EP0697524B1 - Turbomolecular vacuum pump - Google Patents

Turbomolecular vacuum pump Download PDF

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Publication number
EP0697524B1
EP0697524B1 EP95401896A EP95401896A EP0697524B1 EP 0697524 B1 EP0697524 B1 EP 0697524B1 EP 95401896 A EP95401896 A EP 95401896A EP 95401896 A EP95401896 A EP 95401896A EP 0697524 B1 EP0697524 B1 EP 0697524B1
Authority
EP
European Patent Office
Prior art keywords
rotor
bell
stator
shaft
drive motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95401896A
Other languages
German (de)
French (fr)
Other versions
EP0697524A1 (en
Inventor
Denis Perrillat-Amede
Didier Pierrejean
François Reverdy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP0697524A1 publication Critical patent/EP0697524A1/en
Application granted granted Critical
Publication of EP0697524B1 publication Critical patent/EP0697524B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump

Definitions

  • the present invention relates to a pump turbomolecular comprising a stator and a rotor, the rotor comprising an active part of the bell type and a shaft central, the stator comprising an external part and a internal part penetrating into the cavity of said part active in bell and supporting the stator part of the drive motor, the rotor shaft supporting the part rotor of the drive motor, said central shaft (5) and the bell-shaped active part (3) of the rotor being in one piece without assembly.
  • a pump is known, see DE-A-3 713 534 or EP-A-0 470 637.
  • the motor rotor electric drive is fixed around the central shaft which is itself assembled to the active part itself by a screw, the rotor of the electric motor being formed, depending on the type of motor, windings, iron or magnets permanent.
  • the permanent magnet motor is usually preferred, for its performance, its size and the stability of its rotation speed.
  • the speed of rotation is limited by the resistance materials constituting the rotor, but also by the dynamic behavior of the rotor which is linked among other things to the rotor stiffness.
  • the rotor assembly of known pumps is hardly rigid, it is bulky, expensive and difficult to degas. In particular, it is difficult to obtain a good rigidity of the shaft-part assembly active and good resistance of permanent magnets to centrifugal forces. It is necessary to fret the magnets.
  • the subject of the invention is therefore a vacuum pump turbomolecular, as defined above, characterized in that said central shaft and said active part in rotor bell are in non-magnetic material, said shaft having a bore central in which is housed the rotor part of said drive motor, consisting of a permanent magnet cylindrical.
  • said permanent magnet has a section circular with two diametrically opposite flats. This provision allows the evacuation of air during the introduction of the magnet into the bore of the shaft.
  • Figure 2 shows the section of the permanent magnet used as the rotor of the electric drive motor.
  • Figure 3 shows a small mounting variant.
  • a vacuum pump fin type turbomolecular This pump has a rotor 1 and a stator 2.
  • the rotor 1 comprises a part active 3 in the shape of a bell and comprising fins 4 and a central shaft 5.
  • the active part 3 with its fins 4 and the central shaft 5 are one and the same piece made in a single block without assembly and in a material not magnetic.
  • the stator 2 is in two assembled parts: an external part 6 in which stages are mounted fixed fins 7 and an internal part 8 which penetrates into the cavity 9 of the active part 3 in the shape of a bell rotor 1.
  • This internal part 8 of the stator carries the part stator of an electric drive motor comprising a magnetic circuit 10 and windings 11.
  • the part rotor of the drive motor consists of a single cylindrical multipolar permanent magnet 12 introduced at the bottom of a central bore 13 of the central shaft 5.
  • the pump described is a pump fins, but the invention applies equally well to Holweck drum type molecular pumps and the term turbomolecular pump used includes both pumps with fins than those of the Holweck type.
  • the pump of the invention thanks to its rotor monobloc, without assembly, and including the motor rotor drive is located not around the central shaft, but housed in a central bore of the shaft, and made up of a single cylindrical permanent magnet, allows a excellent rigidity of the rotating assembly, compactness and lower cost and minimizes the internal degassing of the suction side pump.

Description

La présente invention concerne une pompe turbomoléculaire comportant un stator et un rotor, le rotor comportant une partie active du type en cloche et un arbre central, le stator comportant une partie externe et une partie interne pénétrant dans la cavité de ladite partie active en cloche et supportant la partie statorique du moteur d'entraínement, l'arbre du rotor supportant la partie rotorique du moteur d'entraínement, ledit arbre central (5) et la partie active en cloche (3) du rotor étant monobloc sans assemblage. Une telle pompe est connue, voir DE-A- 3 713 534 ou EP-A-0 470 637.The present invention relates to a pump turbomolecular comprising a stator and a rotor, the rotor comprising an active part of the bell type and a shaft central, the stator comprising an external part and a internal part penetrating into the cavity of said part active in bell and supporting the stator part of the drive motor, the rotor shaft supporting the part rotor of the drive motor, said central shaft (5) and the bell-shaped active part (3) of the rotor being in one piece without assembly. Such a pump is known, see DE-A-3 713 534 or EP-A-0 470 637.

Dans des pompes connues, le rotor du moteur électrique d'entraínement est fixé autour de l'arbre central qui est lui-même assemblé à la partie active elle-même par une vis, le rotor du moteur électrique étant constitué, selon le type de moteur, de bobinages, de fer ou d'aimants permanents. Le moteur à aimants permanents est généralement préféré, pour son rendement, son encombrement et la stabilité de sa vitesse de rotation.In known pumps, the motor rotor electric drive is fixed around the central shaft which is itself assembled to the active part itself by a screw, the rotor of the electric motor being formed, depending on the type of motor, windings, iron or magnets permanent. The permanent magnet motor is usually preferred, for its performance, its size and the stability of its rotation speed.

On sait qu'afin d'obtenir de meilleurs débits et taux de compression, on est amené à augmenter la vitesse de rotation de la machine, dont ces performances sont proportionnelles à cette vitesse.We know that in order to obtain better flows and rates compression, we have to increase the speed of machine rotation, whose performance is proportional to this speed.

La vitesse de rotation est limitée par la résistance des matériaux constituant le rotor, mais également par le comportement dynamique du rotor qui est lié entre autre à la rigidité du rotor.The speed of rotation is limited by the resistance materials constituting the rotor, but also by the dynamic behavior of the rotor which is linked among other things to the rotor stiffness.

Par ailleurs, l'intégration des pompes à l'intérieur d'appareils, tels que des détecteurs de fuite ou les analyseurs de gaz conduit à miniaturiser le plus possible les pompes. Un autre élément important est le dégazage des éléments constitutifs de la pompe car il conditionne en partie la pression limite, il est en particulier nécessaire de minimiser ce dégazage côté aspiration.In addition, the integration of pumps inside devices, such as leak detectors or gas analyzers leads to miniaturize as much as possible the pumps. Another important element is the degassing of components of the pump because it conditions part the pressure limit it is especially necessary to minimize this degassing on the suction side.

L'assemblage rotorique des pompes connues est difficilement rigide, il est encombrant, coûteux et difficile à dégazer. En particulier, il est difficile d'obtenir une bonne rigidité de l'assemblage arbre-partie active et une bonne résistance des aimants permanents aux efforts centrifuges. Il est nécessaire de fretter les aimants.The rotor assembly of known pumps is hardly rigid, it is bulky, expensive and difficult to degas. In particular, it is difficult to obtain a good rigidity of the shaft-part assembly active and good resistance of permanent magnets to centrifugal forces. It is necessary to fret the magnets.

La présente invention a pour but de proposer une pompe à rotor rigide, peu encombrant et à faible dégazage. Par rotor rigide, on entend un rotor dont la fréquence du premier mode de flexion est très supérieure à la fréquence de rotation de la pompe.The object of the present invention is to propose a pump with rigid rotor, compact and low degassing. Through rigid rotor means a rotor whose frequency of first bending mode is much higher than the frequency pump rotation.

L'invention a ainsi pour objet une pompe à vide turbomoléculaire, telle que définie ci-dessus, caractérisée en ce que ledit arbre central et ladite partie active en cloche du rotor sont en matériau non magnétique, ledit arbre comportant un alésage central dans lequel est logée la partie rotorique dudit moteur d'entraínement, constituée d'un aimant permanent cylindrique.The subject of the invention is therefore a vacuum pump turbomolecular, as defined above, characterized in that said central shaft and said active part in rotor bell are in non-magnetic material, said shaft having a bore central in which is housed the rotor part of said drive motor, consisting of a permanent magnet cylindrical.

Avantageusement, ledit aimant permanent a une section circulaire avec deux méplats diamétralement opposés. Cette disposition permet l'évacuation de l'air lors de l'introduction de l'aimant dans l'alésage de l'arbre.Advantageously, said permanent magnet has a section circular with two diametrically opposite flats. This provision allows the evacuation of air during the introduction of the magnet into the bore of the shaft.

On va maintenant donner la description d'un exemple de mise en oeuvre de l'invention en se reportant au dessin annexé dans lequel :We will now give the description of an example of implementation of the invention with reference to the drawing annexed in which:

La figure 1 montre en coupe axiale une pompe turbomoléculaire selon l'invention.Figure 1 shows in axial section a pump turbomolecular according to the invention.

La figure 2 montre la section de l'aimant permanent utilisé comme rotor du moteur électrique d'entraínement.Figure 2 shows the section of the permanent magnet used as the rotor of the electric drive motor.

La figure 3 montre une petite variante de montage.Figure 3 shows a small mounting variant.

En se référant à la figure 1, on voit une pompe à vide turbomoléculaire du type à ailettes. Cette pompe comporte un rotor 1 et un stator 2. Le rotor 1 comprend une partie active 3 en forme de cloche et comportant des ailettes 4 et un arbre central 5. La partie active 3 avec ses ailettes 4 et l'arbre central 5 ne font qu'une seule et même pièce réalisée en un seul bloc sans assemblage et en un matériau non magnétique. Le stator 2 est en deux parties assemblées : une partie externe 6 dans laquelle sont montés des étages d'ailettes fixes 7 et une partie interne 8 qui pénètre dans la cavité 9 de la partie active 3 en forme de cloche du rotor 1.Referring to Figure 1, we see a vacuum pump fin type turbomolecular. This pump has a rotor 1 and a stator 2. The rotor 1 comprises a part active 3 in the shape of a bell and comprising fins 4 and a central shaft 5. The active part 3 with its fins 4 and the central shaft 5 are one and the same piece made in a single block without assembly and in a material not magnetic. The stator 2 is in two assembled parts: an external part 6 in which stages are mounted fixed fins 7 and an internal part 8 which penetrates into the cavity 9 of the active part 3 in the shape of a bell rotor 1.

Cette partie interne 8 du stator porte la partie statorique d'un moteur électrique d'entraínement comprenant un circuit magnétique 10 et des enroulements 11. La partie rotorique du moteur d'entraínement est constituée d'un unique aimant permanent multipolaire cylindrique 12 introduit au fond d'un alésage central 13 de l'arbre central 5.This internal part 8 of the stator carries the part stator of an electric drive motor comprising a magnetic circuit 10 and windings 11. The part rotor of the drive motor consists of a single cylindrical multipolar permanent magnet 12 introduced at the bottom of a central bore 13 of the central shaft 5.

Comme le montre la figure 3, l'aimant permanent 12 a une section circulaire, mais avec deux méplats diamétralement opposés 14 et 15 de façon à permettre l'évacuation de l'air lors de l'introduction de l'aimant dans l'alésage 13.As shown in Figure 3, the permanent magnet 12 a a circular section, but with two flats diametrically opposed 14 and 15 so as to allow the evacuation of air during the introduction of the magnet in bore 13.

Le rotor 1 est supporté dans le stator par deux paliers à roulements 16 et 17. Une entretoise 18 permet d'adapter le diamètre de la partie interne 8 du stator à celui de la bague externe 19 du roulement 16.The rotor 1 is supported in the stator by two rolling bearings 16 and 17. A spacer 18 allows to adapt the diameter of the internal part 8 of the stator to that of the outer ring 19 of the bearing 16.

Si le diamètre de la bague extérieure 19 du roulement 16 est supérieur au diamètre du circuit magnétique 10, cela permet d'éviter l'entretoise 18 comme le montre la figure 3.If the diameter of the outer ring 19 of the bearing 16 is greater than the diameter of the magnetic circuit 10, this avoids the spacer 18 as shown in Figure 3.

Bien entendu, la pompe décrite est une pompe à ailettes, mais l'invention s'applique tout aussi bien aux pompes moléculaires du type Holweck à tambour et le terme de pompe turbomoléculaire utilisé englobe aussi bien les pompes à ailettes que celles du type Holweck.Of course, the pump described is a pump fins, but the invention applies equally well to Holweck drum type molecular pumps and the term turbomolecular pump used includes both pumps with fins than those of the Holweck type.

Ainsi, la pompe de l'invention, grâce à son rotor monobloc, sans assemblage, et dont le rotor du moteur d'entraínement est situé non pas autour de l'arbre central, mais logé dans un alésage central de l'arbre, et constitué d'un unique aimant permanent cylindrique, permet une excellente rigidité de l'ensemble tournant, un encombrement et un coût moindre et minimise le dégazage interne de la pompe côté aspiration.Thus, the pump of the invention, thanks to its rotor monobloc, without assembly, and including the motor rotor drive is located not around the central shaft, but housed in a central bore of the shaft, and made up of a single cylindrical permanent magnet, allows a excellent rigidity of the rotating assembly, compactness and lower cost and minimizes the internal degassing of the suction side pump.

Claims (2)

  1. A turbomolecular pump comprising a stator (6, 8) and a rotor (1), said rotor comprising a central shaft (5) and a bell-shaped active portion (3), said stator comprising an outer portion (6) and an inner portion (8) that penetrates into the cavity (9) of said bell-shaped active portion (3), and that supports the stator portion (10, 11) of the drive motor, the shaft (5) of said rotor supporting the rotor portion of said drive motor, said central shaft (5) and the bell-shaped active portion (3) of the rotor being made in one piece, without any assembly being necessary, said central shaft (5) and the bell-shaped active portion (3) of the rotor are made of a nonmagnetic material, said shaft (5) being provided with a central bore (13) which receives the rotor portion of said drive motor, which portion is constituted by a cylindrical permanent magnet (12).
  2. A turbomolecular vacuum pump according to claim 1, characterized in that said permanent magnet (12) has a cross-section that is circular with two diametrically opposite flats (14, 15).
EP95401896A 1994-08-19 1995-08-16 Turbomolecular vacuum pump Expired - Lifetime EP0697524B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9410147A FR2723767B1 (en) 1994-08-19 1994-08-19 TURBOMOLECULAR VACUUM PUMP
FR9410147 1994-08-19

Publications (2)

Publication Number Publication Date
EP0697524A1 EP0697524A1 (en) 1996-02-21
EP0697524B1 true EP0697524B1 (en) 1999-03-10

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ID=9466397

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95401896A Expired - Lifetime EP0697524B1 (en) 1994-08-19 1995-08-16 Turbomolecular vacuum pump

Country Status (5)

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US (1) US5542825A (en)
EP (1) EP0697524B1 (en)
JP (1) JPH0868388A (en)
DE (1) DE69508163T2 (en)
FR (1) FR2723767B1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE508445C2 (en) * 1997-01-28 1998-10-05 Magnetal Ab High speed vacuum pump
DE19718791A1 (en) * 1997-05-03 1998-11-05 Mannesmann Vdo Ag Conveyor unit
JP3013083B2 (en) * 1998-06-23 2000-02-28 セイコー精機株式会社 Turbo molecular pump
US6412173B1 (en) 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
JP3856661B2 (en) * 2001-06-06 2006-12-13 株式会社荏原製作所 Vacuum pump
DE10211134C1 (en) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolecular pump for low pressure applications has coaxial central opening providing free access to center
ITTO20030421A1 (en) * 2003-06-05 2004-12-06 Varian Spa COMPACT VACUUM PUMP
JP2007309245A (en) * 2006-05-19 2007-11-29 Boc Edwards Kk Vacuum pump
US8513826B2 (en) * 2008-06-26 2013-08-20 Ed Mazur Wind turbine
FR2974175B1 (en) * 2011-04-14 2013-10-11 Mecanique Magnetique Sa DEVICE FOR DETECTING THE AXIAL POSITION OF A ROTATING SHAFT AND APPLICATION TO A TURBO-MOLECULAR PUMP
DE202012000611U1 (en) * 2012-01-21 2013-04-23 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump

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Publication number Priority date Publication date Assignee Title
CH477629A (en) * 1967-08-18 1969-08-31 Pfeiffer Vakuumtechnik Vacuum pump with an electric drive, in particular a turbo molecular pump
US3535052A (en) * 1967-08-18 1970-10-20 Pfeiffer Vakuumtechnik Electrically driven vacuum pump
DE2554995A1 (en) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik TURBOMOLECULAR PUMP
US4725750A (en) * 1980-11-20 1988-02-16 Hughes Aircraft Company Permanent magnet rotary machine
JPS58163255A (en) * 1982-03-24 1983-09-28 Okuma Mach Works Ltd Rotor for permanent magnet type synchronous motor
US4629921A (en) * 1982-09-14 1986-12-16 Gavaletz John S Dynamoelectric machine rotor
US4588914A (en) * 1984-06-05 1986-05-13 Westinghouse Electric Corp. Permanent magnet rotor for high speed motors and generators
JPS62261696A (en) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp Turbo-molecular pumping plant
JPS62282192A (en) * 1986-05-30 1987-12-08 Mitsubishi Electric Corp Turbo molecular pump
DE3931661A1 (en) * 1989-08-25 1991-04-04 Leybold Ag MAGNETIC BEARING VACUUM PUMP
FR2659396B1 (en) * 1990-03-07 1992-05-15 Cit Alcatel VACUUM PUMP FOR CLEAN MOLECULAR VACUUM.
JPH04219493A (en) * 1990-08-10 1992-08-10 Ebara Corp Turbo-molecular pump
JP2527398B2 (en) * 1992-06-05 1996-08-21 財団法人真空科学研究所 Turbo molecular pump

Also Published As

Publication number Publication date
US5542825A (en) 1996-08-06
JPH0868388A (en) 1996-03-12
DE69508163D1 (en) 1999-04-15
DE69508163T2 (en) 1999-08-05
FR2723767A1 (en) 1996-02-23
EP0697524A1 (en) 1996-02-21
FR2723767B1 (en) 1997-01-03

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