JP6460592B2 - Dcdcコンバータ、及び半導体装置 - Google Patents
Dcdcコンバータ、及び半導体装置 Download PDFInfo
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- JP6460592B2 JP6460592B2 JP2014149485A JP2014149485A JP6460592B2 JP 6460592 B2 JP6460592 B2 JP 6460592B2 JP 2014149485 A JP2014149485 A JP 2014149485A JP 2014149485 A JP2014149485 A JP 2014149485A JP 6460592 B2 JP6460592 B2 JP 6460592B2
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- transistor
- oxide semiconductor
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- oxide
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Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
- H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
- H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- G—PHYSICS
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- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
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- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
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- H02M3/33546—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only of the forward type with automatic control of the output voltage or current
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Description
本発明の一態様に係るDCDCコンバータの構成を、図1(A)に一例として示す。
次いで、図1に示したトランジスタ11またはトランジスタ19として用いることができる、トランジスタ30の具体的な構成例を、図2に示す。図2(A)には、トランジスタ30の上面図を示す。なお、図2(A)では、トランジスタ30のレイアウトを明確にするために、各種の絶縁膜を省略している。また、図2(A)に示した上面図の、破線A1−A2における断面図を図2(B)に示し、破線A3−A4における断面図を図2(C)に示す。
パルス幅制御を用いる場合の制御回路の構成の一例について説明する。
図5に、バイアス回路15と、保持回路16と、オペアンプ14の構成例を示す。図5に示す保持回路16の構成は、図1(A)に示した保持回路16の構成と同じであり、保持回路16は、トランジスタ19と容量素子20とを有する。また、図5ではオペアンプ14が有する電流源17を図示している。図5に示す電流源17の構成は、図1(A)に示した電流源17の構成と同じであり、電流源17はトランジスタ18を有する。
図8に、バイアス回路15aと、保持回路16aと、誤差増幅器42の構成例を示す。
図9に、DCDCコンバータの断面構造の一例を示す。図9では、図1に示したトランジスタ11、トランジスタ18、トランジスタ19と、図4に示したバッファ46が有するトランジスタ65及びトランジスタ66の断面構造を、一例として示す。
酸化物半導体膜は、単結晶酸化物半導体膜と非単結晶酸化物半導体膜とに大別される。非単結晶酸化物半導体膜とは、非晶質酸化物半導体膜、微結晶酸化物半導体膜、多結晶酸化物半導体膜、CAAC−OS膜などをいう。
CAAC−OS膜は、c軸配向した複数の結晶部を有する酸化物半導体膜の一つであり、ほとんどの結晶部は、一辺が100nm未満の立方体内に収まる大きさである。従って、CAAC−OS膜に含まれる結晶部は、一辺が10nm未満、5nm未満または3nm未満の立方体内に収まる大きさの場合も含まれる。CAAC−OS膜は、微結晶酸化物半導体膜よりも欠陥準位密度が低いという特徴がある。透過型電子顕微鏡(TEM:Transmission Electron Microscope)によって、CAAC−OS膜の明視野像および回折パターンの複合解析像(高分解能TEM像ともいう。)を観察することで複数の結晶部を確認することができる。一方、高分解能TEM像によっても明確な結晶部同士の境界、即ち結晶粒界(グレインバウンダリーともいう。)を確認することができない。そのため、CAAC−OS膜は、結晶粒界に起因する電子移動度の低下が起こりにくいといえる。
微結晶酸化物半導体膜は、高分解能TEM像において、結晶部を確認することのできる領域と、明確な結晶部を確認することのできない領域と、を有する。微結晶酸化物半導体膜に含まれる結晶部は、1nm以上100nm以下、または1nm以上10nm以下の大きさであることが多い。特に、1nm以上10nm以下、または1nm以上3nm以下の微結晶であるナノ結晶(nc:nanocrystal)を有する酸化物半導体膜を、nc−OS(nanocrystalline Oxide Semiconductor)膜と呼ぶ。また、nc−OS膜は、例えば、高分解能TEM像では、結晶粒界を明確に確認できない場合がある。
非晶質酸化物半導体膜は、膜中における原子配列が不規則であり、結晶部を有さない酸化物半導体膜である。石英のような無定形状態を有する酸化物半導体膜が一例である。
次いで、図10に示したトランジスタ30の作製方法の一例について、図10を用いて説明する。
本発明の一態様に係るDCDCコンバータは、入力電位に対して高い出力電位が得られる昇圧型であっても良いし、入力電位に対して低い出力電位が得られる降圧型であっても良い。
本発明の一態様に係るDCDCコンバータ、または半導体装置を用いることで、低消費電力の電子機器を実現することができる。特に電力の供給を常時受けることが困難な携帯用の電子機器の場合、本発明の一態様に係るDCDCコンバータ、半導体装置をその構成要素に追加することにより、連続使用時間が長くなるといったメリットが得られる。
11 トランジスタ
12 平滑化回路
13 制御回路
14 オペアンプ
15 バイアス回路
15a バイアス回路
15b バイアス回路
16 保持回路
16a 保持回路
16b 保持回路
17 電流源
18 トランジスタ
19 トランジスタ
20 容量素子
29 基板
30 トランジスタ
31 絶縁膜
32a 酸化物半導体膜
32b 酸化物半導体膜
32c 酸化物半導体膜
33 導電膜
34 導電膜
35 絶縁膜
36 導電膜
38 絶縁膜
39 酸化物半導体膜
40 分圧回路
41 抵抗素子
41a 抵抗素子
41b 抵抗素子
42 誤差増幅器
43 位相補償回路
44 コンパレータ
45 三角波発振器
46 バッファ
48 トランジスタ
49 電流源
50 配線
51 トランジスタ
52 スイッチング素子
52t トランジスタ
53 配線
54 トランジスタ
55 抵抗素子
56 オペアンプ
60 差動アンプ
61 出力回路
62 出力端子
65 トランジスタ
66 トランジスタ
130 ダイオード
131 コイル
132 容量素子
133 トランス
134 ダイオード
135 トランス
301 交流電源
302 スイッチ
303 整流回路
304 発光素子
350 フォトダイオード
351 スイッチ
352 容量素子
353 パルス幅変調回路
354 インバータ
355 バンドパスフィルタ
356 トランジスタ
357 トランジスタ
358 トランジスタ
359 トランジスタ
360 ダイオード
363 ダイオード
400 半導体基板
401 素子分離領域
411 絶縁膜
412 導電膜
413 導電膜
414 絶縁膜
415 絶縁膜
416 絶縁膜
417 導電膜
418 導電膜
420 絶縁膜
421 導電膜
422 絶縁膜
5001 筐体
5002 表示部
5003 支持台
5301 筐体
5302 筐体
5303 表示部
5304 表示部
5305 マイクロホン
5306 スピーカー
5307 操作キー
5308 スタイラス
5701 筐体
5702 表示部
5901 筐体
5902 表示部
5903 カメラ
5904 スピーカー
5905 ボタン
5906 外部接続部
5907 マイク
7071 筐体
7072 光源
7073 支持台
7081 筐体
7082 光源
9501 トランジスタ
9502 トランジスタ
9503 トランジスタ
9504 トランジスタ
9505 トランジスタ
9506 トランジスタ
9507 トランジスタ
9508 トランジスタ
9509 トランジスタ
9510 トランジスタ
9511 トランジスタ
9512 トランジスタ
9513 容量素子
9514 トランジスタ
9515 トランジスタ
9516 電流源
9517 配線
9520 配線
Claims (4)
- スイッチング素子と、
制御回路と、
前記スイッチング素子を介して入力された電位を平滑化する機能を有する第1回路と、を有するDCDCコンバータであり、
前記制御回路は、オペアンプと、バイアス回路と、第2回路と、を有し、
前記オペアンプは、前記スイッチング素子のスイッチングを制御する信号を生成する機能を有し、
前記バイアス回路は、前記オペアンプが有する電流源に供給するバイアス電位を生成する機能を有し、
前記第2回路は、第1トランジスタと、容量素子と、を有し、
前記第1トランジスタは、前記バイアス電位を前記容量素子に供給する機能と、前記バイアス電位を前記電流源に供給する機能と、を有し、
前記第1トランジスタは、前記容量素子において前記バイアス電位を保持する機能と、前記バイアス電位の前記電流源への供給を保持する機能と、を有し、
前記スイッチング素子は、第2トランジスタを有し、
前記第1トランジスタは、第1酸化物半導体膜を有し、
前記第2トランジスタは、第2酸化物半導体膜を有し、
前記第1酸化物半導体膜及び前記第2酸化物半導体膜は、それぞれ、In、M(Mは、Ga、Y、Zr、La、Ce、またはNd)、及びZnを含み、
前記Mの原子数に対する前記Inの原子数の割合は、前記第1酸化物半導体膜よりも、前記第2酸化物半導体膜の方が大きいDCDCコンバータ。 - スイッチング素子と、
制御回路と、
前記スイッチング素子を介して入力された電位を平滑化する機能を有する第1回路と、を有するDCDCコンバータであり、
前記制御回路は、オペアンプと、バイアス回路と、第2回路と、を有し、
前記オペアンプは、前記スイッチング素子のスイッチングを制御する信号を生成する機能を有し、
前記バイアス回路は、前記オペアンプが有する電流源に供給するバイアス電位を生成する機能を有し、
前記第2回路は、第1トランジスタと、容量素子と、を有し、
前記第1トランジスタは、前記バイアス電位を前記容量素子に供給する機能と、前記バイアス電位を前記電流源に供給する機能と、を有し、
前記第1トランジスタは、前記容量素子において前記バイアス電位を保持する機能と、前記バイアス電位の前記電流源への供給を保持する機能と、を有し、
前記スイッチング素子は、第2トランジスタを有し、
前記第1トランジスタは、第1酸化物半導体膜と、前記第1酸化物半導体膜を介して重なる一対の第1ゲート電極と、を有し、
前記第2トランジスタは、第2酸化物半導体膜と、前記第2酸化物半導体膜を介して重なる一対の第2ゲート電極と、を有し、
前記一対の第1ゲート電極の一方には前記信号が供給され、前記一対の第1ゲート電極の他方には前記バイアス電位よりも低い電位が供給され、
前記一対の第2ゲート電極は、電気的に接続され、
前記第1酸化物半導体膜及び前記第2酸化物半導体膜は、それぞれ、In、M(Mは、Ga、Y、Zr、La、Ce、またはNd)、及びZnを含むDCDCコンバータ。 - スイッチング素子と、
制御回路と、
前記スイッチング素子を介して入力された電位を平滑化する機能を有する第1回路と、を有するDCDCコンバータであり、
前記制御回路は、オペアンプと、バイアス回路と、第2回路と、を有し、
前記オペアンプは、前記スイッチング素子のスイッチングを制御する信号を生成する機能を有し、
前記バイアス回路は、前記オペアンプが有する電流源に供給するバイアス電位を生成する機能を有し、
前記第2回路は、第1トランジスタと、容量素子と、を有し、
前記第1トランジスタは、前記バイアス電位を前記容量素子に供給する機能と、前記バイアス電位を前記電流源に供給する機能と、を有し、
前記第1トランジスタは、前記容量素子において前記バイアス電位を保持する機能と、前記バイアス電位の前記電流源への供給を保持する機能と、を有し、
前記スイッチング素子は、第2トランジスタを有し、
前記第1トランジスタは、第1酸化物半導体膜を有し、
前記第2トランジスタは、第2酸化物半導体膜を有し、
前記第1酸化物半導体膜は、In、M(Mは、Ga、Y、Zr、La、Ce、またはNd)、及びZnを含み、
前記第2酸化物半導体膜は、In及びZnの少なくとも一を含むDCDCコンバータ。 - 請求項1乃至請求項3のいずれか1項に記載のDCDCコンバータを有する半導体装置。
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US9412762B2 (en) | 2016-08-09 |
US20160285369A1 (en) | 2016-09-29 |
JP2015047061A (ja) | 2015-03-12 |
US20150035514A1 (en) | 2015-02-05 |
US10008929B2 (en) | 2018-06-26 |
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