GB0209291D0 - Plasma processing apparatus - Google Patents

Plasma processing apparatus

Info

Publication number
GB0209291D0
GB0209291D0 GB0209291A GB0209291A GB0209291D0 GB 0209291 D0 GB0209291 D0 GB 0209291D0 GB 0209291 A GB0209291 A GB 0209291A GB 0209291 A GB0209291 A GB 0209291A GB 0209291 D0 GB0209291 D0 GB 0209291D0
Authority
GB
United Kingdom
Prior art keywords
processing apparatus
plasma processing
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0209291A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trikon Technologies Ltd
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Priority to GB0209291A priority Critical patent/GB0209291D0/en
Publication of GB0209291D0 publication Critical patent/GB0209291D0/en
Priority to US10/419,113 priority patent/US6876154B2/en
Priority to GB0309001A priority patent/GB2387964B/en
Ceased legal-status Critical Current

Links

GB0209291A 2002-04-24 2002-04-24 Plasma processing apparatus Ceased GB0209291D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0209291A GB0209291D0 (en) 2002-04-24 2002-04-24 Plasma processing apparatus
US10/419,113 US6876154B2 (en) 2002-04-24 2003-04-21 Plasma processing apparatus
GB0309001A GB2387964B (en) 2002-04-24 2003-04-22 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0209291A GB0209291D0 (en) 2002-04-24 2002-04-24 Plasma processing apparatus

Publications (1)

Publication Number Publication Date
GB0209291D0 true GB0209291D0 (en) 2002-06-05

Family

ID=9935365

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0209291A Ceased GB0209291D0 (en) 2002-04-24 2002-04-24 Plasma processing apparatus
GB0309001A Expired - Lifetime GB2387964B (en) 2002-04-24 2003-04-22 Plasma processing apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB0309001A Expired - Lifetime GB2387964B (en) 2002-04-24 2003-04-22 Plasma processing apparatus

Country Status (1)

Country Link
GB (2) GB0209291D0 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100599094B1 (en) * 2004-11-29 2006-07-12 삼성전자주식회사 Electro-magnatic accelerator with Coil turn modulation
EP1936656A1 (en) * 2006-12-21 2008-06-25 Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO Plasma generator and method for cleaning an object
EP2253735B1 (en) 2009-05-13 2017-11-22 SiO2 Medical Products, Inc. Vessel processing
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
EP2846755A1 (en) 2012-05-09 2015-03-18 SiO2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
JP6509734B2 (en) 2012-11-01 2019-05-08 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド Film inspection method
EP2920567B1 (en) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
CA2892294C (en) 2012-11-30 2021-07-27 Sio2 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
WO2014134577A1 (en) 2013-03-01 2014-09-04 Sio2 Medical Products, Inc. Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
KR102167557B1 (en) 2013-03-11 2020-10-20 에스아이오2 메디컬 프로덕츠, 인크. Coated Packaging
EP2971227B1 (en) 2013-03-15 2017-11-15 Si02 Medical Products, Inc. Coating method.
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
CA2995225C (en) 2015-08-18 2023-08-29 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130036A (en) * 1984-07-23 1986-02-12 Fujitsu Ltd Microwave plasma processing apparatus
US5022977A (en) * 1986-09-29 1991-06-11 Nippon Telegraph And Telephone Corporation Ion generation apparatus and thin film forming apparatus and ion source utilizing the ion generation apparatus
US5189446A (en) * 1991-05-17 1993-02-23 International Business Machines Corporation Plasma wafer processing tool having closed electron cyclotron resonance
EP0537950B1 (en) * 1991-10-17 1997-04-02 Applied Materials, Inc. Plasma reactor

Also Published As

Publication number Publication date
GB2387964A (en) 2003-10-29
GB2387964B (en) 2005-12-07
GB0309001D0 (en) 2003-05-28

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)