FR3112176B1 - Pompe à vide primaire et Installation - Google Patents

Pompe à vide primaire et Installation Download PDF

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Publication number
FR3112176B1
FR3112176B1 FR2010341A FR2010341A FR3112176B1 FR 3112176 B1 FR3112176 B1 FR 3112176B1 FR 2010341 A FR2010341 A FR 2010341A FR 2010341 A FR2010341 A FR 2010341A FR 3112176 B1 FR3112176 B1 FR 3112176B1
Authority
FR
France
Prior art keywords
vacuum pump
stator
cassette
pump
installation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2010341A
Other languages
English (en)
Other versions
FR3112176A1 (fr
Inventor
Stéphane Crochet
Yann Olivier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2010341A priority Critical patent/FR3112176B1/fr
Priority to PCT/EP2021/058021 priority patent/WO2021219307A1/fr
Publication of FR3112176A1 publication Critical patent/FR3112176A1/fr
Application granted granted Critical
Publication of FR3112176B1 publication Critical patent/FR3112176B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F04C29/061—Silencers using overlapping frequencies, e.g. Helmholtz resonators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/04—Thermal properties

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Pompe à vide (1) primaire comprenant un orifice d’aspiration (4) et un orifice de refoulement (5), la pompe à vide (1) étant configurée pour pouvoir refouler les gaz pompés à pression atmosphérique, comprenant :- un stator (2) comprenant au moins un étage de pompage (3a-3e),- deux arbres de rotors (6) configurés pour tourner de façon synchronisée en sens inverse dans le au moins un étage de pompage (3a-3e) pour entrainer un gaz à pomper entre l’orifice d’aspiration (4) et un orifice de sortie (8) du stator (2),caractérisée en ce que la pompe à vide (1) comprend en outre au moins une cassette (11) configurée pour recevoir au moins l’un des éléments parmi un silencieux (10), au moins un dispositif de délestage (29), au moins un dispositif de purge et un refroidisseur (27) de la pompe à vide (1), la au moins une cassette (11) étant fixée au stator (2) de manière amovible et interposée sur le chemin d’écoulement des gaz. Figure d’abrégé : FIGURE : 2
FR2010341A 2020-04-29 2020-10-09 Pompe à vide primaire et Installation Active FR3112176B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2010341A FR3112176B1 (fr) 2020-10-09 2020-10-09 Pompe à vide primaire et Installation
PCT/EP2021/058021 WO2021219307A1 (fr) 2020-04-29 2021-03-26 Pompe à vide primaire et installation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2010341A FR3112176B1 (fr) 2020-10-09 2020-10-09 Pompe à vide primaire et Installation
FR2010341 2020-10-09

Publications (2)

Publication Number Publication Date
FR3112176A1 FR3112176A1 (fr) 2022-01-07
FR3112176B1 true FR3112176B1 (fr) 2023-03-17

Family

ID=74183307

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2010341A Active FR3112176B1 (fr) 2020-04-29 2020-10-09 Pompe à vide primaire et Installation

Country Status (1)

Country Link
FR (1) FR3112176B1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1715188A1 (fr) * 2005-04-22 2006-10-25 Kaeser Kompressoren GmbH Silencieux développé pour et destiné à un compresseur
JP5524691B2 (ja) * 2010-04-19 2014-06-18 株式会社荏原製作所 複合型サイレンサ、及びドライ真空ポンプ装置
FR2978214B1 (fr) * 2011-07-21 2013-08-16 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
BE1023523B1 (nl) * 2015-09-25 2017-04-19 Atlas Copco Airpower, N.V. Werkwijze voor het koelen van een compressor of vacuümpomp en een compressor of vacuümpomp die een dergelijke werkwijze toepast
DE202016001950U1 (de) * 2016-03-30 2017-07-03 Leybold Gmbh Vakuumpumpe
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge

Also Published As

Publication number Publication date
FR3112176A1 (fr) 2022-01-07

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