GB0419772D0 - Method and apparatus for thin film metrology - Google Patents
Method and apparatus for thin film metrologyInfo
- Publication number
- GB0419772D0 GB0419772D0 GB0419772A GB0419772A GB0419772D0 GB 0419772 D0 GB0419772 D0 GB 0419772D0 GB 0419772 A GB0419772 A GB 0419772A GB 0419772 A GB0419772 A GB 0419772A GB 0419772 D0 GB0419772 D0 GB 0419772D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- thin film
- film metrology
- metrology
- thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0419772A GB0419772D0 (en) | 2004-09-07 | 2004-09-07 | Method and apparatus for thin film metrology |
EP05784553A EP1789753A1 (en) | 2004-09-07 | 2005-09-07 | Method and apparatus for thin film metrology |
PCT/GB2005/003432 WO2006027568A1 (en) | 2004-09-07 | 2005-09-07 | Method and apparatus for thin film metrology |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0419772A GB0419772D0 (en) | 2004-09-07 | 2004-09-07 | Method and apparatus for thin film metrology |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0419772D0 true GB0419772D0 (en) | 2004-10-06 |
Family
ID=33156097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0419772A Ceased GB0419772D0 (en) | 2004-09-07 | 2004-09-07 | Method and apparatus for thin film metrology |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1789753A1 (en) |
GB (1) | GB0419772D0 (en) |
WO (1) | WO2006027568A1 (en) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2253735B1 (en) | 2009-05-13 | 2017-11-22 | SiO2 Medical Products, Inc. | Vessel processing |
US7985188B2 (en) | 2009-05-13 | 2011-07-26 | Cv Holdings Llc | Vessel, coating, inspection and processing apparatus |
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
US10189603B2 (en) | 2011-11-11 | 2019-01-29 | Sio2 Medical Products, Inc. | Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
EP2846755A1 (en) | 2012-05-09 | 2015-03-18 | SiO2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
JP6509734B2 (en) | 2012-11-01 | 2019-05-08 | エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド | Film inspection method |
EP2920567B1 (en) | 2012-11-16 | 2020-08-19 | SiO2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
CA2892294C (en) | 2012-11-30 | 2021-07-27 | Sio2 Medical Products, Inc. | Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
WO2014134577A1 (en) | 2013-03-01 | 2014-09-04 | Sio2 Medical Products, Inc. | Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
KR102167557B1 (en) | 2013-03-11 | 2020-10-20 | 에스아이오2 메디컬 프로덕츠, 인크. | Coated Packaging |
EP2971227B1 (en) | 2013-03-15 | 2017-11-15 | Si02 Medical Products, Inc. | Coating method. |
US11066745B2 (en) | 2014-03-28 | 2021-07-20 | Sio2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
CA2995225C (en) | 2015-08-18 | 2023-08-29 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
JP6838075B2 (en) * | 2015-12-12 | 2021-03-03 | ザ セクレタリー,デパートメント オブ エレクトロニクス アンド インフォメーション テクノロジー(ディーイーアイティーワイ) | Systems, equipment, and methods for monitoring surface profile and / or thickness measurements on thin films |
CN113048894B (en) * | 2021-03-04 | 2022-10-18 | 上海精测半导体技术有限公司 | Device and method for detecting change of reflected light and film thickness measuring device |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59120909A (en) * | 1982-12-28 | 1984-07-12 | Fujitsu Ltd | Method for measuring thickness of resist coated film |
DE3600346A1 (en) * | 1986-01-08 | 1987-07-09 | Fraunhofer Ges Forschung | METHOD FOR IMAGING LASER INTERFEROMETRY AND LASER INTERFEROMETER FOR IMPLEMENTING THE METHOD |
DD265055A3 (en) * | 1986-07-29 | 1989-02-22 | Technisches Glas Veb K | ARRANGEMENT FOR INTERFEROMETRIC CLEARANCE AND THICKNESS MEASUREMENT |
JPS6475903A (en) * | 1987-09-18 | 1989-03-22 | Ricoh Kk | Method for measuring refractive index and film thickness |
US5563709A (en) * | 1994-09-13 | 1996-10-08 | Integrated Process Equipment Corp. | Apparatus for measuring, thinning and flattening silicon structures |
AT410257B (en) * | 2000-10-23 | 2003-03-25 | Mte Innovative Measurement Sol | DEVICE FOR CHECKING AND CHECKING A SINGLE GLASS PANEL OR INSULATING GLASS ELEMENT |
DE10225488A1 (en) * | 2002-06-10 | 2003-12-18 | Bild Und Signalverarbeitung Mb | Method and device for non-contact thickness measurement of transparent measurement objects |
-
2004
- 2004-09-07 GB GB0419772A patent/GB0419772D0/en not_active Ceased
-
2005
- 2005-09-07 EP EP05784553A patent/EP1789753A1/en not_active Withdrawn
- 2005-09-07 WO PCT/GB2005/003432 patent/WO2006027568A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP1789753A1 (en) | 2007-05-30 |
WO2006027568A1 (en) | 2006-03-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |