JP5028033B2 - 酸化物半導体膜のドライエッチング方法 - Google Patents
酸化物半導体膜のドライエッチング方法 Download PDFInfo
- Publication number
- JP5028033B2 JP5028033B2 JP2006163464A JP2006163464A JP5028033B2 JP 5028033 B2 JP5028033 B2 JP 5028033B2 JP 2006163464 A JP2006163464 A JP 2006163464A JP 2006163464 A JP2006163464 A JP 2006163464A JP 5028033 B2 JP5028033 B2 JP 5028033B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- oxide semiconductor
- dry etching
- semiconductor film
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 53
- 238000001312 dry etching Methods 0.000 title claims description 44
- 239000004065 semiconductor Substances 0.000 title claims description 34
- 238000005530 etching Methods 0.000 claims description 100
- 229930195733 hydrocarbon Natural products 0.000 claims description 23
- 239000004215 Carbon black (E152) Substances 0.000 claims description 22
- 150000002430 hydrocarbons Chemical class 0.000 claims description 22
- 230000008569 process Effects 0.000 claims description 13
- 229910052733 gallium Inorganic materials 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 108091006149 Electron carriers Proteins 0.000 claims description 3
- 239000010408 film Substances 0.000 description 57
- 239000007789 gas Substances 0.000 description 44
- 229910007541 Zn O Inorganic materials 0.000 description 37
- 239000000758 substrate Substances 0.000 description 33
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 12
- 238000001020 plasma etching Methods 0.000 description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 11
- 238000002474 experimental method Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 10
- 230000007423 decrease Effects 0.000 description 8
- 239000011701 zinc Substances 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 239000000047 product Substances 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 229910021617 Indium monochloride Inorganic materials 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- APHGZSBLRQFRCA-UHFFFAOYSA-M indium(1+);chloride Chemical compound [In]Cl APHGZSBLRQFRCA-UHFFFAOYSA-M 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 150000001485 argon Chemical class 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- KLRHPHDUDFIRKB-UHFFFAOYSA-M indium(i) bromide Chemical compound [Br-].[In+] KLRHPHDUDFIRKB-UHFFFAOYSA-M 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 239000000088 plastic resin Substances 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229910005269 GaF 3 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- -1 argon hydrocarbon Chemical class 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 229910000043 hydrogen iodide Inorganic materials 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/465—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Electromagnetism (AREA)
- Drying Of Semiconductors (AREA)
Description
Claims (8)
- 少なくともInと、Gaと、Znと、を含む酸化物半導体膜のエッチング方法において、炭化水素を含むガスでエッチングすることを特徴とする酸化物半導体膜のドライエッチング方法。
- 前記エッチング時の前記炭化水素を含むガスの圧力は、0.6Pa以上3.5Pa以下の範囲であることを特徴とする請求項1記載の酸化物半導体膜のドライエッチング方法。
- 前記エッチング時のRFパワー密度は、0.1W/cm2以上20W/cm2以下の範囲であることを特徴とする請求項1記載の酸化物半導体膜のドライエッチング方法。
- 前記酸化物半導体膜は、電子キャリア濃度が1018/cm3未満である透明アモルファス酸化膜であることを特徴とする請求項1記載の酸化物半導体膜のドライエッチング方法。
- 前記酸化物半導体膜の膜厚は、1nm以上2mm以下の範囲であることを特徴とする請求項1記載の酸化物半導体膜のドライエッチング方法。
- 前記エッチング時の、前記酸化物半導体膜の表面温度は、−20℃以上200℃以下の範囲であることを特徴とする請求項1記載の酸化物半導体膜のドライエッチング方法。
- 前記エッチングプロセスに使用するガスは、炭化水素とArの混合ガスであることを特徴とする請求項1記載の酸化物半導体膜のドライエッチング方法。
- 前記炭化水素とArの混合ガス中で、Arの割合は5mol%以上80mol%以下の範囲であることを特徴とする請求項7記載の酸化物半導体膜のドライエッチング方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006163464A JP5028033B2 (ja) | 2006-06-13 | 2006-06-13 | 酸化物半導体膜のドライエッチング方法 |
US11/802,276 US8034248B2 (en) | 2006-06-13 | 2007-05-22 | Dry etching method for oxide semiconductor film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006163464A JP5028033B2 (ja) | 2006-06-13 | 2006-06-13 | 酸化物半導体膜のドライエッチング方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007335505A JP2007335505A (ja) | 2007-12-27 |
JP2007335505A5 JP2007335505A5 (ja) | 2009-07-30 |
JP5028033B2 true JP5028033B2 (ja) | 2012-09-19 |
Family
ID=38822501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006163464A Expired - Fee Related JP5028033B2 (ja) | 2006-06-13 | 2006-06-13 | 酸化物半導体膜のドライエッチング方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8034248B2 (ja) |
JP (1) | JP5028033B2 (ja) |
Families Citing this family (1777)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI562380B (en) | 2005-01-28 | 2016-12-11 | Semiconductor Energy Lab Co Ltd | Semiconductor device, electronic device, and method of manufacturing semiconductor device |
TWI481024B (zh) | 2005-01-28 | 2015-04-11 | Semiconductor Energy Lab | 半導體裝置,電子裝置,和半導體裝置的製造方法 |
US7858451B2 (en) * | 2005-02-03 | 2010-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, semiconductor device and manufacturing method thereof |
US7948171B2 (en) | 2005-02-18 | 2011-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
US7928938B2 (en) * | 2005-04-19 | 2011-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including memory circuit, display device and electronic apparatus |
US8629819B2 (en) | 2005-07-14 | 2014-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
EP1995787A3 (en) | 2005-09-29 | 2012-01-18 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device having oxide semiconductor layer and manufacturing method therof |
CN101577293B (zh) | 2005-11-15 | 2012-09-19 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
EP2924498A1 (en) | 2006-04-06 | 2015-09-30 | Semiconductor Energy Laboratory Co, Ltd. | Liquid crystal desplay device, semiconductor device, and electronic appliance |
JP4999400B2 (ja) * | 2006-08-09 | 2012-08-15 | キヤノン株式会社 | 酸化物半導体膜のドライエッチング方法 |
JP5116277B2 (ja) | 2006-09-29 | 2013-01-09 | 株式会社半導体エネルギー研究所 | 半導体装置、表示装置、液晶表示装置、表示モジュール及び電子機器 |
US7646015B2 (en) | 2006-10-31 | 2010-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device and semiconductor device |
JP5542297B2 (ja) | 2007-05-17 | 2014-07-09 | 株式会社半導体エネルギー研究所 | 液晶表示装置、表示モジュール及び電子機器 |
JP5542296B2 (ja) | 2007-05-17 | 2014-07-09 | 株式会社半導体エネルギー研究所 | 液晶表示装置、表示モジュール及び電子機器 |
JP4989309B2 (ja) | 2007-05-18 | 2012-08-01 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
US8354674B2 (en) | 2007-06-29 | 2013-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device wherein a property of a first semiconductor layer is different from a property of a second semiconductor layer |
WO2009014155A1 (en) | 2007-07-25 | 2009-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device having the same |
US9041202B2 (en) | 2008-05-16 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US8314765B2 (en) | 2008-06-17 | 2012-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
KR102549916B1 (ko) | 2008-07-10 | 2023-06-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광장치 및 전자기기 |
US9666719B2 (en) | 2008-07-31 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8945981B2 (en) | 2008-07-31 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
TWI491048B (zh) | 2008-07-31 | 2015-07-01 | Semiconductor Energy Lab | 半導體裝置 |
TWI495108B (zh) | 2008-07-31 | 2015-08-01 | Semiconductor Energy Lab | 半導體裝置的製造方法 |
TWI577027B (zh) | 2008-07-31 | 2017-04-01 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
JP5480554B2 (ja) | 2008-08-08 | 2014-04-23 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI500160B (zh) | 2008-08-08 | 2015-09-11 | Semiconductor Energy Lab | 半導體裝置及其製造方法 |
TWI424506B (zh) | 2008-08-08 | 2014-01-21 | Semiconductor Energy Lab | 半導體裝置的製造方法 |
TWI508282B (zh) | 2008-08-08 | 2015-11-11 | Semiconductor Energy Lab | 半導體裝置及其製造方法 |
JP5525778B2 (ja) | 2008-08-08 | 2014-06-18 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9082857B2 (en) | 2008-09-01 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
JP5627071B2 (ja) | 2008-09-01 | 2014-11-19 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
TWI606592B (zh) | 2008-09-01 | 2017-11-21 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
KR101545460B1 (ko) | 2008-09-12 | 2015-08-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 생산 방법 |
WO2010029859A1 (en) * | 2008-09-12 | 2010-03-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR101783193B1 (ko) | 2008-09-12 | 2017-09-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
KR101644406B1 (ko) | 2008-09-12 | 2016-08-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
CN103545342B (zh) | 2008-09-19 | 2018-01-26 | 株式会社半导体能源研究所 | 半导体装置 |
CN102160105B (zh) | 2008-09-19 | 2014-06-11 | 株式会社半导体能源研究所 | 显示装置及其制造方法 |
CN102160102B (zh) | 2008-09-19 | 2013-11-06 | 株式会社半导体能源研究所 | 显示装置 |
KR101507324B1 (ko) | 2008-09-19 | 2015-03-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
KR102426826B1 (ko) | 2008-09-19 | 2022-08-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101611643B1 (ko) | 2008-10-01 | 2016-04-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
EP2172977A1 (en) | 2008-10-03 | 2010-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
KR101803720B1 (ko) | 2008-10-03 | 2017-12-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
CN101714546B (zh) | 2008-10-03 | 2014-05-14 | 株式会社半导体能源研究所 | 显示装置及其制造方法 |
KR20160113329A (ko) | 2008-10-03 | 2016-09-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시장치 |
EP2172804B1 (en) | 2008-10-03 | 2016-05-11 | Semiconductor Energy Laboratory Co, Ltd. | Display device |
CN101719493B (zh) | 2008-10-08 | 2014-05-14 | 株式会社半导体能源研究所 | 显示装置 |
JP5484853B2 (ja) | 2008-10-10 | 2014-05-07 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
KR101799601B1 (ko) | 2008-10-16 | 2017-11-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 표시 장치 |
JP5361651B2 (ja) | 2008-10-22 | 2013-12-04 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
KR101667909B1 (ko) | 2008-10-24 | 2016-10-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치의 제조방법 |
US8741702B2 (en) * | 2008-10-24 | 2014-06-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR101310473B1 (ko) | 2008-10-24 | 2013-09-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP5616012B2 (ja) | 2008-10-24 | 2014-10-29 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
WO2010047288A1 (en) | 2008-10-24 | 2010-04-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductordevice |
US8106400B2 (en) | 2008-10-24 | 2012-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP5442234B2 (ja) | 2008-10-24 | 2014-03-12 | 株式会社半導体エネルギー研究所 | 半導体装置及び表示装置 |
EP2180518B1 (en) * | 2008-10-24 | 2018-04-25 | Semiconductor Energy Laboratory Co, Ltd. | Method for manufacturing semiconductor device |
TWI633605B (zh) | 2008-10-31 | 2018-08-21 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
KR101631454B1 (ko) | 2008-10-31 | 2016-06-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 논리회로 |
KR101634411B1 (ko) | 2008-10-31 | 2016-06-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 구동 회로, 표시 장치 및 전자 장치 |
KR101603303B1 (ko) | 2008-10-31 | 2016-03-14 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 도전성 산질화물 및 도전성 산질화물막의 제작 방법 |
EP2184783B1 (en) | 2008-11-07 | 2012-10-03 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device and method for manufacturing the same |
CN101740631B (zh) | 2008-11-07 | 2014-07-16 | 株式会社半导体能源研究所 | 半导体装置及该半导体装置的制造方法 |
TWI535037B (zh) | 2008-11-07 | 2016-05-21 | 半導體能源研究所股份有限公司 | 半導體裝置和其製造方法 |
TW201921700A (zh) | 2008-11-07 | 2019-06-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置和其製造方法 |
TWI467663B (zh) | 2008-11-07 | 2015-01-01 | Semiconductor Energy Lab | 半導體裝置和該半導體裝置的製造方法 |
KR101659703B1 (ko) * | 2008-11-07 | 2016-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101432764B1 (ko) | 2008-11-13 | 2014-08-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치의 제조방법 |
TWI502739B (zh) | 2008-11-13 | 2015-10-01 | Semiconductor Energy Lab | 半導體裝置及其製造方法 |
US8232947B2 (en) | 2008-11-14 | 2012-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
JP2010153802A (ja) | 2008-11-20 | 2010-07-08 | Semiconductor Energy Lab Co Ltd | 半導体装置及び半導体装置の作製方法 |
KR102556313B1 (ko) | 2008-11-21 | 2023-07-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
TWI508304B (zh) | 2008-11-28 | 2015-11-11 | Semiconductor Energy Lab | 半導體裝置和其製造方法 |
TWI585955B (zh) | 2008-11-28 | 2017-06-01 | 半導體能源研究所股份有限公司 | 光感測器及顯示裝置 |
TWI654754B (zh) | 2008-11-28 | 2019-03-21 | 日商半導體能源研究所股份有限公司 | 液晶顯示裝置 |
KR101472771B1 (ko) | 2008-12-01 | 2014-12-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
JP2010156960A (ja) | 2008-12-03 | 2010-07-15 | Semiconductor Energy Lab Co Ltd | 液晶表示装置 |
JP5491833B2 (ja) | 2008-12-05 | 2014-05-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
CN103456794B (zh) | 2008-12-19 | 2016-08-10 | 株式会社半导体能源研究所 | 晶体管的制造方法 |
JP5615540B2 (ja) | 2008-12-19 | 2014-10-29 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
EP2515337B1 (en) | 2008-12-24 | 2016-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit and semiconductor device |
US8441007B2 (en) | 2008-12-25 | 2013-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US8114720B2 (en) | 2008-12-25 | 2012-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8383470B2 (en) * | 2008-12-25 | 2013-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor (TFT) having a protective layer and manufacturing method thereof |
JP5590877B2 (ja) * | 2008-12-26 | 2014-09-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI549198B (zh) | 2008-12-26 | 2016-09-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
KR101648927B1 (ko) | 2009-01-16 | 2016-08-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
US8492756B2 (en) | 2009-01-23 | 2013-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8436350B2 (en) * | 2009-01-30 | 2013-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device using an oxide semiconductor with a plurality of metal clusters |
US8367486B2 (en) | 2009-02-05 | 2013-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and method for manufacturing the transistor |
US8174021B2 (en) | 2009-02-06 | 2012-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the semiconductor device |
US8749930B2 (en) | 2009-02-09 | 2014-06-10 | Semiconductor Energy Laboratory Co., Ltd. | Protection circuit, semiconductor device, photoelectric conversion device, and electronic device |
US8278657B2 (en) | 2009-02-13 | 2012-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device including the transistor, and manufacturing method of the transistor and the semiconductor device |
US8247812B2 (en) | 2009-02-13 | 2012-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device including the transistor, and manufacturing method of the transistor and the semiconductor device |
CN101840936B (zh) | 2009-02-13 | 2014-10-08 | 株式会社半导体能源研究所 | 包括晶体管的半导体装置及其制造方法 |
US8247276B2 (en) | 2009-02-20 | 2012-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US8841661B2 (en) | 2009-02-25 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Staggered oxide semiconductor TFT semiconductor device and manufacturing method thereof |
US8704216B2 (en) | 2009-02-27 | 2014-04-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8461582B2 (en) | 2009-03-05 | 2013-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US20100224878A1 (en) | 2009-03-05 | 2010-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5504008B2 (ja) | 2009-03-06 | 2014-05-28 | 株式会社半導体エネルギー研究所 | 半導体装置 |
EP2406826B1 (en) | 2009-03-12 | 2017-08-23 | Semiconductor Energy Laboratory Co, Ltd. | Method for manufacturing semiconductor device |
TWI485781B (zh) | 2009-03-13 | 2015-05-21 | Semiconductor Energy Lab | 半導體裝置及該半導體裝置的製造方法 |
US8450144B2 (en) | 2009-03-26 | 2013-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR101752640B1 (ko) | 2009-03-27 | 2017-06-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
TWI617029B (zh) | 2009-03-27 | 2018-03-01 | 半導體能源研究所股份有限公司 | 半導體裝置 |
KR101681884B1 (ko) | 2009-03-27 | 2016-12-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치, 표시장치 및 전자기기 |
TWI485851B (zh) | 2009-03-30 | 2015-05-21 | Semiconductor Energy Lab | 半導體裝置及其製造方法 |
TWI489628B (zh) | 2009-04-02 | 2015-06-21 | Semiconductor Energy Lab | 半導體裝置和其製造方法 |
US8338226B2 (en) | 2009-04-02 | 2012-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8441047B2 (en) | 2009-04-10 | 2013-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
TWI535023B (zh) | 2009-04-16 | 2016-05-21 | 半導體能源研究所股份有限公司 | 半導體裝置和其製造方法 |
CN102422426B (zh) * | 2009-05-01 | 2016-06-01 | 株式会社半导体能源研究所 | 半导体装置的制造方法 |
JP5751762B2 (ja) | 2009-05-21 | 2015-07-22 | 株式会社半導体エネルギー研究所 | 半導体装置 |
EP2256814B1 (en) | 2009-05-29 | 2019-01-16 | Semiconductor Energy Laboratory Co, Ltd. | Oxide semiconductor device and method for manufacturing the same |
EP2256795B1 (en) | 2009-05-29 | 2014-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for oxide semiconductor device |
JP5564331B2 (ja) | 2009-05-29 | 2014-07-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
KR101291395B1 (ko) | 2009-06-30 | 2013-07-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 제조 방법 |
WO2011001879A1 (en) | 2009-06-30 | 2011-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
CN104576748B (zh) | 2009-06-30 | 2019-03-15 | 株式会社半导体能源研究所 | 半导体装置的制造方法 |
KR101810699B1 (ko) | 2009-06-30 | 2018-01-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 제작 방법 |
JP5663214B2 (ja) * | 2009-07-03 | 2015-02-04 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
KR102106460B1 (ko) | 2009-07-03 | 2020-05-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
KR101476817B1 (ko) | 2009-07-03 | 2014-12-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 트랜지스터를 갖는 표시 장치 및 그 제작 방법 |
KR102011614B1 (ko) | 2009-07-10 | 2019-08-16 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
KR101642620B1 (ko) | 2009-07-10 | 2016-07-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
KR20210131462A (ko) | 2009-07-10 | 2021-11-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치의 제작 방법 |
KR101739154B1 (ko) | 2009-07-17 | 2017-05-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
WO2011007677A1 (en) | 2009-07-17 | 2011-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2011007682A1 (en) | 2009-07-17 | 2011-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
KR101414926B1 (ko) | 2009-07-18 | 2014-07-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치 제조 방법 |
WO2011010545A1 (en) | 2009-07-18 | 2011-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR101782176B1 (ko) | 2009-07-18 | 2017-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제조 방법 |
CN105070749B (zh) | 2009-07-18 | 2019-08-09 | 株式会社半导体能源研究所 | 半导体装置以及制造半导体装置的方法 |
WO2011010542A1 (en) | 2009-07-23 | 2011-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR101785992B1 (ko) | 2009-07-24 | 2017-10-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011013523A1 (en) | 2009-07-31 | 2011-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2011013502A1 (en) | 2009-07-31 | 2011-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
CN103489871B (zh) | 2009-07-31 | 2016-03-23 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
KR101967480B1 (ko) | 2009-07-31 | 2019-04-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
KR102097932B1 (ko) | 2009-07-31 | 2020-04-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 디바이스 및 그 형성 방법 |
EP2284891B1 (en) | 2009-08-07 | 2019-07-24 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device and manufacturing method thereof |
TWI596741B (zh) | 2009-08-07 | 2017-08-21 | 半導體能源研究所股份有限公司 | 半導體裝置和其製造方法 |
TWI830077B (zh) | 2009-08-07 | 2024-01-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
JP5642447B2 (ja) | 2009-08-07 | 2014-12-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI604594B (zh) | 2009-08-07 | 2017-11-01 | 半導體能源研究所股份有限公司 | 半導體裝置及包括該半導體裝置之電話、錶、和顯示裝置 |
TWI634642B (zh) | 2009-08-07 | 2018-09-01 | 半導體能源研究所股份有限公司 | 半導體裝置和其製造方法 |
JP5663231B2 (ja) | 2009-08-07 | 2015-02-04 | 株式会社半導体エネルギー研究所 | 発光装置 |
US8115883B2 (en) | 2009-08-27 | 2012-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
WO2011027649A1 (en) | 2009-09-02 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a transistor, and manufacturing method of semiconductor device |
WO2011027715A1 (en) | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
WO2011027701A1 (en) | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
WO2011027664A1 (en) | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
WO2011027656A1 (en) | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
KR101836532B1 (ko) | 2009-09-04 | 2018-04-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR102221207B1 (ko) | 2009-09-04 | 2021-03-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 및 발광 장치를 제작하기 위한 방법 |
WO2011027676A1 (en) | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2011027702A1 (en) | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
KR101746198B1 (ko) | 2009-09-04 | 2017-06-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시장치 및 전자기기 |
US9805641B2 (en) * | 2009-09-04 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
WO2011033909A1 (en) * | 2009-09-16 | 2011-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device including the driver circuit, and electronic device including the display device |
KR101709749B1 (ko) | 2009-09-16 | 2017-03-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치의 구동 방법 및 표시 장치 |
KR101730347B1 (ko) | 2009-09-16 | 2017-04-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101301461B1 (ko) | 2009-09-16 | 2013-08-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 산화물 반도체층 |
WO2011034012A1 (en) | 2009-09-16 | 2011-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, light emitting device, semiconductor device, and electronic device |
KR102009813B1 (ko) | 2009-09-16 | 2019-08-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 및 이의 제조 방법 |
US9715845B2 (en) | 2009-09-16 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
WO2011036987A1 (en) | 2009-09-24 | 2011-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
TWI512997B (zh) | 2009-09-24 | 2015-12-11 | Semiconductor Energy Lab | 半導體裝置,電源電路,和半導體裝置的製造方法 |
CN105161543A (zh) | 2009-09-24 | 2015-12-16 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
KR102111468B1 (ko) | 2009-09-24 | 2020-05-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
WO2011036993A1 (en) | 2009-09-24 | 2011-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device including the driver circuit, and electronic appliance including the display device |
KR101342179B1 (ko) | 2009-09-24 | 2013-12-16 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 소자 및 그 제조 방법 |
WO2011037008A1 (en) | 2009-09-24 | 2011-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor film and method for manufacturing semiconductor device |
WO2011036981A1 (en) | 2009-09-24 | 2011-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011036999A1 (en) | 2009-09-24 | 2011-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
KR20120080575A (ko) * | 2009-09-30 | 2012-07-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 레독스 커패시터 및 그 제작 방법 |
KR101767035B1 (ko) * | 2009-10-01 | 2017-08-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR20120084751A (ko) | 2009-10-05 | 2012-07-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
WO2011043182A1 (en) | 2009-10-05 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for removing electricity and method for manufacturing semiconductor device |
KR101991006B1 (ko) * | 2009-10-08 | 2019-06-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101376461B1 (ko) | 2009-10-08 | 2014-03-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체층 및 반도체 장치 |
WO2011043194A1 (en) | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR102000410B1 (ko) | 2009-10-09 | 2019-07-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
KR20120083341A (ko) | 2009-10-09 | 2012-07-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 액정 표시 장치를 포함하는 전자 기기 |
KR101959693B1 (ko) | 2009-10-09 | 2019-03-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
KR101820973B1 (ko) * | 2009-10-09 | 2018-01-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치 제조 방법 |
WO2011043215A1 (en) * | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Shift register and display device and driving method thereof |
KR101759504B1 (ko) | 2009-10-09 | 2017-07-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 표시 장치 및 이를 포함한 전자 기기 |
KR101754701B1 (ko) * | 2009-10-09 | 2017-07-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 이를 제조하기 위한 방법 |
WO2011043164A1 (en) * | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
WO2011043195A1 (en) | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011043206A1 (en) | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101680047B1 (ko) | 2009-10-14 | 2016-11-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101945301B1 (ko) | 2009-10-16 | 2019-02-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 표시 장치 및 전자 장치 |
KR101426723B1 (ko) | 2009-10-16 | 2014-08-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
KR101903918B1 (ko) | 2009-10-16 | 2018-10-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 논리 회로 및 반도체 장치 |
KR101915251B1 (ko) | 2009-10-16 | 2018-11-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR102375647B1 (ko) | 2009-10-16 | 2022-03-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 이를 구비한 전자 장치 |
WO2011048923A1 (en) | 2009-10-21 | 2011-04-28 | Semiconductor Energy Laboratory Co., Ltd. | E-book reader |
KR101847656B1 (ko) | 2009-10-21 | 2018-05-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
KR20120096463A (ko) | 2009-10-21 | 2012-08-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 표시 장치를 갖는 전자 기기 |
KR101803554B1 (ko) | 2009-10-21 | 2017-11-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 제작방법 |
KR20170130641A (ko) | 2009-10-21 | 2017-11-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 그 액정 표시 장치를 구비하는 전자기기 |
KR101751908B1 (ko) | 2009-10-21 | 2017-06-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전압 조정 회로 |
WO2011048968A1 (en) | 2009-10-21 | 2011-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101789309B1 (ko) | 2009-10-21 | 2017-10-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 아날로그 회로 및 반도체 장치 |
KR20220153647A (ko) | 2009-10-29 | 2022-11-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101930682B1 (ko) | 2009-10-29 | 2018-12-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
CN102576172B (zh) | 2009-10-30 | 2016-01-27 | 株式会社半导体能源研究所 | 液晶显示设备、其驱动方法以及包括该液晶显示设备的电子电器 |
KR101796909B1 (ko) | 2009-10-30 | 2017-12-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 비선형 소자, 표시 장치, 및 전자 기기 |
CN105070717B (zh) | 2009-10-30 | 2019-01-01 | 株式会社半导体能源研究所 | 半导体装置 |
CN102668095B (zh) * | 2009-10-30 | 2016-08-03 | 株式会社半导体能源研究所 | 晶体管 |
EP2494597A4 (en) | 2009-10-30 | 2015-03-18 | Semiconductor Energy Lab | SEMICONDUCTOR COMPONENT |
KR101837102B1 (ko) | 2009-10-30 | 2018-03-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
CN104867982B (zh) | 2009-10-30 | 2018-08-03 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
WO2011052411A1 (en) * | 2009-10-30 | 2011-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Transistor |
WO2011052410A1 (en) | 2009-10-30 | 2011-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Power diode, rectifier, and semiconductor device including the same |
WO2011052382A1 (en) | 2009-10-30 | 2011-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
SG188112A1 (en) | 2009-10-30 | 2013-03-28 | Semiconductor Energy Lab | Logic circuit and semiconductor device |
CN102484471B (zh) | 2009-10-30 | 2015-04-01 | 株式会社半导体能源研究所 | 驱动器电路、包括该驱动器电路的显示设备和包括该显示设备的电子设备 |
WO2011052366A1 (en) | 2009-10-30 | 2011-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Voltage regulator circuit |
WO2011052437A1 (en) | 2009-10-30 | 2011-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Non-linear element, display device including non-linear element, and electronic device including display device |
CN104485341A (zh) | 2009-11-06 | 2015-04-01 | 株式会社半导体能源研究所 | 半导体装置 |
KR102378013B1 (ko) | 2009-11-06 | 2022-03-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
CN102598279B (zh) | 2009-11-06 | 2015-10-07 | 株式会社半导体能源研究所 | 半导体装置 |
CN102598284B (zh) | 2009-11-06 | 2015-04-15 | 株式会社半导体能源研究所 | 半导体器件 |
WO2011055644A1 (en) | 2009-11-06 | 2011-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR101761432B1 (ko) | 2009-11-06 | 2017-07-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011055669A1 (en) | 2009-11-06 | 2011-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR102286284B1 (ko) | 2009-11-06 | 2021-08-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101727469B1 (ko) | 2009-11-06 | 2017-04-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
JP5539846B2 (ja) | 2009-11-06 | 2014-07-02 | 株式会社半導体エネルギー研究所 | 評価方法、半導体装置の作製方法 |
KR101952065B1 (ko) | 2009-11-06 | 2019-02-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 동작 방법 |
WO2011055769A1 (en) * | 2009-11-06 | 2011-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor element and semiconductor device, and deposition apparatus |
WO2011058852A1 (en) | 2009-11-13 | 2011-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101738996B1 (ko) | 2009-11-13 | 2017-05-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 불휘발성 메모리 소자를 포함하는 장치 |
KR102513073B1 (ko) | 2009-11-13 | 2023-03-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
WO2011058882A1 (en) | 2009-11-13 | 2011-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target and manufacturing method thereof, and transistor |
CN102668097B (zh) | 2009-11-13 | 2015-08-12 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
KR101975741B1 (ko) * | 2009-11-13 | 2019-05-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 타깃 재료의 포장 방법 및 타깃의 장착 방법 |
KR101893332B1 (ko) | 2009-11-13 | 2018-08-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 구동 방법 |
KR20220116369A (ko) | 2009-11-13 | 2022-08-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 이 표시 장치를 구비한 전자 기기 |
WO2011058913A1 (en) | 2009-11-13 | 2011-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2011062029A1 (en) | 2009-11-18 | 2011-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
WO2011062067A1 (en) * | 2009-11-20 | 2011-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101370301B1 (ko) | 2009-11-20 | 2014-03-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
KR102451852B1 (ko) | 2009-11-20 | 2022-10-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101945660B1 (ko) | 2009-11-20 | 2019-02-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 트랜지스터 |
KR101790365B1 (ko) * | 2009-11-20 | 2017-10-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101800852B1 (ko) | 2009-11-20 | 2017-12-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101693914B1 (ko) | 2009-11-20 | 2017-01-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011062041A1 (en) * | 2009-11-20 | 2011-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor |
JP5762723B2 (ja) | 2009-11-20 | 2015-08-12 | 株式会社半導体エネルギー研究所 | 変調回路及びそれを備えた半導体装置 |
CN104332177B (zh) | 2009-11-20 | 2018-05-08 | 株式会社半导体能源研究所 | 非易失性锁存电路和逻辑电路,以及使用其的半导体器件 |
KR101662359B1 (ko) | 2009-11-24 | 2016-10-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 메모리 셀을 포함하는 반도체 장치 |
KR101911382B1 (ko) * | 2009-11-27 | 2018-10-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101517944B1 (ko) | 2009-11-27 | 2015-05-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작방법 |
KR20180059577A (ko) | 2009-11-27 | 2018-06-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011065209A1 (en) * | 2009-11-27 | 2011-06-03 | Semiconductor Energy Laboratory Co., Ltd. | Non-linear element, display device including non-linear element, and electronic device including display device |
WO2011065210A1 (en) | 2009-11-28 | 2011-06-03 | Semiconductor Energy Laboratory Co., Ltd. | Stacked oxide material, semiconductor device, and method for manufacturing the semiconductor device |
WO2011065216A1 (en) | 2009-11-28 | 2011-06-03 | Semiconductor Energy Laboratory Co., Ltd. | Stacked oxide material, semiconductor device, and method for manufacturing the semiconductor device |
KR101824124B1 (ko) | 2009-11-28 | 2018-02-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101329849B1 (ko) | 2009-11-28 | 2013-11-14 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
KR20180030255A (ko) | 2009-11-30 | 2018-03-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치, 액정 표시 장치의 구동 방법, 및 이 액정 표시 장치를 구비하는 전자기기 |
KR20120107107A (ko) | 2009-12-04 | 2012-09-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011068025A1 (en) | 2009-12-04 | 2011-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Dc converter circuit and power supply circuit |
KR101943109B1 (ko) | 2009-12-04 | 2019-01-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
CN104795323B (zh) | 2009-12-04 | 2017-12-29 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
KR101800038B1 (ko) * | 2009-12-04 | 2017-11-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
KR102462239B1 (ko) | 2009-12-04 | 2022-11-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011068032A1 (en) | 2009-12-04 | 2011-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
JP5584103B2 (ja) * | 2009-12-04 | 2014-09-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP2011139052A (ja) * | 2009-12-04 | 2011-07-14 | Semiconductor Energy Lab Co Ltd | 半導体記憶装置 |
WO2011068028A1 (en) * | 2009-12-04 | 2011-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, semiconductor device, and method for manufacturing the same |
WO2011068106A1 (en) | 2009-12-04 | 2011-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
KR102250803B1 (ko) | 2009-12-04 | 2021-05-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011068016A1 (en) | 2009-12-04 | 2011-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR20120106786A (ko) | 2009-12-08 | 2012-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101835300B1 (ko) | 2009-12-08 | 2018-03-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR20170061194A (ko) | 2009-12-10 | 2017-06-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치의 구동 방법 및 표시 장치 |
KR101804589B1 (ko) | 2009-12-11 | 2018-01-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
WO2011070929A1 (en) | 2009-12-11 | 2011-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
KR20120102748A (ko) | 2009-12-11 | 2012-09-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전계 효과 트랜지스터 |
KR101720072B1 (ko) | 2009-12-11 | 2017-03-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 불휘발성 래치 회로와 논리 회로, 및 이를 사용한 반도체 장치 |
JP5727204B2 (ja) | 2009-12-11 | 2015-06-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
WO2011070928A1 (en) | 2009-12-11 | 2011-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5185357B2 (ja) * | 2009-12-17 | 2013-04-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR101813460B1 (ko) | 2009-12-18 | 2017-12-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101729933B1 (ko) | 2009-12-18 | 2017-04-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 불휘발성 래치 회로와 논리 회로, 및 이를 사용한 반도체 장치 |
WO2011074409A1 (en) | 2009-12-18 | 2011-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
WO2011074407A1 (en) | 2009-12-18 | 2011-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2011074379A1 (en) * | 2009-12-18 | 2011-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and driving method thereof |
WO2011074393A1 (en) | 2009-12-18 | 2011-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US9057758B2 (en) * | 2009-12-18 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for measuring current, method for inspecting semiconductor device, semiconductor device, and test element group |
CN102725784B (zh) | 2009-12-18 | 2016-03-23 | 株式会社半导体能源研究所 | 具有光学传感器的显示设备及其驱动方法 |
CN105140245B (zh) | 2009-12-18 | 2018-07-17 | 株式会社半导体能源研究所 | 液晶显示设备和电子设备 |
CN102652396B (zh) | 2009-12-23 | 2015-12-16 | 株式会社半导体能源研究所 | 半导体装置 |
WO2011077916A1 (en) | 2009-12-24 | 2011-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
KR20120101716A (ko) | 2009-12-24 | 2012-09-14 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 전자 기기 |
WO2011077925A1 (en) | 2009-12-25 | 2011-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
WO2011077978A1 (en) | 2009-12-25 | 2011-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing display device |
CN102804360B (zh) | 2009-12-25 | 2014-12-17 | 株式会社半导体能源研究所 | 半导体装置 |
WO2011077966A1 (en) | 2009-12-25 | 2011-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
EP3550604A1 (en) | 2009-12-25 | 2019-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8441009B2 (en) * | 2009-12-25 | 2013-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
CN102656801B (zh) | 2009-12-25 | 2016-04-27 | 株式会社半导体能源研究所 | 存储器装置、半导体器件和电子装置 |
EP2519969A4 (en) | 2009-12-28 | 2016-07-06 | Semiconductor Energy Lab | SEMICONDUCTOR COMPONENT |
WO2011080998A1 (en) | 2009-12-28 | 2011-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN102656691B (zh) | 2009-12-28 | 2015-07-29 | 株式会社半导体能源研究所 | 存储器装置和半导体装置 |
WO2011081041A1 (en) * | 2009-12-28 | 2011-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
KR20120106873A (ko) | 2009-12-28 | 2012-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
KR101749944B1 (ko) | 2009-12-28 | 2017-06-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 전자 기기 |
US8780629B2 (en) | 2010-01-15 | 2014-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
WO2011086847A1 (en) | 2010-01-15 | 2011-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011086812A1 (en) * | 2010-01-15 | 2011-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011086846A1 (en) | 2010-01-15 | 2011-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101791279B1 (ko) * | 2010-01-15 | 2017-10-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101748763B1 (ko) | 2010-01-15 | 2017-06-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 전자 기기 |
KR20120099483A (ko) | 2010-01-15 | 2012-09-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 이를 구동하는 방법 |
KR101861991B1 (ko) | 2010-01-20 | 2018-05-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 신호 처리 회로 및 신호 처리 회로를 구동하기 위한 방법 |
KR102257147B1 (ko) | 2010-01-20 | 2021-05-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 휴대 전화기 |
CN102714023B (zh) | 2010-01-20 | 2016-05-04 | 株式会社半导体能源研究所 | 液晶显示设备的驱动方法 |
US9984617B2 (en) | 2010-01-20 | 2018-05-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device including light emitting element |
WO2011089843A1 (en) | 2010-01-20 | 2011-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving display device |
US8415731B2 (en) * | 2010-01-20 | 2013-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device with integrated capacitor and having transistor overlapping sections |
WO2011090087A1 (en) * | 2010-01-20 | 2011-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Display method of display device |
EP2526622B1 (en) | 2010-01-20 | 2015-09-23 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device |
WO2011089832A1 (en) | 2010-01-20 | 2011-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving display device and liquid crystal display device |
KR102395345B1 (ko) | 2010-01-20 | 2022-05-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전자 기기 |
WO2011089848A1 (en) | 2010-01-20 | 2011-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device and electronic system |
CN102714209B (zh) | 2010-01-22 | 2015-09-16 | 株式会社半导体能源研究所 | 半导体存储器件及其驱动方法 |
KR101829309B1 (ko) | 2010-01-22 | 2018-02-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR102088281B1 (ko) | 2010-01-22 | 2020-03-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101805378B1 (ko) | 2010-01-24 | 2017-12-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치와 이의 제조 방법 |
US8879010B2 (en) | 2010-01-24 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
CN106057162B (zh) | 2010-01-24 | 2019-01-22 | 株式会社半导体能源研究所 | 显示装置 |
KR101800850B1 (ko) | 2010-01-29 | 2017-11-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 기억 장치 |
WO2011093151A1 (en) | 2010-01-29 | 2011-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the same |
KR20120120330A (ko) | 2010-01-29 | 2012-11-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101862823B1 (ko) * | 2010-02-05 | 2018-05-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 구동 방법 |
CN102725842B (zh) * | 2010-02-05 | 2014-12-03 | 株式会社半导体能源研究所 | 半导体器件 |
WO2011096153A1 (en) | 2010-02-05 | 2011-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8436403B2 (en) | 2010-02-05 | 2013-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor provided with sidewall and electronic appliance |
WO2011096271A1 (en) | 2010-02-05 | 2011-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
KR101791713B1 (ko) | 2010-02-05 | 2017-10-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전계 효과 트랜지스터 및 반도체 장치 |
US9391209B2 (en) | 2010-02-05 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN105590964B (zh) | 2010-02-05 | 2019-01-04 | 株式会社半导体能源研究所 | 半导体装置 |
CN106847816A (zh) | 2010-02-05 | 2017-06-13 | 株式会社半导体能源研究所 | 半导体装置 |
WO2011096264A1 (en) * | 2010-02-05 | 2011-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
KR101399611B1 (ko) | 2010-02-05 | 2014-05-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 및 반도체 장치의 제조 방법 |
KR101810261B1 (ko) | 2010-02-10 | 2017-12-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전계 효과 트랜지스터 |
US8947337B2 (en) | 2010-02-11 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8617920B2 (en) | 2010-02-12 | 2013-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR101817054B1 (ko) | 2010-02-12 | 2018-01-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 이를 포함한 표시 장치 |
KR101830196B1 (ko) | 2010-02-12 | 2018-02-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 구동 방법 |
WO2011099335A1 (en) | 2010-02-12 | 2011-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2011099389A1 (en) | 2010-02-12 | 2011-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of the same |
CN102741915B (zh) | 2010-02-12 | 2015-12-16 | 株式会社半导体能源研究所 | 显示装置及驱动方法 |
WO2011099376A1 (en) | 2010-02-12 | 2011-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
KR101924318B1 (ko) | 2010-02-12 | 2018-12-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 구동 방법 |
WO2011099360A1 (en) | 2010-02-12 | 2011-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
KR20230145240A (ko) | 2010-02-18 | 2023-10-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR102081035B1 (ko) * | 2010-02-19 | 2020-02-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제조 방법 |
WO2011102183A1 (en) | 2010-02-19 | 2011-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011102228A1 (en) | 2010-02-19 | 2011-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of semiconductor device |
KR102049472B1 (ko) | 2010-02-19 | 2019-11-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011102248A1 (en) | 2010-02-19 | 2011-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
WO2011102206A1 (en) * | 2010-02-19 | 2011-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device, driving method thereof, and method for manufacturing semiconductor device |
WO2011102233A1 (en) * | 2010-02-19 | 2011-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5740169B2 (ja) * | 2010-02-19 | 2015-06-24 | 株式会社半導体エネルギー研究所 | トランジスタの作製方法 |
US8928644B2 (en) | 2010-02-19 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for driving display device |
WO2011102190A1 (en) | 2010-02-19 | 2011-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Demodulation circuit and rfid tag including the demodulation circuit |
KR20180110212A (ko) | 2010-02-19 | 2018-10-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 트랜지스터 및 이를 이용한 표시 장치 |
KR101912804B1 (ko) | 2010-02-23 | 2018-10-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9000438B2 (en) | 2010-02-26 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR102598388B1 (ko) | 2010-02-26 | 2023-11-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 |
KR101780841B1 (ko) | 2010-02-26 | 2017-09-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011105184A1 (en) | 2010-02-26 | 2011-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
WO2011105268A1 (en) * | 2010-02-26 | 2011-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR101733765B1 (ko) * | 2010-02-26 | 2017-05-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시장치 및 표시장치의 구동 방법 |
WO2011105310A1 (en) | 2010-02-26 | 2011-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR20130009978A (ko) | 2010-02-26 | 2013-01-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 소자의 제조 방법 및 성막 장치 |
CN102770903B (zh) | 2010-02-26 | 2015-10-07 | 株式会社半导体能源研究所 | 显示装置及具备该显示装置的电子书阅读器 |
KR101389120B1 (ko) | 2010-03-02 | 2014-04-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 펄스 신호 출력 회로 및 시프트 레지스터 |
WO2011108345A1 (en) | 2010-03-02 | 2011-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
DE112011106185B3 (de) | 2010-03-02 | 2023-05-04 | Semiconductor Energy Laboratory Co., Ltd. | Impulssignal-Ausgangsschaltung und Schieberegister |
KR101767037B1 (ko) | 2010-03-02 | 2017-08-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 승압 회로 및 승압 회로를 포함하는 rfid 태그 |
KR101932909B1 (ko) | 2010-03-04 | 2018-12-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 메모리 장치 및 반도체 장치 |
KR102341927B1 (ko) * | 2010-03-05 | 2021-12-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
KR20130008037A (ko) * | 2010-03-05 | 2013-01-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치를 제작하는 방법 |
WO2011108374A1 (en) | 2010-03-05 | 2011-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
WO2011108346A1 (en) | 2010-03-05 | 2011-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of oxide semiconductor film and manufacturing method of transistor |
CN106449649B (zh) | 2010-03-08 | 2019-09-27 | 株式会社半导体能源研究所 | 半导体装置及半导体装置的制造方法 |
WO2011111490A1 (en) | 2010-03-08 | 2011-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
TWI594173B (zh) * | 2010-03-08 | 2017-08-01 | 半導體能源研究所股份有限公司 | 電子裝置及電子系統 |
KR101874784B1 (ko) | 2010-03-08 | 2018-07-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101812467B1 (ko) | 2010-03-08 | 2017-12-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011111505A1 (en) | 2010-03-08 | 2011-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
WO2011111504A1 (en) | 2010-03-08 | 2011-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device and electronic system |
US8900362B2 (en) * | 2010-03-12 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of gallium oxide single crystal |
KR101840185B1 (ko) | 2010-03-12 | 2018-03-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 회로를 구동하는 방법 및 표시 장치를 구동하는 방법 |
KR101773992B1 (ko) | 2010-03-12 | 2017-09-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101823853B1 (ko) | 2010-03-12 | 2018-02-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
CN102782622B (zh) | 2010-03-12 | 2016-11-02 | 株式会社半导体能源研究所 | 显示装置的驱动方法 |
WO2011114866A1 (en) * | 2010-03-17 | 2011-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
KR101840797B1 (ko) * | 2010-03-19 | 2018-03-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 메모리 장치 |
US20110227082A1 (en) | 2010-03-19 | 2011-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN102812547B (zh) | 2010-03-19 | 2015-09-09 | 株式会社半导体能源研究所 | 半导体装置 |
WO2011114867A1 (en) | 2010-03-19 | 2011-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of semiconductor device |
WO2011114868A1 (en) | 2010-03-19 | 2011-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011118351A1 (en) | 2010-03-25 | 2011-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101921047B1 (ko) | 2010-03-26 | 2018-11-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치를 제작하는 방법 |
WO2011118510A1 (en) | 2010-03-26 | 2011-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR101862539B1 (ko) | 2010-03-26 | 2018-05-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011118741A1 (en) * | 2010-03-26 | 2011-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
WO2011122299A1 (en) | 2010-03-31 | 2011-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
WO2011122280A1 (en) | 2010-03-31 | 2011-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
KR20130069583A (ko) | 2010-03-31 | 2013-06-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 필드 시퀀셜 구동형 표시 장치 |
WO2011122514A1 (en) | 2010-03-31 | 2011-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Power supply device and driving method thereof |
KR101814367B1 (ko) | 2010-03-31 | 2018-01-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 그 구동 방법 |
KR101977152B1 (ko) | 2010-04-02 | 2019-05-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9196739B2 (en) | 2010-04-02 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor film and metal oxide film |
US9190522B2 (en) | 2010-04-02 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor |
US9147768B2 (en) | 2010-04-02 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor and a metal oxide film |
US8884282B2 (en) | 2010-04-02 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011122364A1 (en) | 2010-04-02 | 2011-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN102918650B (zh) | 2010-04-07 | 2017-03-22 | 株式会社半导体能源研究所 | 晶体管 |
WO2011125432A1 (en) | 2010-04-07 | 2011-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
KR101748901B1 (ko) | 2010-04-09 | 2017-06-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 그 구동 방법 |
WO2011125456A1 (en) | 2010-04-09 | 2011-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8207025B2 (en) | 2010-04-09 | 2012-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
KR101850926B1 (ko) | 2010-04-09 | 2018-04-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011125455A1 (en) | 2010-04-09 | 2011-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor memory device |
WO2011125806A1 (en) | 2010-04-09 | 2011-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8653514B2 (en) | 2010-04-09 | 2014-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP5744366B2 (ja) | 2010-04-12 | 2015-07-08 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
US8854583B2 (en) | 2010-04-12 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and liquid crystal display device |
KR101881729B1 (ko) | 2010-04-16 | 2018-07-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막 방법 및 반도체 장치를 제작하기 위한 방법 |
WO2011129233A1 (en) | 2010-04-16 | 2011-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2011237418A (ja) | 2010-04-16 | 2011-11-24 | Semiconductor Energy Lab Co Ltd | 電流測定方法、半導体装置の検査方法、半導体装置、および特性評価用回路 |
KR20130061678A (ko) | 2010-04-16 | 2013-06-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전원 회로 |
US8692243B2 (en) | 2010-04-20 | 2014-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR101833082B1 (ko) | 2010-04-23 | 2018-02-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 그 구동 방법 |
KR101877377B1 (ko) | 2010-04-23 | 2018-07-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
KR102434906B1 (ko) | 2010-04-23 | 2022-08-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
KR101854421B1 (ko) | 2010-04-23 | 2018-05-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
KR101636008B1 (ko) | 2010-04-23 | 2016-07-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
WO2011132591A1 (en) | 2010-04-23 | 2011-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9537043B2 (en) | 2010-04-23 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method thereof |
CN102859704B (zh) | 2010-04-23 | 2016-08-03 | 株式会社半导体能源研究所 | 半导体装置的制造方法 |
WO2011135999A1 (en) | 2010-04-27 | 2011-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9349325B2 (en) | 2010-04-28 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
KR20190110632A (ko) | 2010-04-28 | 2019-09-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
WO2011136018A1 (en) | 2010-04-28 | 2011-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic appliance |
WO2011135987A1 (en) | 2010-04-28 | 2011-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8890555B2 (en) | 2010-04-28 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for measuring transistor |
US9697788B2 (en) | 2010-04-28 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9478185B2 (en) | 2010-05-12 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical display device and display method thereof |
US9064473B2 (en) | 2010-05-12 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical display device and display method thereof |
JP5797449B2 (ja) | 2010-05-13 | 2015-10-21 | 株式会社半導体エネルギー研究所 | 半導体装置の評価方法 |
TWI511236B (zh) | 2010-05-14 | 2015-12-01 | Semiconductor Energy Lab | 半導體裝置 |
WO2011142467A1 (en) | 2010-05-14 | 2011-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8664658B2 (en) | 2010-05-14 | 2014-03-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011142371A1 (en) | 2010-05-14 | 2011-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9490368B2 (en) | 2010-05-20 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US8624239B2 (en) | 2010-05-20 | 2014-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8588000B2 (en) | 2010-05-20 | 2013-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device having a reading transistor with a back-gate electrode |
US9496405B2 (en) | 2010-05-20 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including step of adding cation to oxide semiconductor layer |
JP5923248B2 (ja) | 2010-05-20 | 2016-05-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2011145468A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
WO2011145707A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
WO2011145537A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
WO2011145632A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
WO2011145538A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP5714973B2 (ja) | 2010-05-21 | 2015-05-07 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR101872927B1 (ko) | 2010-05-21 | 2018-06-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP5852793B2 (ja) | 2010-05-21 | 2016-02-03 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
WO2011145634A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8629438B2 (en) | 2010-05-21 | 2014-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2011145706A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
WO2011145484A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101808198B1 (ko) | 2010-05-21 | 2017-12-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
JP5766012B2 (ja) | 2010-05-21 | 2015-08-19 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
WO2011145633A1 (en) | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5749975B2 (ja) | 2010-05-28 | 2015-07-15 | 株式会社半導体エネルギー研究所 | 光検出装置、及び、タッチパネル |
US8895375B2 (en) | 2010-06-01 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor and method for manufacturing the same |
WO2011152254A1 (en) | 2010-06-04 | 2011-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101894897B1 (ko) | 2010-06-04 | 2018-09-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011152286A1 (en) | 2010-06-04 | 2011-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8779433B2 (en) | 2010-06-04 | 2014-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011155295A1 (en) | 2010-06-10 | 2011-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Dc/dc converter, power supply circuit, and semiconductor device |
WO2011155502A1 (en) | 2010-06-11 | 2011-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8610180B2 (en) | 2010-06-11 | 2013-12-17 | Semiconductor Energy Laboratory Co., Ltd. | Gas sensor and method for manufacturing the gas sensor |
WO2011155302A1 (en) | 2010-06-11 | 2011-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5823740B2 (ja) | 2010-06-16 | 2015-11-25 | 株式会社半導体エネルギー研究所 | 入出力装置 |
US9209314B2 (en) | 2010-06-16 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor |
JP5797471B2 (ja) | 2010-06-16 | 2015-10-21 | 株式会社半導体エネルギー研究所 | 入出力装置 |
KR101862808B1 (ko) | 2010-06-18 | 2018-05-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US8637802B2 (en) | 2010-06-18 | 2014-01-28 | Semiconductor Energy Laboratory Co., Ltd. | Photosensor, semiconductor device including photosensor, and light measurement method using photosensor |
US8552425B2 (en) | 2010-06-18 | 2013-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011158704A1 (en) | 2010-06-18 | 2011-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
WO2011162147A1 (en) | 2010-06-23 | 2011-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101746197B1 (ko) | 2010-06-25 | 2017-06-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 및 반도체 장치의 검사 방법 |
KR20120000499A (ko) | 2010-06-25 | 2012-01-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 트랜지스터 및 반도체 장치 |
WO2011162104A1 (en) | 2010-06-25 | 2011-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
WO2012002236A1 (en) | 2010-06-29 | 2012-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Wiring board, semiconductor device, and manufacturing methods thereof |
KR101822526B1 (ko) | 2010-06-30 | 2018-01-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치와 그 제작 방법 |
US8441010B2 (en) | 2010-07-01 | 2013-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9473714B2 (en) | 2010-07-01 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state imaging device and semiconductor display device |
KR101350751B1 (ko) | 2010-07-01 | 2014-01-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치의 구동 방법 |
US8642380B2 (en) | 2010-07-02 | 2014-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
CN102959713B (zh) | 2010-07-02 | 2017-05-10 | 株式会社半导体能源研究所 | 半导体装置 |
KR20130090405A (ko) | 2010-07-02 | 2013-08-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 |
KR102233958B1 (ko) | 2010-07-02 | 2021-03-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
JP5792524B2 (ja) | 2010-07-02 | 2015-10-14 | 株式会社半導体エネルギー研究所 | 装置 |
US8605059B2 (en) | 2010-07-02 | 2013-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Input/output device and driving method thereof |
WO2012002186A1 (en) | 2010-07-02 | 2012-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9336739B2 (en) | 2010-07-02 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
TWI541782B (zh) | 2010-07-02 | 2016-07-11 | 半導體能源研究所股份有限公司 | 液晶顯示裝置 |
WO2012008286A1 (en) | 2010-07-16 | 2012-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2012008304A1 (en) | 2010-07-16 | 2012-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8785241B2 (en) | 2010-07-16 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2012008390A1 (en) | 2010-07-16 | 2012-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8519387B2 (en) | 2010-07-26 | 2013-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing |
JP5735872B2 (ja) | 2010-07-27 | 2015-06-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR20180088759A (ko) | 2010-07-27 | 2018-08-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
TWI565001B (zh) | 2010-07-28 | 2017-01-01 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的驅動方法 |
JP5846789B2 (ja) | 2010-07-29 | 2016-01-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2012014786A1 (en) | 2010-07-30 | 2012-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semicondcutor device and manufacturing method thereof |
KR101842181B1 (ko) * | 2010-08-04 | 2018-03-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US8928466B2 (en) | 2010-08-04 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8537600B2 (en) | 2010-08-04 | 2013-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Low off-state leakage current semiconductor memory device |
JP5739257B2 (ja) | 2010-08-05 | 2015-06-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP5743790B2 (ja) | 2010-08-06 | 2015-07-01 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2012017844A1 (en) | 2010-08-06 | 2012-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8422272B2 (en) | 2010-08-06 | 2013-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8582348B2 (en) | 2010-08-06 | 2013-11-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US8467231B2 (en) | 2010-08-06 | 2013-06-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
TWI555128B (zh) | 2010-08-06 | 2016-10-21 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的驅動方法 |
TWI605549B (zh) | 2010-08-06 | 2017-11-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
US8792284B2 (en) | 2010-08-06 | 2014-07-29 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor memory device |
JP5671418B2 (ja) | 2010-08-06 | 2015-02-18 | 株式会社半導体エネルギー研究所 | 半導体装置の駆動方法 |
CN107947763B (zh) | 2010-08-06 | 2021-12-28 | 株式会社半导体能源研究所 | 半导体集成电路 |
US8467232B2 (en) | 2010-08-06 | 2013-06-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8803164B2 (en) | 2010-08-06 | 2014-08-12 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state image sensing device and semiconductor display device |
JP5832181B2 (ja) | 2010-08-06 | 2015-12-16 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
TWI559409B (zh) | 2010-08-16 | 2016-11-21 | 半導體能源研究所股份有限公司 | 半導體裝置之製造方法 |
US9129703B2 (en) | 2010-08-16 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor memory device |
JP5848912B2 (ja) | 2010-08-16 | 2016-01-27 | 株式会社半導体エネルギー研究所 | 液晶表示装置の制御回路、液晶表示装置、及び当該液晶表示装置を具備する電子機器 |
US9343480B2 (en) | 2010-08-16 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI508294B (zh) | 2010-08-19 | 2015-11-11 | Semiconductor Energy Lab | 半導體裝置 |
US8759820B2 (en) | 2010-08-20 | 2014-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8508276B2 (en) | 2010-08-25 | 2013-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including latch circuit |
US8883555B2 (en) | 2010-08-25 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, manufacturing method of electronic device, and sputtering target |
US8685787B2 (en) | 2010-08-25 | 2014-04-01 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
JP2013009285A (ja) | 2010-08-26 | 2013-01-10 | Semiconductor Energy Lab Co Ltd | 信号処理回路及びその駆動方法 |
US9058047B2 (en) | 2010-08-26 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5727892B2 (ja) | 2010-08-26 | 2015-06-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8592261B2 (en) | 2010-08-27 | 2013-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for designing semiconductor device |
US8603841B2 (en) | 2010-08-27 | 2013-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing methods of semiconductor device and light-emitting display device |
JP5806043B2 (ja) | 2010-08-27 | 2015-11-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
CN106298794B (zh) | 2010-08-27 | 2019-07-30 | 株式会社半导体能源研究所 | 存储器件及半导体器件 |
JP5763474B2 (ja) | 2010-08-27 | 2015-08-12 | 株式会社半導体エネルギー研究所 | 光センサ |
US8450123B2 (en) | 2010-08-27 | 2013-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Oxygen diffusion evaluation method of oxide film stacked body |
JP5674594B2 (ja) | 2010-08-27 | 2015-02-25 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の駆動方法 |
US8593858B2 (en) | 2010-08-31 | 2013-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of semiconductor device |
US8634228B2 (en) | 2010-09-02 | 2014-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of semiconductor device |
US8575610B2 (en) | 2010-09-02 | 2013-11-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
WO2012029638A1 (en) | 2010-09-03 | 2012-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2012029612A1 (en) | 2010-09-03 | 2012-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target and method for manufacturing semiconductor device |
KR20180015760A (ko) | 2010-09-03 | 2018-02-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전계 효과 트랜지스터 및 반도체 장치의 제조 방법 |
US8728860B2 (en) | 2010-09-03 | 2014-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2012256819A (ja) | 2010-09-08 | 2012-12-27 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
US8487844B2 (en) | 2010-09-08 | 2013-07-16 | Semiconductor Energy Laboratory Co., Ltd. | EL display device and electronic device including the same |
US8520426B2 (en) | 2010-09-08 | 2013-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US8797487B2 (en) | 2010-09-10 | 2014-08-05 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, liquid crystal display device, and manufacturing method thereof |
KR20120026970A (ko) | 2010-09-10 | 2012-03-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 발광 장치 |
US8766253B2 (en) | 2010-09-10 | 2014-07-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101824125B1 (ko) | 2010-09-10 | 2018-02-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
US9142568B2 (en) | 2010-09-10 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting display device |
US8546161B2 (en) | 2010-09-13 | 2013-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of thin film transistor and liquid crystal display device |
KR101872926B1 (ko) | 2010-09-13 | 2018-06-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9546416B2 (en) | 2010-09-13 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming crystalline oxide semiconductor film |
JP2012256821A (ja) | 2010-09-13 | 2012-12-27 | Semiconductor Energy Lab Co Ltd | 記憶装置 |
TWI543166B (zh) | 2010-09-13 | 2016-07-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
US8835917B2 (en) | 2010-09-13 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power diode, and rectifier |
US8664097B2 (en) | 2010-09-13 | 2014-03-04 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8592879B2 (en) | 2010-09-13 | 2013-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9496743B2 (en) | 2010-09-13 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Power receiving device and wireless power feed system |
JP5827520B2 (ja) | 2010-09-13 | 2015-12-02 | 株式会社半導体エネルギー研究所 | 半導体記憶装置 |
US8647919B2 (en) | 2010-09-13 | 2014-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and method for manufacturing the same |
JP5815337B2 (ja) | 2010-09-13 | 2015-11-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8558960B2 (en) | 2010-09-13 | 2013-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US8871565B2 (en) | 2010-09-13 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR101932576B1 (ko) | 2010-09-13 | 2018-12-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101952235B1 (ko) | 2010-09-13 | 2019-02-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
TWI539453B (zh) | 2010-09-14 | 2016-06-21 | 半導體能源研究所股份有限公司 | 記憶體裝置和半導體裝置 |
KR20180124158A (ko) | 2010-09-15 | 2018-11-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 그 제작 방법 |
US9230994B2 (en) | 2010-09-15 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
JP2012256012A (ja) | 2010-09-15 | 2012-12-27 | Semiconductor Energy Lab Co Ltd | 表示装置 |
WO2012035984A1 (en) | 2010-09-15 | 2012-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
KR101856722B1 (ko) | 2010-09-22 | 2018-05-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 파워 절연 게이트형 전계 효과 트랜지스터 |
US8767443B2 (en) | 2010-09-22 | 2014-07-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method for inspecting the same |
US8792260B2 (en) | 2010-09-27 | 2014-07-29 | Semiconductor Energy Laboratory Co., Ltd. | Rectifier circuit and semiconductor device using the same |
TWI574259B (zh) | 2010-09-29 | 2017-03-11 | 半導體能源研究所股份有限公司 | 半導體記憶體裝置和其驅動方法 |
TWI620176B (zh) | 2010-10-05 | 2018-04-01 | 半導體能源研究所股份有限公司 | 半導體記憶體裝置及其驅動方法 |
US9437743B2 (en) | 2010-10-07 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Thin film element, semiconductor device, and method for manufacturing the same |
US8716646B2 (en) | 2010-10-08 | 2014-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and method for operating the same |
US8679986B2 (en) | 2010-10-14 | 2014-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing display device |
US8546892B2 (en) | 2010-10-20 | 2013-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US8803143B2 (en) | 2010-10-20 | 2014-08-12 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor including buffer layers with high resistivity |
TWI543158B (zh) | 2010-10-25 | 2016-07-21 | 半導體能源研究所股份有限公司 | 半導體儲存裝置及其驅動方法 |
WO2012057296A1 (en) | 2010-10-29 | 2012-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Storage device |
JP5771505B2 (ja) | 2010-10-29 | 2015-09-02 | 株式会社半導体エネルギー研究所 | 受信回路 |
KR101924231B1 (ko) | 2010-10-29 | 2018-11-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 기억 장치 |
CN105732401A (zh) | 2010-11-02 | 2016-07-06 | 宇部兴产株式会社 | (酰胺氨基烷烃)金属化合物及使用所述金属化合物制备含金属的薄膜的方法 |
US8916866B2 (en) | 2010-11-03 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8957468B2 (en) | 2010-11-05 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Variable capacitor and liquid crystal display device |
WO2012060253A1 (en) | 2010-11-05 | 2012-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8569754B2 (en) | 2010-11-05 | 2013-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
TWI555205B (zh) | 2010-11-05 | 2016-10-21 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的製造方法 |
JP6010291B2 (ja) | 2010-11-05 | 2016-10-19 | 株式会社半導体エネルギー研究所 | 表示装置の駆動方法 |
KR101952733B1 (ko) | 2010-11-05 | 2019-02-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9087744B2 (en) | 2010-11-05 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving transistor |
US8902637B2 (en) | 2010-11-08 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device comprising inverting amplifier circuit and driving method thereof |
TWI593115B (zh) | 2010-11-11 | 2017-07-21 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
TWI541981B (zh) | 2010-11-12 | 2016-07-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
US8854865B2 (en) | 2010-11-24 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8936965B2 (en) | 2010-11-26 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9103724B2 (en) | 2010-11-30 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising photosensor comprising oxide semiconductor, method for driving the semiconductor device, method for driving the photosensor, and electronic device |
TWI562379B (en) | 2010-11-30 | 2016-12-11 | Semiconductor Energy Lab Co Ltd | Semiconductor device and method for manufacturing semiconductor device |
US8823092B2 (en) | 2010-11-30 | 2014-09-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8809852B2 (en) | 2010-11-30 | 2014-08-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, semiconductor element, semiconductor device, and method for manufacturing the same |
US8629496B2 (en) | 2010-11-30 | 2014-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8816425B2 (en) | 2010-11-30 | 2014-08-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8461630B2 (en) | 2010-12-01 | 2013-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP5908263B2 (ja) | 2010-12-03 | 2016-04-26 | 株式会社半導体エネルギー研究所 | Dc−dcコンバータ |
KR102637010B1 (ko) | 2010-12-03 | 2024-02-16 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막 및 반도체 장치 |
TWI632551B (zh) | 2010-12-03 | 2018-08-11 | 半導體能源研究所股份有限公司 | 積體電路,其驅動方法,及半導體裝置 |
JP5856827B2 (ja) | 2010-12-09 | 2016-02-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI534905B (zh) | 2010-12-10 | 2016-05-21 | 半導體能源研究所股份有限公司 | 顯示裝置及顯示裝置之製造方法 |
JP2012256020A (ja) | 2010-12-15 | 2012-12-27 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその駆動方法 |
US8894825B2 (en) | 2010-12-17 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target, method for manufacturing the same, manufacturing semiconductor device |
US8730416B2 (en) | 2010-12-17 | 2014-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9202822B2 (en) | 2010-12-17 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP2012142562A (ja) | 2010-12-17 | 2012-07-26 | Semiconductor Energy Lab Co Ltd | 半導体記憶装置 |
US9024317B2 (en) | 2010-12-24 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor circuit, method for driving the same, storage device, register circuit, display device, and electronic device |
US9911858B2 (en) | 2010-12-28 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2012090799A1 (en) | 2010-12-28 | 2012-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP2012151453A (ja) | 2010-12-28 | 2012-08-09 | Semiconductor Energy Lab Co Ltd | 半導体装置および半導体装置の駆動方法 |
US9443984B2 (en) | 2010-12-28 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP6030298B2 (ja) | 2010-12-28 | 2016-11-24 | 株式会社半導体エネルギー研究所 | 緩衝記憶装置及び信号処理回路 |
JP5852874B2 (ja) | 2010-12-28 | 2016-02-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9048142B2 (en) | 2010-12-28 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5993141B2 (ja) | 2010-12-28 | 2016-09-14 | 株式会社半導体エネルギー研究所 | 記憶装置 |
US8735892B2 (en) | 2010-12-28 | 2014-05-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device using oxide semiconductor |
US8829512B2 (en) | 2010-12-28 | 2014-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP5864054B2 (ja) | 2010-12-28 | 2016-02-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8941112B2 (en) | 2010-12-28 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2012090973A1 (en) | 2010-12-28 | 2012-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
TWI525614B (zh) | 2011-01-05 | 2016-03-11 | 半導體能源研究所股份有限公司 | 儲存元件、儲存裝置、及信號處理電路 |
JP5977523B2 (ja) | 2011-01-12 | 2016-08-24 | 株式会社半導体エネルギー研究所 | トランジスタの作製方法 |
US8536571B2 (en) | 2011-01-12 | 2013-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8912080B2 (en) | 2011-01-12 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of the semiconductor device |
TWI535032B (zh) | 2011-01-12 | 2016-05-21 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
TWI570809B (zh) | 2011-01-12 | 2017-02-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
US8575678B2 (en) | 2011-01-13 | 2013-11-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device with floating gate |
US8421071B2 (en) | 2011-01-13 | 2013-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
TWI619230B (zh) | 2011-01-14 | 2018-03-21 | 半導體能源研究所股份有限公司 | 半導體記憶裝置 |
KR102026718B1 (ko) | 2011-01-14 | 2019-09-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 기억장치, 반도체 장치, 검출 방법 |
JP5859839B2 (ja) | 2011-01-14 | 2016-02-16 | 株式会社半導体エネルギー研究所 | 記憶素子の駆動方法、及び、記憶素子 |
JP5897910B2 (ja) | 2011-01-20 | 2016-04-06 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
TWI614747B (zh) | 2011-01-26 | 2018-02-11 | 半導體能源研究所股份有限公司 | 記憶體裝置及半導體裝置 |
WO2012102182A1 (en) | 2011-01-26 | 2012-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN103348464B (zh) | 2011-01-26 | 2016-01-13 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
TWI570920B (zh) | 2011-01-26 | 2017-02-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
TWI602303B (zh) | 2011-01-26 | 2017-10-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
JP5798933B2 (ja) | 2011-01-26 | 2015-10-21 | 株式会社半導体エネルギー研究所 | 信号処理回路 |
TW202320146A (zh) | 2011-01-26 | 2023-05-16 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
WO2012102181A1 (en) | 2011-01-27 | 2012-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI525619B (zh) | 2011-01-27 | 2016-03-11 | 半導體能源研究所股份有限公司 | 記憶體電路 |
KR102233959B1 (ko) | 2011-01-28 | 2021-03-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 및 반도체 장치 |
US8634230B2 (en) | 2011-01-28 | 2014-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
WO2012102281A1 (en) | 2011-01-28 | 2012-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9494829B2 (en) | 2011-01-28 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and liquid crystal display device containing the same |
TWI520273B (zh) | 2011-02-02 | 2016-02-01 | 半導體能源研究所股份有限公司 | 半導體儲存裝置 |
US8513773B2 (en) | 2011-02-02 | 2013-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Capacitor and semiconductor device including dielectric and N-type semiconductor |
US9799773B2 (en) | 2011-02-02 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US8780614B2 (en) | 2011-02-02 | 2014-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9431400B2 (en) | 2011-02-08 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method for manufacturing the same |
US8787083B2 (en) | 2011-02-10 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit |
US9167234B2 (en) | 2011-02-14 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8975680B2 (en) | 2011-02-17 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method manufacturing semiconductor memory device |
KR101899880B1 (ko) | 2011-02-17 | 2018-09-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 프로그래머블 lsi |
US8643007B2 (en) | 2011-02-23 | 2014-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8709920B2 (en) | 2011-02-24 | 2014-04-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9443455B2 (en) | 2011-02-25 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device having a plurality of pixels |
US9691772B2 (en) | 2011-03-03 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including memory cell which includes transistor and capacitor |
US9023684B2 (en) | 2011-03-04 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8659015B2 (en) | 2011-03-04 | 2014-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9646829B2 (en) | 2011-03-04 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
JP5898527B2 (ja) | 2011-03-04 | 2016-04-06 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8841664B2 (en) | 2011-03-04 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8785933B2 (en) | 2011-03-04 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8659957B2 (en) | 2011-03-07 | 2014-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US9099437B2 (en) | 2011-03-08 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8625085B2 (en) | 2011-03-08 | 2014-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Defect evaluation method for semiconductor |
JP5827145B2 (ja) | 2011-03-08 | 2015-12-02 | 株式会社半導体エネルギー研究所 | 信号処理回路 |
US8541781B2 (en) | 2011-03-10 | 2013-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2012121265A1 (en) | 2011-03-10 | 2012-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and method for manufacturing the same |
US8772849B2 (en) | 2011-03-10 | 2014-07-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8760903B2 (en) | 2011-03-11 | 2014-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Storage circuit |
TWI624878B (zh) | 2011-03-11 | 2018-05-21 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
JP2012209543A (ja) | 2011-03-11 | 2012-10-25 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
TWI521612B (zh) | 2011-03-11 | 2016-02-11 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
JP5933300B2 (ja) | 2011-03-16 | 2016-06-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR101995682B1 (ko) | 2011-03-18 | 2019-07-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막, 반도체 장치, 및 반도체 장치의 제작 방법 |
JP5933897B2 (ja) | 2011-03-18 | 2016-06-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8859330B2 (en) | 2011-03-23 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP5839474B2 (ja) | 2011-03-24 | 2016-01-06 | 株式会社半導体エネルギー研究所 | 信号処理回路 |
US8956944B2 (en) | 2011-03-25 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
TWI582999B (zh) | 2011-03-25 | 2017-05-11 | 半導體能源研究所股份有限公司 | 場效電晶體及包含該場效電晶體之記憶體與半導體電路 |
TWI545652B (zh) | 2011-03-25 | 2016-08-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
US9012904B2 (en) | 2011-03-25 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8987728B2 (en) | 2011-03-25 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
US9219159B2 (en) | 2011-03-25 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film and method for manufacturing semiconductor device |
US8686416B2 (en) | 2011-03-25 | 2014-04-01 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
JP6053098B2 (ja) | 2011-03-28 | 2016-12-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8927329B2 (en) | 2011-03-30 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor device with improved electronic properties |
JP5879165B2 (ja) | 2011-03-30 | 2016-03-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9082860B2 (en) | 2011-03-31 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8686486B2 (en) | 2011-03-31 | 2014-04-01 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
TWI567735B (zh) | 2011-03-31 | 2017-01-21 | 半導體能源研究所股份有限公司 | 記憶體電路,記憶體單元,及訊號處理電路 |
JP5982147B2 (ja) | 2011-04-01 | 2016-08-31 | 株式会社半導体エネルギー研究所 | 発光装置 |
US8541266B2 (en) | 2011-04-01 | 2013-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9960278B2 (en) | 2011-04-06 | 2018-05-01 | Yuhei Sato | Manufacturing method of semiconductor device |
US9093538B2 (en) | 2011-04-08 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9012905B2 (en) | 2011-04-08 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor comprising oxide semiconductor and method for manufacturing the same |
JP2012256406A (ja) | 2011-04-08 | 2012-12-27 | Semiconductor Energy Lab Co Ltd | 記憶装置、及び当該記憶装置を用いた半導体装置 |
TWI567736B (zh) | 2011-04-08 | 2017-01-21 | 半導體能源研究所股份有限公司 | 記憶體元件及信號處理電路 |
US8854867B2 (en) | 2011-04-13 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and driving method of the memory device |
JP5883699B2 (ja) | 2011-04-13 | 2016-03-15 | 株式会社半導体エネルギー研究所 | プログラマブルlsi |
US9478668B2 (en) | 2011-04-13 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US8878174B2 (en) | 2011-04-15 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, memory circuit, integrated circuit, and driving method of the integrated circuit |
US9070776B2 (en) | 2011-04-15 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8779488B2 (en) | 2011-04-15 | 2014-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8878270B2 (en) | 2011-04-15 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
JP6001900B2 (ja) | 2011-04-21 | 2016-10-05 | 株式会社半導体エネルギー研究所 | 信号処理回路 |
US9331206B2 (en) | 2011-04-22 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Oxide material and semiconductor device |
US9006803B2 (en) | 2011-04-22 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US8797788B2 (en) | 2011-04-22 | 2014-08-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10079053B2 (en) | 2011-04-22 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and memory device |
US8809854B2 (en) | 2011-04-22 | 2014-08-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8941958B2 (en) | 2011-04-22 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8916868B2 (en) | 2011-04-22 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US8932913B2 (en) | 2011-04-22 | 2015-01-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8878288B2 (en) | 2011-04-22 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN105931967B (zh) | 2011-04-27 | 2019-05-03 | 株式会社半导体能源研究所 | 半导体装置的制造方法 |
US8729545B2 (en) | 2011-04-28 | 2014-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8681533B2 (en) | 2011-04-28 | 2014-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit, signal processing circuit, and electronic device |
KR101919056B1 (ko) | 2011-04-28 | 2018-11-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 회로 |
US9935622B2 (en) | 2011-04-28 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Comparator and semiconductor device including comparator |
US8848464B2 (en) | 2011-04-29 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US8476927B2 (en) | 2011-04-29 | 2013-07-02 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
KR101963457B1 (ko) | 2011-04-29 | 2019-03-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 기억 장치 및 그 구동 방법 |
US9111795B2 (en) | 2011-04-29 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with capacitor connected to memory element through oxide semiconductor film |
US9614094B2 (en) | 2011-04-29 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer and method for driving the same |
US8446171B2 (en) | 2011-04-29 | 2013-05-21 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing unit |
TWI525615B (zh) | 2011-04-29 | 2016-03-11 | 半導體能源研究所股份有限公司 | 半導體儲存裝置 |
US8785923B2 (en) | 2011-04-29 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TW202230814A (zh) | 2011-05-05 | 2022-08-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
US8709922B2 (en) | 2011-05-06 | 2014-04-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101874144B1 (ko) | 2011-05-06 | 2018-07-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 기억 장치 |
US9117701B2 (en) | 2011-05-06 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8809928B2 (en) | 2011-05-06 | 2014-08-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, and method for manufacturing the semiconductor device |
TWI568181B (zh) | 2011-05-06 | 2017-01-21 | 半導體能源研究所股份有限公司 | 邏輯電路及半導體裝置 |
WO2012153473A1 (en) | 2011-05-06 | 2012-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9443844B2 (en) | 2011-05-10 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Gain cell semiconductor memory device and driving method thereof |
TWI541978B (zh) | 2011-05-11 | 2016-07-11 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置之驅動方法 |
US8946066B2 (en) | 2011-05-11 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US8847233B2 (en) | 2011-05-12 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a trenched insulating layer coated with an oxide semiconductor film |
TWI557711B (zh) | 2011-05-12 | 2016-11-11 | 半導體能源研究所股份有限公司 | 顯示裝置的驅動方法 |
WO2012157472A1 (en) | 2011-05-13 | 2012-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101952570B1 (ko) | 2011-05-13 | 2019-02-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
US9048788B2 (en) | 2011-05-13 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a photoelectric conversion portion |
JP6013773B2 (ja) | 2011-05-13 | 2016-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP5886127B2 (ja) | 2011-05-13 | 2016-03-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9954110B2 (en) | 2011-05-13 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | EL display device and electronic device |
JP5886128B2 (ja) | 2011-05-13 | 2016-03-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR101921772B1 (ko) | 2011-05-13 | 2018-11-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP6110075B2 (ja) | 2011-05-13 | 2017-04-05 | 株式会社半導体エネルギー研究所 | 表示装置 |
JP5959296B2 (ja) | 2011-05-13 | 2016-08-02 | 株式会社半導体エネルギー研究所 | 半導体装置およびその製造方法 |
TWI536502B (zh) | 2011-05-13 | 2016-06-01 | 半導體能源研究所股份有限公司 | 記憶體電路及電子裝置 |
US9093539B2 (en) | 2011-05-13 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2012157532A1 (en) | 2011-05-16 | 2012-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
TWI570891B (zh) | 2011-05-17 | 2017-02-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
US9673823B2 (en) | 2011-05-18 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
TWI552150B (zh) | 2011-05-18 | 2016-10-01 | 半導體能源研究所股份有限公司 | 半導體儲存裝置 |
KR101991735B1 (ko) | 2011-05-19 | 2019-06-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 집적 회로 |
KR102093909B1 (ko) | 2011-05-19 | 2020-03-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 회로 및 회로의 구동 방법 |
US8709889B2 (en) | 2011-05-19 | 2014-04-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and manufacturing method thereof |
US8837203B2 (en) | 2011-05-19 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8581625B2 (en) | 2011-05-19 | 2013-11-12 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
KR102081792B1 (ko) | 2011-05-19 | 2020-02-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 연산회로 및 연산회로의 구동방법 |
JP6006975B2 (ja) | 2011-05-19 | 2016-10-12 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US8779799B2 (en) | 2011-05-19 | 2014-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit |
TWI616873B (zh) | 2011-05-20 | 2018-03-01 | 半導體能源研究所股份有限公司 | 儲存裝置及信號處理電路 |
JP6030334B2 (ja) | 2011-05-20 | 2016-11-24 | 株式会社半導体エネルギー研究所 | 記憶装置 |
WO2012161059A1 (en) | 2011-05-20 | 2012-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
JP5886496B2 (ja) | 2011-05-20 | 2016-03-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI614995B (zh) | 2011-05-20 | 2018-02-11 | 半導體能源研究所股份有限公司 | 鎖相迴路及使用此鎖相迴路之半導體裝置 |
JP5820335B2 (ja) | 2011-05-20 | 2015-11-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6013680B2 (ja) | 2011-05-20 | 2016-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP5947099B2 (ja) | 2011-05-20 | 2016-07-06 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8508256B2 (en) | 2011-05-20 | 2013-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit |
JP6091083B2 (ja) | 2011-05-20 | 2017-03-08 | 株式会社半導体エネルギー研究所 | 記憶装置 |
JP6013682B2 (ja) | 2011-05-20 | 2016-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置の駆動方法 |
JP5951351B2 (ja) | 2011-05-20 | 2016-07-13 | 株式会社半導体エネルギー研究所 | 加算器及び全加算器 |
JP5936908B2 (ja) | 2011-05-20 | 2016-06-22 | 株式会社半導体エネルギー研究所 | パリティビット出力回路およびパリティチェック回路 |
JP6082189B2 (ja) | 2011-05-20 | 2017-02-15 | 株式会社半導体エネルギー研究所 | 記憶装置及び信号処理回路 |
TWI557739B (zh) | 2011-05-20 | 2016-11-11 | 半導體能源研究所股份有限公司 | 半導體積體電路 |
TWI559683B (zh) | 2011-05-20 | 2016-11-21 | 半導體能源研究所股份有限公司 | 半導體積體電路 |
US9336845B2 (en) | 2011-05-20 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Register circuit including a volatile memory and a nonvolatile memory |
CN102789808B (zh) | 2011-05-20 | 2018-03-06 | 株式会社半导体能源研究所 | 存储器装置和用于驱动存储器装置的方法 |
JP5820336B2 (ja) | 2011-05-20 | 2015-11-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2012160963A1 (en) | 2011-05-20 | 2012-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5892852B2 (ja) | 2011-05-20 | 2016-03-23 | 株式会社半導体エネルギー研究所 | プログラマブルロジックデバイス |
US20120298998A1 (en) | 2011-05-25 | 2012-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film, semiconductor device, and method for manufacturing semiconductor device |
US9171840B2 (en) | 2011-05-26 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR101912971B1 (ko) | 2011-05-26 | 2018-10-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 분주 회로 및 분주 회로를 이용한 반도체 장치 |
US8610482B2 (en) | 2011-05-27 | 2013-12-17 | Semiconductor Energy Laboratory Co., Ltd. | Trimming circuit and method for driving trimming circuit |
JP5912844B2 (ja) | 2011-05-31 | 2016-04-27 | 株式会社半導体エネルギー研究所 | プログラマブルロジックデバイス |
US9467047B2 (en) | 2011-05-31 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | DC-DC converter, power source circuit, and semiconductor device |
US8669781B2 (en) | 2011-05-31 | 2014-03-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5890251B2 (ja) | 2011-06-08 | 2016-03-22 | 株式会社半導体エネルギー研究所 | 通信方法 |
KR102124557B1 (ko) | 2011-06-08 | 2020-06-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 스퍼터링 타겟, 스퍼터링 타겟의 제조 방법 및 박막의 형성 방법 |
JP2013016243A (ja) | 2011-06-09 | 2013-01-24 | Semiconductor Energy Lab Co Ltd | 記憶装置 |
US8891285B2 (en) | 2011-06-10 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9112036B2 (en) | 2011-06-10 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
JP6005401B2 (ja) | 2011-06-10 | 2016-10-12 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP6104522B2 (ja) | 2011-06-10 | 2017-03-29 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8958263B2 (en) | 2011-06-10 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8804405B2 (en) | 2011-06-16 | 2014-08-12 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9299852B2 (en) | 2011-06-16 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
TWI557910B (zh) | 2011-06-16 | 2016-11-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
US9166055B2 (en) | 2011-06-17 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR20130007426A (ko) | 2011-06-17 | 2013-01-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
US8901554B2 (en) | 2011-06-17 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including channel formation region including oxide semiconductor |
KR102377750B1 (ko) | 2011-06-17 | 2022-03-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 디스플레이 장치 |
US9099885B2 (en) | 2011-06-17 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Wireless power feeding system |
US8673426B2 (en) | 2011-06-29 | 2014-03-18 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, method of manufacturing the driver circuit, and display device including the driver circuit |
US8878589B2 (en) | 2011-06-30 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
WO2013005380A1 (en) | 2011-07-01 | 2013-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9318506B2 (en) | 2011-07-08 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8748886B2 (en) | 2011-07-08 | 2014-06-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
KR102014876B1 (ko) | 2011-07-08 | 2019-08-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
US9385238B2 (en) | 2011-07-08 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Transistor using oxide semiconductor |
US9214474B2 (en) | 2011-07-08 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9490241B2 (en) | 2011-07-08 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a first inverter and a second inverter |
US8952377B2 (en) | 2011-07-08 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9496138B2 (en) | 2011-07-08 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor film, method for manufacturing semiconductor device, and semiconductor device |
US8847220B2 (en) | 2011-07-15 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8836626B2 (en) | 2011-07-15 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9200952B2 (en) | 2011-07-15 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a photodetector and an analog arithmetic circuit |
JP2013042117A (ja) | 2011-07-15 | 2013-02-28 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
US8946812B2 (en) | 2011-07-21 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8643008B2 (en) | 2011-07-22 | 2014-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9012993B2 (en) | 2011-07-22 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8716073B2 (en) | 2011-07-22 | 2014-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for processing oxide semiconductor film and method for manufacturing semiconductor device |
KR102297329B1 (ko) | 2011-07-22 | 2021-09-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 |
JP6013685B2 (ja) | 2011-07-22 | 2016-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8994019B2 (en) | 2011-08-05 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8718224B2 (en) | 2011-08-05 | 2014-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
JP6006572B2 (ja) | 2011-08-18 | 2016-10-12 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6128775B2 (ja) | 2011-08-19 | 2017-05-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI575494B (zh) | 2011-08-19 | 2017-03-21 | 半導體能源研究所股份有限公司 | 半導體裝置的驅動方法 |
JP6116149B2 (ja) | 2011-08-24 | 2017-04-19 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI637483B (zh) | 2011-08-29 | 2018-10-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
US9252279B2 (en) | 2011-08-31 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9660092B2 (en) | 2011-08-31 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor thin film transistor including oxygen release layer |
JP6016532B2 (ja) | 2011-09-07 | 2016-10-26 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6050054B2 (ja) | 2011-09-09 | 2016-12-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8802493B2 (en) | 2011-09-13 | 2014-08-12 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of oxide semiconductor device |
JP5825744B2 (ja) | 2011-09-15 | 2015-12-02 | 株式会社半導体エネルギー研究所 | パワー絶縁ゲート型電界効果トランジスタ |
WO2013039126A1 (en) | 2011-09-16 | 2013-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5832399B2 (ja) | 2011-09-16 | 2015-12-16 | 株式会社半導体エネルギー研究所 | 発光装置 |
US9082663B2 (en) | 2011-09-16 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8952379B2 (en) | 2011-09-16 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN103022012B (zh) | 2011-09-21 | 2017-03-01 | 株式会社半导体能源研究所 | 半导体存储装置 |
WO2013042562A1 (en) | 2011-09-22 | 2013-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2013042643A1 (en) | 2011-09-22 | 2013-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector and method for driving photodetector |
US8841675B2 (en) | 2011-09-23 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Minute transistor |
US9431545B2 (en) | 2011-09-23 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR102108572B1 (ko) | 2011-09-26 | 2020-05-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
JP2013084333A (ja) | 2011-09-28 | 2013-05-09 | Semiconductor Energy Lab Co Ltd | シフトレジスタ回路 |
KR20140056392A (ko) | 2011-09-29 | 2014-05-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
SG11201505088UA (en) | 2011-09-29 | 2015-08-28 | Semiconductor Energy Lab | Semiconductor device |
KR101506303B1 (ko) | 2011-09-29 | 2015-03-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 및 반도체 장치의 제작 방법 |
US8716708B2 (en) | 2011-09-29 | 2014-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8982607B2 (en) | 2011-09-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and signal processing circuit |
JP5806905B2 (ja) | 2011-09-30 | 2015-11-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US20130087784A1 (en) | 2011-10-05 | 2013-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP2013093565A (ja) | 2011-10-07 | 2013-05-16 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
JP2013093561A (ja) | 2011-10-07 | 2013-05-16 | Semiconductor Energy Lab Co Ltd | 酸化物半導体膜及び半導体装置 |
JP6022880B2 (ja) | 2011-10-07 | 2016-11-09 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の作製方法 |
US8637864B2 (en) | 2011-10-13 | 2014-01-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
JP6026839B2 (ja) | 2011-10-13 | 2016-11-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9018629B2 (en) | 2011-10-13 | 2015-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9117916B2 (en) | 2011-10-13 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US9287405B2 (en) | 2011-10-13 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
JP5912394B2 (ja) | 2011-10-13 | 2016-04-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR20130040706A (ko) | 2011-10-14 | 2013-04-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
IN2014DN03274A (ja) | 2011-10-14 | 2015-05-22 | Semiconductor Energy Lab | |
KR20130043063A (ko) | 2011-10-19 | 2013-04-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
TWI567985B (zh) | 2011-10-21 | 2017-01-21 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
JP6226518B2 (ja) | 2011-10-24 | 2017-11-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR101976212B1 (ko) | 2011-10-24 | 2019-05-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
JP6045285B2 (ja) | 2011-10-24 | 2016-12-14 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP6082562B2 (ja) | 2011-10-27 | 2017-02-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR20130046357A (ko) | 2011-10-27 | 2013-05-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR20140086954A (ko) | 2011-10-28 | 2014-07-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
US8604472B2 (en) | 2011-11-09 | 2013-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5933895B2 (ja) | 2011-11-10 | 2016-06-15 | 株式会社半導体エネルギー研究所 | 半導体装置および半導体装置の作製方法 |
US8796682B2 (en) | 2011-11-11 | 2014-08-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US9082861B2 (en) | 2011-11-11 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with oxide semiconductor channel having protective layer |
US8878177B2 (en) | 2011-11-11 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
JP6076038B2 (ja) | 2011-11-11 | 2017-02-08 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
JP6122275B2 (ja) | 2011-11-11 | 2017-04-26 | 株式会社半導体エネルギー研究所 | 表示装置 |
CN103918025B (zh) | 2011-11-11 | 2016-12-21 | 株式会社半导体能源研究所 | 信号线驱动电路以及液晶显示装置 |
US8969130B2 (en) | 2011-11-18 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, formation method thereof, semiconductor device, and manufacturing method thereof |
KR20130055521A (ko) | 2011-11-18 | 2013-05-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 소자, 및 반도체 소자의 제작 방법, 및 반도체 소자를 포함하는 반도체 장치 |
US8962386B2 (en) | 2011-11-25 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6099368B2 (ja) | 2011-11-25 | 2017-03-22 | 株式会社半導体エネルギー研究所 | 記憶装置 |
US8829528B2 (en) | 2011-11-25 | 2014-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including groove portion extending beyond pixel electrode |
US8951899B2 (en) | 2011-11-25 | 2015-02-10 | Semiconductor Energy Laboratory | Method for manufacturing semiconductor device |
JP6125211B2 (ja) | 2011-11-25 | 2017-05-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9057126B2 (en) | 2011-11-29 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target and method for manufacturing semiconductor device |
US20130137232A1 (en) | 2011-11-30 | 2013-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film and method for manufacturing semiconductor device |
KR102072244B1 (ko) | 2011-11-30 | 2020-01-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
TWI588910B (zh) | 2011-11-30 | 2017-06-21 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
TWI591611B (zh) | 2011-11-30 | 2017-07-11 | 半導體能源研究所股份有限公司 | 半導體顯示裝置 |
US9076871B2 (en) | 2011-11-30 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6147992B2 (ja) | 2011-11-30 | 2017-06-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8981367B2 (en) | 2011-12-01 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI621185B (zh) | 2011-12-01 | 2018-04-11 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的製造方法 |
JP6050662B2 (ja) | 2011-12-02 | 2016-12-21 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の作製方法 |
JP2013137853A (ja) | 2011-12-02 | 2013-07-11 | Semiconductor Energy Lab Co Ltd | 記憶装置および記憶装置の駆動方法 |
WO2013080900A1 (en) | 2011-12-02 | 2013-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9257422B2 (en) | 2011-12-06 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit and method for driving signal processing circuit |
US9076505B2 (en) | 2011-12-09 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US10002968B2 (en) | 2011-12-14 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
JP6105266B2 (ja) | 2011-12-15 | 2017-03-29 | 株式会社半導体エネルギー研究所 | 記憶装置 |
WO2013089115A1 (en) | 2011-12-15 | 2013-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8785258B2 (en) | 2011-12-20 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2013149953A (ja) | 2011-12-20 | 2013-08-01 | Semiconductor Energy Lab Co Ltd | 半導体装置及び半導体装置の作製方法 |
US8748240B2 (en) | 2011-12-22 | 2014-06-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8907392B2 (en) | 2011-12-22 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including stacked sub memory cells |
JP2013130802A (ja) | 2011-12-22 | 2013-07-04 | Semiconductor Energy Lab Co Ltd | 半導体装置、画像表示装置、記憶装置、及び電子機器 |
TWI613824B (zh) | 2011-12-23 | 2018-02-01 | 半導體能源研究所股份有限公司 | 半導體裝置 |
JP6012450B2 (ja) | 2011-12-23 | 2016-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置の駆動方法 |
US8704221B2 (en) | 2011-12-23 | 2014-04-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6033071B2 (ja) | 2011-12-23 | 2016-11-30 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI580189B (zh) | 2011-12-23 | 2017-04-21 | 半導體能源研究所股份有限公司 | 位準位移電路及半導體積體電路 |
TWI569446B (zh) | 2011-12-23 | 2017-02-01 | 半導體能源研究所股份有限公司 | 半導體元件、半導體元件的製造方法、及包含半導體元件的半導體裝置 |
WO2013094547A1 (en) | 2011-12-23 | 2013-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6053490B2 (ja) | 2011-12-23 | 2016-12-27 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
WO2013099537A1 (en) | 2011-12-26 | 2013-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Motion recognition device |
KR102100425B1 (ko) | 2011-12-27 | 2020-04-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
TWI584383B (zh) | 2011-12-27 | 2017-05-21 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
KR102103913B1 (ko) | 2012-01-10 | 2020-04-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
US8836555B2 (en) | 2012-01-18 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Circuit, sensor circuit, and semiconductor device using the sensor circuit |
US8969867B2 (en) | 2012-01-18 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9040981B2 (en) | 2012-01-20 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9099560B2 (en) | 2012-01-20 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9653614B2 (en) | 2012-01-23 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR102147870B1 (ko) | 2012-01-23 | 2020-08-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2013111756A1 (en) | 2012-01-25 | 2013-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9006733B2 (en) | 2012-01-26 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US8956912B2 (en) | 2012-01-26 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9419146B2 (en) | 2012-01-26 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6091905B2 (ja) | 2012-01-26 | 2017-03-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TW201901972A (zh) | 2012-01-26 | 2019-01-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的製造方法 |
TWI561951B (en) | 2012-01-30 | 2016-12-11 | Semiconductor Energy Lab Co Ltd | Power supply circuit |
TWI562361B (en) | 2012-02-02 | 2016-12-11 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
KR102101167B1 (ko) | 2012-02-03 | 2020-04-16 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9362417B2 (en) | 2012-02-03 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196741B2 (en) | 2012-02-03 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8916424B2 (en) | 2012-02-07 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9859114B2 (en) | 2012-02-08 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device with an oxygen-controlling insulating layer |
JP6125850B2 (ja) | 2012-02-09 | 2017-05-10 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の作製方法 |
JP5981157B2 (ja) | 2012-02-09 | 2016-08-31 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9112037B2 (en) | 2012-02-09 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20130207111A1 (en) | 2012-02-09 | 2013-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including semiconductor device, electronic device including semiconductor device, and method for manufacturing semiconductor device |
US8817516B2 (en) | 2012-02-17 | 2014-08-26 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit and semiconductor device |
JP2014063557A (ja) | 2012-02-24 | 2014-04-10 | Semiconductor Energy Lab Co Ltd | 記憶装置及び半導体装置 |
US20130221345A1 (en) | 2012-02-28 | 2013-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6220526B2 (ja) | 2012-02-29 | 2017-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9312257B2 (en) | 2012-02-29 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8988152B2 (en) | 2012-02-29 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6151530B2 (ja) | 2012-02-29 | 2017-06-21 | 株式会社半導体エネルギー研究所 | イメージセンサ、カメラ、及び監視システム |
US8975917B2 (en) | 2012-03-01 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
JP6046514B2 (ja) | 2012-03-01 | 2016-12-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP2013183001A (ja) | 2012-03-01 | 2013-09-12 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
US9287370B2 (en) | 2012-03-02 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Memory device comprising a transistor including an oxide semiconductor and semiconductor device including the same |
US9735280B2 (en) | 2012-03-02 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and method for forming oxide film |
US9176571B2 (en) | 2012-03-02 | 2015-11-03 | Semiconductor Energy Laboratories Co., Ltd. | Microprocessor and method for driving microprocessor |
JP6100559B2 (ja) | 2012-03-05 | 2017-03-22 | 株式会社半導体エネルギー研究所 | 半導体記憶装置 |
JP6041707B2 (ja) | 2012-03-05 | 2016-12-14 | 株式会社半導体エネルギー研究所 | ラッチ回路および半導体装置 |
US8995218B2 (en) | 2012-03-07 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8981370B2 (en) | 2012-03-08 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN104160295B (zh) | 2012-03-09 | 2017-09-15 | 株式会社半导体能源研究所 | 半导体装置的驱动方法 |
CN104170001B (zh) | 2012-03-13 | 2017-03-01 | 株式会社半导体能源研究所 | 发光装置及其驱动方法 |
JP6168795B2 (ja) | 2012-03-14 | 2017-07-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9117409B2 (en) | 2012-03-14 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device with transistor and capacitor discharging gate of driving electrode and oxide semiconductor layer |
US9058892B2 (en) | 2012-03-14 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and shift register |
KR102108248B1 (ko) | 2012-03-14 | 2020-05-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막, 트랜지스터, 및 반도체 장치 |
US9541386B2 (en) | 2012-03-21 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Distance measurement device and distance measurement system |
US9324449B2 (en) | 2012-03-28 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, signal processing unit having the driver circuit, method for manufacturing the signal processing unit, and display device |
JP6169376B2 (ja) | 2012-03-28 | 2017-07-26 | 株式会社半導体エネルギー研究所 | 電池管理ユニット、保護回路、蓄電装置 |
US9349849B2 (en) | 2012-03-28 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the semiconductor device |
US9786793B2 (en) | 2012-03-29 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer including regions with different concentrations of resistance-reducing elements |
KR102044725B1 (ko) | 2012-03-29 | 2019-11-14 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전원 제어 장치 |
JP6139187B2 (ja) | 2012-03-29 | 2017-05-31 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP2013229013A (ja) | 2012-03-29 | 2013-11-07 | Semiconductor Energy Lab Co Ltd | アレイコントローラ及びストレージシステム |
US8941113B2 (en) | 2012-03-30 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, semiconductor device, and manufacturing method of semiconductor element |
US8999773B2 (en) | 2012-04-05 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Processing method of stacked-layer film and manufacturing method of semiconductor device |
JP2013232885A (ja) | 2012-04-06 | 2013-11-14 | Semiconductor Energy Lab Co Ltd | 半導体リレー |
US9711110B2 (en) | 2012-04-06 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising grayscale conversion portion and display portion |
US8901556B2 (en) | 2012-04-06 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, method for manufacturing semiconductor device, and semiconductor device |
US9793444B2 (en) | 2012-04-06 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
JP5975907B2 (ja) | 2012-04-11 | 2016-08-23 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9276121B2 (en) | 2012-04-12 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9208849B2 (en) | 2012-04-12 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device, and electronic device |
JP6128906B2 (ja) | 2012-04-13 | 2017-05-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6059566B2 (ja) | 2012-04-13 | 2017-01-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9030232B2 (en) | 2012-04-13 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Isolator circuit and semiconductor device |
KR102254731B1 (ko) | 2012-04-13 | 2021-05-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP6143423B2 (ja) | 2012-04-16 | 2017-06-07 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
JP6001308B2 (ja) | 2012-04-17 | 2016-10-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6076612B2 (ja) | 2012-04-17 | 2017-02-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9029863B2 (en) | 2012-04-20 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9219164B2 (en) | 2012-04-20 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor channel |
US9230683B2 (en) | 2012-04-25 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9236408B2 (en) | 2012-04-25 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device including photodiode |
US9006024B2 (en) | 2012-04-25 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9331689B2 (en) | 2012-04-27 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Power supply circuit and semiconductor device including the same |
US9285848B2 (en) | 2012-04-27 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Power reception control device, power reception device, power transmission and reception system, and electronic device |
JP6199583B2 (ja) | 2012-04-27 | 2017-09-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8860022B2 (en) | 2012-04-27 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9048323B2 (en) | 2012-04-30 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6228381B2 (ja) | 2012-04-30 | 2017-11-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6100071B2 (ja) | 2012-04-30 | 2017-03-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9703704B2 (en) | 2012-05-01 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9007090B2 (en) | 2012-05-01 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of driving semiconductor device |
JP6035195B2 (ja) | 2012-05-01 | 2016-11-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
SG10201608665WA (en) | 2012-05-02 | 2016-12-29 | Semiconductor Energy Lab Co Ltd | Programmable logic device |
US9261943B2 (en) | 2012-05-02 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8866510B2 (en) | 2012-05-02 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6227890B2 (ja) | 2012-05-02 | 2017-11-08 | 株式会社半導体エネルギー研究所 | 信号処理回路および制御回路 |
KR102025722B1 (ko) | 2012-05-02 | 2019-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 온도 센서 회로, 및 온도 센서 회로를 사용한 반도체 장치 |
US9104395B2 (en) | 2012-05-02 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Processor and driving method thereof |
JP6243136B2 (ja) | 2012-05-02 | 2017-12-06 | 株式会社半導体エネルギー研究所 | スイッチングコンバータ |
KR20130125717A (ko) | 2012-05-09 | 2013-11-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 구동 방법 |
CN104285302B (zh) | 2012-05-10 | 2017-08-22 | 株式会社半导体能源研究所 | 半导体装置 |
KR102069158B1 (ko) | 2012-05-10 | 2020-01-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 배선의 형성 방법, 반도체 장치, 및 반도체 장치의 제작 방법 |
KR102222438B1 (ko) | 2012-05-10 | 2021-03-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 표시 장치 |
KR102087443B1 (ko) | 2012-05-11 | 2020-03-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 구동 방법 |
DE102013207324A1 (de) | 2012-05-11 | 2013-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung und elektronisches Gerät |
TWI670553B (zh) | 2012-05-16 | 2019-09-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置及觸控面板 |
US8929128B2 (en) | 2012-05-17 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Storage device and writing method of the same |
US9817032B2 (en) | 2012-05-23 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Measurement device |
CN104321967B (zh) | 2012-05-25 | 2018-01-09 | 株式会社半导体能源研究所 | 可编程逻辑装置及半导体装置 |
JP6050721B2 (ja) | 2012-05-25 | 2016-12-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6250955B2 (ja) | 2012-05-25 | 2017-12-20 | 株式会社半導体エネルギー研究所 | 半導体装置の駆動方法 |
KR102164990B1 (ko) | 2012-05-25 | 2020-10-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 기억 소자의 구동 방법 |
JP2014003594A (ja) | 2012-05-25 | 2014-01-09 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその駆動方法 |
US9147706B2 (en) | 2012-05-29 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having sensor circuit having amplifier circuit |
JP6377317B2 (ja) | 2012-05-30 | 2018-08-22 | 株式会社半導体エネルギー研究所 | プログラマブルロジックデバイス |
KR102388690B1 (ko) | 2012-05-31 | 2022-04-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2013179922A1 (en) | 2012-05-31 | 2013-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8785928B2 (en) | 2012-05-31 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8995607B2 (en) | 2012-05-31 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US9048265B2 (en) | 2012-05-31 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising oxide semiconductor layer |
JP6158588B2 (ja) | 2012-05-31 | 2017-07-05 | 株式会社半導体エネルギー研究所 | 発光装置 |
US9916793B2 (en) | 2012-06-01 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving the same |
WO2013180016A1 (en) | 2012-06-01 | 2013-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and alarm device |
US9135182B2 (en) | 2012-06-01 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Central processing unit and driving method thereof |
US8872174B2 (en) | 2012-06-01 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
JP6108960B2 (ja) | 2012-06-01 | 2017-04-05 | 株式会社半導体エネルギー研究所 | 半導体装置、処理装置 |
US8901557B2 (en) | 2012-06-15 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR102113160B1 (ko) | 2012-06-15 | 2020-05-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9059219B2 (en) | 2012-06-27 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9742378B2 (en) | 2012-06-29 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Pulse output circuit and semiconductor device |
CN104380444A (zh) | 2012-06-29 | 2015-02-25 | 株式会社半导体能源研究所 | 半导体装置 |
US8873308B2 (en) | 2012-06-29 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
TWI596778B (zh) | 2012-06-29 | 2017-08-21 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的製造方法 |
KR102082794B1 (ko) | 2012-06-29 | 2020-02-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치의 구동 방법, 및 표시 장치 |
KR102161077B1 (ko) | 2012-06-29 | 2020-09-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9054678B2 (en) | 2012-07-06 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9190525B2 (en) | 2012-07-06 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer |
US9083327B2 (en) | 2012-07-06 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
KR102099262B1 (ko) | 2012-07-11 | 2020-04-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치, 및 액정 표시 장치의 구동 방법 |
JP2014032399A (ja) | 2012-07-13 | 2014-02-20 | Semiconductor Energy Lab Co Ltd | 液晶表示装置 |
JP6006558B2 (ja) | 2012-07-17 | 2016-10-12 | 株式会社半導体エネルギー研究所 | 半導体装置及びその製造方法 |
CN108987416B (zh) | 2012-07-20 | 2023-07-04 | 株式会社半导体能源研究所 | 显示装置及具有该显示装置的电子设备 |
WO2014013959A1 (en) | 2012-07-20 | 2014-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
WO2014013958A1 (en) | 2012-07-20 | 2014-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
JP6185311B2 (ja) | 2012-07-20 | 2017-08-23 | 株式会社半導体エネルギー研究所 | 電源制御回路、及び信号処理回路 |
JP2014042004A (ja) | 2012-07-26 | 2014-03-06 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
KR20140013931A (ko) | 2012-07-26 | 2014-02-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 |
JP6224931B2 (ja) | 2012-07-27 | 2017-11-01 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP2014045175A (ja) | 2012-08-02 | 2014-03-13 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
JP6134598B2 (ja) | 2012-08-02 | 2017-05-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
CN108054175A (zh) | 2012-08-03 | 2018-05-18 | 株式会社半导体能源研究所 | 半导体装置 |
IN2015DN01663A (ja) | 2012-08-03 | 2015-07-03 | Semiconductor Energy Lab | |
US10557192B2 (en) | 2012-08-07 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for using sputtering target and method for forming oxide film |
US9885108B2 (en) | 2012-08-07 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming sputtering target |
JP2014057298A (ja) | 2012-08-10 | 2014-03-27 | Semiconductor Energy Lab Co Ltd | 半導体装置の駆動方法 |
US9245958B2 (en) | 2012-08-10 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP2014199899A (ja) | 2012-08-10 | 2014-10-23 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2014024808A1 (en) | 2012-08-10 | 2014-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9929276B2 (en) | 2012-08-10 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
CN108305895B (zh) | 2012-08-10 | 2021-08-03 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
TWI581404B (zh) | 2012-08-10 | 2017-05-01 | 半導體能源研究所股份有限公司 | 半導體裝置以及該半導體裝置的驅動方法 |
JP2014057296A (ja) | 2012-08-10 | 2014-03-27 | Semiconductor Energy Lab Co Ltd | 半導体装置の駆動方法 |
US8937307B2 (en) | 2012-08-10 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR102171650B1 (ko) | 2012-08-10 | 2020-10-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
JP6220597B2 (ja) | 2012-08-10 | 2017-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8872120B2 (en) | 2012-08-23 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and method for driving the same |
KR102069683B1 (ko) | 2012-08-24 | 2020-01-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 방사선 검출 패널, 방사선 촬상 장치, 및 화상 진단 장치 |
US9625764B2 (en) | 2012-08-28 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
DE102013216824A1 (de) | 2012-08-28 | 2014-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung |
KR20140029202A (ko) | 2012-08-28 | 2014-03-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
KR102161078B1 (ko) | 2012-08-28 | 2020-09-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 그 제작 방법 |
TWI575663B (zh) | 2012-08-31 | 2017-03-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
US8947158B2 (en) | 2012-09-03 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
WO2014034820A1 (en) | 2012-09-03 | 2014-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Microcontroller |
DE102013217278B4 (de) | 2012-09-12 | 2017-03-30 | Semiconductor Energy Laboratory Co., Ltd. | Photodetektorschaltung, Bildgebungsvorrichtung und Verfahren zum Ansteuern einer Photodetektorschaltung |
US9018624B2 (en) | 2012-09-13 | 2015-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic appliance |
CN111477634B (zh) | 2012-09-13 | 2023-11-14 | 株式会社半导体能源研究所 | 半导体装置 |
US8981372B2 (en) | 2012-09-13 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic appliance |
TWI595659B (zh) | 2012-09-14 | 2017-08-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
US8927985B2 (en) | 2012-09-20 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2014046222A1 (en) | 2012-09-24 | 2014-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
TWI746200B (zh) | 2012-09-24 | 2021-11-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
TWI681233B (zh) | 2012-10-12 | 2020-01-01 | 日商半導體能源研究所股份有限公司 | 液晶顯示裝置、觸控面板及液晶顯示裝置的製造方法 |
JP6290576B2 (ja) | 2012-10-12 | 2018-03-07 | 株式会社半導体エネルギー研究所 | 液晶表示装置及びその駆動方法 |
KR102226090B1 (ko) | 2012-10-12 | 2021-03-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 및 반도체 장치의 제조 장치 |
JP6351947B2 (ja) | 2012-10-12 | 2018-07-04 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
KR102094568B1 (ko) | 2012-10-17 | 2020-03-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그의 제작 방법 |
WO2014061535A1 (en) | 2012-10-17 | 2014-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2014082388A (ja) | 2012-10-17 | 2014-05-08 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
US9166021B2 (en) | 2012-10-17 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6283191B2 (ja) | 2012-10-17 | 2018-02-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR102168987B1 (ko) | 2012-10-17 | 2020-10-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 마이크로컨트롤러 및 그 제조 방법 |
JP6021586B2 (ja) | 2012-10-17 | 2016-11-09 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2014061567A1 (en) | 2012-10-17 | 2014-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
JP6059501B2 (ja) | 2012-10-17 | 2017-01-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP5951442B2 (ja) | 2012-10-17 | 2016-07-13 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI591966B (zh) | 2012-10-17 | 2017-07-11 | 半導體能源研究所股份有限公司 | 可編程邏輯裝置及可編程邏輯裝置的驅動方法 |
KR102220279B1 (ko) | 2012-10-19 | 2021-02-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막을 포함하는 다층막 및 반도체 장치의 제작 방법 |
JP6204145B2 (ja) | 2012-10-23 | 2017-09-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9287411B2 (en) | 2012-10-24 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
WO2014065343A1 (en) | 2012-10-24 | 2014-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI637517B (zh) | 2012-10-24 | 2018-10-01 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
KR102279459B1 (ko) | 2012-10-24 | 2021-07-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR102130184B1 (ko) | 2012-10-24 | 2020-07-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2014065389A1 (en) | 2012-10-25 | 2014-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Central control system |
JP6219562B2 (ja) | 2012-10-30 | 2017-10-25 | 株式会社半導体エネルギー研究所 | 表示装置及び電子機器 |
WO2014073374A1 (en) | 2012-11-06 | 2014-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
KR20220150439A (ko) | 2012-11-08 | 2022-11-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 디스플레이 장치 |
JP6220641B2 (ja) | 2012-11-15 | 2017-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI608616B (zh) | 2012-11-15 | 2017-12-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
TWI605593B (zh) | 2012-11-15 | 2017-11-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
JP6285150B2 (ja) | 2012-11-16 | 2018-02-28 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI620323B (zh) | 2012-11-16 | 2018-04-01 | 半導體能源研究所股份有限公司 | 半導體裝置 |
TWI600157B (zh) | 2012-11-16 | 2017-09-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
JP6317059B2 (ja) | 2012-11-16 | 2018-04-25 | 株式会社半導体エネルギー研究所 | 半導体装置及び表示装置 |
US9412764B2 (en) | 2012-11-28 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic device |
KR102148549B1 (ko) | 2012-11-28 | 2020-08-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
US9263531B2 (en) | 2012-11-28 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, film formation method thereof, and semiconductor device |
TWI627483B (zh) | 2012-11-28 | 2018-06-21 | 半導體能源研究所股份有限公司 | 顯示裝置及電視接收機 |
TWI662698B (zh) | 2012-11-28 | 2019-06-11 | 日商半導體能源研究所股份有限公司 | 顯示裝置 |
US9246011B2 (en) * | 2012-11-30 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9153649B2 (en) | 2012-11-30 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for evaluating semiconductor device |
TWI624949B (zh) | 2012-11-30 | 2018-05-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
WO2014084152A1 (en) | 2012-11-30 | 2014-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2014130336A (ja) | 2012-11-30 | 2014-07-10 | Semiconductor Energy Lab Co Ltd | 表示装置 |
US9594281B2 (en) | 2012-11-30 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9349593B2 (en) | 2012-12-03 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR102207028B1 (ko) | 2012-12-03 | 2021-01-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP2014135478A (ja) | 2012-12-03 | 2014-07-24 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP6254834B2 (ja) | 2012-12-06 | 2017-12-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9577446B2 (en) | 2012-12-13 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Power storage system and power storage device storing data for the identifying power storage device |
TWI611419B (zh) | 2012-12-24 | 2018-01-11 | 半導體能源研究所股份有限公司 | 可程式邏輯裝置及半導體裝置 |
KR102241249B1 (ko) | 2012-12-25 | 2021-04-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 저항 소자, 표시 장치, 및 전자기기 |
US9905585B2 (en) | 2012-12-25 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising capacitor |
DE112013006219T5 (de) | 2012-12-25 | 2015-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung und deren Herstellungsverfahren |
KR102459007B1 (ko) | 2012-12-25 | 2022-10-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9437273B2 (en) | 2012-12-26 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI607510B (zh) | 2012-12-28 | 2017-12-01 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的製造方法 |
JP2014143410A (ja) | 2012-12-28 | 2014-08-07 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP6329762B2 (ja) | 2012-12-28 | 2018-05-23 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9316695B2 (en) | 2012-12-28 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2014104267A1 (en) | 2012-12-28 | 2014-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN110137181A (zh) | 2012-12-28 | 2019-08-16 | 株式会社半导体能源研究所 | 半导体装置及半导体装置的制造方法 |
US9391096B2 (en) | 2013-01-18 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
TWI614813B (zh) | 2013-01-21 | 2018-02-11 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
TWI619010B (zh) | 2013-01-24 | 2018-03-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
US9190172B2 (en) | 2013-01-24 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6223198B2 (ja) | 2013-01-24 | 2017-11-01 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP5807076B2 (ja) | 2013-01-24 | 2015-11-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9466725B2 (en) | 2013-01-24 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8981374B2 (en) | 2013-01-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9076825B2 (en) | 2013-01-30 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
TWI593025B (zh) | 2013-01-30 | 2017-07-21 | 半導體能源研究所股份有限公司 | 氧化物半導體層的處理方法 |
TWI618252B (zh) | 2013-02-12 | 2018-03-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
KR102112367B1 (ko) | 2013-02-12 | 2020-05-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9231111B2 (en) | 2013-02-13 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2014125979A1 (en) | 2013-02-13 | 2014-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9190527B2 (en) | 2013-02-13 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of semiconductor device |
US8952723B2 (en) | 2013-02-13 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9318484B2 (en) | 2013-02-20 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI611566B (zh) | 2013-02-25 | 2018-01-11 | 半導體能源研究所股份有限公司 | 顯示裝置和電子裝置 |
US9293544B2 (en) | 2013-02-26 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having buried channel structure |
US9373711B2 (en) | 2013-02-27 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI612321B (zh) | 2013-02-27 | 2018-01-21 | 半導體能源研究所股份有限公司 | 成像裝置 |
TWI611567B (zh) | 2013-02-27 | 2018-01-11 | 半導體能源研究所股份有限公司 | 半導體裝置、驅動電路及顯示裝置 |
JP6141777B2 (ja) | 2013-02-28 | 2017-06-07 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2014195241A (ja) | 2013-02-28 | 2014-10-09 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
JP2014195243A (ja) | 2013-02-28 | 2014-10-09 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
KR102238682B1 (ko) | 2013-02-28 | 2021-04-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치와 그 제작 방법 |
US9276125B2 (en) | 2013-03-01 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9647152B2 (en) | 2013-03-01 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Sensor circuit and semiconductor device including sensor circuit |
KR102153110B1 (ko) | 2013-03-06 | 2020-09-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체막 및 반도체 장치 |
US9269315B2 (en) | 2013-03-08 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of semiconductor device |
US8947121B2 (en) | 2013-03-12 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
TWI644433B (zh) | 2013-03-13 | 2018-12-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
JP6283237B2 (ja) | 2013-03-14 | 2018-02-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR102290247B1 (ko) | 2013-03-14 | 2021-08-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치와 그 제작 방법 |
KR20150128823A (ko) | 2013-03-14 | 2015-11-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 구동 방법 및 반도체 장치 |
US9294075B2 (en) | 2013-03-14 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR20150128820A (ko) | 2013-03-14 | 2015-11-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 구동 방법 및 반도체 장치 |
JP2014199709A (ja) | 2013-03-14 | 2014-10-23 | 株式会社半導体エネルギー研究所 | 記憶装置、半導体装置 |
JP6298662B2 (ja) | 2013-03-14 | 2018-03-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI722545B (zh) | 2013-03-15 | 2021-03-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
US9786350B2 (en) | 2013-03-18 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9153650B2 (en) | 2013-03-19 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor |
US9577107B2 (en) | 2013-03-19 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and method for forming oxide semiconductor film |
JP6093726B2 (ja) | 2013-03-22 | 2017-03-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6355374B2 (ja) | 2013-03-22 | 2018-07-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9007092B2 (en) | 2013-03-22 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2014157019A1 (en) | 2013-03-25 | 2014-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10347769B2 (en) | 2013-03-25 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with multi-layer source/drain electrodes |
JP6272713B2 (ja) | 2013-03-25 | 2018-01-31 | 株式会社半導体エネルギー研究所 | プログラマブルロジックデバイス及び半導体装置 |
JP6316630B2 (ja) | 2013-03-26 | 2018-04-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6376788B2 (ja) | 2013-03-26 | 2018-08-22 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
US9608122B2 (en) | 2013-03-27 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP2014209209A (ja) | 2013-03-28 | 2014-11-06 | 株式会社半導体エネルギー研究所 | 表示装置 |
US9368636B2 (en) | 2013-04-01 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device comprising a plurality of oxide semiconductor layers |
JP6300589B2 (ja) | 2013-04-04 | 2018-03-28 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9112460B2 (en) | 2013-04-05 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device |
JP6224338B2 (ja) | 2013-04-11 | 2017-11-01 | 株式会社半導体エネルギー研究所 | 半導体装置、表示装置及び半導体装置の作製方法 |
JP6198434B2 (ja) | 2013-04-11 | 2017-09-20 | 株式会社半導体エネルギー研究所 | 表示装置及び電子機器 |
US10304859B2 (en) | 2013-04-12 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide film on an oxide semiconductor film |
TWI620324B (zh) | 2013-04-12 | 2018-04-01 | 半導體能源研究所股份有限公司 | 半導體裝置 |
JP6280794B2 (ja) | 2013-04-12 | 2018-02-14 | 株式会社半導体エネルギー研究所 | 半導体装置及びその駆動方法 |
US9915848B2 (en) | 2013-04-19 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
JP6333028B2 (ja) | 2013-04-19 | 2018-05-30 | 株式会社半導体エネルギー研究所 | 記憶装置及び半導体装置 |
JP6456598B2 (ja) | 2013-04-19 | 2019-01-23 | 株式会社半導体エネルギー研究所 | 表示装置 |
WO2014175296A1 (en) | 2013-04-24 | 2014-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9893192B2 (en) | 2013-04-24 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6396671B2 (ja) | 2013-04-26 | 2018-09-26 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6401483B2 (ja) | 2013-04-26 | 2018-10-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
TWI644434B (zh) | 2013-04-29 | 2018-12-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
TWI631711B (zh) | 2013-05-01 | 2018-08-01 | 半導體能源研究所股份有限公司 | 半導體裝置 |
KR102222344B1 (ko) | 2013-05-02 | 2021-03-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9231002B2 (en) | 2013-05-03 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9882058B2 (en) | 2013-05-03 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
CN105190902B (zh) | 2013-05-09 | 2019-01-29 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
US9246476B2 (en) | 2013-05-10 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit |
US9704894B2 (en) | 2013-05-10 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device including pixel electrode including oxide |
TWI621337B (zh) | 2013-05-14 | 2018-04-11 | 半導體能源研究所股份有限公司 | 信號處理裝置 |
TWI669824B (zh) | 2013-05-16 | 2019-08-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
US9312392B2 (en) | 2013-05-16 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI618058B (zh) | 2013-05-16 | 2018-03-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
TWI639235B (zh) | 2013-05-16 | 2018-10-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
TWI638519B (zh) | 2013-05-17 | 2018-10-11 | 半導體能源研究所股份有限公司 | 可程式邏輯裝置及半導體裝置 |
US10032872B2 (en) | 2013-05-17 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device |
JP6298353B2 (ja) | 2013-05-17 | 2018-03-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9209795B2 (en) | 2013-05-17 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device and measuring method |
US9754971B2 (en) | 2013-05-18 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9293599B2 (en) | 2013-05-20 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
DE102014208859B4 (de) | 2013-05-20 | 2021-03-11 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung |
US9647125B2 (en) | 2013-05-20 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9343579B2 (en) | 2013-05-20 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2014188893A1 (en) | 2013-05-20 | 2014-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI664731B (zh) | 2013-05-20 | 2019-07-01 | 半導體能源研究所股份有限公司 | 半導體裝置 |
KR102442752B1 (ko) | 2013-05-20 | 2022-09-14 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2014188983A1 (en) | 2013-05-21 | 2014-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and formation method thereof |
US10416504B2 (en) | 2013-05-21 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
TWI649606B (zh) | 2013-06-05 | 2019-02-01 | 日商半導體能源研究所股份有限公司 | 顯示裝置及電子裝置 |
JP6374221B2 (ja) | 2013-06-05 | 2018-08-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6400336B2 (ja) | 2013-06-05 | 2018-10-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6475424B2 (ja) | 2013-06-05 | 2019-02-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI624936B (zh) | 2013-06-05 | 2018-05-21 | 半導體能源研究所股份有限公司 | 顯示裝置 |
JP2015195327A (ja) | 2013-06-05 | 2015-11-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9773915B2 (en) | 2013-06-11 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR102282108B1 (ko) | 2013-06-13 | 2021-07-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP6368155B2 (ja) | 2013-06-18 | 2018-08-01 | 株式会社半導体エネルギー研究所 | プログラマブルロジックデバイス |
US9035301B2 (en) | 2013-06-19 | 2015-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
TWI652822B (zh) | 2013-06-19 | 2019-03-01 | 日商半導體能源研究所股份有限公司 | 氧化物半導體膜及其形成方法 |
TWI633650B (zh) | 2013-06-21 | 2018-08-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
US9515094B2 (en) | 2013-06-26 | 2016-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Storage device and semiconductor device |
KR20230053723A (ko) | 2013-06-27 | 2023-04-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP6352070B2 (ja) | 2013-07-05 | 2018-07-04 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US20150008428A1 (en) | 2013-07-08 | 2015-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9666697B2 (en) | 2013-07-08 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device including an electron trap layer |
US9312349B2 (en) | 2013-07-08 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9293480B2 (en) | 2013-07-10 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9424950B2 (en) | 2013-07-10 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6018607B2 (ja) | 2013-07-12 | 2016-11-02 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9818763B2 (en) | 2013-07-12 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
JP6322503B2 (ja) | 2013-07-16 | 2018-05-09 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6516978B2 (ja) | 2013-07-17 | 2019-05-22 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9443592B2 (en) | 2013-07-18 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9395070B2 (en) | 2013-07-19 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Support of flexible component and light-emitting device |
TWI608523B (zh) | 2013-07-19 | 2017-12-11 | 半導體能源研究所股份有限公司 | Oxide semiconductor film, method of manufacturing oxide semiconductor film, and semiconductor device |
US9379138B2 (en) | 2013-07-19 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device with drive voltage dependent on external light intensity |
US10529740B2 (en) | 2013-07-25 | 2020-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including semiconductor layer and conductive layer |
TWI632688B (zh) | 2013-07-25 | 2018-08-11 | 半導體能源研究所股份有限公司 | 半導體裝置以及半導體裝置的製造方法 |
TWI636309B (zh) | 2013-07-25 | 2018-09-21 | 日商半導體能源研究所股份有限公司 | 液晶顯示裝置及電子裝置 |
TWI641208B (zh) | 2013-07-26 | 2018-11-11 | 日商半導體能源研究所股份有限公司 | 直流對直流轉換器 |
JP6410496B2 (ja) | 2013-07-31 | 2018-10-24 | 株式会社半導体エネルギー研究所 | マルチゲート構造のトランジスタ |
US9343288B2 (en) | 2013-07-31 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6460592B2 (ja) | 2013-07-31 | 2019-01-30 | 株式会社半導体エネルギー研究所 | Dcdcコンバータ、及び半導体装置 |
TWI635750B (zh) | 2013-08-02 | 2018-09-11 | 半導體能源研究所股份有限公司 | 攝像裝置以及其工作方法 |
US9496330B2 (en) | 2013-08-02 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
JP2015053477A (ja) | 2013-08-05 | 2015-03-19 | 株式会社半導体エネルギー研究所 | 半導体装置および半導体装置の作製方法 |
JP6345023B2 (ja) | 2013-08-07 | 2018-06-20 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
US9601591B2 (en) | 2013-08-09 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR102304824B1 (ko) | 2013-08-09 | 2021-09-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP6329843B2 (ja) | 2013-08-19 | 2018-05-23 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9374048B2 (en) | 2013-08-20 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device, and driving method and program thereof |
US9385592B2 (en) | 2013-08-21 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Charge pump circuit and semiconductor device including the same |
KR102232133B1 (ko) | 2013-08-22 | 2021-03-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR102244553B1 (ko) | 2013-08-23 | 2021-04-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 용량 소자 및 반도체 장치 |
US9443987B2 (en) | 2013-08-23 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI749810B (zh) | 2013-08-28 | 2021-12-11 | 日商半導體能源研究所股份有限公司 | 顯示裝置 |
US9590109B2 (en) | 2013-08-30 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6426402B2 (ja) | 2013-08-30 | 2018-11-21 | 株式会社半導体エネルギー研究所 | 表示装置 |
US9552767B2 (en) | 2013-08-30 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9360564B2 (en) | 2013-08-30 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
WO2015030150A1 (en) | 2013-08-30 | 2015-03-05 | Semiconductor Energy Laboratory Co., Ltd. | Storage circuit and semiconductor device |
JP6406926B2 (ja) | 2013-09-04 | 2018-10-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9449853B2 (en) | 2013-09-04 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising electron trap layer |
JP6345544B2 (ja) | 2013-09-05 | 2018-06-20 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9607991B2 (en) | 2013-09-05 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10008513B2 (en) | 2013-09-05 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6401977B2 (ja) | 2013-09-06 | 2018-10-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR102294507B1 (ko) | 2013-09-06 | 2021-08-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9590110B2 (en) | 2013-09-10 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Ultraviolet light sensor circuit |
TWI640014B (zh) | 2013-09-11 | 2018-11-01 | 半導體能源研究所股份有限公司 | 記憶體裝置、半導體裝置及電子裝置 |
US9893194B2 (en) | 2013-09-12 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9269822B2 (en) | 2013-09-12 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
TWI646690B (zh) | 2013-09-13 | 2019-01-01 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
US9805952B2 (en) | 2013-09-13 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
CN105531621B (zh) | 2013-09-13 | 2019-11-12 | 株式会社半导体能源研究所 | 显示装置 |
JP2015079946A (ja) | 2013-09-13 | 2015-04-23 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9461126B2 (en) | 2013-09-13 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, clocked inverter circuit, sequential circuit, and semiconductor device including sequential circuit |
JP6467171B2 (ja) | 2013-09-17 | 2019-02-06 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9269915B2 (en) | 2013-09-18 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
JP6347704B2 (ja) | 2013-09-18 | 2018-06-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6261926B2 (ja) | 2013-09-18 | 2018-01-17 | 関東化學株式会社 | 金属酸化物エッチング液組成物およびエッチング方法 |
TWI677989B (zh) | 2013-09-19 | 2019-11-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
TWI633668B (zh) | 2013-09-23 | 2018-08-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
JP2015084418A (ja) | 2013-09-23 | 2015-04-30 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9425217B2 (en) | 2013-09-23 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6570817B2 (ja) | 2013-09-23 | 2019-09-04 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6383616B2 (ja) | 2013-09-25 | 2018-08-29 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9799774B2 (en) | 2013-09-26 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Switch circuit, semiconductor device, and system |
JP6392603B2 (ja) | 2013-09-27 | 2018-09-19 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6581765B2 (ja) | 2013-10-02 | 2019-09-25 | 株式会社半導体エネルギー研究所 | ブートストラップ回路、およびブートストラップ回路を有する半導体装置 |
JP6386323B2 (ja) | 2013-10-04 | 2018-09-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TW202203465A (zh) | 2013-10-10 | 2022-01-16 | 日商半導體能源研究所股份有限公司 | 液晶顯示裝置 |
US9293592B2 (en) | 2013-10-11 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
JP6591739B2 (ja) | 2013-10-16 | 2019-10-16 | 株式会社半導体エネルギー研究所 | 演算処理装置の駆動方法 |
TWI621127B (zh) | 2013-10-18 | 2018-04-11 | 半導體能源研究所股份有限公司 | 運算處理裝置及其驅動方法 |
TWI642170B (zh) | 2013-10-18 | 2018-11-21 | 半導體能源研究所股份有限公司 | 顯示裝置及電子裝置 |
US9276128B2 (en) | 2013-10-22 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and etchant used for the same |
WO2015060133A1 (en) | 2013-10-22 | 2015-04-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2015179247A (ja) | 2013-10-22 | 2015-10-08 | 株式会社半導体エネルギー研究所 | 表示装置 |
US9455349B2 (en) | 2013-10-22 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor thin film transistor with reduced impurity diffusion |
DE102014220672A1 (de) | 2013-10-22 | 2015-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung |
CN105659369B (zh) | 2013-10-22 | 2019-10-22 | 株式会社半导体能源研究所 | 半导体装置及半导体装置的制造方法 |
KR20160074514A (ko) | 2013-10-22 | 2016-06-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
US9583516B2 (en) | 2013-10-25 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
JP6457239B2 (ja) | 2013-10-31 | 2019-01-23 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9590111B2 (en) | 2013-11-06 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
JP6440457B2 (ja) | 2013-11-07 | 2018-12-19 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6478562B2 (ja) | 2013-11-07 | 2019-03-06 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9385054B2 (en) | 2013-11-08 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Data processing device and manufacturing method thereof |
JP2015118724A (ja) | 2013-11-13 | 2015-06-25 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の駆動方法 |
JP6426437B2 (ja) | 2013-11-22 | 2018-11-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6393590B2 (ja) | 2013-11-22 | 2018-09-19 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6486660B2 (ja) | 2013-11-27 | 2019-03-20 | 株式会社半導体エネルギー研究所 | 表示装置 |
US9882014B2 (en) | 2013-11-29 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP2016001712A (ja) | 2013-11-29 | 2016-01-07 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US20150155313A1 (en) | 2013-11-29 | 2015-06-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6496132B2 (ja) | 2013-12-02 | 2019-04-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
CN110047760A (zh) | 2013-12-02 | 2019-07-23 | 株式会社半导体能源研究所 | 显示装置及其制造方法 |
KR20220047897A (ko) | 2013-12-02 | 2022-04-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
US9991392B2 (en) | 2013-12-03 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP2016027597A (ja) | 2013-12-06 | 2016-02-18 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6537264B2 (ja) | 2013-12-12 | 2019-07-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9349751B2 (en) | 2013-12-12 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI642186B (zh) | 2013-12-18 | 2018-11-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
TWI666770B (zh) | 2013-12-19 | 2019-07-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
JP6444714B2 (ja) | 2013-12-20 | 2018-12-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9379192B2 (en) | 2013-12-20 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2015097586A1 (en) | 2013-12-25 | 2015-07-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2015097589A1 (en) | 2013-12-26 | 2015-07-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6402017B2 (ja) | 2013-12-26 | 2018-10-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9960280B2 (en) | 2013-12-26 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI637484B (zh) | 2013-12-26 | 2018-10-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
WO2015097596A1 (en) | 2013-12-26 | 2015-07-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9349418B2 (en) | 2013-12-27 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
WO2015097593A1 (en) | 2013-12-27 | 2015-07-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6446258B2 (ja) | 2013-12-27 | 2018-12-26 | 株式会社半導体エネルギー研究所 | トランジスタ |
US9472678B2 (en) | 2013-12-27 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6506545B2 (ja) | 2013-12-27 | 2019-04-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR102309629B1 (ko) | 2013-12-27 | 2021-10-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 |
US9397149B2 (en) | 2013-12-27 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6506961B2 (ja) | 2013-12-27 | 2019-04-24 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
US9577110B2 (en) | 2013-12-27 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor and the display device including the semiconductor device |
JP6444723B2 (ja) | 2014-01-09 | 2018-12-26 | 株式会社半導体エネルギー研究所 | 装置 |
US9300292B2 (en) | 2014-01-10 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Circuit including transistor |
US9401432B2 (en) | 2014-01-16 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9379713B2 (en) | 2014-01-17 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Data processing device and driving method thereof |
KR102306200B1 (ko) | 2014-01-24 | 2021-09-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2015114476A1 (en) | 2014-01-28 | 2015-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9929044B2 (en) | 2014-01-30 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US9929279B2 (en) | 2014-02-05 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9443876B2 (en) | 2014-02-05 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, and the display module |
US9653487B2 (en) | 2014-02-05 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, module, and electronic device |
TWI665778B (zh) | 2014-02-05 | 2019-07-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置、模組及電子裝置 |
JP6473626B2 (ja) | 2014-02-06 | 2019-02-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US10055232B2 (en) | 2014-02-07 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising memory circuit |
US9869716B2 (en) | 2014-02-07 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Device comprising programmable logic element |
TWI658597B (zh) | 2014-02-07 | 2019-05-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
JP6534530B2 (ja) | 2014-02-07 | 2019-06-26 | 株式会社半導体エネルギー研究所 | 半導体装置 |
CN105960633B (zh) | 2014-02-07 | 2020-06-19 | 株式会社半导体能源研究所 | 半导体装置、装置及电子设备 |
JP2015165226A (ja) | 2014-02-07 | 2015-09-17 | 株式会社半導体エネルギー研究所 | 装置 |
TWI803431B (zh) | 2014-02-11 | 2023-05-21 | 日商半導體能源研究所股份有限公司 | 顯示裝置及電子裝置 |
WO2015125042A1 (en) | 2014-02-19 | 2015-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Oxide, semiconductor device, module, and electronic device |
CN111524967A (zh) | 2014-02-21 | 2020-08-11 | 株式会社半导体能源研究所 | 半导体膜、晶体管、半导体装置、显示装置以及电子设备 |
JP2015172991A (ja) | 2014-02-21 | 2015-10-01 | 株式会社半導体エネルギー研究所 | 半導体装置、電子部品、及び電子機器 |
JP6506566B2 (ja) | 2014-02-21 | 2019-04-24 | 株式会社半導体エネルギー研究所 | 電流測定方法 |
CN112233982A (zh) | 2014-02-28 | 2021-01-15 | 株式会社半导体能源研究所 | 半导体装置的制造方法 |
US9564535B2 (en) | 2014-02-28 | 2017-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
KR102329066B1 (ko) | 2014-02-28 | 2021-11-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 구동 방법, 및 전자 기기 |
US9294096B2 (en) | 2014-02-28 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10074576B2 (en) | 2014-02-28 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
KR20150104518A (ko) | 2014-03-05 | 2015-09-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 레벨 시프터 회로 |
JP6474280B2 (ja) | 2014-03-05 | 2019-02-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US10096489B2 (en) | 2014-03-06 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9537478B2 (en) | 2014-03-06 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9397637B2 (en) | 2014-03-06 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Voltage controlled oscillator, semiconductor device, and electronic device |
JP6625328B2 (ja) | 2014-03-06 | 2019-12-25 | 株式会社半導体エネルギー研究所 | 半導体装置の駆動方法 |
WO2015132694A1 (en) | 2014-03-07 | 2015-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Touch sensor, touch panel, and manufacturing method of touch panel |
US9419622B2 (en) | 2014-03-07 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9443872B2 (en) | 2014-03-07 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9653611B2 (en) | 2014-03-07 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6442321B2 (ja) | 2014-03-07 | 2018-12-19 | 株式会社半導体エネルギー研究所 | 半導体装置及びその駆動方法、並びに電子機器 |
WO2015132697A1 (en) | 2014-03-07 | 2015-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR102267237B1 (ko) | 2014-03-07 | 2021-06-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 전자 기기 |
US9711536B2 (en) | 2014-03-07 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
JP6585354B2 (ja) | 2014-03-07 | 2019-10-02 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR20160132405A (ko) | 2014-03-12 | 2016-11-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP6560508B2 (ja) | 2014-03-13 | 2019-08-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6525421B2 (ja) | 2014-03-13 | 2019-06-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9640669B2 (en) | 2014-03-13 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
KR102450562B1 (ko) | 2014-03-13 | 2022-10-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 촬상 장치 |
US9324747B2 (en) | 2014-03-13 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
JP6677449B2 (ja) | 2014-03-13 | 2020-04-08 | 株式会社半導体エネルギー研究所 | 半導体装置の駆動方法 |
JP6541376B2 (ja) | 2014-03-13 | 2019-07-10 | 株式会社半導体エネルギー研究所 | プログラマブルロジックデバイスの動作方法 |
US9887212B2 (en) | 2014-03-14 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
WO2015136412A1 (en) | 2014-03-14 | 2015-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Circuit system |
US10361290B2 (en) | 2014-03-14 | 2019-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising adding oxygen to buffer film and insulating film |
JP2015188071A (ja) | 2014-03-14 | 2015-10-29 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9299848B2 (en) | 2014-03-14 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, RF tag, and electronic device |
WO2015140656A1 (en) | 2014-03-18 | 2015-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP6509596B2 (ja) | 2014-03-18 | 2019-05-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9842842B2 (en) | 2014-03-19 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and semiconductor device and electronic device having the same |
US9887291B2 (en) | 2014-03-19 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, or the display module |
JP6495698B2 (ja) | 2014-03-20 | 2019-04-03 | 株式会社半導体エネルギー研究所 | 半導体装置、電子部品、及び電子機器 |
TWI657488B (zh) | 2014-03-20 | 2019-04-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置、具有該半導體裝置的顯示裝置、具有該顯示裝置的顯示模組以及具有該半導體裝置、該顯示裝置和該顯示模組的電子裝置 |
WO2015145292A1 (en) | 2014-03-28 | 2015-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
JP6487738B2 (ja) | 2014-03-31 | 2019-03-20 | 株式会社半導体エネルギー研究所 | 半導体装置、電子部品 |
TWI695375B (zh) | 2014-04-10 | 2020-06-01 | 日商半導體能源研究所股份有限公司 | 記憶體裝置及半導體裝置 |
JP6635670B2 (ja) | 2014-04-11 | 2020-01-29 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9674470B2 (en) | 2014-04-11 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for driving semiconductor device, and method for driving electronic device |
TWI646782B (zh) | 2014-04-11 | 2019-01-01 | 日商半導體能源研究所股份有限公司 | 保持電路、保持電路的驅動方法以及包括保持電路的半導體裝置 |
JP6541398B2 (ja) | 2014-04-11 | 2019-07-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9768315B2 (en) | 2014-04-18 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device having the same |
KR102511325B1 (ko) | 2014-04-18 | 2023-03-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 그 동작 방법 |
WO2015159179A1 (en) | 2014-04-18 | 2015-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
JP6613044B2 (ja) | 2014-04-22 | 2019-11-27 | 株式会社半導体エネルギー研究所 | 表示装置、表示モジュール、及び電子機器 |
KR102380829B1 (ko) | 2014-04-23 | 2022-03-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 촬상 장치 |
US9780226B2 (en) | 2014-04-25 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
TWI643457B (zh) | 2014-04-25 | 2018-12-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
KR102330412B1 (ko) | 2014-04-25 | 2021-11-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 전자 부품, 및 전자 기기 |
JP6468686B2 (ja) | 2014-04-25 | 2019-02-13 | 株式会社半導体エネルギー研究所 | 入出力装置 |
US10043913B2 (en) | 2014-04-30 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, semiconductor device, display device, module, and electronic device |
TWI679624B (zh) | 2014-05-02 | 2019-12-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
US10656799B2 (en) | 2014-05-02 | 2020-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and operation method thereof |
JP6537341B2 (ja) | 2014-05-07 | 2019-07-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6653997B2 (ja) | 2014-05-09 | 2020-02-26 | 株式会社半導体エネルギー研究所 | 表示補正回路及び表示装置 |
KR102333604B1 (ko) | 2014-05-15 | 2021-11-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 이 반도체 장치를 포함하는 표시 장치 |
JP2015233130A (ja) | 2014-05-16 | 2015-12-24 | 株式会社半導体エネルギー研究所 | 半導体基板および半導体装置の作製方法 |
JP6612056B2 (ja) | 2014-05-16 | 2019-11-27 | 株式会社半導体エネルギー研究所 | 撮像装置、及び監視装置 |
JP6580863B2 (ja) | 2014-05-22 | 2019-09-25 | 株式会社半導体エネルギー研究所 | 半導体装置、健康管理システム |
JP6616102B2 (ja) | 2014-05-23 | 2019-12-04 | 株式会社半導体エネルギー研究所 | 記憶装置及び電子機器 |
TWI672804B (zh) | 2014-05-23 | 2019-09-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
WO2015181679A1 (en) * | 2014-05-27 | 2015-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10020403B2 (en) | 2014-05-27 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9874775B2 (en) | 2014-05-28 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
KR102354008B1 (ko) | 2014-05-29 | 2022-01-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 반도체 장치의 제작 방법 및 전자 기기 |
KR20150138026A (ko) | 2014-05-29 | 2015-12-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP6653129B2 (ja) | 2014-05-29 | 2020-02-26 | 株式会社半導体エネルギー研究所 | 記憶装置 |
KR102418666B1 (ko) | 2014-05-29 | 2022-07-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 촬상 소자, 전자 기기, 촬상 소자의 구동 방법, 및 전자 기기의 구동 방법 |
JP6525722B2 (ja) | 2014-05-29 | 2019-06-05 | 株式会社半導体エネルギー研究所 | 記憶装置、電子部品、及び電子機器 |
JP6538426B2 (ja) | 2014-05-30 | 2019-07-03 | 株式会社半導体エネルギー研究所 | 半導体装置及び電子機器 |
JP6537892B2 (ja) | 2014-05-30 | 2019-07-03 | 株式会社半導体エネルギー研究所 | 半導体装置、及び電子機器 |
TWI663726B (zh) | 2014-05-30 | 2019-06-21 | Semiconductor Energy Laboratory Co., Ltd. | 半導體裝置、模組及電子裝置 |
TWI646658B (zh) | 2014-05-30 | 2019-01-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
US9831238B2 (en) | 2014-05-30 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including insulating film having opening portion and conductive film in the opening portion |
KR102398950B1 (ko) | 2014-05-30 | 2022-05-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 이의 제조 방법, 및 전자 장치 |
KR102373263B1 (ko) | 2014-05-30 | 2022-03-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 이를 제조하기 위한 방법 |
KR102437450B1 (ko) | 2014-06-13 | 2022-08-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 및 반도체 장치를 포함하는 전자 기기 |
JP2016015475A (ja) | 2014-06-13 | 2016-01-28 | 株式会社半導体エネルギー研究所 | 半導体装置、及び電子機器 |
KR102344782B1 (ko) | 2014-06-13 | 2021-12-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 입력 장치 및 입출력 장치 |
TWI663733B (zh) | 2014-06-18 | 2019-06-21 | 日商半導體能源研究所股份有限公司 | 電晶體及半導體裝置 |
KR20150146409A (ko) | 2014-06-20 | 2015-12-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 표시 장치, 입출력 장치, 및 전자 기기 |
TWI666776B (zh) | 2014-06-20 | 2019-07-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置以及包括該半導體裝置的顯示裝置 |
US9722090B2 (en) | 2014-06-23 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including first gate oxide semiconductor film, and second gate |
JP6545541B2 (ja) | 2014-06-25 | 2019-07-17 | 株式会社半導体エネルギー研究所 | 撮像装置、監視装置、及び電子機器 |
US10002971B2 (en) | 2014-07-03 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9647129B2 (en) | 2014-07-04 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9461179B2 (en) | 2014-07-11 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor device (TFT) comprising stacked oxide semiconductor layers and having a surrounded channel structure |
DE112015003266T5 (de) | 2014-07-15 | 2017-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung, Herstellungsverfahren dafür und Anzeigevorrichtung mit der Halbleitervorrichtung |
KR102422059B1 (ko) | 2014-07-18 | 2022-07-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 촬상 장치, 및 전자 기기 |
JP6581825B2 (ja) | 2014-07-18 | 2019-09-25 | 株式会社半導体エネルギー研究所 | 表示システム |
US9312280B2 (en) | 2014-07-25 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2016012893A1 (en) | 2014-07-25 | 2016-01-28 | Semiconductor Energy Laboratory Co., Ltd. | Oscillator circuit and semiconductor device including the same |
JP6527416B2 (ja) | 2014-07-29 | 2019-06-05 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
KR102533396B1 (ko) | 2014-07-31 | 2023-05-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 전자 장치 |
JP6555956B2 (ja) | 2014-07-31 | 2019-08-07 | 株式会社半導体エネルギー研究所 | 撮像装置、監視装置、及び電子機器 |
US9705004B2 (en) | 2014-08-01 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6553444B2 (ja) | 2014-08-08 | 2019-07-31 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9595955B2 (en) | 2014-08-08 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including power storage elements and switches |
JP6652342B2 (ja) | 2014-08-08 | 2020-02-19 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US10147747B2 (en) | 2014-08-21 | 2018-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US10032888B2 (en) | 2014-08-22 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and electronic appliance having semiconductor device |
US10559667B2 (en) | 2014-08-25 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for measuring current of semiconductor device |
KR102509203B1 (ko) | 2014-08-29 | 2023-03-14 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 촬상 장치 및 전자 기기 |
WO2016034983A1 (en) | 2014-09-02 | 2016-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
KR102329498B1 (ko) | 2014-09-04 | 2021-11-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9766517B2 (en) | 2014-09-05 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and display module |
TW201614626A (en) | 2014-09-05 | 2016-04-16 | Semiconductor Energy Lab | Display device and electronic device |
US9722091B2 (en) | 2014-09-12 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP6676316B2 (ja) | 2014-09-12 | 2020-04-08 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
DE112015004272T5 (de) | 2014-09-19 | 2017-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Herstellungsverfahren der Halbleitervorrichtung |
KR20160034200A (ko) | 2014-09-19 | 2016-03-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
JP2016066788A (ja) | 2014-09-19 | 2016-04-28 | 株式会社半導体エネルギー研究所 | 半導体膜の評価方法および半導体装置の作製方法 |
US9401364B2 (en) | 2014-09-19 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10071904B2 (en) | 2014-09-25 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
JP2016111677A (ja) | 2014-09-26 | 2016-06-20 | 株式会社半導体エネルギー研究所 | 半導体装置、無線センサ、及び電子機器 |
JP6633330B2 (ja) | 2014-09-26 | 2020-01-22 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2016046685A1 (en) | 2014-09-26 | 2016-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US10170055B2 (en) | 2014-09-26 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method thereof |
US9450581B2 (en) | 2014-09-30 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, semiconductor device, electronic component, and electronic device |
WO2016055894A1 (en) | 2014-10-06 | 2016-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9698170B2 (en) | 2014-10-07 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
CN106796918A (zh) | 2014-10-10 | 2017-05-31 | 株式会社半导体能源研究所 | 半导体装置、电路板及电子设备 |
CN112671388A (zh) | 2014-10-10 | 2021-04-16 | 株式会社半导体能源研究所 | 逻辑电路、处理单元、电子构件以及电子设备 |
US9991393B2 (en) | 2014-10-16 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
JP6645793B2 (ja) | 2014-10-17 | 2020-02-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2016063159A1 (en) | 2014-10-20 | 2016-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof, module, and electronic device |
US10068927B2 (en) | 2014-10-23 | 2018-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
JP6615565B2 (ja) | 2014-10-24 | 2019-12-04 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9704704B2 (en) | 2014-10-28 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
WO2016067144A1 (en) | 2014-10-28 | 2016-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device, manufacturing method of display device, and electronic device |
TWI652362B (zh) | 2014-10-28 | 2019-03-01 | 日商半導體能源研究所股份有限公司 | 氧化物及其製造方法 |
JP6780927B2 (ja) | 2014-10-31 | 2020-11-04 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US10680017B2 (en) | 2014-11-07 | 2020-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element including EL layer, electrode which has high reflectance and a high work function, display device, electronic device, and lighting device |
US9584707B2 (en) | 2014-11-10 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9548327B2 (en) | 2014-11-10 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device having a selenium containing photoelectric conversion layer |
JP6563313B2 (ja) | 2014-11-21 | 2019-08-21 | 株式会社半導体エネルギー研究所 | 半導体装置、及び電子機器 |
TWI711165B (zh) | 2014-11-21 | 2020-11-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置及電子裝置 |
TWI699897B (zh) | 2014-11-21 | 2020-07-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
US9438234B2 (en) | 2014-11-21 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device including logic circuit |
DE112015005339T5 (de) | 2014-11-28 | 2017-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung, Modul und elektronisches Gerät |
JP6647841B2 (ja) | 2014-12-01 | 2020-02-14 | 株式会社半導体エネルギー研究所 | 酸化物の作製方法 |
JP6667267B2 (ja) | 2014-12-08 | 2020-03-18 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6647846B2 (ja) | 2014-12-08 | 2020-02-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6833315B2 (ja) | 2014-12-10 | 2021-02-24 | 株式会社半導体エネルギー研究所 | 半導体装置、及び電子機器 |
CN107004722A (zh) | 2014-12-10 | 2017-08-01 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
JP6689062B2 (ja) | 2014-12-10 | 2020-04-28 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9773832B2 (en) | 2014-12-10 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
WO2016092416A1 (en) | 2014-12-11 | 2016-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, and electronic device |
JP2016116220A (ja) | 2014-12-16 | 2016-06-23 | 株式会社半導体エネルギー研究所 | 半導体装置、及び電子機器 |
JP6676354B2 (ja) | 2014-12-16 | 2020-04-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR102581808B1 (ko) | 2014-12-18 | 2023-09-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 센서 장치, 및 전자 기기 |
US10396210B2 (en) | 2014-12-26 | 2019-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with stacked metal oxide and oxide semiconductor layers and display device including the semiconductor device |
TWI686874B (zh) | 2014-12-26 | 2020-03-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置、顯示裝置、顯示模組、電子裝置、氧化物及氧化物的製造方法 |
KR20170101233A (ko) | 2014-12-26 | 2017-09-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 스퍼터링용 타깃의 제작 방법 |
CN111933668A (zh) | 2014-12-29 | 2020-11-13 | 株式会社半导体能源研究所 | 半导体装置 |
US10522693B2 (en) | 2015-01-16 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and electronic device |
US9954112B2 (en) | 2015-01-26 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9812587B2 (en) | 2015-01-26 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9443564B2 (en) | 2015-01-26 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
TWI710124B (zh) | 2015-01-30 | 2020-11-11 | 日商半導體能源研究所股份有限公司 | 成像裝置及電子裝置 |
US9647132B2 (en) | 2015-01-30 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and memory device |
WO2016125049A1 (en) | 2015-02-02 | 2016-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Oxide and manufacturing method thereof |
CN107210226B (zh) | 2015-02-04 | 2020-12-22 | 株式会社半导体能源研究所 | 半导体装置的制造方法 |
US9660100B2 (en) | 2015-02-06 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
TWI683365B (zh) | 2015-02-06 | 2020-01-21 | 日商半導體能源研究所股份有限公司 | 裝置及其製造方法以及電子裝置 |
US9954113B2 (en) | 2015-02-09 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Transistor including oxide semiconductor, semiconductor device including the transistor, and electronic device including the transistor |
JP6717604B2 (ja) | 2015-02-09 | 2020-07-01 | 株式会社半導体エネルギー研究所 | 半導体装置、中央処理装置及び電子機器 |
TWI685113B (zh) | 2015-02-11 | 2020-02-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
KR102585396B1 (ko) | 2015-02-12 | 2023-10-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막 및 반도체 장치 |
US9818880B2 (en) | 2015-02-12 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
JP2016154225A (ja) | 2015-02-12 | 2016-08-25 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
US10249644B2 (en) | 2015-02-13 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9991394B2 (en) | 2015-02-20 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and fabrication method thereof |
US9489988B2 (en) | 2015-02-20 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US10403646B2 (en) | 2015-02-20 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6711642B2 (ja) | 2015-02-25 | 2020-06-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6739185B2 (ja) | 2015-02-26 | 2020-08-12 | 株式会社半導体エネルギー研究所 | ストレージシステム、およびストレージ制御回路 |
US9653613B2 (en) | 2015-02-27 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP6744108B2 (ja) | 2015-03-02 | 2020-08-19 | 株式会社半導体エネルギー研究所 | トランジスタ、トランジスタの作製方法、半導体装置および電子機器 |
TWI718125B (zh) | 2015-03-03 | 2021-02-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
KR102526654B1 (ko) | 2015-03-03 | 2023-04-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막, 상기 산화물 반도체막을 포함하는 반도체 장치, 및 상기 반도체 장치를 포함하는 표시 장치 |
CN113223967A (zh) | 2015-03-03 | 2021-08-06 | 株式会社半导体能源研究所 | 半导体装置、该半导体装置的制造方法或包括该半导体装置的显示装置 |
JP6681117B2 (ja) | 2015-03-13 | 2020-04-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR102560862B1 (ko) | 2015-03-17 | 2023-07-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 터치 패널 |
JP2016225602A (ja) | 2015-03-17 | 2016-12-28 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
US10008609B2 (en) | 2015-03-17 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, or display device including the same |
US9964799B2 (en) | 2015-03-17 | 2018-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module, and electronic device |
JP2016177280A (ja) | 2015-03-18 | 2016-10-06 | 株式会社半導体エネルギー研究所 | 表示装置および電子機器、並びに表示装置の駆動方法 |
JP6662665B2 (ja) | 2015-03-19 | 2020-03-11 | 株式会社半導体エネルギー研究所 | 液晶表示装置及び該液晶表示装置を用いた電子機器 |
KR102582523B1 (ko) | 2015-03-19 | 2023-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 전자 기기 |
US10147823B2 (en) | 2015-03-19 | 2018-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR20160114511A (ko) | 2015-03-24 | 2016-10-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
JP6688116B2 (ja) | 2015-03-24 | 2020-04-28 | 株式会社半導体エネルギー研究所 | 撮像装置および電子機器 |
US9842938B2 (en) | 2015-03-24 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including semiconductor device |
US10429704B2 (en) | 2015-03-26 | 2019-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module including the display device, and electronic device including the display device or the display module |
US10096715B2 (en) | 2015-03-26 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and electronic device |
US9806200B2 (en) | 2015-03-27 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6736321B2 (ja) | 2015-03-27 | 2020-08-05 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
TWI695513B (zh) | 2015-03-27 | 2020-06-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置及電子裝置 |
TW202316486A (zh) | 2015-03-30 | 2023-04-16 | 日商半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
US9716852B2 (en) | 2015-04-03 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Broadcast system |
US10389961B2 (en) | 2015-04-09 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
KR20230098354A (ko) | 2015-04-13 | 2023-07-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US10372274B2 (en) | 2015-04-13 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and touch panel |
US10056497B2 (en) | 2015-04-15 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10460984B2 (en) | 2015-04-15 | 2019-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating electrode and semiconductor device |
US9916791B2 (en) | 2015-04-16 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device, electronic device, and method for driving display device |
US10192995B2 (en) | 2015-04-28 | 2019-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10002970B2 (en) | 2015-04-30 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of the same, or display device including the same |
KR102549926B1 (ko) | 2015-05-04 | 2023-06-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 반도체 장치의 제작 방법, 및 전자기기 |
US10671204B2 (en) | 2015-05-04 | 2020-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel and data processor |
JP6681780B2 (ja) | 2015-05-07 | 2020-04-15 | 株式会社半導体エネルギー研究所 | 表示システムおよび電子機器 |
TWI693719B (zh) | 2015-05-11 | 2020-05-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
DE102016207737A1 (de) | 2015-05-11 | 2016-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung, Verfahren zum Herstellen der Halbleitervorrichtung, Reifen und beweglicher Gegenstand |
JP6935171B2 (ja) | 2015-05-14 | 2021-09-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US11728356B2 (en) | 2015-05-14 | 2023-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion element and imaging device |
US9627034B2 (en) | 2015-05-15 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device |
US9837547B2 (en) | 2015-05-22 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide conductor and display device including the semiconductor device |
KR20240014632A (ko) | 2015-05-22 | 2024-02-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 및 상기 반도체 장치를 포함하는 표시 장치 |
JP2016225614A (ja) | 2015-05-26 | 2016-12-28 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6773453B2 (ja) | 2015-05-26 | 2020-10-21 | 株式会社半導体エネルギー研究所 | 記憶装置及び電子機器 |
US10139663B2 (en) | 2015-05-29 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Input/output device and electronic device |
KR102553553B1 (ko) | 2015-06-12 | 2023-07-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 촬상 장치, 및 그 동작 방법 및 전자 기기 |
DE112016002769T5 (de) | 2015-06-19 | 2018-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung, Herstellungsverfahren dafür und elektronisches Gerät |
US9860465B2 (en) | 2015-06-23 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9935633B2 (en) | 2015-06-30 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, semiconductor device, electronic component, and electronic device |
US10290573B2 (en) | 2015-07-02 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9917209B2 (en) | 2015-07-03 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device including step of forming trench over semiconductor |
US10181531B2 (en) | 2015-07-08 | 2019-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor having low parasitic capacitance |
JP2017022377A (ja) | 2015-07-14 | 2017-01-26 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US10501003B2 (en) | 2015-07-17 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, lighting device, and vehicle |
US10985278B2 (en) | 2015-07-21 | 2021-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11189736B2 (en) | 2015-07-24 | 2021-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10978489B2 (en) | 2015-07-24 | 2021-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display panel, method for manufacturing semiconductor device, method for manufacturing display panel, and information processing device |
US11024725B2 (en) | 2015-07-24 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including metal oxide film |
US10424671B2 (en) | 2015-07-29 | 2019-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, circuit board, and electronic device |
US9825177B2 (en) | 2015-07-30 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of a semiconductor device using multiple etching mask |
US10585506B2 (en) | 2015-07-30 | 2020-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device with high visibility regardless of illuminance of external light |
CN106409919A (zh) | 2015-07-30 | 2017-02-15 | 株式会社半导体能源研究所 | 半导体装置以及包括该半导体装置的显示装置 |
KR102513517B1 (ko) | 2015-07-30 | 2023-03-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 전자 기기 |
US9911861B2 (en) | 2015-08-03 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of the same, and electronic device |
US9876946B2 (en) | 2015-08-03 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
JP6791661B2 (ja) | 2015-08-07 | 2020-11-25 | 株式会社半導体エネルギー研究所 | 表示パネル |
US9893202B2 (en) | 2015-08-19 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9666606B2 (en) | 2015-08-21 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
JP2017041877A (ja) | 2015-08-21 | 2017-02-23 | 株式会社半導体エネルギー研究所 | 半導体装置、電子部品、および電子機器 |
US9773919B2 (en) | 2015-08-26 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2017037564A1 (en) | 2015-08-28 | 2017-03-09 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, transistor, and semiconductor device |
JP2017050537A (ja) | 2015-08-31 | 2017-03-09 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9911756B2 (en) | 2015-08-31 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor and electronic device surrounded by layer having assigned band gap to prevent electrostatic discharge damage |
JP6807683B2 (ja) | 2015-09-11 | 2021-01-06 | 株式会社半導体エネルギー研究所 | 入出力パネル |
SG10201607278TA (en) | 2015-09-18 | 2017-04-27 | Semiconductor Energy Lab Co Ltd | Semiconductor device and electronic device |
JP2017063420A (ja) | 2015-09-25 | 2017-03-30 | 株式会社半導体エネルギー研究所 | 半導体装置 |
WO2017055967A1 (en) | 2015-09-30 | 2017-04-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
WO2017064587A1 (en) | 2015-10-12 | 2017-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Display panel, input/output device, data processor, and method for manufacturing display panel |
WO2017064590A1 (en) | 2015-10-12 | 2017-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9852926B2 (en) | 2015-10-20 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for semiconductor device |
US20170118479A1 (en) | 2015-10-23 | 2017-04-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
CN107077639A (zh) | 2015-10-23 | 2017-08-18 | 株式会社半导体能源研究所 | 半导体装置及电子设备 |
US10007161B2 (en) | 2015-10-26 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
SG10201608814YA (en) | 2015-10-29 | 2017-05-30 | Semiconductor Energy Lab Co Ltd | Semiconductor device and method for manufacturing the semiconductor device |
US9773787B2 (en) | 2015-11-03 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, electronic device, or method for driving the semiconductor device |
US9741400B2 (en) | 2015-11-05 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, electronic device, and method for operating the semiconductor device |
JP6796461B2 (ja) | 2015-11-18 | 2020-12-09 | 株式会社半導体エネルギー研究所 | 半導体装置、コンピュータ及び電子機器 |
JP2018032839A (ja) | 2015-12-11 | 2018-03-01 | 株式会社半導体エネルギー研究所 | トランジスタ、回路、半導体装置、表示装置および電子機器 |
US10868045B2 (en) | 2015-12-11 | 2020-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
US10050152B2 (en) | 2015-12-16 | 2018-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
WO2017103731A1 (en) | 2015-12-18 | 2017-06-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US10177142B2 (en) | 2015-12-25 | 2019-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Circuit, logic circuit, processor, electronic component, and electronic device |
KR102595042B1 (ko) | 2015-12-28 | 2023-10-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치를 포함하는 표시 장치 |
JP6851814B2 (ja) | 2015-12-29 | 2021-03-31 | 株式会社半導体エネルギー研究所 | トランジスタ |
KR20180099725A (ko) | 2015-12-29 | 2018-09-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 금속 산화물막 및 반도체 장치 |
JP2017135698A (ja) | 2015-12-29 | 2017-08-03 | 株式会社半導体エネルギー研究所 | 半導体装置、コンピュータ及び電子機器 |
JP6827328B2 (ja) | 2016-01-15 | 2021-02-10 | 株式会社半導体エネルギー研究所 | 半導体装置及び電子機器 |
KR102330089B1 (ko) | 2016-01-18 | 2021-12-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 금속 산화물막, 반도체 장치, 및 표시 장치 |
JP6839986B2 (ja) | 2016-01-20 | 2021-03-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP6822853B2 (ja) | 2016-01-21 | 2021-01-27 | 株式会社半導体エネルギー研究所 | 記憶装置及び記憶装置の駆動方法 |
US10411013B2 (en) | 2016-01-22 | 2019-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and memory device |
US10700212B2 (en) | 2016-01-28 | 2020-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, semiconductor wafer, module, electronic device, and manufacturing method thereof |
US10115741B2 (en) | 2016-02-05 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10250247B2 (en) | 2016-02-10 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
JP6970511B2 (ja) | 2016-02-12 | 2021-11-24 | 株式会社半導体エネルギー研究所 | トランジスタ |
CN114284364A (zh) | 2016-02-12 | 2022-04-05 | 株式会社半导体能源研究所 | 半导体装置以及包括该半导体装置的显示装置 |
US9954003B2 (en) | 2016-02-17 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10263114B2 (en) | 2016-03-04 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, or display device including the same |
WO2017149428A1 (en) | 2016-03-04 | 2017-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and display device including the semiconductor device |
WO2017149413A1 (en) | 2016-03-04 | 2017-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP6904730B2 (ja) | 2016-03-08 | 2021-07-21 | 株式会社半導体エネルギー研究所 | 撮像装置 |
US9882064B2 (en) | 2016-03-10 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and electronic device |
US10096720B2 (en) | 2016-03-25 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
WO2017168283A1 (ja) | 2016-04-01 | 2017-10-05 | 株式会社半導体エネルギー研究所 | 複合酸化物半導体、当該複合酸化物半導体を用いた半導体装置、当該半導体装置を有する表示装置 |
US10236875B2 (en) | 2016-04-15 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for operating the semiconductor device |
CN109074296B (zh) | 2016-04-15 | 2023-09-12 | 株式会社半导体能源研究所 | 半导体装置、电子构件及电子设备 |
KR102358829B1 (ko) | 2016-05-19 | 2022-02-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 복합 산화물 반도체 및 트랜지스터 |
KR102296809B1 (ko) | 2016-06-03 | 2021-08-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 금속 산화물 및 전계 효과 트랜지스터 |
KR102330605B1 (ko) | 2016-06-22 | 2021-11-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US10411003B2 (en) | 2016-10-14 | 2019-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
CN114115609A (zh) | 2016-11-25 | 2022-03-01 | 株式会社半导体能源研究所 | 显示装置及其工作方法 |
US10504741B2 (en) * | 2017-02-28 | 2019-12-10 | Tokyo Electron Limited | Semiconductor manufacturing method and plasma processing apparatus |
JP6807775B2 (ja) | 2017-02-28 | 2021-01-06 | 東京エレクトロン株式会社 | 成膜方法及びプラズマ処理装置 |
WO2019025893A1 (ja) | 2017-07-31 | 2019-02-07 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
JP6782211B2 (ja) * | 2017-09-08 | 2020-11-11 | 株式会社東芝 | 透明電極、それを用いた素子、および素子の製造方法 |
WO2019145803A1 (ja) | 2018-01-24 | 2019-08-01 | 株式会社半導体エネルギー研究所 | 半導体装置、電子部品、及び電子機器 |
JP7293190B2 (ja) | 2018-03-16 | 2023-06-19 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US20210249273A1 (en) * | 2018-05-08 | 2021-08-12 | Sony Semiconductor Solutions Corporation | Etching method of oxide semiconductor film, oxide semiconductor workpiece, and electronic device |
WO2020012276A1 (ja) | 2018-07-09 | 2020-01-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US11948945B2 (en) | 2019-05-31 | 2024-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and wireless communication device with the semiconductor device |
JPWO2021095474A1 (ja) * | 2019-11-14 | 2021-05-20 | ||
EP3989266A1 (en) * | 2020-10-23 | 2022-04-27 | Imec VZW | Method for etching an igzo structure |
US20230260798A1 (en) * | 2021-05-25 | 2023-08-17 | Lam Research Corporation | Chemistry for high aspect ratio etch for 3d-nand |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2521815B2 (ja) | 1989-08-17 | 1996-08-07 | 沖電気工業株式会社 | 透明導電膜のエッチング方法 |
US5068007A (en) * | 1990-09-24 | 1991-11-26 | Motorola, Inc. | Etching of materials in a noncorrosive environment |
JPH06338223A (ja) | 1993-05-31 | 1994-12-06 | Asahi Glass Co Ltd | 透明導電膜 |
JPH09326298A (ja) * | 1996-04-01 | 1997-12-16 | Denso Corp | ドライエッチング方法及びel素子の製造方法 |
JP3543898B2 (ja) | 1996-09-09 | 2004-07-21 | 三井化学株式会社 | エッチング用ガスおよびその製造方法 |
DE69729394T2 (de) * | 1996-11-29 | 2005-06-02 | Idemitsu Kosan Co. Ltd. | Organische elektrolumineszente Vorrichtung |
JPH11335874A (ja) | 1998-05-25 | 1999-12-07 | Minolta Co Ltd | 酸化亜鉛膜の加工方法 |
JP2000238178A (ja) | 1999-02-24 | 2000-09-05 | Teijin Ltd | 透明導電積層体 |
JP4164562B2 (ja) | 2002-09-11 | 2008-10-15 | 独立行政法人科学技術振興機構 | ホモロガス薄膜を活性層として用いる透明薄膜電界効果型トランジスタ |
WO2003040441A1 (en) * | 2001-11-05 | 2003-05-15 | Japan Science And Technology Agency | Natural superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film |
CN102867855B (zh) | 2004-03-12 | 2015-07-15 | 独立行政法人科学技术振兴机构 | 薄膜晶体管及其制造方法 |
JP2005354036A (ja) * | 2004-05-14 | 2005-12-22 | Toppan Printing Co Ltd | 半導体装置の形成方法 |
JP4524223B2 (ja) * | 2004-07-16 | 2010-08-11 | 富士フイルム株式会社 | 機能素子及びその製造方法、ならびに固体撮像素子及びその製造方法 |
-
2006
- 2006-06-13 JP JP2006163464A patent/JP5028033B2/ja not_active Expired - Fee Related
-
2007
- 2007-05-22 US US11/802,276 patent/US8034248B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20070287296A1 (en) | 2007-12-13 |
US8034248B2 (en) | 2011-10-11 |
JP2007335505A (ja) | 2007-12-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5028033B2 (ja) | 酸化物半導体膜のドライエッチング方法 | |
JP4999400B2 (ja) | 酸化物半導体膜のドライエッチング方法 | |
KR102180406B1 (ko) | 에칭 방법 | |
Pearton et al. | Dry etching of electronic oxides, polymers, and semiconductors | |
KR101516648B1 (ko) | 산화물 표면 대신 베어 실리콘 상의 폴리머 막들의 선택적 증착 | |
JP3000717B2 (ja) | ドライエッチング方法 | |
US4878993A (en) | Method of etching thin indium tin oxide films | |
TWI588892B (zh) | 利用鈍化反應的銅之非等向性蝕刻 | |
CN109690735B (zh) | 用于高纵横比结构的剥离方法 | |
US20180277387A1 (en) | Gases for low damage selective silicon nitride etching | |
Pearton et al. | Reactive ion etching of InP, InGaAs, InAlAs: comparison of C2H6/H2 with CCl2F2/O2 | |
US20180047578A1 (en) | Method of processing target object | |
TWI684201B (zh) | 被處理體之處理方法 | |
JP5783890B2 (ja) | プラズマ処理方法 | |
CN114342043A (zh) | 低压下的高密度、模量和硬度的非晶碳膜 | |
US10217681B1 (en) | Gases for low damage selective silicon nitride etching | |
US5211790A (en) | Dry etching method by sulfur conditioning | |
US10260150B2 (en) | Method and system for sculpting spacer sidewall mask | |
JP6004420B2 (ja) | 不揮発性化合物の除去方法 | |
JP2010003872A (ja) | 酸化亜鉛膜のドライエッチング方法 | |
Kim et al. | Dry etching of germanium using inductively coupled Ar/CCl 2 F 2/Cl 2 plasma | |
Guo et al. | Reactive ion etching of zinc oxide using methane and hydrogen | |
JPH09263948A (ja) | プラズマを用いた薄膜形成方法、薄膜製造装置、エッチング方法、及びエッチング装置 | |
Kim et al. | Etching of oxynitride thin films using inductively coupled plasma | |
US11171013B2 (en) | Leveraging precursor molecular composition and structure for atomic layer etching |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20080207 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20090323 |
|
RD05 | Notification of revocation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7425 Effective date: 20090427 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090615 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090615 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100129 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20100617 |
|
RD05 | Notification of revocation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7425 Effective date: 20100730 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20101227 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120130 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120618 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120625 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150629 Year of fee payment: 3 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5028033 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
LAPS | Cancellation because of no payment of annual fees |