JPS63138496U - - Google Patents
Info
- Publication number
- JPS63138496U JPS63138496U JP3141087U JP3141087U JPS63138496U JP S63138496 U JPS63138496 U JP S63138496U JP 3141087 U JP3141087 U JP 3141087U JP 3141087 U JP3141087 U JP 3141087U JP S63138496 U JPS63138496 U JP S63138496U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- rotor
- wall surface
- molecular pump
- turbo molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000035699 permeability Effects 0.000 claims 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
図面は本考案に係るターボ分子ポンプの好適な
実施例を示す一部を破断した側面図である。
１……ケーシング、２……ステータ翼、３……
ロータ、４……ロータ翼、５……ステータコラム
、６……軸方向電磁石、７……径方向電磁石、８
……高周波モータ、９……軸方向位置センサ、１
０……径方向位置センサ、１１，１２……保護用
ドライベアリング、１３……磁気シールド材、１
４……クリツプ。
The drawing is a partially cutaway side view showing a preferred embodiment of the turbomolecular pump according to the present invention. 1...Casing, 2...Stator blade, 3...
Rotor, 4... Rotor blade, 5... Stator column, 6... Axial electromagnet, 7... Radial electromagnet, 8
... High frequency motor, 9 ... Axial position sensor, 1
0... Radial position sensor, 11, 12... Protective dry bearing, 13... Magnetic shielding material, 1
4... Clip.
Claims (1)
、上記ケーシング内に配置されたロータの外壁面
に取付けられたロータ翼とを、ロータの軸方向に
交互に配設してなるターボ分子ポンプにおいて、
前記ケーシングの外表面は透磁率の高い磁気シー
ルド材により被覆されていることを特徴とするタ
ーボ分子ポンプ。 A turbo molecular pump in which stator blades attached to an inner wall surface of a casing and rotor blades attached to an outer wall surface of a rotor disposed within the casing are arranged alternately in the axial direction of the rotor,
A turbo molecular pump characterized in that the outer surface of the casing is coated with a magnetic shielding material having high magnetic permeability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141087U JPS63138496U (en) | 1987-03-04 | 1987-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141087U JPS63138496U (en) | 1987-03-04 | 1987-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63138496U true JPS63138496U (en) | 1988-09-12 |
Family
ID=30837114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3141087U Pending JPS63138496U (en) | 1987-03-04 | 1987-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63138496U (en) |
-
1987
- 1987-03-04 JP JP3141087U patent/JPS63138496U/ja active Pending