JPH0214496U - - Google Patents
Info
- Publication number
- JPH0214496U JPH0214496U JP9338788U JP9338788U JPH0214496U JP H0214496 U JPH0214496 U JP H0214496U JP 9338788 U JP9338788 U JP 9338788U JP 9338788 U JP9338788 U JP 9338788U JP H0214496 U JPH0214496 U JP H0214496U
- Authority
- JP
- Japan
- Prior art keywords
- turbine blade
- diameter
- rotor
- threaded groove
- groove portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000002131 composite material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図、第２図は本考案による複合型ターボ分
子ポンプの一実施例を示す図であり、第１図は複
合型ターボ分子ポンプの断面図、第２図はロータ
の側面図、第３図は従来の複合型ターボ分子ポン
プの断面図である。
１……複合型ターボ分子ポンプ、２……ハウジ
ング、３……ステータ翼、５……ロータ、６……
ロータ翼（タービン翼）、７……ネジ溝、８……
固定筒、９……ネジ溝部、１０……ロータ軸、１
２……モータ、１４……半径方向電磁石、１５…
…軸方向電磁石、１７……アーマチヤーデイスク
、１８……スペーサ。
1 and 2 are diagrams showing an embodiment of a composite turbo-molecular pump according to the present invention. FIG. 1 is a sectional view of the composite turbo-molecular pump, FIG. 2 is a side view of the rotor, and FIG. The figure is a cross-sectional view of a conventional composite turbomolecular pump. DESCRIPTION OF SYMBOLS 1...Combined turbo molecular pump, 2...Housing, 3...Stator blade, 5...Rotor, 6...
Rotor blade (turbine blade), 7... thread groove, 8...
Fixed tube, 9... Thread groove portion, 10... Rotor shaft, 1
2...Motor, 14...Radial electromagnet, 15...
...Axis electromagnet, 17... Armature disk, 18... Spacer.
Claims (1)
備えた複合型ターボ分子ポンプにおいて、前記タ
ービン翼部の径とネジ溝部の径を異らしめたこと
を特徴とする複合型ターボ分子ポンプ。 What is claimed is: 1. A compound turbo-molecular pump comprising a rotor having both a turbine blade portion and a threaded groove portion, wherein the diameter of the turbine blade portion and the diameter of the threaded groove portion are different.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9338788U JPH0214496U (en) | 1988-07-13 | 1988-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9338788U JPH0214496U (en) | 1988-07-13 | 1988-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214496U true JPH0214496U (en) | 1990-01-30 |
Family
ID=31317843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9338788U Pending JPH0214496U (en) | 1988-07-13 | 1988-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214496U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048512A (en) * | 1973-03-30 | 1975-04-30 | ||
| JPS6172896A (en) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | High speed rotary pump |
-
1988
- 1988-07-13 JP JP9338788U patent/JPH0214496U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048512A (en) * | 1973-03-30 | 1975-04-30 | ||
| JPS6172896A (en) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | High speed rotary pump |
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