EP0697524A1 - Turbomolecular vacuum pump - Google Patents

Turbomolecular vacuum pump Download PDF

Info

Publication number
EP0697524A1
EP0697524A1 EP95401896A EP95401896A EP0697524A1 EP 0697524 A1 EP0697524 A1 EP 0697524A1 EP 95401896 A EP95401896 A EP 95401896A EP 95401896 A EP95401896 A EP 95401896A EP 0697524 A1 EP0697524 A1 EP 0697524A1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
bell
shaft
drive motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95401896A
Other languages
German (de)
French (fr)
Other versions
EP0697524B1 (en
Inventor
Denis Perrillat-Amede
Didier Pierrejean
François Reverdy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP0697524A1 publication Critical patent/EP0697524A1/en
Application granted granted Critical
Publication of EP0697524B1 publication Critical patent/EP0697524B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump

Definitions

  • the present invention relates to a turbomolecular pump comprising a stator and a rotor, the rotor comprising an active part of the bell type and a central shaft, the stator comprising an external part and an internal part penetrating into the cavity of said active bell part and supporting the stator part of the drive motor, the rotor shaft supporting the rotor part of the drive motor.
  • the rotor of the electric drive motor is fixed around the central shaft which is itself assembled to the active part itself by a screw, the rotor of the electric motor being constituted, according to the type of motor, windings, iron or permanent magnets.
  • the permanent magnet motor is generally preferred for its efficiency, its size and the stability of its speed of rotation.
  • the speed of rotation is limited by the resistance of the materials constituting the rotor, but also by the dynamic behavior of the rotor which is linked among other things to the rigidity of the rotor.
  • the rotor assembly of known pumps is difficult to rigid, it is bulky, expensive and difficult to degas. In particular, it is difficult to obtain good rigidity of the shaft-part assembly active and good resistance of permanent magnets to centrifugal forces. It is necessary to hoop the magnets.
  • the present invention aims to provide a rigid rotor pump, compact and low degassing.
  • rigid rotor is meant a rotor whose frequency of the first bending mode is much higher than the frequency of rotation of the pump.
  • a subject of the invention is therefore a turbomolecular vacuum pump, as defined above, characterized in that said central shaft and said bell-shaped active part of the rotor are in one piece, without assembly and made of non-magnetic material, said shaft comprising a central bore in which is housed the rotor part of said drive motor, consisting of a cylindrical permanent magnet.
  • said permanent magnet has a circular section with two diametrically opposite flats. This arrangement allows the evacuation of air during the introduction of the magnet into the bore of the shaft.
  • Figure 1 shows in axial section a turbomolecular pump according to the invention.
  • Figure 2 shows the section of the permanent magnet used as the rotor of the electric drive motor.
  • Figure 3 shows a small mounting variant.
  • a fin type turbomolecular vacuum pump comprising a rotor 1 and a stator 2.
  • the rotor 1 comprises an active part 3 in the shape of a bell and comprising fins 4 and a central shaft 5.
  • the active part 3 with its fins 4 and the central shaft 5 do not only one and the same part made in a single block without assembly and in a non-magnetic material.
  • the stator 2 is in two assembled parts: an external part 6 in which are mounted stages of fixed fins 7 and an internal part 8 which penetrates into the cavity 9 of the active part 3 in the form of a bell of the rotor 1.
  • This internal part 8 of the stator carries the stator part of an electric drive motor comprising a magnetic circuit 10 and windings 11.
  • the rotor part of the drive motor consists of a single cylindrical multipolar permanent magnet 12 introduced at the bottom a central bore 13 of the central shaft 5.
  • the permanent magnet 12 has a circular section, but with two diametrically opposite flats 14 and 15 so as to allow the evacuation of air during the introduction of the magnet into the bore 13.
  • the rotor 1 is supported in the stator by two rolling bearings 16 and 17.
  • a spacer 18 makes it possible to adapt the diameter of the internal part 8 of the stator to that of the external ring 19 of the bearing 16.
  • the pump described is a vane pump, but the invention applies equally well to molecular pumps of the Holweck drum type and the term of turbomolecular pump used includes both vane pumps and those of the Holweck type.
  • the pump of the invention thanks to its monobloc rotor, without assembly, and whose rotor of the drive motor is located not around the central shaft, but housed in a central bore of the shaft, and consisting of a single permanent cylindrical magnet, allows excellent rigidity of the rotating assembly, space and lower cost and minimizes the internal degassing of the pump on the suction side.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

The turbo-molecular vacuum pump includes a stator (6, 8) and a rotor (1), the rotor including a bell-type active part (3) and a central shaft (5). The stator comprises an external part (6) and an internal part (8) penetrating into the cavity (9) of the bell-shaped active part. The central shaft (5) and the active bell shape of the rotor are formed as a monoblock. The shaft (5) includes a central bore (13) in which is lodges the rotor part of the drive motor, consisting of a cylindrical permanent magnet.

Description

La présente invention concerne une pompe turbomoléculaire comportant un stator et un rotor, le rotor comportant une partie active du type en cloche et un arbre central, le stator comportant une partie externe et une partie interne pénétrant dans la cavité de ladite partie active en cloche et supportant la partie statorique du moteur d'entraînement, l'arbre du rotor supportant la partie rotorique du moteur d'entraînement.The present invention relates to a turbomolecular pump comprising a stator and a rotor, the rotor comprising an active part of the bell type and a central shaft, the stator comprising an external part and an internal part penetrating into the cavity of said active bell part and supporting the stator part of the drive motor, the rotor shaft supporting the rotor part of the drive motor.

Dans les pompes connues de ce type, le rotor du moteur électrique d'entraînement est fixé autour de l'arbre central qui est lui-même assemblé à la partie active elle-même par une vis, le rotor du moteur électrique étant constitué, selon le type de moteur, de bobinages, de fer ou d'aimants permanents. Le moteur à aimants permanents est généralement préféré, pour son rendement, son encombrement et la stabilité de sa vitesse de rotation.In known pumps of this type, the rotor of the electric drive motor is fixed around the central shaft which is itself assembled to the active part itself by a screw, the rotor of the electric motor being constituted, according to the type of motor, windings, iron or permanent magnets. The permanent magnet motor is generally preferred for its efficiency, its size and the stability of its speed of rotation.

On sait qu'afin d'obtenir de meilleurs débits et taux de compression, on est amené à augmenter la vitesse de rotation de la machine, dont ces performances sont proportionnelles à cette vitesse.It is known that in order to obtain better flow rates and compression rates, it is necessary to increase the speed of rotation of the machine, whose performance is proportional to this speed.

La vitesse de rotation est limitée par la résistance des matériaux constituant le rotor, mais également par le comportement dynamique du rotor qui est lié entre autre à la rigidité du rotor.The speed of rotation is limited by the resistance of the materials constituting the rotor, but also by the dynamic behavior of the rotor which is linked among other things to the rigidity of the rotor.

Par ailleurs, l'intégration des pompes à l'intérieur d'appareils, tels que des détecteurs de fuite ou les analyseurs de gaz conduit à miniaturiser le plus possible les pompes. Un autre élément important est le dégazage des éléments constitutifs de la pompe car il conditionne en partie la pression limite, il est en particulier nécessaire de minimiser ce dégazage côté aspiration.Furthermore, the integration of pumps inside devices, such as leak detectors or gas analyzers leads to miniaturizing the pumps as much as possible. Another important element is the degassing of the constituent elements of the pump because it partly conditions the limit pressure, it is in particular necessary to minimize this degassing on the suction side.

L'assemblage rotorique des pompes connues est difficilement rigide, il est encombrant, coûteux et difficile à dégazer. En particulier, il est difficile d'obtenir une bonne rigidité de l'assemblage arbre-partie active et une bonne résistance des aimants permanents aux efforts centrifuges. Il est nécessaire de fretter les aimants.The rotor assembly of known pumps is difficult to rigid, it is bulky, expensive and difficult to degas. In particular, it is difficult to obtain good rigidity of the shaft-part assembly active and good resistance of permanent magnets to centrifugal forces. It is necessary to hoop the magnets.

La présente invention a pour but de proposer une pompe à rotor rigide, peu encombrant et à faible dégazage. Par rotor rigide, on entend un rotor dont la fréquence du premier mode de flexion est très supérieure à la fréquence de rotation de la pompe.The present invention aims to provide a rigid rotor pump, compact and low degassing. By rigid rotor is meant a rotor whose frequency of the first bending mode is much higher than the frequency of rotation of the pump.

L'invention a ainsi pour objet une pompe à vide turbomoléculaire, telle que définie ci-dessus, caractérisée en ce que ledit arbre central et ladite partie active en cloche du rotor sont monobloc, sans assemblage et en matériau non magnétique, ledit arbre comportant un alésage central dans lequel est logée la partie rotorique dudit moteur d'entraînement, constituée d'un aimant permanent cylindrique.A subject of the invention is therefore a turbomolecular vacuum pump, as defined above, characterized in that said central shaft and said bell-shaped active part of the rotor are in one piece, without assembly and made of non-magnetic material, said shaft comprising a central bore in which is housed the rotor part of said drive motor, consisting of a cylindrical permanent magnet.

Avantageusement, ledit aimant permanent a une section circulaire avec deux méplats diamétralement opposés. Cette disposition permet l'évacuation de l'air lors de l'introduction de l'aimant dans l'alésage de l'arbre.Advantageously, said permanent magnet has a circular section with two diametrically opposite flats. This arrangement allows the evacuation of air during the introduction of the magnet into the bore of the shaft.

On va maintenant donner la description d'un exemple de mise en oeuvre de l'invention en se reportant au dessin annexé dans lequel :We will now give the description of an exemplary implementation of the invention with reference to the appended drawing in which:

La figure 1 montre en coupe axiale une pompe turbomoléculaire selon l'invention.Figure 1 shows in axial section a turbomolecular pump according to the invention.

La figure 2 montre la section de l'aimant permanent utilisé comme rotor du moteur électrique d'entraînement.Figure 2 shows the section of the permanent magnet used as the rotor of the electric drive motor.

La figure 3 montre une petite variante de montage.Figure 3 shows a small mounting variant.

En se référant à la figure 1, on voit une pompe à vide turbomoléculaire du type à ailettes. Cette pompe comporte un rotor 1 et un stator 2. Le rotor 1 comprend une partie active 3 en forme de cloche et comportant des ailettes 4 et un arbre central 5. La partie active 3 avec ses ailettes 4 et l'arbre central 5 ne font qu'une seule et même pièce réalisée en un seul bloc sans assemblage et en un matériau non magnétique. Le stator 2 est en deux parties assemblées : une partie externe 6 dans laquelle sont montés des étages d'ailettes fixes 7 et une partie interne 8 qui pénètre dans la cavité 9 de la partie active 3 en forme de cloche du rotor 1.Referring to Figure 1, there is shown a fin type turbomolecular vacuum pump. This pump comprises a rotor 1 and a stator 2. The rotor 1 comprises an active part 3 in the shape of a bell and comprising fins 4 and a central shaft 5. The active part 3 with its fins 4 and the central shaft 5 do not only one and the same part made in a single block without assembly and in a non-magnetic material. The stator 2 is in two assembled parts: an external part 6 in which are mounted stages of fixed fins 7 and an internal part 8 which penetrates into the cavity 9 of the active part 3 in the form of a bell of the rotor 1.

Cette partie interne 8 du stator porte la partie statorique d'un moteur électrique d'entraînement comprenant un circuit magnétique 10 et des enroulements 11. La partie rotorique du moteur d'entraînement est constituée d'un unique aimant permanent multipolaire cylindrique 12 introduit au fond d'un alésage central 13 de l'arbre central 5.This internal part 8 of the stator carries the stator part of an electric drive motor comprising a magnetic circuit 10 and windings 11. The rotor part of the drive motor consists of a single cylindrical multipolar permanent magnet 12 introduced at the bottom a central bore 13 of the central shaft 5.

Comme le montre la figure 3, l'aimant permanent 12 a une section circulaire, mais avec deux méplats diamétralement opposés 14 et 15 de façon à permettre l'évacuation de l'air lors de l'introduction de l'aimant dans l'alésage 13.As shown in Figure 3, the permanent magnet 12 has a circular section, but with two diametrically opposite flats 14 and 15 so as to allow the evacuation of air during the introduction of the magnet into the bore 13.

Le rotor 1 est supporté dans le stator par deux paliers à roulements 16 et 17. Une entretoise 18 permet d'adapter le diamètre de la partie interne 8 du stator à celui de la bague externe 19 du roulement 16.The rotor 1 is supported in the stator by two rolling bearings 16 and 17. A spacer 18 makes it possible to adapt the diameter of the internal part 8 of the stator to that of the external ring 19 of the bearing 16.

Si le diamètre de la bague extérieure 19 du roulement 16 est supérieur au diamètre du circuit magnétique 10, cela permet d'éviter l'entretoise 18 comme le montre la figure 3.If the diameter of the outer ring 19 of the bearing 16 is greater than the diameter of the magnetic circuit 10, this makes it possible to avoid the spacer 18 as shown in FIG. 3.

Bien entendu, la pompe décrite est une pompe à ailettes, mais l'invention s'applique tout aussi bien aux pompes moléculaires du type Holweck à tambour et le terme de pompe turbomoléculaire utilisé englobe aussi bien les pompes à ailettes que celles du type Holweck.Of course, the pump described is a vane pump, but the invention applies equally well to molecular pumps of the Holweck drum type and the term of turbomolecular pump used includes both vane pumps and those of the Holweck type.

Ainsi, la pompe de l'invention, grâce à son rotor monobloc, sans assemblage, et dont le rotor du moteur d'entraînement est situé non pas autour de l'arbre central, mais logé dans un alésage central de l'arbre, et constitué d'un unique aimant permanent cylindrique, permet une excellente rigidité de l'ensemble tournant, un encombrement et un coût moindre et minimise le dégazage interne de la pompe côté aspiration.Thus, the pump of the invention, thanks to its monobloc rotor, without assembly, and whose rotor of the drive motor is located not around the central shaft, but housed in a central bore of the shaft, and consisting of a single permanent cylindrical magnet, allows excellent rigidity of the rotating assembly, space and lower cost and minimizes the internal degassing of the pump on the suction side.

Claims (2)

1/ Pompe à vide turbomoléculaire, comportant un stator (6, 8) et un rotor (1), ledit rotor comportant une partie active (3) du type en cloche et un arbre central (5), ledit stator comportant une partie externe (6) et une partie interne (8) pénétrant dans la cavité (9) de ladite partie active en cloche (3) et supportant la partie statorique (10, 11) du moteur d'entraînement, l'arbre (5) dudit rotor supportant la partie rotorique dudit moteur d'entraînement, caractérisée en ce que ledit arbre central (5) et la partie active en cloche (3) du rotor sont monobloc sans assemblage et en matériau non magnétique, ledit arbre (5) comportant un alésage central (13) dans lequel est logée la partie rotorique dudit moteur d'entraînement, constituée d'un aimant permanent cylindrique (12). 1 / Turbomolecular vacuum pump, comprising a stator (6, 8) and a rotor (1), said rotor comprising an active part (3) of the bell type and a central shaft (5), said stator comprising an external part ( 6) and an internal part (8) penetrating into the cavity (9) of said bell-shaped active part (3) and supporting the stator part (10, 11) of the drive motor, the shaft (5) of said rotor supporting the rotor part of said drive motor, characterized in that said central shaft (5) and the bell-shaped active part (3) of the rotor are in one piece without assembly and made of non-magnetic material, said shaft (5) having a central bore ( 13) in which is housed the rotor part of said drive motor, consisting of a cylindrical permanent magnet (12). 2/ Pompe à vide turbomoléculaire selon la revendication 1, caractérisée en ce que ledit aimant permanent (12) a une section circulaire avec deux méplats diamétralement opposés (14, 15). 2 / turbomolecular vacuum pump according to claim 1, characterized in that said permanent magnet (12) has a circular section with two diametrically opposite flats (14, 15).
EP95401896A 1994-08-19 1995-08-16 Turbomolecular vacuum pump Expired - Lifetime EP0697524B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9410147A FR2723767B1 (en) 1994-08-19 1994-08-19 TURBOMOLECULAR VACUUM PUMP
FR9410147 1994-08-19

Publications (2)

Publication Number Publication Date
EP0697524A1 true EP0697524A1 (en) 1996-02-21
EP0697524B1 EP0697524B1 (en) 1999-03-10

Family

ID=9466397

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95401896A Expired - Lifetime EP0697524B1 (en) 1994-08-19 1995-08-16 Turbomolecular vacuum pump

Country Status (5)

Country Link
US (1) US5542825A (en)
EP (1) EP0697524B1 (en)
JP (1) JPH0868388A (en)
DE (1) DE69508163T2 (en)
FR (1) FR2723767B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998032973A1 (en) * 1997-01-28 1998-07-30 Magnetal Ab Magnetically suspended high velocity vacuum pump
WO2003076810A1 (en) * 2002-03-14 2003-09-18 Gesellschaft für Schwerionenforschung mbH Turbomolecular pump with a high-vacuum sided circular suction surface

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19718791A1 (en) * 1997-05-03 1998-11-05 Mannesmann Vdo Ag Conveyor unit
JP3013083B2 (en) * 1998-06-23 2000-02-28 セイコー精機株式会社 Turbo molecular pump
US6412173B1 (en) 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
JP3856661B2 (en) * 2001-06-06 2006-12-13 株式会社荏原製作所 Vacuum pump
ITTO20030421A1 (en) * 2003-06-05 2004-12-06 Varian Spa COMPACT VACUUM PUMP
JP2007309245A (en) * 2006-05-19 2007-11-29 Boc Edwards Kk Vacuum pump
US8513826B2 (en) * 2008-06-26 2013-08-20 Ed Mazur Wind turbine
FR2974175B1 (en) * 2011-04-14 2013-10-11 Mecanique Magnetique Sa DEVICE FOR DETECTING THE AXIAL POSITION OF A ROTATING SHAFT AND APPLICATION TO A TURBO-MOLECULAR PUMP
DE202012000611U1 (en) * 2012-01-21 2013-04-23 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH477629A (en) * 1967-08-18 1969-08-31 Pfeiffer Vakuumtechnik Vacuum pump with an electric drive, in particular a turbo molecular pump
DE3713534A1 (en) * 1986-05-08 1987-11-12 Mitsubishi Electric Corp TURBO MOLECULAR PUMP
EP0470637A1 (en) * 1990-08-10 1992-02-12 Ebara Corporation Turbo molecular pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535052A (en) * 1967-08-18 1970-10-20 Pfeiffer Vakuumtechnik Electrically driven vacuum pump
DE2554995A1 (en) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik TURBOMOLECULAR PUMP
US4725750A (en) * 1980-11-20 1988-02-16 Hughes Aircraft Company Permanent magnet rotary machine
JPS58163255A (en) * 1982-03-24 1983-09-28 Okuma Mach Works Ltd Rotor for permanent magnet type synchronous motor
US4629921A (en) * 1982-09-14 1986-12-16 Gavaletz John S Dynamoelectric machine rotor
US4588914A (en) * 1984-06-05 1986-05-13 Westinghouse Electric Corp. Permanent magnet rotor for high speed motors and generators
JPS62282192A (en) * 1986-05-30 1987-12-08 Mitsubishi Electric Corp Turbo molecular pump
DE3931661A1 (en) * 1989-08-25 1991-04-04 Leybold Ag MAGNETIC BEARING VACUUM PUMP
FR2659396B1 (en) * 1990-03-07 1992-05-15 Cit Alcatel VACUUM PUMP FOR CLEAN MOLECULAR VACUUM.
JP2527398B2 (en) * 1992-06-05 1996-08-21 財団法人真空科学研究所 Turbo molecular pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH477629A (en) * 1967-08-18 1969-08-31 Pfeiffer Vakuumtechnik Vacuum pump with an electric drive, in particular a turbo molecular pump
DE3713534A1 (en) * 1986-05-08 1987-11-12 Mitsubishi Electric Corp TURBO MOLECULAR PUMP
EP0470637A1 (en) * 1990-08-10 1992-02-12 Ebara Corporation Turbo molecular pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998032973A1 (en) * 1997-01-28 1998-07-30 Magnetal Ab Magnetically suspended high velocity vacuum pump
WO2003076810A1 (en) * 2002-03-14 2003-09-18 Gesellschaft für Schwerionenforschung mbH Turbomolecular pump with a high-vacuum sided circular suction surface

Also Published As

Publication number Publication date
DE69508163T2 (en) 1999-08-05
FR2723767A1 (en) 1996-02-23
FR2723767B1 (en) 1997-01-03
DE69508163D1 (en) 1999-04-15
JPH0868388A (en) 1996-03-12
EP0697524B1 (en) 1999-03-10
US5542825A (en) 1996-08-06

Similar Documents

Publication Publication Date Title
EP0697524B1 (en) Turbomolecular vacuum pump
JP3961273B2 (en) Vacuum pump
EP1682778A1 (en) Turbomolecular vacuum pump
KR20010025024A (en) Friction vacuum pump with a stator and a rotor
EP0664410A1 (en) Magnetic bearing and an assembly composed of a stator and a rotor suspended by such a bearing
EP1001507A1 (en) Electric machine rotor specially adapted to high speeds
EP1604115A1 (en) Integrated centrifugal compressor unit
EP0882892A1 (en) Scroll type machine
FR2965126A1 (en) PUMP MODULE
EP0720272B1 (en) Rotating device having an axial magnetical thrust bearing and radial levitating means
FR2776037A1 (en) Magnetic bearings structure for e.g. small-sized devices high speed fan motor
FR2735535A1 (en) TURBOMOLECULAR PUMP
EP0280984B1 (en) Rotary vacuum pump
EP1576292B1 (en) Vacuum pumping arrangement
KR20030045597A (en) Vacuum pump
EP0751297A1 (en) Turbo molecular pump
FR2629877A1 (en) VACUUM MOLECULAR PUMP
JP3399800B2 (en) Motor and turbo molecular pump
EP0445691A1 (en) Vacuum pump with magnetic suspension
US20060153715A1 (en) Vacuum pumping system and method of operating a vacuum pumping arrangement
US20060099094A1 (en) Vacuum pumping arrangement and method of operating same
FR2611818A1 (en) Molecular rotary vacuum pump of the Gaëde channel type
WO2022254148A1 (en) Turbomachine provided with a magnetic drive pump
EP2631490B1 (en) Radial-flow impeller with radially free base ring
EP3921922B1 (en) Device for compressing a fluid driven by an electric machine with a compression shaft passing through the rotor

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE GB IT

17P Request for examination filed

Effective date: 19960629

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

17Q First examination report despatched

Effective date: 19980216

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL ALSTHOM COMPAGNIE GENERALE D'ELECTRICITE

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE GB IT

ITF It: translation for a ep patent filed

Owner name: JACOBACCI & PERANI S.P.A.

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19990322

REF Corresponds to:

Ref document number: 69508163

Country of ref document: DE

Date of ref document: 19990415

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20070822

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20070823

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20070827

Year of fee payment: 13

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20080816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080816

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090303

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080816