JPS6429290U - - Google Patents

Info

Publication number
JPS6429290U
JPS6429290U JP12397487U JP12397487U JPS6429290U JP S6429290 U JPS6429290 U JP S6429290U JP 12397487 U JP12397487 U JP 12397487U JP 12397487 U JP12397487 U JP 12397487U JP S6429290 U JPS6429290 U JP S6429290U
Authority
JP
Japan
Prior art keywords
room
housing
turbo
molecular pump
evacuated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12397487U
Other languages
Japanese (ja)
Other versions
JPH0732956Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987123974U priority Critical patent/JPH0732956Y2/en
Publication of JPS6429290U publication Critical patent/JPS6429290U/ja
Application granted granted Critical
Publication of JPH0732956Y2 publication Critical patent/JPH0732956Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は、本考案の一実施例を示すターボ分子ポ
ンプの断面図である。 １……ターボ分子ポンプ、２……ハウジング、
３……ステータ翼、４……チヤンバ、５……ロー
タ、６……ロータ翼、８……固定筒、１０……ロ
ータ軸、１２……モータ、１４……半径方向磁気
軸受、１５……軸方向磁気軸受、１７……アーマ
チヤーデイスク、１８，１８′……永久磁石。 The drawing is a sectional view of a turbomolecular pump showing an embodiment of the present invention. 1...Turbo molecular pump, 2...Housing,
3... Stator blade, 4... Chamber, 5... Rotor, 6... Rotor blade, 8... Fixed cylinder, 10... Rotor shaft, 12... Motor, 14... Radial magnetic bearing, 15... Axial magnetic bearing, 17... armature disk, 18, 18'... permanent magnet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空にしたい部屋にハウジングが連結され、こ
のハウジング内の装置を作動させることにより前
記部屋の真空度を高めるターボ分子ポンプにおい
て、前記装置を構成する部品に放射率低減手段を
施すことにより、前記装置の作動時に発生する熱
の前記部屋側への輻射伝熱量を低減させることを
特徴とするターボ分子ポンプ。 In a turbo-molecular pump in which a housing is connected to a room to be evacuated and the degree of vacuum in the room is increased by operating a device in the housing, the device is A turbo-molecular pump characterized in that the amount of radiant heat transferred to the room side of the heat generated during operation is reduced.
JP1987123974U 1987-08-13 1987-08-13 Turbo molecular pump Expired - Lifetime JPH0732956Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987123974U JPH0732956Y2 (en) 1987-08-13 1987-08-13 Turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987123974U JPH0732956Y2 (en) 1987-08-13 1987-08-13 Turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS6429290U true JPS6429290U (en) 1989-02-21
JPH0732956Y2 JPH0732956Y2 (en) 1995-07-31

Family

ID=31373310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987123974U Expired - Lifetime JPH0732956Y2 (en) 1987-08-13 1987-08-13 Turbo molecular pump

Country Status (1)

Country Link
JP (1) JPH0732956Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5676453B2 (en) * 2009-08-26 2015-02-25 株式会社島津製作所 Turbomolecular pump and rotor manufacturing method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4671624B2 (en) * 2004-05-25 2011-04-20 エドワーズ株式会社 Vacuum pump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584323A (en) * 1981-06-26 1983-01-11 Osaka Shinku Kiki Seisakusho:Kk Method of forming rotor with moving blade

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584323A (en) * 1981-06-26 1983-01-11 Osaka Shinku Kiki Seisakusho:Kk Method of forming rotor with moving blade

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5676453B2 (en) * 2009-08-26 2015-02-25 株式会社島津製作所 Turbomolecular pump and rotor manufacturing method
US10024327B2 (en) 2009-08-26 2018-07-17 Shimadzu Corporation Turbomolecular pump, and method of manufacturing rotor

Also Published As

Publication number Publication date
JPH0732956Y2 (en) 1995-07-31

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