FR2869369A1 - Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe - Google Patents

Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe

Info

Publication number
FR2869369A1
FR2869369A1 FR0450741A FR0450741A FR2869369A1 FR 2869369 A1 FR2869369 A1 FR 2869369A1 FR 0450741 A FR0450741 A FR 0450741A FR 0450741 A FR0450741 A FR 0450741A FR 2869369 A1 FR2869369 A1 FR 2869369A1
Authority
FR
France
Prior art keywords
stage
pump
gases
vacuum pump
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR0450741A
Other languages
English (en)
Other versions
FR2869369B1 (fr
Inventor
Pascal Durand
Jean Francois Vuillermoz
Patrick Pilotti
Jean Francois Grosdaillon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA filed Critical Alcatel SA
Priority to FR0450741A priority Critical patent/FR2869369B1/fr
Priority to EP05290810A priority patent/EP1589227A1/fr
Priority to JP2005119563A priority patent/JP2005307978A/ja
Priority to US11/109,798 priority patent/US7670119B2/en
Publication of FR2869369A1 publication Critical patent/FR2869369A1/fr
Application granted granted Critical
Publication of FR2869369B1 publication Critical patent/FR2869369B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
  • Rotary Pumps (AREA)

Abstract

La présente invention a pour objet une pompe à vide multi-étagée comportant au moins un premier étage basse pression et au moins un deuxième étage haute pression. L'un au moins des étages comporte au moins un orifice pour l'admission des gaz à pomper, dit aspiration, et l'un au moins des étages comporte au moins un orifice ouvert vers l'extérieur destinée à l'évacuation des gaz pompés, dit refoulement. Les premier et deuxième étages communiquent afin d'assurer le passage des gaz entre le premier étage et le deuxième étage. Le premier étage travaille à un débit plus faible que le deuxième étage.Dans le cas d'une pompe volumétrique rotative à palettes et à joint d'huile, l'huile est injectée dans l'étage ayant le débit le plus important.
FR0450741A 2004-04-21 2004-04-21 Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe Expired - Fee Related FR2869369B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0450741A FR2869369B1 (fr) 2004-04-21 2004-04-21 Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe
EP05290810A EP1589227A1 (fr) 2004-04-21 2005-04-13 Pompe à vide multi-étagée et installation de pompage comprenant une telle pompe
JP2005119563A JP2005307978A (ja) 2004-04-21 2005-04-18 多段式真空ポンプおよびその種のポンプを備えたポンプ設備
US11/109,798 US7670119B2 (en) 2004-04-21 2005-04-20 Multistage vacuum pump and a pumping installation including such a pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0450741A FR2869369B1 (fr) 2004-04-21 2004-04-21 Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe

Publications (2)

Publication Number Publication Date
FR2869369A1 true FR2869369A1 (fr) 2005-10-28
FR2869369B1 FR2869369B1 (fr) 2006-07-21

Family

ID=34942115

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0450741A Expired - Fee Related FR2869369B1 (fr) 2004-04-21 2004-04-21 Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe

Country Status (4)

Country Link
US (1) US7670119B2 (fr)
EP (1) EP1589227A1 (fr)
JP (1) JP2005307978A (fr)
FR (1) FR2869369B1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080226480A1 (en) * 2007-03-15 2008-09-18 Ion Metrics, Inc. Multi-Stage Trochoidal Vacuum Pump
DE102010019635B4 (de) * 2010-05-06 2014-04-03 Multivac Sepp Haggenmüller Gmbh & Co. Kg Siegelstation für eine Verpackungsmaschine
EP2946082B1 (fr) * 2013-01-18 2019-11-06 United Technologies Corporation Plaque de transfert de pompe à huile
US10760573B2 (en) * 2014-06-27 2020-09-01 Ateliers Busch Sa Method of pumping in a system of vacuum pumps and system of vacuum pumps
CN106540470A (zh) * 2016-11-02 2017-03-29 佛山市龙眼智能制造科技有限公司 一种高效节能集中烘料的真空系统及其工作方法
GB2572958C (en) * 2018-04-16 2021-06-23 Edwards Ltd A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
EP4168678A4 (fr) * 2020-06-18 2024-06-19 Milwaukee Electric Tool Corp Pompe à vide dotée d'une électrovanne
FR3112578B3 (fr) * 2020-07-20 2022-07-22 Pfeiffer Vacuum Pompe à vide à palettes, détecteur et installation de lyophilisation

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB863163A (en) * 1956-09-21 1961-03-15 Scaife Company Rotary gas compressor pump
US3668393A (en) * 1969-09-30 1972-06-06 Siemens Ag Apparatus having evacuation spaces and a pumping assembly
DE3710782A1 (de) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3116872A (en) * 1959-05-18 1964-01-07 Bendix Balzers Vacuum Inc Gas ballast pumps
JPS5237214A (en) * 1975-09-19 1977-03-23 Hitachi Ltd Multi-stage screw compressor
JPS6223501A (ja) * 1985-07-24 1987-01-31 Kobe Steel Ltd サイドストリ−ム形スクリユ−膨張機
JPH03271578A (ja) * 1990-03-20 1991-12-03 Mitsubishi Motors Corp 二段ベーンポンプ
JPH0436091A (ja) * 1990-05-29 1992-02-06 Shimadzu Corp 油回転真空ポンプ
JPH0726625B2 (ja) * 1990-12-12 1995-03-29 株式会社荏原製作所 ２段スクリュー真空ポンプ
JPH0518382A (ja) * 1991-07-10 1993-01-26 Ebara Corp スクリユー形真空ポンプ
JPH0658278A (ja) * 1992-08-05 1994-03-01 Ebara Corp 多段スクリュー式真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB863163A (en) * 1956-09-21 1961-03-15 Scaife Company Rotary gas compressor pump
US3668393A (en) * 1969-09-30 1972-06-06 Siemens Ag Apparatus having evacuation spaces and a pumping assembly
DE3710782A1 (de) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür

Also Published As

Publication number Publication date
JP2005307978A (ja) 2005-11-04
US20050238502A1 (en) 2005-10-27
US7670119B2 (en) 2010-03-02
EP1589227A1 (fr) 2005-10-26
FR2869369B1 (fr) 2006-07-21

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse

Effective date: 20111230