pump
- vacuum side
- rotor
- radial magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 description 3
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の実施例の断面図である。
１……ケーシング、２……ブラケツト、４……
内部ハウジング、５……固定翼、６……回転翼、
９……軸、１０……リブ、１１……ダクト、１２
……吸気口、１３……排気口、１４……高真空側
ラジアル磁気軸受固定子、１４′……低真空側ラ
ジアル磁気軸受固定子、１５……高真空側ラジア
ル磁気軸受用変位センサ、１５′……低真空側ラ
ジアル磁気軸受用変位センサ、１６……高真空側
ラジアル磁気軸受回転子、１６′……低真空側ラ
ジアル磁気軸受回転子、１７……スラスト磁気軸
受コイル、１８……スラスト磁気軸受回転子、１
９……モータの固定子、２０……モータの回転子
、２１……スラスト磁気軸受用変位センサー、１
００……第１段ポンプロータ、１０１……第２段
ポンプロータ。
FIG. 1 is a sectional view of an embodiment of the present invention. 1...Casing, 2...Bracket, 4...
Internal housing, 5... fixed wing, 6... rotary wing,
9... shaft, 10... rib, 11... duct, 12
...Intake port, 13...Exhaust port, 14...High vacuum side radial magnetic bearing stator, 14'...Low vacuum side radial magnetic bearing stator, 15...Displacement sensor for high vacuum side radial magnetic bearing, 15 '... Displacement sensor for low vacuum side radial magnetic bearing, 16... Radial magnetic bearing rotor on high vacuum side, 16'... Radial magnetic bearing rotor on low vacuum side, 17... Thrust magnetic bearing coil, 18... Thrust Magnetic bearing rotor, 1
9...Motor stator, 20...Motor rotor, 21...Displacement sensor for thrust magnetic bearing, 1
00...1st stage pump rotor, 101...2nd stage pump rotor.
Claims (1)
高真空側及び低真空側）に配置し、前記２個のポ
ンプロータの軸方向中間に少なくとも１個の磁気
軸受及び駆動モータを配置したことを特徴とする
２段ポンプ式のターボ分子ポンプ。 Connect the two pump rotors to both ends of the drive shaft (
A two-stage turbo molecular pump, characterized in that at least one magnetic bearing and a drive motor are arranged in the axial middle of the two pump rotors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3178587U JPH0617035Y2 (en) | 1987-03-06 | 1987-03-06 | Turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3178587U JPH0617035Y2 (en) | 1987-03-06 | 1987-03-06 | Turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140196U true JPS63140196U (en) | 1988-09-14 |
| JPH0617035Y2 JPH0617035Y2 (en) | 1994-05-02 |
Family
ID=30837838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3178587U Expired - Lifetime JPH0617035Y2 (en) | 1987-03-06 | 1987-03-06 | Turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617035Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005042709A (en) * | 2003-07-10 | 2005-02-17 | Ebara Corp | Vacuum pump |
-
1987
- 1987-03-06 JP JP3178587U patent/JPH0617035Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005042709A (en) * | 2003-07-10 | 2005-02-17 | Ebara Corp | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617035Y2 (en) | 1994-05-02 |