JPS61183462A - 磁石やコイルの磁場を利用したパイプ等の内面イオンプレ−テイング装置及びその方法 - Google Patents

磁石やコイルの磁場を利用したパイプ等の内面イオンプレ−テイング装置及びその方法

Info

Publication number
JPS61183462A
JPS61183462A JP2014985A JP2014985A JPS61183462A JP S61183462 A JPS61183462 A JP S61183462A JP 2014985 A JP2014985 A JP 2014985A JP 2014985 A JP2014985 A JP 2014985A JP S61183462 A JPS61183462 A JP S61183462A
Authority
JP
Japan
Prior art keywords
pipe
coil
ion plating
ion
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014985A
Other languages
English (en)
Inventor
Kazunari Ikuta
一成 生田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YUUGOU GIKEN KK
Original Assignee
YUUGOU GIKEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YUUGOU GIKEN KK filed Critical YUUGOU GIKEN KK
Priority to JP2014985A priority Critical patent/JPS61183462A/ja
Publication of JPS61183462A publication Critical patent/JPS61183462A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 〔技術分野〕 この発明は、磁石やコイルを組合せて放電プラズマビー
ムをパイプ等の内面に導き、内壁をイオンプレーティン
グする装置に関する。
〔従来技術〕
従来パイプ等の内面を電気化学的にめっきする方法が存
在しなかった。
〔発明の目的〕
この発明は、従来不可能であったパイプ等の内面へ、直
流あるいは交流の磁場を用いてプラズマビームを導を、
パイプ等と陽極の間に適当な電圧を掛けて内面をイオン
プレーティングする装置を提供する事を目的きしている
。
〔発明の構成〕
以下、この発明の一実旅例を第１図を用いて説明する。
図において（１）はプラズマ源、（２）は環状磁石、（
３）はハース兼降極、（４）はｓｉ板、（５）はイオン
集積用負バイアス電源、（６）は交流用空芯コイル部、
（７）は被イオンプレーティング材兼イオンコレクター
として働くパイプ、（８１はプラズマビームを導く環状
磁石と交流用空芯コイルの組合せで構成された磁力線で
ある。
〔発明の作用、動作〕
プラズマ源（１）で発生したプラズマは、環状磁石（２
）と交流用空芯コイル（６）の組合せで構成された磁力
＠　（７１によって、被イオンプレーティング材兼イオ
ンコレクターであるパイプ（７）の内面へ導かれる。
空芯コイル（６）へ適当な周波数と大きさの電流を交流
電源から供給されるとパイプ内に存在する磁力線は充分
にパイプ内面をなめまわし、一様に内面にイオンプレー
ティングが行なわれる。
〔発明の効果〕
以上のように、この発明によれば、パイプ等の内面をイ
オンプレーティングすることが出来るので、化学プラン
ト等の配管材の内面の物理的化学的強度を制御可能とな
るので、パイプ内面へのコーティングやライニングに頼
っていた表面被膜技術の分計への新しい方法で、省資源
等産業界へ与える影響は極めて大きい。
【図面の簡単な説明】
第１図は、この発明による一実施例を示す図。 （１）　　プラズマ源 （２）環状磁石 （３）ハース兼陽極 （４）遼蔽板 （５）　　イオン集積用負バイアス電源（６）　　交流
用空芯コイル （７）被イオンプレーティング材兼イオンコレクターと
して働くパイプ

Claims (1)

    【特許請求の範囲】
  1. 磁石やコイルを組合せて放電プラズマビームをパイプ等
    の内面へ導き、内壁をイオンプレーティングする装置。
JP2014985A 1985-02-06 1985-02-06 磁石やコイルの磁場を利用したパイプ等の内面イオンプレ−テイング装置及びその方法 Pending JPS61183462A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014985A JPS61183462A (ja) 1985-02-06 1985-02-06 磁石やコイルの磁場を利用したパイプ等の内面イオンプレ−テイング装置及びその方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014985A JPS61183462A (ja) 1985-02-06 1985-02-06 磁石やコイルの磁場を利用したパイプ等の内面イオンプレ−テイング装置及びその方法

Publications (1)

Publication Number Publication Date
JPS61183462A true JPS61183462A (ja) 1986-08-16

Family

ID=12019093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014985A Pending JPS61183462A (ja) 1985-02-06 1985-02-06 磁石やコイルの磁場を利用したパイプ等の内面イオンプレ−テイング装置及びその方法

Country Status (1)

Country Link
JP (1) JPS61183462A (ja)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007538158A (ja) * 2004-05-19 2007-12-27 サブ−ワン テクノロジー， インコーポレイテッド プラズマフローを内部通路コーティングのために指向させる装置
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007538158A (ja) * 2004-05-19 2007-12-27 サブ−ワン テクノロジー， インコーポレイテッド プラズマフローを内部通路コーティングのために指向させる装置
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US10537273B2 (en) 2009-05-13 2020-01-21 Sio2 Medical Products, Inc. Syringe with PECVD lubricity layer
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US10390744B2 (en) 2009-05-13 2019-08-27 Sio2 Medical Products, Inc. Syringe with PECVD lubricity layer, apparatus and method for transporting a vessel to and from a PECVD processing station, and double wall plastic vessel
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US11123491B2 (en) 2010-11-12 2021-09-21 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11884446B2 (en) 2011-11-11 2024-01-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11148856B2 (en) 2011-11-11 2021-10-19 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US10577154B2 (en) 2011-11-11 2020-03-03 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11724860B2 (en) 2011-11-11 2023-08-15 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US10363370B2 (en) 2012-11-30 2019-07-30 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US11406765B2 (en) 2012-11-30 2022-08-09 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US11344473B2 (en) 2013-03-11 2022-05-31 SiO2Medical Products, Inc. Coated packaging
US10016338B2 (en) 2013-03-11 2018-07-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US11298293B2 (en) 2013-03-11 2022-04-12 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US10537494B2 (en) 2013-03-11 2020-01-21 Sio2 Medical Products, Inc. Trilayer coated blood collection tube with low oxygen transmission rate
US11684546B2 (en) 2013-03-11 2023-06-27 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US10912714B2 (en) 2013-03-11 2021-02-09 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate

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