JPH0185493U - - Google Patents
Info
- Publication number
- JPH0185493U JPH0185493U JP18324587U JP18324587U JPH0185493U JP H0185493 U JPH0185493 U JP H0185493U JP 18324587 U JP18324587 U JP 18324587U JP 18324587 U JP18324587 U JP 18324587U JP H0185493 U JPH0185493 U JP H0185493U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic bearing
- permanent magnet
- rotor
- bearing made
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の一実施例を示すターボ分子ポ
ンプの要部断面図である。第２図は変形実施例を
示す部分断面図である。第３図、第４図及び第５
図はいずれも従来の磁気軸受装置を示すターボ分
子ポンプの要部断面図である。
Ｒ…ロータ、Ｓ…ロータシヤフト、ＳＲ…スラ
ストランナ、１，２…上部永久磁石、３…電磁石
、４，５…下部永久磁石、７…ホルダ、８，１４
…ラジアル・スラスト磁気軸受、９…スラスト磁
気軸受、１２…センサ、１３…プレート。
FIG. 1 is a sectional view of essential parts of a turbomolecular pump showing an embodiment of the present invention. FIG. 2 is a partial sectional view showing a modified embodiment. Figures 3, 4 and 5
Each figure is a sectional view of a main part of a turbomolecular pump showing a conventional magnetic bearing device. R... Rotor, S... Rotor shaft, SR... Thrust runner, 1, 2... Upper permanent magnet, 3... Electromagnet, 4, 5... Lower permanent magnet, 7... Holder, 8, 14
...Radial thrust magnetic bearing, 9...Thrust magnetic bearing, 12...Sensor, 13...Plate.
Claims (1)
ンプにおいて、前記ロータの一端側に永久磁石に
より構成した磁気軸受を、他端側に電磁石により
構成した磁気軸受と永久磁石により構成した磁気
軸受とを配してなることを特徴とするターボ分子
ポンプの磁気軸受装置。 In a turbo-molecular pump in which a rotor is supported by magnetic levitation, a magnetic bearing made of a permanent magnet is disposed on one end of the rotor, and a magnetic bearing made of an electromagnet and a magnetic bearing made of a permanent magnet are disposed on the other end. A magnetic bearing device for a turbo molecular pump, which is characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18324587U JPH0185493U (en) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18324587U JPH0185493U (en) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0185493U true JPH0185493U (en) | 1989-06-06 |
Family
ID=31474674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18324587U Pending JPH0185493U (en) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0185493U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02163497A (en) * | 1988-12-15 | 1990-06-22 | Seiko Seiki Co Ltd | Turbo-molecular pump |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5177746A (en) * | 1974-12-06 | 1976-07-06 | Teldix Gmbh | |
| JPS5812478A (en) * | 1981-07-15 | 1983-01-24 | Hitachi Ltd | Manufacture of solid state image pickup device |
-
1987
- 1987-11-30 JP JP18324587U patent/JPH0185493U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5177746A (en) * | 1974-12-06 | 1976-07-06 | Teldix Gmbh | |
| JPS5812478A (en) * | 1981-07-15 | 1983-01-24 | Hitachi Ltd | Manufacture of solid state image pickup device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02163497A (en) * | 1988-12-15 | 1990-06-22 | Seiko Seiki Co Ltd | Turbo-molecular pump |