JPS63174595U - - Google Patents
Info
- Publication number
- JPS63174595U JPS63174595U JP3141187U JP3141187U JPS63174595U JP S63174595 U JPS63174595 U JP S63174595U JP 3141187 U JP3141187 U JP 3141187U JP 3141187 U JP3141187 U JP 3141187U JP S63174595 U JPS63174595 U JP S63174595U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- casing
- supported
- wall surface
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
図面は本考案をインナーロータ型のターボ分子
ポンプに適用した実施例を示す縦断側面図である
。
１…ケーシング、２…ステータ翼、３…ロータ
、４…ロータ翼、５，１３…ベース、６…高周波
モータ、７…支持プレート、８…永久磁石固定用
ブロツク、１０，１１…永久磁石、１２…スパイ
ラルグルーブベアリング、１４…軸受台、１５…
凹部、１６…バネ受け、１７…コイルスプリング
、１８…空間以上。
The drawing is a longitudinal sectional side view showing an embodiment in which the present invention is applied to an inner rotor type turbomolecular pump. DESCRIPTION OF SYMBOLS 1... Casing, 2... Stator blade, 3... Rotor, 4... Rotor blade, 5, 13... Base, 6... High frequency motor, 7... Support plate, 8... Permanent magnet fixing block, 10, 11... Permanent magnet, 12 ...Spiral groove bearing, 14...Bearing stand, 15...
Recessed portion, 16...Spring receiver, 17...Coil spring, 18...More than space.
Claims (1)
、上記ケーシング内に配置されたロータの外壁面
に取付けられたロータ翼とを、ロータの軸方向に
交互に配設してなるターボ分子ポンプにおいて、
前記ロータ上部の高真空側は永久磁石からなる磁
気軸受により支持されているとともに、ロータ下
部の低真空側に位置するロータシヤフトの下端が
動圧滑り軸受により、径方向、軸方向に支持され
、上記磁気軸受と動圧滑り軸受との間にロータを
回転駆動させる高周波モータが配置されているこ
とを特徴とするターボ分子ポンプ。 A turbo molecular pump in which stator blades attached to an inner wall surface of a casing and rotor blades attached to an outer wall surface of a rotor disposed within the casing are arranged alternately in the axial direction of the rotor,
The high vacuum side of the upper part of the rotor is supported by a magnetic bearing made of a permanent magnet, and the lower end of the rotor shaft located on the low vacuum side of the lower part of the rotor is supported in the radial and axial directions by a dynamic pressure sliding bearing, A turbo molecular pump characterized in that a high frequency motor for rotationally driving a rotor is disposed between the magnetic bearing and the hydrodynamic sliding bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141187U JPS63174595U (en) | 1987-03-04 | 1987-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141187U JPS63174595U (en) | 1987-03-04 | 1987-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63174595U true JPS63174595U (en) | 1988-11-11 |
Family
ID=30837116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3141187U Pending JPS63174595U (en) | 1987-03-04 | 1987-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63174595U (en) |
-
1987
- 1987-03-04 JP JP3141187U patent/JPS63174595U/ja active Pending
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