KR100917913B1 - Cars 현미경을 이용한 유기 박막의 화학종 및 두께동시 광학분석장치 - Google Patents
Cars 현미경을 이용한 유기 박막의 화학종 및 두께동시 광학분석장치 Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0666—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using an exciting beam and a detection beam including surface acoustic waves [SAW]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N2021/653—Coherent methods [CARS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N2021/653—Coherent methods [CARS]
- G01N2021/656—Raman microprobe
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- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Acoustics & Sound (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (15)
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- 스톡스광과 펌프광을 유기 박막에 조사하여 산란되는 CARS(Coherent Anti-stokes Raman Scattering) 신호의 파장 및 세기를 측정하여 상기 박막의 두께 측정 및 화학종 분석을 하되,유기 박막에의 스톡스광과 펌프광의 조사 장치는스톡스광 혹은 탐침광을 발생시키는 광원(10);상기 광원(10)으로부터 발생된 광을 분할하는 광분할기(20);상기 광분할기(20)에 의해 분할된 빔의 일부가 통과되며 광대역의 안정된 빔 분포를 갖도록 하는 광자결정 광섬유(Photonic Crystal Fiber)(30);상기 광자결정 광섬유(30)에 의해 안정된 빔이 통과되며 저주파수의 빔을 통과되도록 하여 근적외선 영역의 스톡스광이 되도록 하는 저주파 통과필터(Low Pass Filter)(40);상기 광분할기(20)에 의해 분할된 나머지의 빔이 통과되며 파장을 좁게 하여 고분자 시료의 매질분자를 들뜬 상태로 만드는 펌프광이 통과되도록 하는 협대역 투과필터(Narrow Band Pass Filter)(50); 및상기 저주파 통과필터(40)를 통과한 스톡스광과 상기 협대역 투과필터(50)를 통과한 펌프광을 공간적으로 결합시키는 노치 필터(Notch Filter)(60); 및상기 노치 필터(60)에 의해 결합된 빔을 고분자 시료에 주사시켜 CARS 신호를 발생시키는 스캔장치(70);를 포함하는 것을 특징으로 하는 CARS 현미경을 이용한 광학분석장치.
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- 제 9 항에 있어서,상기 협대역 투과필터(50)의 전단 또는 후단에 설치되어 상기 스톡스광과 상기 펌프광의 광경로를 시간적으로 지연시켜 일치시키는 광 지연기(Optical Delay)(120)가 더 구비된 것을 특징으로 하는 CARS 현미경을 이용한 광학분석장치.
- 제 11 항에 있어서,상기 협대역 투과필터(50)는 빔의 파장이 10 내지 1.0 nm의 범위를 갖는 펌프광을 통과시키는 것을 특징으로 하는 CARS 현미경을 이용한 광학분석장치.
- 제 9 항에 있어서,상기 광분할기(20)는 분할된 일부의 빔과 나머지의 빔의 비율이 3~4:7~6으로 분할되도록 하는 것을 특징으로 하는 CARS 현미경을 이용한 광학분석장치.
- 제 9 항에 있어서,상기 광자결정 광섬유(30)의 길이는 30~40cm인 것을 특징으로 하는 CARS 현 미경을 이용한 광학분석장치.
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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KR1020070089962A KR100917913B1 (ko) | 2007-09-05 | 2007-09-05 | Cars 현미경을 이용한 유기 박막의 화학종 및 두께동시 광학분석장치 |
PCT/KR2008/005229 WO2009031838A1 (en) | 2007-09-05 | 2008-09-04 | Spectral analyzer for measuring the thickness and identification of chemicals of organic thin films using cars microscopy |
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KR1020070089962A KR100917913B1 (ko) | 2007-09-05 | 2007-09-05 | Cars 현미경을 이용한 유기 박막의 화학종 및 두께동시 광학분석장치 |
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KR20090024965A KR20090024965A (ko) | 2009-03-10 |
KR100917913B1 true KR100917913B1 (ko) | 2009-09-16 |
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KR1020070089962A KR100917913B1 (ko) | 2007-09-05 | 2007-09-05 | Cars 현미경을 이용한 유기 박막의 화학종 및 두께동시 광학분석장치 |
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WO (1) | WO2009031838A1 (ko) |
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US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
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JPH09213652A (ja) * | 1996-02-01 | 1997-08-15 | Semiconductor Energy Lab Co Ltd | レーザーアニール装置 |
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JPH05288681A (ja) * | 1992-04-13 | 1993-11-02 | Osaka Gas Co Ltd | コヒ−レント反スト−クスラマン散乱分光測定装置 |
KR20010110293A (ko) * | 1998-10-14 | 2001-12-12 | 추후제출 | 얇은 층상 재료를 광학적으로 특성분석하는 장치 |
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