JPS62101095U

JPS62101095U -

Info

Publication number: JPS62101095U
Application number: JP19343685U
Authority: JP
Priority date: 1985-12-18
Filing date: 1985-12-18
Publication date: 1987-06-27

Description

[Brief explanation of the drawing]

第１図は本考案に係わるターボ分子ポンプの一
実施例を示す縦断側面図、第２図，，は強
磁性体の各実施例を示す平面図、第３図は周方
向の磁気ムラを示す説明図、第３図は軸方向の
磁気ムラを示す説明図、第４図は従来のターボ分
子ポンプを示す縦断側面図である。１……ケーシング、４……静翼、５……動翼、
６……ロータ、７……ロータ軸、８……回転側永
久磁石、９……静止側永久磁石、１０……強磁性
体、１１……すべり軸受。 Fig. 1 is a vertical sectional side view showing one embodiment of the turbo molecular pump according to the present invention, Fig. 2, , is a plan view showing each embodiment of the ferromagnetic material, and Fig. 3 shows magnetic unevenness in the circumferential direction. FIG. 3 is an explanatory diagram showing magnetic unevenness in the axial direction, and FIG. 4 is a longitudinal side view showing a conventional turbo molecular pump. 1... Casing, 4... Stationary blade, 5... Moving blade,
6...Rotor, 7...Rotor shaft, 8...Rotating side permanent magnet, 9...Stationary side permanent magnet, 10...Ferromagnetic material, 11...Sliding bearing.

Claims

[Scope of utility model registration request]

A ring in which moving blades attached to the rotor and stationary blades attached to the casing are arranged alternately in the axial direction of the rotor, and the upper part of the rotor shaft located on the low vacuum side in the casing is attached to a member on the casing side. The turbo is rotatably supported at the bottom of the rotor shaft by a magnetic bearing consisting of a stationary permanent magnet in the shape of a ring and a rotating permanent magnet in the shape of a ring attached to the rotor shaft, and a sliding bearing capable of carrying loads in the direction of the rotor shaft. A turbo-molecular pump characterized in that a ring-shaped ferromagnetic material is attached to a stationary side permanent magnet and a rotating side permanent magnet of the magnetic bearing.