KR102211950B1 - 의료용 주사기 카트리지 등의 pecvd 증착 균일성 제어 - Google Patents
의료용 주사기 카트리지 등의 pecvd 증착 균일성 제어 Download PDFInfo
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- KR102211950B1 KR102211950B1 KR1020157017469A KR20157017469A KR102211950B1 KR 102211950 B1 KR102211950 B1 KR 102211950B1 KR 1020157017469 A KR1020157017469 A KR 1020157017469A KR 20157017469 A KR20157017469 A KR 20157017469A KR 102211950 B1 KR102211950 B1 KR 102211950B1
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Abstract
Description
도 2는 도 1의 뚜껑 달린 어셈블리에 대한 종단면으로서, 3층 구조 PECVD 세트의 확대도를 나타낸다.
도 3은 도 1의 뚜껑 달린 어셈블리에 대한 확대 부분도이다.
도 4는 화학기상증착 코팅 스테이션에 안착된, 도 1과 도 2의 뚜껑 달린 어셈블리에 대한 종단면도이다.
도 5는 도 4의 A-A선을 따른 단면도로서, 사중극 자석 어레이를 나타낸다.
도 6은 도 4와 도 5에 나타낸 화학기상증착 코팅 스테이션을 더 상세히 보여주는 개략도이다.
도 7은 제제 (pharmaceutical preparation)가 충전되어 있고, 사전충전형 주사기를 정의하는 플런저 팁, 피스톤, 스토퍼, 또는 밀봉부가 장착된, 도 1 내지 도 6의 뚜껑 달린 어셈블리의 도 2와 유사한 도면이다. 본 도면에 나타낸 선택예에서는 플런저 팁, 피스톤, 스토퍼, 또는 밀봉부 및 플런저 푸쉬 로드가 설치되어 있다.
도 8은 마개 (격막 및 크림프)가 장착되어 있고, 동일한 배리어 코팅 혹은 층, 부동태화 층 또는 pH 보호 코팅, 및 그 밖의 일반 특징부들을 구비한 바이얼의 종단면도이다.
도 9는 본 발명의 임의의 구현예와 함께 사용가능한 대안적 자석 구조로서의 솔레노이드 코일에 대한, 도 5와 유사한 도면으로서, 9a 부분은 솔레노이드 코일의 분리사시도이다.
도 10은 본 발명의 임의의 구현예와 함께 사용가능한 대안적 자석 구조로서의 원형 단면 환상 코일 (toroidal coil)에 대한, 도 5와 유사한 도면이다.
도 11은 도 10의 환상 코일의 분리 절취사시도이다.
도 12는 본 발명의 임의의 구현예와 함께 사용가능한 대안적 자석 구조로서의 원형 단면 환상 코일에 대한, 도 9a와 유사한 도면이다.
도 13은 도 12의 13-13 단면선을 따른 단면도이다.
도 14는 본 발명의 임의의 구현예와 함께 사용가능한 원통 축과 일치하는 극축 (polar axis)을 가진 링 자석의 극축 배향을 나타낸다.
도 15는 본 발명의 임의의 구현예와 함께 사용가능한, 최장 치수에 평행한 극축을 가진 둥근 원통형 바 자석의 극축 배향을 나타낸다.
도 16은 본 발명의 임의의 구현예와 함께 사용가능한, 최장 치수에 평행한 극축을 가진 정사각형-단면 원통형 바 자석의 극축 배향을 나타낸다.
도 17은 본 발명의 임의의 구현예와 함께 사용가능한, 원주 극축을 가진 다중극 링 자석의 극축 배향 (밀폐 링으로부터의 절취도)을 나타낸다.
도 18은 최단 치수 (두께)에 평행하고 최장 치수 (길이)에 직각을 이루는 극축을 가진 바 자석의 극축 배향을 나타낸다.
도 19는 본 발명의 임의의 구현예와 함께 사용가능한, 도 5의 사중극 자석 어레이의 사시도이다.
도 20은 본 발명의 임의의 구현예에서 도 19의 자석 어레이와 유사하게 사용가능한 축방향 자석 어레이의 사시도이다.
도 21은 본 발명의 임의의 구현예에서 도 19의 자석 어레이와 유사하게 사용가능한 사중극 자석 어레이의 사시도이다.
도 22는 본 발명의 임의의 구현예에서 도 19의 자석 어레이와 유사하게 사용가능한, 적층형 다중극 세그먼트 링 자석 어레이의 사시도이다.
도 23은 본 발명의 임의의 구현예에서 도 19의 자석 어레이와 유사하게 사용가능한, 적층형 축방향-극 링 자석 어레이의 사시도이다.
도 24는 본 발명의 임의의 구현예에서 도 19의 자석 어레이와 유사하게 사용가능한, 적층형 사중극 자석 어레이의 사시도이다.
도 25는 본 발명의 임의의 구현예에서 도 19의 자석 어레이와 유사하게 사용가능한, 사중극 자석 어레이의 사시도이다.
도 26은 본 발명의 임의의 구현예에서 도 5의 해당 구조 (108)와 유사하게 사용가능한, 90도 천공 패턴을 가진 제1 대안적 가스 입구 및 내부 전극에 대한 측방향 입면도이다.
도 27은 본 발명의 임의의 구현예에서 도 5의 해당 구조 (108)와 유사하게 사용가능한, 120도 천공 패턴을 가진 제2 대안적 가스 입구 및 내부 전극에 대한 측방향 입면도이다.
도 28은 본 발명의 임의의 구현예에서 도 5의 해당 구조 (108)와 유사하게 사용가능한, 나선형 또는 45도 천공 패턴을 가진 제2 대안적 가스 입구 및 내부 전극에 대한 측방향 입면도이다.
도 29는 임의의 구현예에서 도 4 내지 도 6과 도 9 내지 도 28의 PECVD 장치 상에 분리된 뚜껑 (270)과 사용가능한, 의료용 샘플관의 사시도이다.
도 30은 실시예 1의 실험에서, 의료용 배럴의 대체로 원형의 내부 표면 (16) 상의 위치에 대한 코팅 혹은 층 두께의 선도이다.
도 31은 실시예 2의 실험에서, 의료용 배럴의 대체로 원형의 내부 표면 (16) 상의 위치에 대한 코팅 혹은 층 두께의 선도이다.
도 32는 실시예 3의 실험에서, 의료용 배럴의 대체로 원형의 내부 표면 (16) 상의 위치에 대한 코팅 혹은 층 두께의 선도이다.
도 33은 실시예 4의 실험에서, 의료용 배럴의 대체로 원형의 내부 표면 (16) 상의 위치에 대한 코팅 혹은 층 두께의 선도이다.
도 34는 실시예 5의 실험에서, 의료용 배럴의 대체로 원형의 내부 표면 (16) 상의 위치에 대한 코팅 혹은 층 두께의 선도이다.
도 35은 실시예 6의 실험에서, 의료용 배럴의 대체로 원형의 내부 표면 (16) 상의 위치에 대한 코팅 혹은 층 두께의 선도이다.
도 37은 도 4와 유사한 도면으로서, 임의의 구현예에서 개별적 또는 조합된 형태로 사용가능한 특정의 선택적 특징부들 (헬름홀츠 코일 (86a, 86b), 광검출기 (350), 로고스키 코일 (352), 및 랭뮤어 프로브 (354)을 포함함)를 나타낸다.
도 38은 전자 병을 포함한 플라즈마 처리 장치의 개략적 종단면도이다. 전자 병의 구성을 더 잘 나타내기 위해 플라즈마 발생 시스템, 물질 공급 시스템 및 배기 시스템을 생략하였다.
도 39는 도 38의 39-39선을 따른 단면도이다.
도 40은 도 38의 40-40선을 따른 부분단면도로서, 링 자석 (75) 및 밀접하게 이격된 자력선들 (83)의 횡단면도를 나타낸다.
도 41은 전자를 방사방향으로 밀폐시키기 위한 링 자석들 (75)의 적층체로 만들어진 대안적 전자 병의 개략적 단면도로서, 각 단부는 전자들을 축방향으로 밀폐시키기 위한 바 자석 (65)에 의해 뚜껑 덮힌 상태로 있다. 전자 병의 구성을 더 잘 나타내기 위해 플라즈마 발생 시스템, 물질 공급 시스템 및 배기 시스템을 생략하였다.
도 42는 전자들을 방사방향 및 축방향으로 제공하기 위한 솔레노이드 코일로 만들어진 대안적 전자 병의 개략적 단면도이다. 전자 병의 구성을 더 잘 나타내기 위해 플라즈마 발생 시스템, 물질 공급 시스템 및 배기 시스템을 생략하였다.
도 43은 전자들을 방사방향으로 밀폐시키기 위한 솔레노이드 코일 및 전자들을 축방향으로 밀폐시키기 위한 정전식 전자 미러들로 만들어진 또 다른 대안적 전자 병의 개략적 단면도이다. 전자 병의 구성을 더 잘 나타내기 위해 플라즈마 발생 시스템, 물질 공급 시스템 및 배기 시스템을 생략하였다.
도 44는 전자들을 방사방향으로 밀폐시키는 원통형 정전식 미러 및 전자들을 축방향으로 밀폐시키기 위한 자석식 전자 미러들로 만들어진 또 다른 대안적 전자 병의 개략적 단면도이다. 전자 병의 구성을 더 잘 나타내기 위해 플라즈마 발생 시스템, 물질 공급 시스템 및 배기 시스템을 생략하였다.
도 45는 방사방향으로 연장되는 극축을 가진 교번식 바 자석들 (61 및 62)로 만들어진 8개의 자석 사중극 유사체의 상세도이다. 자석 (61)은 내향 북극을 가지며, 교번식 자석 (62)은 외향 북극을 가진다.
도 46은 환형면이 극을 정함에 따라, 축방향을 향하는 극축을 가진 8개의 링 자석으로 이루어진 적층체의 상세도이다. 일 구현예에 의하면,8개 자석 모두 동일한 자기장 세기를 가지며, 이에 따라 오로지 방사방향 밀폐만 가능하다. 또 다른 구현예에서는 적층체의 각 단부에서 링 자석의 자기장 세기가 더 높으므로, 축방향 밀폐 역시 가능하다.
도 47은 본 발명의 특정 양태에 사용되는 자석 어레이의 개략적 측면도이다.
도 48은 경사진 사중극 자석 어레이를 포함한 PECVD 장치 내 바이얼의 개략적 측면도이다.
도 49는 본 발명의 특정 양태에 사용되는 축방향 자석 어레이의 사시도이다.
도 50은 도 1의 뚜껑 달린 어셈블리에서 국부 코팅 혹은 층을 위한 대안적 코팅 스테이션의 종단면도이다.
도 51은 도 1 내지 도 6의 뚜껑 달린 어셈블리에 대한 도 7과 유사한 도면으로서, 선택적 국부 윤활성 코팅을 나타낸다.
도 52 내지 도 54는 윤활제로서의 실리콘 오일 (또는 그 밖의 오일)의 단점들을 나타내는 도면이다.
도 55는 상부 쉘 지지체가 제거된 상태에서, 하부 쉘 지지체 (836)에 지지된 원추형 자석들의 링 형상 어레이의 사시도이다.
도 56은 도 55의 56-56선을 따른 단면도이다.
도 57은 상부 또는 하부 쉘 지지체 (836) (상부 쉘 지지체와 하부 쉘 지지체는 선택적으로 동일할 수 있음)의 단면도이다.
도 58은 본 발명에 따라 사용가능한 대안적 절두피라미드형 자석 모양을 나타낸다.
도 59는 본 발명에 따라 사용가능한 대안적 피라미드 자석 형상을 나타낸다.
도 60은 본 발명에 따라 사용가능한 대안적 절두원추형 자석 모양을 나타낸다.
도 61은 의료용 배럴의 내부 표면상의 코팅 혹은 층 두께에 대한 맵이다.
도 62는 의료용 배럴의 개략적 도면이다.
도 63은 도 61의 의료용 배럴의 대체로 원통형 내부 표면상의 코팅 혹은 층 두께에 대한 추가 개략적 도면이다.
도 64는 코팅 혹은 층 두께 대 (versus) 도 61 내지 도 63의 의료용 배럴의 후방측으로부터의 거리에 대한 선도이다.
도 65는 코팅 혹은 층 두께의 맵이다.
도 66은 도 65의 의료용 배럴의 대체로 원통형 내부 표면상의 코팅 혹은 층 두께를 보여주는 현미경 사진이다.
도 67은 도 65의 의료용 배럴의 대체로 원통형 내부 표면상의 코팅 혹은 층 두께를 보여주는 또 다른 제2 현미경 사진이다.
도 68은 플런저를 삽입하고 주사기를 10분 동안 숙성시킨 후, 실시예 9의 Fm에 대한 선도이다.
도 69는 의료용 배럴 상의 제3 윤활성 코팅 혹은 층 두께의 맵이다.
도 70은 실시예 10의 Fm에 대한 선도이다.
도 71은 의료용 배럴의 대체로 원통형 내부 표면상의 코팅 혹은 층 두께를 보여주는 현미경 사진이다.
도 72는 의료용 배럴의 대체로 원통형 내부 표면상의 코팅 혹은 층 두께를 보여주는 또 다른 제2 현미경 사진이다.
도 73은 도 69, 도 70, 도 71 및 도 72의 데이터를 생성하는데 사용되는 NdFe 자석에 대한 자기장 세기 프로파일을 나타낸다.
도 74는 실시예 11에서 시험 대상 바이얼의 바이얼 벽에서의 TEM (투과 전자 현미경) 시험 위치들을 나타낸다.
Claims (27)
- 내부공간의 적어도 일 부분을 획정하며 4 내지 15 mm의 내경을 갖는 원통형의 내부표면을 가진 벽을 포함한 의료용 배럴을 제공하는 단계;
상기 내부공간 속에 위치하고, 상기 원통형의 내부 표면과 동축을 이루며 그로부터 방사방향으로 1.2 내지 6.9 mm 이격되며, 하나 이상의 출구를 가진 내부 통로가 마련된 내부 전극을 제공하는 단계;
외부 전극을 제공하는 단계;
상기 내부 통로의 하나 이상의 출구를 통해 가스 PECVD 전구체를 내부공간 내부로 도입하는 단계;
상기 원통형의 내부 표면의 적어도 일 부분 상에 플라즈마 강화 화학기상증착 (PECVD)으로 2㎚ 내지 1000㎚의 두께를 갖는 가스 배리어 코팅을 형성하도록 전자기 에너지를 상기 외부 전극에 인가하는 단계; 및
전자기 에너지를 인가하는 동안에, 자기장을 의료용 배럴 가까이에 인가하는 단계를 포함하고,
상기 자기장은 원통형의 표면 가까이에, 상기 표면의 길이를 따라 축방향으로 연장되는 1개 이상의 자기장 발생기에 의해 제공되며, 각각의 자기장 발생기는 극축을 정의하는 북극과 남극을 갖고,
상기 자기장을 인가하는 시간 동안의 적어도 일부에서, 내부공간의 적어도 일 부분에서의 자기장의 적어도 일부가 극축이 처리 대상 표면에 대해 방사면 (radial plane)으로 연장되도록 배향되는 의료용 카트리지 또는 주사기를 위한 의료용 배럴의 제조 방법. - 삭제
- 삭제
- 제1항에 있어서, 상기 자기장 발생기 중 1개 이상은 상기 의료용 배럴의 길이로 연장되는 것인 방법.
- 제1항에 있어서, 상기 자기장을 인가하는 시간 동안의 적어도 일부에서 상기 자기장 발생기 중 1개 이상의 극축이 상기 원통형의 표면의 축에 평행하도록 배치하는 것인 방법.
- 제1항에 있어서, 상기 자기장을 인가하는 시간 동안의 적어도 일부에서, 상기 자기장 발생기 중 2개 이상은 작동 위치에 있는 원통형의 표면 둘레로 원주 방향으로 분포되는 것인 방법.
- 제1항에 있어서, 상기 자기장을 인가하는 시간 동안의 적어도 일부에서, 1개 이상의 자기장 발생기는 극축을 따라 연장되는 내부 통로를 가진 환형 실린더를 포함하며, 상기 원통형의 표면 전체가 내부 통로 내부에 위치하는 것인 방법.
- 삭제
- 제1항에 있어서, 2개 이상의 자기장 발생기가 상기 원통형의 표면의 축에 대해 원주 방향으로 분포되며, 극축이 반대가 되도록 자기장 발생기들은 교번 형태로 제공되는 것인 방법.
- 제1항에 있어서, 상기 자기장 발생기 중 1개 이상 또는 상기 원통형의 표면은 서로에 대해 회전하는 것인 방법.
- 제1항에 있어서, PECVD가 수행되기 전, 상기 의료용 배럴에는 피하 주사바늘이 부착되며, 상기 원통형의 표면은 주사바늘 단부, 후단부, 및 상기 단부들 사이의 몸체부를 포함하는 것인 방법.
- 제1항에 있어서, 상기 자기장을 인가하는 시간 동안의 적어도 일부에서, 플라즈마의 적어도 일부는 전자 병 내 원통형의 표면 가까이에 적어도 부분적으로 밀폐되는 것인 방법.
- 제12항에 있어서, 상기 전자 병은 원통형의 표면의 단부들 사이보다 상기 원통형의 표면의 일 단부에 또는 상기 단부 가까이에 더 강한 자기장을 인가하는 구조로 정의되는 것인 방법.
- 제12항에 있어서, 상기 전자 병은 원통형의 표면의 한 단부 또는 상기 단부 가까이에서 보다 상기 원통형의 표면의 다른 단부 또는 상기 단부 가까이에서 더 강한 자기장을 인가하는 구조로 정의되는 것인 방법.
- 제12항에 있어서, 상기 전자 병은 상기 원통형의 표면의 적어도 한 단부 가까이에 위치하는 음으로 하전된 객체 또는 객체의 일부를 포함하는 것인 방법.
- 제1항에 있어서, 1개 이상의 자기장 발생기는 바 자석인 방법.
- 제1항에 있어서, 1개 이상의 자기장 발생기는 작동 위치에 있을 때 중앙 요홈 내부에 원통형의 표면을 갖는 링 자석인 방법.
- 제1항에 있어서, 상기 전자기 에너지는 고주파 에너지인 방법.
- 제1항에 있어서, 상기 외부 전극은 원통형이며, 상기 의료용 배럴의 원통형의 표면은 상기 외부 전극 내부에 배치되는 것인 방법.
- 제1항에 있어서, 상기 가스 배리어 코팅 혹은 층을 도포하기 위해 전자기 에너지는 0.1 내지 500 Watts의 전력 수준으로 인가되는 것인 방법.
- 제1항에 있어서, 상기 가스 배리어 코팅 혹은 층을 도포하기 위한 전자기 에너지는 다수의 불연속 펄스로 인가되는 것인 방법.
- 제1항에 있어서, 상기 가스 PECVD 전구체는 선형 실록산, 단일환 실록산, 다환 실록산, 폴리실세스퀴옥산, 선형 실라잔, 단일환 실라잔, 다환 실라잔, 폴리실세스퀴아잔, 실라트랜, 실쿠아실라트랜, 실프로아트란, 아자실라트랜, 아자실쿠아시아트랜, 아자실프로아트랜, 또는 이들 전구체 중 임의의 둘 이상의 조합물을 포함하는 것인 방법.
- 제1항에 있어서, 상기 가스 PECVD 전구체는 헥사메틸렌디실록산 (HMDSO), 테트라메틸렌디실록산 (TMDSO), 또는 이들의 조합물을 포함하는 것인 방법.
- 제1항, 제 4항 내지 제 7항 및 제 9항 내지 제23항 중 어느 한 항에 따른 방법으로 제조된 의료용 배럴을 포함하는 주사기.
- 제1항, 제 4항 내지 제 7항 및 제 9항 내지 제23항 중 어느 한 항에 따른 방법으로 제조된 의료용 배럴을 포함하는 카트리지.
- 삭제
- 내부공간의 적어도 일 부분을 획정하는, 4 내지 15 mm 범위의 직경을 가진 원통형의 내부 표면을 가진 벽을 포함한 의료용 배럴을 안착시키도록 구성된 크기 및 위치의 안착부를 포함하는 배럴 홀더;
상기 의료용 배럴이 안착부에 안착되었을 때 일 부분이 상기 의료용 배럴의 내부공간 속에 위치하도록 배치되는 외부 표면을 가지며, 상기 원통형의 내부 표면과 동축을 이루고 그로부터 방사방향으로 1.2 내지 6.9 mm 이격되며, 하나 이상의 출구가 형성된 내부 통로를 갖는 내부 전극;
외부 전극;
상기 홀더에 연결되어, 상기 의료용 배럴이 안착부에 안착되었을 때 PECVD 전구체를 상기 의료용 배럴의 내부공간에 공급하도록 구성된 공급부; 및
상기 홀더에 연결되어, 상기 의료용 배럴이 안착부에 안착되었을 때 상기 의료용 배럴의 내부공간 속에 자기장을 인가하기 위한 1개 이상의 자기장 발생부를 포함하고,
상기 1개 이상의 자기장 발생기는 상기 원통형의 표면 가까이에, 상기 표면의 길이를 따라 축방향으로 연장되고, 각각의 자기장 발생기는 극축을 정의하는 북극과 남극을 갖고,
각각의 자기장 발생기는 자기장을 인가하는 시간 동안의 적어도 일부에서, 내부공간의 적어도 일 부분에서의 자기장의 적어도 일부가 극축이 처리 대상 표면에 대해 방사면 (radial plane)으로 연장되도록 배향되는 의료용 카트리지 또는 주사기용 의료용 배럴을 피복하는 장치.
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BR112015012470A2 (pt) | 2017-07-11 |
WO2014085348A2 (en) | 2014-06-05 |
JP2016504496A (ja) | 2016-02-12 |
WO2014085346A1 (en) | 2014-06-05 |
CN105705676B (zh) | 2018-09-07 |
JP6382830B2 (ja) | 2018-08-29 |
US20150335823A1 (en) | 2015-11-26 |
EP2925903A2 (en) | 2015-10-07 |
KR20150091374A (ko) | 2015-08-10 |
AU2013352436A1 (en) | 2015-06-11 |
CA2892294C (en) | 2021-07-27 |
AU2013352436B2 (en) | 2018-10-25 |
CN105705676A (zh) | 2016-06-22 |
BR112015012470B1 (pt) | 2022-08-02 |
EP2925903B1 (en) | 2022-04-13 |
WO2014085348A3 (en) | 2015-01-08 |
US10201660B2 (en) | 2019-02-12 |
CA2892294A1 (en) | 2014-06-05 |
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