JPS62133990U - - Google Patents
Info
- Publication number
- JPS62133990U JPS62133990U JP2260086U JP2260086U JPS62133990U JP S62133990 U JPS62133990 U JP S62133990U JP 2260086 U JP2260086 U JP 2260086U JP 2260086 U JP2260086 U JP 2260086U JP S62133990 U JPS62133990 U JP S62133990U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- motor
- rotating shaft
- load side
- turbo molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000314 lubricant Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Description
第１図は本考案の実施例による要部拡大図、第
２図は他の実施例を示す要部拡大図、第３図は更
に他の実施例を示す要部拡大図、第４図は従来装
置の全体断面図、第５図は第４図の要部拡大図で
ある。
図中１はモートル、１ｂは軸受、１１，１６は
回転子、１１ａは螺線溝、１ｊ，１ｋは周壁部、
１３，１４，１５は止め輪、１７は軸封部材、１
７ａは螺線溝である。なお、各図中同一符号は同
一または相当部分を示す。
Fig. 1 is an enlarged view of main parts according to an embodiment of the present invention, Fig. 2 is an enlarged view of main parts showing another embodiment, Fig. 3 is an enlarged view of main parts showing still another embodiment, and Fig. 4 is an enlarged view of main parts according to an embodiment of the present invention. FIG. 5 is an enlarged view of the main part of FIG. 4, which is an overall sectional view of the conventional device. In the figure, 1 is a motor, 1b is a bearing, 11 and 16 are rotors, 11a is a spiral groove, 1j and 1k are peripheral walls,
13, 14, 15 are retaining rings, 17 is a shaft sealing member, 1
7a is a spiral groove. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
転軸の負荷側を支承する軸受を設け、この軸受が
潤滑材で潤滑されるターボ分子ポンプにおいて、
上記軸受よりも負荷側には、回転方向に対し、上
記モートル内部へ向つてポンプ作用する螺線溝部
材を設けたことを特徴とするターボ分子ポンプ。 A turbo molecular pump is provided with a rotating shaft of a motor that drives a rotor blade, and a bearing that supports the load side of this rotating shaft, and this bearing is lubricated with a lubricant.
A turbo molecular pump characterized in that a spiral groove member is provided on the load side of the bearing and acts as a pump toward the inside of the motor in the rotational direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2260086U JPS62133990U (en) | 1986-02-18 | 1986-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2260086U JPS62133990U (en) | 1986-02-18 | 1986-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62133990U true JPS62133990U (en) | 1987-08-24 |
Family
ID=30820137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2260086U Pending JPS62133990U (en) | 1986-02-18 | 1986-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62133990U (en) |
-
1986
- 1986-02-18 JP JP2260086U patent/JPS62133990U/ja active Pending
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