JP2012160740A5 - - Google Patents

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JP2012160740A5
JP2012160740A5 JP2012058087A JP2012058087A JP2012160740A5 JP 2012160740 A5 JP2012160740 A5 JP 2012160740A5 JP 2012058087 A JP2012058087 A JP 2012058087A JP 2012058087 A JP2012058087 A JP 2012058087A JP 2012160740 A5 JP2012160740 A5 JP 2012160740A5
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oxide
growth chamber
oxygen
gas
generator installed
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JP2012160740A (ja
JP5451801B2 (ja
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JP2012058087A 2004-11-10 2012-03-15 電界効果型トランジスタの製造方法 Expired - Lifetime JP5451801B2 (ja)

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JP2012058087A JP5451801B2 (ja) 2004-11-10 2012-03-15 電界効果型トランジスタの製造方法

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JP2004326686 2004-11-10
JP2004326686 2004-11-10
JP2012058087A JP5451801B2 (ja) 2004-11-10 2012-03-15 電界効果型トランジスタの製造方法

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JP2012160740A JP2012160740A (ja) 2012-08-23
JP2012160740A5 true JP2012160740A5 (OSRAM) 2012-12-06
JP5451801B2 JP5451801B2 (ja) 2014-03-26

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JP2012058252A Expired - Lifetime JP5401572B2 (ja) 2004-11-10 2012-03-15 電界効果型トランジスタの製造方法
JP2012058087A Expired - Lifetime JP5451801B2 (ja) 2004-11-10 2012-03-15 電界効果型トランジスタの製造方法
JP2012058253A Expired - Lifetime JP5401573B2 (ja) 2004-11-10 2012-03-15 電界効果型トランジスタの製造方法
JP2012058163A Expired - Lifetime JP5401571B2 (ja) 2004-11-10 2012-03-15 電界効果型トランジスタの製造方法

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JP2012058163A Expired - Lifetime JP5401571B2 (ja) 2004-11-10 2012-03-15 電界効果型トランジスタの製造方法

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US (2) US7829444B2 (OSRAM)
JP (4) JP5401572B2 (OSRAM)

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