JP2007096055A5 - - Google Patents

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JP2007096055A5
JP2007096055A5 JP2005284538A JP2005284538A JP2007096055A5 JP 2007096055 A5 JP2007096055 A5 JP 2007096055A5 JP 2005284538 A JP2005284538 A JP 2005284538A JP 2005284538 A JP2005284538 A JP 2005284538A JP 2007096055 A5 JP2007096055 A5 JP 2007096055A5
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JP2005284538A 2005-09-29 2005-09-29 半導体装置、及び半導体装置の作製方法 Expired - Lifetime JP5078246B2 (ja)

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JP2011007027A Division JP5352599B2 (ja) 2011-01-17 2011-01-17 半導体装置
JP2011013925A Division JP2011086962A (ja) 2011-01-26 2011-01-26 半導体装置の作製方法

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Publication number Priority date Publication date Assignee Title
US8158975B2 (en) 2008-10-10 2012-04-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8298858B2 (en) 2008-11-13 2012-10-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8344372B2 (en) 2008-10-03 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing the same
US8343799B2 (en) 2008-10-24 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8343817B2 (en) 2008-08-08 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8344387B2 (en) 2008-11-28 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8389326B2 (en) 2009-06-30 2013-03-05 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8400187B2 (en) 2009-10-16 2013-03-19 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device
US8426868B2 (en) 2008-10-31 2013-04-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
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US8686425B2 (en) 2009-12-28 2014-04-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
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US8704216B2 (en) 2009-02-27 2014-04-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8741702B2 (en) 2008-10-24 2014-06-03 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8890150B2 (en) 2011-01-27 2014-11-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8901557B2 (en) 2012-06-15 2014-12-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8907348B2 (en) 2008-11-21 2014-12-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8916865B2 (en) 2010-06-18 2014-12-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8921948B2 (en) 2011-01-12 2014-12-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US9006729B2 (en) 2009-11-13 2015-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
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US9048320B2 (en) 2008-09-19 2015-06-02 Semiconductor Energy Laboratory Co., Ltd. Display device including oxide semiconductor layer
US9082688B2 (en) 2008-10-03 2015-07-14 Semiconductor Energy Laboratory Co., Ltd. Display device
US9082857B2 (en) 2008-09-01 2015-07-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising an oxide semiconductor layer
US9153649B2 (en) 2012-11-30 2015-10-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for evaluating semiconductor device
US9166026B2 (en) 2011-01-12 2015-10-20 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
US9171938B2 (en) 2009-09-24 2015-10-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor element and method for manufacturing the same
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US9343517B2 (en) 2008-09-19 2016-05-17 Semiconductor Energy Laboratory Co., Ltd. Display device

Families Citing this family (800)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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EP1724751B1 (en) 2005-05-20 2013-04-10 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic apparatus
US8059109B2 (en) 2005-05-20 2011-11-15 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic apparatus
US8008670B2 (en) 2006-02-21 2011-08-30 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
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US8803781B2 (en) * 2007-05-18 2014-08-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and display device
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US8354674B2 (en) * 2007-06-29 2013-01-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device wherein a property of a first semiconductor layer is different from a property of a second semiconductor layer
JP5377940B2 (ja) * 2007-12-03 2013-12-25 株式会社半導体エネルギー研究所 半導体装置
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US8101442B2 (en) * 2008-03-05 2012-01-24 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing EL display device
JP5467728B2 (ja) * 2008-03-14 2014-04-09 富士フイルム株式会社 薄膜電界効果型トランジスタおよびその製造方法
US8247315B2 (en) 2008-03-17 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus and method for manufacturing semiconductor device
JP5331382B2 (ja) * 2008-05-30 2013-10-30 富士フイルム株式会社 半導体素子の製造方法
KR101394541B1 (ko) * 2008-06-05 2014-05-13 삼성디스플레이 주식회사 유기 박막트랜지스터, 그의 제조방법 및 이를 구비한유기발광표시장치
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US8945981B2 (en) 2008-07-31 2015-02-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
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WO2010038819A1 (en) 2008-10-03 2010-04-08 Semiconductor Energy Laboratory Co., Ltd. Display device
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WO2010044478A1 (en) 2008-10-16 2010-04-22 Semiconductor Energy Laboratory Co., Ltd. Light-emitting display device
JP5361651B2 (ja) * 2008-10-22 2013-12-04 株式会社半導体エネルギー研究所 半導体装置の作製方法
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EP2202802B1 (en) * 2008-12-24 2012-09-26 Semiconductor Energy Laboratory Co., Ltd. Driver circuit and semiconductor device
US8441007B2 (en) 2008-12-25 2013-05-14 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
US8114720B2 (en) 2008-12-25 2012-02-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8383470B2 (en) 2008-12-25 2013-02-26 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor (TFT) having a protective layer and manufacturing method thereof
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US8492756B2 (en) 2009-01-23 2013-07-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP5514447B2 (ja) * 2009-01-29 2014-06-04 株式会社半導体エネルギー研究所 半導体装置
US8436350B2 (en) 2009-01-30 2013-05-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device using an oxide semiconductor with a plurality of metal clusters
US8367486B2 (en) * 2009-02-05 2013-02-05 Semiconductor Energy Laboratory Co., Ltd. Transistor and method for manufacturing the transistor
CN101840936B (zh) * 2009-02-13 2014-10-08 株式会社半导体能源研究所 包括晶体管的半导体装置及其制造方法
US8278657B2 (en) * 2009-02-13 2012-10-02 Semiconductor Energy Laboratory Co., Ltd. Transistor, semiconductor device including the transistor, and manufacturing method of the transistor and the semiconductor device
US8247812B2 (en) 2009-02-13 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Transistor, semiconductor device including the transistor, and manufacturing method of the transistor and the semiconductor device
US8247276B2 (en) 2009-02-20 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor, method for manufacturing the same, and semiconductor device
US8841661B2 (en) * 2009-02-25 2014-09-23 Semiconductor Energy Laboratory Co., Ltd. Staggered oxide semiconductor TFT semiconductor device and manufacturing method thereof
US20100224880A1 (en) * 2009-03-05 2010-09-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8461582B2 (en) 2009-03-05 2013-06-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US20100224878A1 (en) 2009-03-05 2010-09-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
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US8927981B2 (en) 2009-03-30 2015-01-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8338226B2 (en) * 2009-04-02 2012-12-25 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
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US8441047B2 (en) * 2009-04-10 2013-05-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
CN102422426B (zh) * 2009-05-01 2016-06-01 株式会社半导体能源研究所 半导体装置的制造方法
JP5760298B2 (ja) * 2009-05-21 2015-08-05 ソニー株式会社 薄膜トランジスタ、表示装置、および電子機器
JP5564331B2 (ja) 2009-05-29 2014-07-30 株式会社半導体エネルギー研究所 半導体装置の作製方法
EP2256814B1 (en) 2009-05-29 2019-01-16 Semiconductor Energy Laboratory Co, Ltd. Oxide semiconductor device and method for manufacturing the same
EP2256795B1 (en) 2009-05-29 2014-11-19 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method for oxide semiconductor device
EP2449594B1 (en) 2009-06-30 2019-08-21 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
WO2011001881A1 (en) 2009-06-30 2011-01-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
KR102096109B1 (ko) 2009-07-03 2020-04-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법
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JP5663214B2 (ja) * 2009-07-03 2015-02-04 株式会社半導体エネルギー研究所 半導体装置の作製方法
KR101460868B1 (ko) 2009-07-10 2014-11-11 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101422362B1 (ko) 2009-07-10 2014-07-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치, 표시 패널 및 전자 기기
KR101935752B1 (ko) 2009-07-10 2019-01-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법
KR101739154B1 (ko) 2009-07-17 2017-05-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제조 방법
WO2011007677A1 (en) 2009-07-17 2011-01-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
WO2011007682A1 (en) 2009-07-17 2011-01-20 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing semiconductor device
CN102473733B (zh) 2009-07-18 2015-09-30 株式会社半导体能源研究所 半导体装置以及制造半导体装置的方法
KR101907366B1 (ko) * 2009-07-18 2018-10-11 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치 제조 방법
WO2011010545A1 (en) * 2009-07-18 2011-01-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR101782176B1 (ko) 2009-07-18 2017-09-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제조 방법
WO2011010542A1 (en) 2009-07-23 2011-01-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR101785992B1 (ko) * 2009-07-24 2017-10-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR102215941B1 (ko) 2009-07-31 2021-02-16 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
WO2011013502A1 (en) 2009-07-31 2011-02-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
WO2011013596A1 (en) 2009-07-31 2011-02-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
WO2011013523A1 (en) 2009-07-31 2011-02-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR101291434B1 (ko) 2009-07-31 2013-08-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 디바이스 및 그 형성 방법
TWI604594B (zh) 2009-08-07 2017-11-01 半導體能源研究所股份有限公司 半導體裝置及包括該半導體裝置之電話、錶、和顯示裝置
EP2284891B1 (en) 2009-08-07 2019-07-24 Semiconductor Energy Laboratory Co, Ltd. Semiconductor device and manufacturing method thereof
JP5663231B2 (ja) 2009-08-07 2015-02-04 株式会社半導体エネルギー研究所 発光装置
TWI529914B (zh) * 2009-08-07 2016-04-11 半導體能源研究所股份有限公司 半導體裝置和其製造方法
TWI596741B (zh) * 2009-08-07 2017-08-21 半導體能源研究所股份有限公司 半導體裝置和其製造方法
TWI559501B (zh) * 2009-08-07 2016-11-21 半導體能源研究所股份有限公司 半導體裝置和其製造方法
WO2011024770A1 (ja) 2009-08-26 2011-03-03 株式会社アルバック 半導体装置、半導体装置を有する液晶表示装置、半導体装置の製造方法
US8115883B2 (en) 2009-08-27 2012-02-14 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing the same
WO2011027649A1 (en) 2009-09-02 2011-03-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device including a transistor, and manufacturing method of semiconductor device
WO2011027676A1 (en) 2009-09-04 2011-03-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
WO2011027702A1 (en) 2009-09-04 2011-03-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for manufacturing the same
WO2011027701A1 (en) 2009-09-04 2011-03-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for manufacturing the same
US9805641B2 (en) 2009-09-04 2017-10-31 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device including the same
CN102598283B (zh) 2009-09-04 2016-05-18 株式会社半导体能源研究所 半导体器件及其制造方法
CN104681447A (zh) 2009-09-04 2015-06-03 株式会社半导体能源研究所 半导体器件的制造方法
WO2011027656A1 (en) * 2009-09-04 2011-03-10 Semiconductor Energy Laboratory Co., Ltd. Transistor and display device
WO2011027661A1 (en) * 2009-09-04 2011-03-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for manufacturing the same
WO2011027664A1 (en) * 2009-09-04 2011-03-10 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and method for manufacturing the same
KR101519893B1 (ko) 2009-09-16 2015-05-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 트랜지스터
KR20230165355A (ko) 2009-09-16 2023-12-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
WO2011034012A1 (en) 2009-09-16 2011-03-24 Semiconductor Energy Laboratory Co., Ltd. Logic circuit, light emitting device, semiconductor device, and electronic device
KR102057221B1 (ko) 2009-09-16 2019-12-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제조 방법
KR102113064B1 (ko) 2009-09-16 2020-05-20 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치 및 이의 제조 방법
WO2011037008A1 (en) 2009-09-24 2011-03-31 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing oxide semiconductor film and method for manufacturing semiconductor device
KR101707260B1 (ko) 2009-09-24 2017-02-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101608923B1 (ko) 2009-09-24 2016-04-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체막 및 반도체 장치
KR101827687B1 (ko) 2009-09-24 2018-02-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 구동 회로, 상기 구동 회로를 포함하는 표시 장치, 및 상기 표시 장치를 포함하는 전자 기기
EP2481089A4 (en) 2009-09-24 2015-09-23 Semiconductor Energy Lab SEMICONDUCTOR COMPONENT AND MANUFACTURING METHOD THEREFOR
WO2011036987A1 (en) 2009-09-24 2011-03-31 Semiconductor Energy Laboratory Co., Ltd. Display device
US9024312B2 (en) 2009-09-30 2015-05-05 Dai Nippon Printing Co., Ltd. Substrate for flexible device, thin film transistor substrate for flexible device, flexible device, substrate for thin film element, thin film element, thin film transistor, method for manufacturing substrate for thin film element, method for manufacturing thin film element, and method for manufacturing thin film transistor
KR101767035B1 (ko) 2009-10-01 2017-08-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
WO2011043182A1 (en) 2009-10-05 2011-04-14 Semiconductor Energy Laboratory Co., Ltd. Method for removing electricity and method for manufacturing semiconductor device
WO2011043163A1 (en) 2009-10-05 2011-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR101623619B1 (ko) 2009-10-08 2016-05-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체층 및 반도체 장치
KR102596694B1 (ko) 2009-10-08 2023-11-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
WO2011043164A1 (en) 2009-10-09 2011-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the semiconductor device
KR101820972B1 (ko) 2009-10-09 2018-01-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제조 방법
KR101820973B1 (ko) 2009-10-09 2018-01-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치 제조 방법
WO2011043194A1 (en) 2009-10-09 2011-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
WO2011043175A1 (en) 2009-10-09 2011-04-14 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and display device having the same
KR20120093864A (ko) 2009-10-09 2012-08-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2011043206A1 (en) * 2009-10-09 2011-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US9171640B2 (en) 2009-10-09 2015-10-27 Semiconductor Energy Laboratory Co., Ltd. Shift register and display device
CN112242173B (zh) 2009-10-09 2024-08-20 株式会社半导体能源研究所 半导体器件
KR101949670B1 (ko) 2009-10-09 2019-02-19 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101832698B1 (ko) * 2009-10-14 2018-02-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
WO2011046015A1 (en) 2009-10-16 2011-04-21 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device
WO2011046048A1 (en) 2009-10-16 2011-04-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
CN104485336B (zh) 2009-10-21 2018-01-02 株式会社半导体能源研究所 半导体器件
KR101402294B1 (ko) 2009-10-21 2014-06-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 제작방법
CN105070715B (zh) * 2009-10-21 2018-10-19 株式会社半导体能源研究所 半导体装置
KR102416955B1 (ko) 2009-10-29 2022-07-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
CN102668096B (zh) 2009-10-30 2015-04-29 株式会社半导体能源研究所 半导体装置及其制造方法
WO2011052437A1 (en) * 2009-10-30 2011-05-05 Semiconductor Energy Laboratory Co., Ltd. Non-linear element, display device including non-linear element, and electronic device including display device
KR101740684B1 (ko) * 2009-10-30 2017-05-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 파워 다이오드, 정류기 및 그것을 가지는 반도체 장치
WO2011052382A1 (en) * 2009-10-30 2011-05-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR101788521B1 (ko) 2009-10-30 2017-10-19 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR102062077B1 (ko) 2009-10-30 2020-01-03 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR20120091243A (ko) * 2009-10-30 2012-08-17 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
EP2497115A4 (en) 2009-11-06 2015-09-02 Semiconductor Energy Lab SEMICONDUCTOR COMPONENT AND MANUFACTURING METHOD THEREFOR
KR101930230B1 (ko) 2009-11-06 2018-12-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치를 제작하기 위한 방법
WO2011055769A1 (en) 2009-11-06 2011-05-12 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor element and semiconductor device, and deposition apparatus
KR102484475B1 (ko) 2009-11-06 2023-01-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
CN102598284B (zh) * 2009-11-06 2015-04-15 株式会社半导体能源研究所 半导体器件
WO2011055668A1 (en) 2009-11-06 2011-05-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR20170076818A (ko) * 2009-11-13 2017-07-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 스퍼터링 타겟 및 그 제작 방법 및 트랜지스터
CN105655351B (zh) * 2009-11-13 2019-11-01 株式会社半导体能源研究所 显示器件
KR20120094013A (ko) 2009-11-13 2012-08-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 스퍼터링 타겟 및 그 제조방법, 및 트랜지스터
KR102450568B1 (ko) 2009-11-13 2022-10-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
KR101975741B1 (ko) 2009-11-13 2019-05-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 타깃 재료의 포장 방법 및 타깃의 장착 방법
KR20120107079A (ko) 2009-11-20 2012-09-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 박막 트랜지스터
WO2011062041A1 (en) * 2009-11-20 2011-05-26 Semiconductor Energy Laboratory Co., Ltd. Transistor
WO2011062057A1 (en) * 2009-11-20 2011-05-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR101995704B1 (ko) 2009-11-20 2019-07-03 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법
KR102614462B1 (ko) 2009-11-27 2023-12-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작방법
CN102640293B (zh) 2009-11-27 2015-07-22 株式会社半导体能源研究所 半导体器件
CN105206514B (zh) 2009-11-28 2018-04-10 株式会社半导体能源研究所 层叠的氧化物材料、半导体器件、以及用于制造该半导体器件的方法
WO2011065210A1 (en) 2009-11-28 2011-06-03 Semiconductor Energy Laboratory Co., Ltd. Stacked oxide material, semiconductor device, and method for manufacturing the semiconductor device
KR102719739B1 (ko) 2009-12-04 2024-10-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR20120107107A (ko) 2009-12-04 2012-09-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2011068033A1 (en) 2009-12-04 2011-06-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
WO2011068025A1 (en) * 2009-12-04 2011-06-09 Semiconductor Energy Laboratory Co., Ltd. Dc converter circuit and power supply circuit
WO2011068028A1 (en) 2009-12-04 2011-06-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor element, semiconductor device, and method for manufacturing the same
JP2011139052A (ja) 2009-12-04 2011-07-14 Semiconductor Energy Lab Co Ltd 半導体記憶装置
KR102450889B1 (ko) 2009-12-04 2022-10-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2011068037A1 (en) 2009-12-04 2011-06-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR101963300B1 (ko) 2009-12-04 2019-03-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
WO2011070892A1 (en) 2009-12-08 2011-06-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR101470303B1 (ko) 2009-12-08 2014-12-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
IN2012DN04871A (enExample) 2009-12-11 2015-09-25 Semiconductor Energy Laoboratory Co Ltd
WO2011070901A1 (en) 2009-12-11 2011-06-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
WO2011074409A1 (en) 2009-12-18 2011-06-23 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
WO2011074506A1 (en) 2009-12-18 2011-06-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
WO2011074407A1 (en) * 2009-12-18 2011-06-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR101481399B1 (ko) * 2009-12-18 2015-01-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
CN102656801B (zh) 2009-12-25 2016-04-27 株式会社半导体能源研究所 存储器装置、半导体器件和电子装置
WO2011077978A1 (en) 2009-12-25 2011-06-30 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing display device
KR101434948B1 (ko) 2009-12-25 2014-08-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2011081041A1 (en) 2009-12-28 2011-07-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the semiconductor device
KR101749944B1 (ko) 2009-12-28 2017-06-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치 및 전자 기기
WO2011081008A1 (en) 2009-12-28 2011-07-07 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic device
KR101842860B1 (ko) 2010-01-20 2018-03-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치의 구동 방법
KR102248998B1 (ko) 2010-01-20 2021-05-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 전자 기기
KR101883331B1 (ko) 2010-01-20 2018-08-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 표시 장치의 구동 방법
KR101978106B1 (ko) 2010-01-20 2019-05-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2011089842A1 (en) 2010-01-20 2011-07-28 Semiconductor Energy Laboratory Co., Ltd. Driving method of liquid crystal display device
WO2011089847A1 (en) 2010-01-20 2011-07-28 Semiconductor Energy Laboratory Co., Ltd. Signal processing circuit and method for driving the same
KR102257147B1 (ko) * 2010-01-20 2021-05-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 휴대 전화기
WO2011090087A1 (en) 2010-01-20 2011-07-28 Semiconductor Energy Laboratory Co., Ltd. Display method of display device
CN102742014B (zh) * 2010-01-22 2015-06-24 株式会社半导体能源研究所 半导体装置
WO2011096275A1 (en) * 2010-02-05 2011-08-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8436403B2 (en) * 2010-02-05 2013-05-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device including transistor provided with sidewall and electronic appliance
KR101819197B1 (ko) 2010-02-05 2018-02-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 및 반도체 장치의 제조 방법
JP2011165778A (ja) * 2010-02-08 2011-08-25 Nippon Hoso Kyokai <Nhk> p型有機薄膜トランジスタ、p型有機薄膜トランジスタの製造方法、および、塗布溶液
US8617920B2 (en) 2010-02-12 2013-12-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP5776192B2 (ja) * 2010-02-16 2015-09-09 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置及びシステム
JP5740169B2 (ja) 2010-02-19 2015-06-24 株式会社半導体エネルギー研究所 トランジスタの作製方法
CN102763202B (zh) 2010-02-19 2016-08-03 株式会社半导体能源研究所 半导体装置及其制造方法
CN102763214B (zh) 2010-02-19 2015-02-18 株式会社半导体能源研究所 半导体器件
US9000438B2 (en) 2010-02-26 2015-04-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR101706292B1 (ko) 2010-03-02 2017-02-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 펄스 신호 출력 회로 및 시프트 레지스터
WO2011108343A1 (en) 2010-03-02 2011-09-09 Semiconductor Energy Laboratory Co., Ltd. Pulse signal output circuit and shift register
KR101798645B1 (ko) 2010-03-02 2017-11-16 가부시키가이샤 한도오따이 에네루기 켄큐쇼 펄스 신호 출력 회로 및 시프트 레지스터
KR102341927B1 (ko) * 2010-03-05 2021-12-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
WO2011108346A1 (en) 2010-03-05 2011-09-09 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of oxide semiconductor film and manufacturing method of transistor
KR101862539B1 (ko) 2010-03-26 2018-05-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101977152B1 (ko) * 2010-04-02 2019-05-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101391964B1 (ko) 2010-04-02 2014-05-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
JP2011233858A (ja) * 2010-04-09 2011-11-17 Dainippon Printing Co Ltd 薄膜素子用基板の製造方法、薄膜素子の製造方法、薄膜トランジスタの製造方法、薄膜素子、および薄膜トランジスタ
US8653514B2 (en) 2010-04-09 2014-02-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
CN102835028B (zh) 2010-04-09 2015-09-09 株式会社半导体能源研究所 分压器电路
KR101881729B1 (ko) 2010-04-16 2018-07-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 성막 방법 및 반도체 장치를 제작하기 위한 방법
US8692243B2 (en) 2010-04-20 2014-04-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP2011248347A (ja) 2010-04-28 2011-12-08 Semiconductor Energy Lab Co Ltd フォトマスク
US8664658B2 (en) 2010-05-14 2014-03-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR101808198B1 (ko) 2010-05-21 2017-12-12 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법
US8629438B2 (en) 2010-05-21 2014-01-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP5775357B2 (ja) * 2010-05-21 2015-09-09 株式会社半導体エネルギー研究所 液晶表示装置
WO2011145484A1 (en) 2010-05-21 2011-11-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2011155295A1 (en) 2010-06-10 2011-12-15 Semiconductor Energy Laboratory Co., Ltd. Dc/dc converter, power supply circuit, and semiconductor device
US8552425B2 (en) 2010-06-18 2013-10-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR101822526B1 (ko) 2010-06-30 2018-01-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치와 그 제작 방법
US8441010B2 (en) 2010-07-01 2013-05-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR101350751B1 (ko) 2010-07-01 2014-01-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치의 구동 방법
US8766252B2 (en) 2010-07-02 2014-07-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising an oxide semiconductor
US8642380B2 (en) 2010-07-02 2014-02-04 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
US8785241B2 (en) 2010-07-16 2014-07-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
DE112011102644B4 (de) * 2010-08-06 2019-12-05 Semiconductor Energy Laboratory Co., Ltd. Integrierte Halbleiterschaltung
JP5948025B2 (ja) 2010-08-06 2016-07-06 株式会社半導体エネルギー研究所 液晶表示装置
TWI587405B (zh) 2010-08-16 2017-06-11 半導體能源研究所股份有限公司 半導體裝置之製造方法
TWI508294B (zh) 2010-08-19 2015-11-11 半導體能源研究所股份有限公司 半導體裝置
US8883555B2 (en) 2010-08-25 2014-11-11 Semiconductor Energy Laboratory Co., Ltd. Electronic device, manufacturing method of electronic device, and sputtering target
US8685787B2 (en) 2010-08-25 2014-04-01 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
JP5864163B2 (ja) 2010-08-27 2016-02-17 株式会社半導体エネルギー研究所 半導体装置の設計方法
US8575610B2 (en) 2010-09-02 2013-11-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for driving the same
WO2012029612A1 (en) 2010-09-03 2012-03-08 Semiconductor Energy Laboratory Co., Ltd. Sputtering target and method for manufacturing semiconductor device
US8728860B2 (en) 2010-09-03 2014-05-20 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
WO2012029638A1 (en) 2010-09-03 2012-03-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR20120026970A (ko) 2010-09-10 2012-03-20 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 발광 장치
US8766253B2 (en) 2010-09-10 2014-07-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2012256821A (ja) 2010-09-13 2012-12-27 Semiconductor Energy Lab Co Ltd 記憶装置
US9546416B2 (en) 2010-09-13 2017-01-17 Semiconductor Energy Laboratory Co., Ltd. Method of forming crystalline oxide semiconductor film
US8592879B2 (en) 2010-09-13 2013-11-26 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
KR101932576B1 (ko) 2010-09-13 2018-12-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
US8664097B2 (en) 2010-09-13 2014-03-04 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
US8558960B2 (en) 2010-09-13 2013-10-15 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and method for manufacturing the same
US8871565B2 (en) 2010-09-13 2014-10-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8835917B2 (en) 2010-09-13 2014-09-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, power diode, and rectifier
TWI539453B (zh) 2010-09-14 2016-06-21 半導體能源研究所股份有限公司 記憶體裝置和半導體裝置
TWI574259B (zh) 2010-09-29 2017-03-11 半導體能源研究所股份有限公司 半導體記憶體裝置和其驅動方法
TWI565063B (zh) 2010-10-01 2017-01-01 應用材料股份有限公司 用在薄膜電晶體應用中的砷化鎵類的材料
TWI539456B (zh) 2010-10-05 2016-06-21 半導體能源研究所股份有限公司 半導體記憶體裝置及其驅動方法
US8803143B2 (en) 2010-10-20 2014-08-12 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor including buffer layers with high resistivity
US8916866B2 (en) 2010-11-03 2014-12-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
TWI555205B (zh) 2010-11-05 2016-10-21 半導體能源研究所股份有限公司 半導體裝置及半導體裝置的製造方法
US8569754B2 (en) * 2010-11-05 2013-10-29 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
TWI654764B (zh) 2010-11-11 2019-03-21 Semiconductor Energy Laboratory Co., Ltd. 半導體裝置及其製造方法
US8936965B2 (en) 2010-11-26 2015-01-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8629496B2 (en) 2010-11-30 2014-01-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8823092B2 (en) 2010-11-30 2014-09-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
TWI562379B (en) 2010-11-30 2016-12-11 Semiconductor Energy Lab Co Ltd Semiconductor device and method for manufacturing semiconductor device
US8809852B2 (en) 2010-11-30 2014-08-19 Semiconductor Energy Laboratory Co., Ltd. Semiconductor film, semiconductor element, semiconductor device, and method for manufacturing the same
US8816425B2 (en) 2010-11-30 2014-08-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR101995082B1 (ko) 2010-12-03 2019-07-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체막 및 반도체 장치
US9202822B2 (en) * 2010-12-17 2015-12-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8894825B2 (en) 2010-12-17 2014-11-25 Semiconductor Energy Laboratory Co., Ltd. Sputtering target, method for manufacturing the same, manufacturing semiconductor device
KR102181898B1 (ko) 2010-12-17 2020-11-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 재료 및 반도체 장치
US9443984B2 (en) 2010-12-28 2016-09-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
WO2012090799A1 (en) 2010-12-28 2012-07-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP5731369B2 (ja) 2010-12-28 2015-06-10 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5975635B2 (ja) 2010-12-28 2016-08-23 株式会社半導体エネルギー研究所 半導体装置
US8883556B2 (en) 2010-12-28 2014-11-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8941112B2 (en) 2010-12-28 2015-01-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
TWI621121B (zh) 2011-01-05 2018-04-11 Semiconductor Energy Laboratory Co., Ltd. 儲存元件、儲存裝置、及信號處理電路
TWI535032B (zh) 2011-01-12 2016-05-21 半導體能源研究所股份有限公司 半導體裝置的製造方法
US20120178224A1 (en) 2011-01-12 2012-07-12 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP5982125B2 (ja) 2011-01-12 2016-08-31 株式会社半導体エネルギー研究所 半導体装置の作製方法
TWI570809B (zh) 2011-01-12 2017-02-11 半導體能源研究所股份有限公司 半導體裝置及其製造方法
KR102026718B1 (ko) 2011-01-14 2019-09-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 기억장치, 반도체 장치, 검출 방법
TWI619230B (zh) 2011-01-14 2018-03-21 半導體能源研究所股份有限公司 半導體記憶裝置
JP5859839B2 (ja) 2011-01-14 2016-02-16 株式会社半導体エネルギー研究所 記憶素子の駆動方法、及び、記憶素子
JP5897910B2 (ja) 2011-01-20 2016-04-06 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2011086962A (ja) * 2011-01-26 2011-04-28 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
TWI570920B (zh) 2011-01-26 2017-02-11 半導體能源研究所股份有限公司 半導體裝置及其製造方法
TWI787452B (zh) 2011-01-26 2022-12-21 日商半導體能源研究所股份有限公司 半導體裝置及其製造方法
TWI564890B (zh) 2011-01-26 2017-01-01 半導體能源研究所股份有限公司 記憶體裝置及半導體裝置
TWI525619B (zh) 2011-01-27 2016-03-11 半導體能源研究所股份有限公司 記憶體電路
TWI520273B (zh) 2011-02-02 2016-02-01 半導體能源研究所股份有限公司 半導體儲存裝置
US8780614B2 (en) 2011-02-02 2014-07-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor memory device
US9799773B2 (en) 2011-02-02 2017-10-24 Semiconductor Energy Laboratory Co., Ltd. Transistor and semiconductor device
US8643007B2 (en) 2011-02-23 2014-02-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8841664B2 (en) 2011-03-04 2014-09-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US9646829B2 (en) 2011-03-04 2017-05-09 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
US9023684B2 (en) 2011-03-04 2015-05-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP5827145B2 (ja) 2011-03-08 2015-12-02 株式会社半導体エネルギー研究所 信号処理回路
US8541781B2 (en) 2011-03-10 2013-09-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP2012209543A (ja) 2011-03-11 2012-10-25 Semiconductor Energy Lab Co Ltd 半導体装置
KR101995682B1 (ko) 2011-03-18 2019-07-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체막, 반도체 장치, 및 반도체 장치의 제작 방법
JP2012204548A (ja) * 2011-03-24 2012-10-22 Sony Corp 表示装置およびその製造方法
TWI545652B (zh) 2011-03-25 2016-08-11 半導體能源研究所股份有限公司 半導體裝置及其製造方法
US9012904B2 (en) 2011-03-25 2015-04-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US9219159B2 (en) 2011-03-25 2015-12-22 Semiconductor Energy Laboratory Co., Ltd. Method for forming oxide semiconductor film and method for manufacturing semiconductor device
US8956944B2 (en) 2011-03-25 2015-02-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP6053098B2 (ja) 2011-03-28 2016-12-27 株式会社半導体エネルギー研究所 半導体装置
US8927329B2 (en) 2011-03-30 2015-01-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing oxide semiconductor device with improved electronic properties
TWI567735B (zh) 2011-03-31 2017-01-21 半導體能源研究所股份有限公司 記憶體電路,記憶體單元,及訊號處理電路
US9082860B2 (en) 2011-03-31 2015-07-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US9142320B2 (en) 2011-04-08 2015-09-22 Semiconductor Energy Laboratory Co., Ltd. Memory element and signal processing circuit
US9093538B2 (en) 2011-04-08 2015-07-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US9012905B2 (en) 2011-04-08 2015-04-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device including transistor comprising oxide semiconductor and method for manufacturing the same
US8878174B2 (en) 2011-04-15 2014-11-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor element, memory circuit, integrated circuit, and driving method of the integrated circuit
JP5946683B2 (ja) 2011-04-22 2016-07-06 株式会社半導体エネルギー研究所 半導体装置
US9331206B2 (en) 2011-04-22 2016-05-03 Semiconductor Energy Laboratory Co., Ltd. Oxide material and semiconductor device
US9117701B2 (en) 2011-05-06 2015-08-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8946066B2 (en) 2011-05-11 2015-02-03 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing semiconductor device
WO2012157472A1 (en) 2011-05-13 2012-11-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2012157463A1 (en) 2011-05-13 2012-11-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8564331B2 (en) 2011-05-13 2013-10-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP5886128B2 (ja) 2011-05-13 2016-03-16 株式会社半導体エネルギー研究所 半導体装置
JP6109489B2 (ja) 2011-05-13 2017-04-05 株式会社半導体エネルギー研究所 El表示装置
KR101889383B1 (ko) 2011-05-16 2018-08-17 가부시키가이샤 한도오따이 에네루기 켄큐쇼 프로그래머블 로직 디바이스
US8581625B2 (en) 2011-05-19 2013-11-12 Semiconductor Energy Laboratory Co., Ltd. Programmable logic device
KR102081792B1 (ko) 2011-05-19 2020-02-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 연산회로 및 연산회로의 구동방법
JP5886496B2 (ja) 2011-05-20 2016-03-16 株式会社半導体エネルギー研究所 半導体装置
TWI616873B (zh) * 2011-05-20 2018-03-01 半導體能源研究所股份有限公司 儲存裝置及信號處理電路
JP6082189B2 (ja) 2011-05-20 2017-02-15 株式会社半導体エネルギー研究所 記憶装置及び信号処理回路
JP5936908B2 (ja) 2011-05-20 2016-06-22 株式会社半導体エネルギー研究所 パリティビット出力回路およびパリティチェック回路
JP5892852B2 (ja) 2011-05-20 2016-03-23 株式会社半導体エネルギー研究所 プログラマブルロジックデバイス
US20120298998A1 (en) 2011-05-25 2012-11-29 Semiconductor Energy Laboratory Co., Ltd. Method for forming oxide semiconductor film, semiconductor device, and method for manufacturing semiconductor device
JP5731904B2 (ja) 2011-05-25 2015-06-10 ルネサスエレクトロニクス株式会社 半導体装置及び半導体装置の製造方法
US8669781B2 (en) 2011-05-31 2014-03-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR101933741B1 (ko) 2011-06-09 2018-12-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 캐시 메모리 및 캐시 메모리의 구동 방법
JP6104522B2 (ja) 2011-06-10 2017-03-29 株式会社半導体エネルギー研究所 半導体装置
JP6009226B2 (ja) * 2011-06-10 2016-10-19 株式会社半導体エネルギー研究所 半導体装置の作製方法
KR20130007426A (ko) 2011-06-17 2013-01-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
SG10201505586UA (en) 2011-06-17 2015-08-28 Semiconductor Energy Lab Semiconductor device and method for manufacturing the same
US8901554B2 (en) 2011-06-17 2014-12-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device including channel formation region including oxide semiconductor
US9166055B2 (en) 2011-06-17 2015-10-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US9130044B2 (en) 2011-07-01 2015-09-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8952377B2 (en) 2011-07-08 2015-02-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US9214474B2 (en) 2011-07-08 2015-12-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US9318506B2 (en) 2011-07-08 2016-04-19 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8847220B2 (en) 2011-07-15 2014-09-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2013042117A (ja) 2011-07-15 2013-02-28 Semiconductor Energy Lab Co Ltd 半導体装置
US8643008B2 (en) 2011-07-22 2014-02-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8718224B2 (en) 2011-08-05 2014-05-06 Semiconductor Energy Laboratory Co., Ltd. Pulse signal output circuit and shift register
JP6006572B2 (ja) 2011-08-18 2016-10-12 株式会社半導体エネルギー研究所 半導体装置
US9660092B2 (en) 2011-08-31 2017-05-23 Semiconductor Energy Laboratory Co., Ltd. Oxide semiconductor thin film transistor including oxygen release layer
JP5975466B2 (ja) * 2011-09-08 2016-08-23 株式会社タムラ製作所 Ga2O3系半導体素子
US9082663B2 (en) 2011-09-16 2015-07-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
WO2013039126A1 (en) 2011-09-16 2013-03-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2013042562A1 (en) 2011-09-22 2013-03-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8841675B2 (en) 2011-09-23 2014-09-23 Semiconductor Energy Laboratory Co., Ltd. Minute transistor
US9431545B2 (en) 2011-09-23 2016-08-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
WO2013042696A1 (en) * 2011-09-23 2013-03-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2013084333A (ja) 2011-09-28 2013-05-09 Semiconductor Energy Lab Co Ltd シフトレジスタ回路
KR102304125B1 (ko) 2011-09-29 2021-09-17 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
TWI613822B (zh) 2011-09-29 2018-02-01 半導體能源研究所股份有限公司 半導體裝置及其製造方法
US20130087784A1 (en) 2011-10-05 2013-04-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP6022880B2 (ja) 2011-10-07 2016-11-09 株式会社半導体エネルギー研究所 半導体装置及び半導体装置の作製方法
JP2013093565A (ja) 2011-10-07 2013-05-16 Semiconductor Energy Lab Co Ltd 半導体装置
JP6026839B2 (ja) 2011-10-13 2016-11-16 株式会社半導体エネルギー研究所 半導体装置
US9117916B2 (en) 2011-10-13 2015-08-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising oxide semiconductor film
JP5912394B2 (ja) 2011-10-13 2016-04-27 株式会社半導体エネルギー研究所 半導体装置
US9018629B2 (en) 2011-10-13 2015-04-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US8637864B2 (en) 2011-10-13 2014-01-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
SG11201504615UA (en) 2011-10-14 2015-07-30 Semiconductor Energy Lab Semiconductor device
KR20130040706A (ko) 2011-10-14 2013-04-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
WO2013061895A1 (en) 2011-10-28 2013-05-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR102012981B1 (ko) 2011-11-09 2019-08-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
US8796682B2 (en) 2011-11-11 2014-08-05 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device
JP6122275B2 (ja) 2011-11-11 2017-04-26 株式会社半導体エネルギー研究所 表示装置
US8878177B2 (en) 2011-11-11 2014-11-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
JP6076038B2 (ja) 2011-11-11 2017-02-08 株式会社半導体エネルギー研究所 表示装置の作製方法
US8951899B2 (en) 2011-11-25 2015-02-10 Semiconductor Energy Laboratory Method for manufacturing semiconductor device
JP6125211B2 (ja) 2011-11-25 2017-05-10 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5881388B2 (ja) * 2011-11-28 2016-03-09 株式会社半導体エネルギー研究所 半導体装置及び半導体装置の作製方法
US9057126B2 (en) 2011-11-29 2015-06-16 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing sputtering target and method for manufacturing semiconductor device
US9076871B2 (en) 2011-11-30 2015-07-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
TWI639150B (zh) 2011-11-30 2018-10-21 Semiconductor Energy Laboratory Co., Ltd. 半導體顯示裝置
US20130137232A1 (en) 2011-11-30 2013-05-30 Semiconductor Energy Laboratory Co., Ltd. Method for forming oxide semiconductor film and method for manufacturing semiconductor device
JP6147992B2 (ja) * 2011-11-30 2017-06-14 株式会社半導体エネルギー研究所 半導体装置
JP2013137853A (ja) 2011-12-02 2013-07-11 Semiconductor Energy Lab Co Ltd 記憶装置および記憶装置の駆動方法
US9076505B2 (en) 2011-12-09 2015-07-07 Semiconductor Energy Laboratory Co., Ltd. Memory device
US10002968B2 (en) 2011-12-14 2018-06-19 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and display device including the same
WO2013089115A1 (en) 2011-12-15 2013-06-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8785258B2 (en) 2011-12-20 2014-07-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP6053490B2 (ja) 2011-12-23 2016-12-27 株式会社半導体エネルギー研究所 半導体装置の作製方法
TWI584383B (zh) 2011-12-27 2017-05-21 半導體能源研究所股份有限公司 半導體裝置及其製造方法
KR102100425B1 (ko) 2011-12-27 2020-04-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
US9099560B2 (en) 2012-01-20 2015-08-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR102412138B1 (ko) 2012-01-25 2022-06-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
TWI581431B (zh) 2012-01-26 2017-05-01 半導體能源研究所股份有限公司 半導體裝置及半導體裝置的製造方法
US9419146B2 (en) 2012-01-26 2016-08-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8956912B2 (en) 2012-01-26 2015-02-17 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US9006733B2 (en) * 2012-01-26 2015-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing thereof
US8916424B2 (en) 2012-02-07 2014-12-23 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US9859114B2 (en) 2012-02-08 2018-01-02 Semiconductor Energy Laboratory Co., Ltd. Oxide semiconductor device with an oxygen-controlling insulating layer
US9112037B2 (en) 2012-02-09 2015-08-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US20130207111A1 (en) 2012-02-09 2013-08-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device including semiconductor device, electronic device including semiconductor device, and method for manufacturing semiconductor device
JP6108858B2 (ja) 2012-02-17 2017-04-05 株式会社半導体エネルギー研究所 p型半導体材料および半導体装置
US9553200B2 (en) * 2012-02-29 2017-01-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP2013183001A (ja) 2012-03-01 2013-09-12 Semiconductor Energy Lab Co Ltd 半導体装置
JP6041707B2 (ja) 2012-03-05 2016-12-14 株式会社半導体エネルギー研究所 ラッチ回路および半導体装置
KR20140136975A (ko) 2012-03-13 2014-12-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치 및 그 구동 방법
US9058892B2 (en) 2012-03-14 2015-06-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and shift register
JP6168795B2 (ja) 2012-03-14 2017-07-26 株式会社半導体エネルギー研究所 半導体装置の作製方法
US9349849B2 (en) 2012-03-28 2016-05-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device including the semiconductor device
US8941113B2 (en) 2012-03-30 2015-01-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor element, semiconductor device, and manufacturing method of semiconductor element
US8901556B2 (en) 2012-04-06 2014-12-02 Semiconductor Energy Laboratory Co., Ltd. Insulating film, method for manufacturing semiconductor device, and semiconductor device
JP6059566B2 (ja) 2012-04-13 2017-01-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP6128906B2 (ja) 2012-04-13 2017-05-17 株式会社半導体エネルギー研究所 半導体装置
JP6505769B2 (ja) * 2012-04-13 2019-04-24 株式会社半導体エネルギー研究所 半導体装置
KR20230004930A (ko) 2012-04-13 2023-01-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
JP6143423B2 (ja) 2012-04-16 2017-06-07 株式会社半導体エネルギー研究所 半導体装置の製造方法
US9219164B2 (en) 2012-04-20 2015-12-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with oxide semiconductor channel
US8860022B2 (en) 2012-04-27 2014-10-14 Semiconductor Energy Laboratory Co., Ltd. Oxide semiconductor film and semiconductor device
US9048323B2 (en) 2012-04-30 2015-06-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
DE112013002407B4 (de) * 2012-05-10 2024-05-08 Semiconductor Energy Laboratory Co., Ltd. Halbleitervorrichtung
KR102222438B1 (ko) 2012-05-10 2021-03-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 표시 장치
KR102082793B1 (ko) 2012-05-10 2020-02-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 그 제작 방법
JP6174899B2 (ja) 2012-05-11 2017-08-02 株式会社半導体エネルギー研究所 半導体装置
KR102087443B1 (ko) 2012-05-11 2020-03-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 구동 방법
US8995607B2 (en) 2012-05-31 2015-03-31 Semiconductor Energy Laboratory Co., Ltd. Pulse signal output circuit and shift register
WO2013179922A1 (en) 2012-05-31 2013-12-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
WO2013180040A1 (en) 2012-05-31 2013-12-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6076626B2 (ja) 2012-06-14 2017-02-08 株式会社ジャパンディスプレイ 表示装置及びその製造方法
JP2014027263A (ja) 2012-06-15 2014-02-06 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
US9059219B2 (en) 2012-06-27 2015-06-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
KR102161077B1 (ko) 2012-06-29 2020-09-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
US10134852B2 (en) 2012-06-29 2018-11-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8873308B2 (en) 2012-06-29 2014-10-28 Semiconductor Energy Laboratory Co., Ltd. Signal processing circuit
WO2014003086A1 (en) 2012-06-29 2014-01-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR102099262B1 (ko) 2012-07-11 2020-04-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치, 및 액정 표시 장치의 구동 방법
JP6006558B2 (ja) 2012-07-17 2016-10-12 株式会社半導体エネルギー研究所 半導体装置及びその製造方法
JP2014042004A (ja) 2012-07-26 2014-03-06 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法
JP6224931B2 (ja) 2012-07-27 2017-11-01 株式会社半導体エネルギー研究所 半導体装置
JP6134598B2 (ja) 2012-08-02 2017-05-24 株式会社半導体エネルギー研究所 半導体装置
CN108054175A (zh) 2012-08-03 2018-05-18 株式会社半导体能源研究所 半导体装置
SG10201700805WA (en) 2012-08-03 2017-02-27 Semiconductor Energy Lab Co Ltd Oxide semiconductor stacked film and semiconductor device
JP2014057296A (ja) 2012-08-10 2014-03-27 Semiconductor Energy Lab Co Ltd 半導体装置の駆動方法
US9929276B2 (en) 2012-08-10 2018-03-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP2014057298A (ja) 2012-08-10 2014-03-27 Semiconductor Energy Lab Co Ltd 半導体装置の駆動方法
JP2014199899A (ja) 2012-08-10 2014-10-23 株式会社半導体エネルギー研究所 半導体装置
TWI581404B (zh) 2012-08-10 2017-05-01 半導體能源研究所股份有限公司 半導體裝置以及該半導體裝置的驅動方法
JP6220597B2 (ja) 2012-08-10 2017-10-25 株式会社半導体エネルギー研究所 半導体装置
KR102171650B1 (ko) 2012-08-10 2020-10-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
US9245958B2 (en) 2012-08-10 2016-01-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8937307B2 (en) 2012-08-10 2015-01-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
CN104584229B (zh) 2012-08-10 2018-05-15 株式会社半导体能源研究所 半导体装置及其制造方法
WO2014024808A1 (en) 2012-08-10 2014-02-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR20140026257A (ko) 2012-08-23 2014-03-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
DE102013216824B4 (de) 2012-08-28 2024-10-17 Semiconductor Energy Laboratory Co., Ltd. Halbleitervorrichtung
TWI575663B (zh) 2012-08-31 2017-03-21 半導體能源研究所股份有限公司 半導體裝置
US8981372B2 (en) 2012-09-13 2015-03-17 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic appliance
KR102738883B1 (ko) 2012-09-13 2024-12-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
US9018624B2 (en) 2012-09-13 2015-04-28 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic appliance
JP6351947B2 (ja) 2012-10-12 2018-07-04 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
KR102226090B1 (ko) 2012-10-12 2021-03-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법 및 반도체 장치의 제조 장치
TWI681233B (zh) 2012-10-12 2020-01-01 日商半導體能源研究所股份有限公司 液晶顯示裝置、觸控面板及液晶顯示裝置的製造方法
JP6021586B2 (ja) 2012-10-17 2016-11-09 株式会社半導体エネルギー研究所 半導体装置
KR102227591B1 (ko) 2012-10-17 2021-03-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
JP2014082388A (ja) * 2012-10-17 2014-05-08 Semiconductor Energy Lab Co Ltd 半導体装置
JP5951442B2 (ja) 2012-10-17 2016-07-13 株式会社半導体エネルギー研究所 半導体装置
KR102220279B1 (ko) 2012-10-19 2021-02-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체막을 포함하는 다층막 및 반도체 장치의 제작 방법
WO2014065343A1 (en) 2012-10-24 2014-05-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR102279459B1 (ko) 2012-10-24 2021-07-19 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
US9287411B2 (en) 2012-10-24 2016-03-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR102130184B1 (ko) 2012-10-24 2020-07-03 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
TWI782259B (zh) 2012-10-24 2022-11-01 日商半導體能源研究所股份有限公司 半導體裝置及其製造方法
JP6219562B2 (ja) * 2012-10-30 2017-10-25 株式会社半導体エネルギー研究所 表示装置及び電子機器
JP6317059B2 (ja) 2012-11-16 2018-04-25 株式会社半導体エネルギー研究所 半導体装置及び表示装置
TWI613813B (zh) 2012-11-16 2018-02-01 半導體能源研究所股份有限公司 半導體裝置
KR102148549B1 (ko) 2012-11-28 2020-08-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
US9412764B2 (en) 2012-11-28 2016-08-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device, and electronic device
TWI582993B (zh) 2012-11-30 2017-05-11 半導體能源研究所股份有限公司 半導體裝置
US9594281B2 (en) 2012-11-30 2017-03-14 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device
JP6320009B2 (ja) 2012-12-03 2018-05-09 株式会社半導体エネルギー研究所 半導体装置及びその作製方法
KR102207028B1 (ko) 2012-12-03 2021-01-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR102209871B1 (ko) 2012-12-25 2021-02-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
US9905585B2 (en) 2012-12-25 2018-02-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising capacitor
KR102241249B1 (ko) 2012-12-25 2021-04-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 저항 소자, 표시 장치, 및 전자기기
WO2014104265A1 (en) 2012-12-28 2014-07-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
TWI607510B (zh) 2012-12-28 2017-12-01 半導體能源研究所股份有限公司 半導體裝置及半導體裝置的製造方法
JP6329762B2 (ja) 2012-12-28 2018-05-23 株式会社半導体エネルギー研究所 半導体装置
US9391096B2 (en) 2013-01-18 2016-07-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
TWI614813B (zh) 2013-01-21 2018-02-11 半導體能源研究所股份有限公司 半導體裝置的製造方法
US8981374B2 (en) 2013-01-30 2015-03-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
TWI618252B (zh) 2013-02-12 2018-03-11 半導體能源研究所股份有限公司 半導體裝置
KR102153110B1 (ko) 2013-03-06 2020-09-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체막 및 반도체 장치
US9269315B2 (en) 2013-03-08 2016-02-23 Semiconductor Energy Laboratory Co., Ltd. Driving method of semiconductor device
JP6355374B2 (ja) 2013-03-22 2018-07-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
US10347769B2 (en) 2013-03-25 2019-07-09 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor with multi-layer source/drain electrodes
JP6376788B2 (ja) 2013-03-26 2018-08-22 株式会社半導体エネルギー研究所 半導体装置およびその作製方法
US9608122B2 (en) 2013-03-27 2017-03-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US10566455B2 (en) * 2013-03-28 2020-02-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP6224338B2 (ja) 2013-04-11 2017-11-01 株式会社半導体エネルギー研究所 半導体装置、表示装置及び半導体装置の作製方法
JP6198434B2 (ja) 2013-04-11 2017-09-20 株式会社半導体エネルギー研究所 表示装置及び電子機器
US10304859B2 (en) 2013-04-12 2019-05-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having an oxide film on an oxide semiconductor film
US9915848B2 (en) 2013-04-19 2018-03-13 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device
US9893192B2 (en) 2013-04-24 2018-02-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6401483B2 (ja) 2013-04-26 2018-10-10 株式会社半導体エネルギー研究所 半導体装置の作製方法
TWI631711B (zh) * 2013-05-01 2018-08-01 半導體能源研究所股份有限公司 半導體裝置
US9231002B2 (en) 2013-05-03 2016-01-05 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device
US9704894B2 (en) 2013-05-10 2017-07-11 Semiconductor Energy Laboratory Co., Ltd. Display device including pixel electrode including oxide
US10032872B2 (en) 2013-05-17 2018-07-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device
US9343579B2 (en) 2013-05-20 2016-05-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
CN109860278A (zh) 2013-05-20 2019-06-07 株式会社半导体能源研究所 半导体装置
TWI664731B (zh) 2013-05-20 2019-07-01 半導體能源研究所股份有限公司 半導體裝置
US9647125B2 (en) 2013-05-20 2017-05-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
TWI649606B (zh) 2013-06-05 2019-02-01 日商半導體能源研究所股份有限公司 顯示裝置及電子裝置
JP6475424B2 (ja) 2013-06-05 2019-02-27 株式会社半導体エネルギー研究所 半導体装置
JP6374221B2 (ja) 2013-06-05 2018-08-15 株式会社半導体エネルギー研究所 半導体装置
US9773915B2 (en) 2013-06-11 2017-09-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US9293480B2 (en) 2013-07-10 2016-03-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and display device including the semiconductor device
US9006736B2 (en) 2013-07-12 2015-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6329843B2 (ja) 2013-08-19 2018-05-23 株式会社半導体エネルギー研究所 半導体装置
KR102232133B1 (ko) 2013-08-22 2021-03-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
US9443987B2 (en) 2013-08-23 2016-09-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US10008513B2 (en) 2013-09-05 2018-06-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US9425217B2 (en) 2013-09-23 2016-08-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6386323B2 (ja) 2013-10-04 2018-09-05 株式会社半導体エネルギー研究所 半導体装置
TWI688102B (zh) 2013-10-10 2020-03-11 日商半導體能源研究所股份有限公司 半導體裝置
US9245593B2 (en) 2013-10-16 2016-01-26 Semiconductor Energy Laboratory Co., Ltd. Method for driving arithmetic processing unit
DE102014220672A1 (de) 2013-10-22 2015-05-07 Semiconductor Energy Laboratory Co., Ltd. Halbleitervorrichtung
WO2015060133A1 (en) 2013-10-22 2015-04-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2015179247A (ja) * 2013-10-22 2015-10-08 株式会社半導体エネルギー研究所 表示装置
US9583516B2 (en) 2013-10-25 2017-02-28 Semiconductor Energy Laboratory Co., Ltd. Display device
US10437107B2 (en) 2013-10-30 2019-10-08 Dic Corporation Liquid-crystal display element
JP5930133B2 (ja) 2013-10-30 2016-06-08 Dic株式会社 液晶表示素子
JP6440457B2 (ja) 2013-11-07 2018-12-19 株式会社半導体エネルギー研究所 半導体装置
JP5850286B2 (ja) 2013-11-12 2016-02-03 Dic株式会社 液晶表示素子
KR101717466B1 (ko) 2013-11-12 2017-03-17 디아이씨 가부시끼가이샤 액정 표시 소자
JP2016001712A (ja) 2013-11-29 2016-01-07 株式会社半導体エネルギー研究所 半導体装置の作製方法
KR102220450B1 (ko) 2013-12-02 2021-02-25 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
US9601634B2 (en) 2013-12-02 2017-03-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US9806098B2 (en) 2013-12-10 2017-10-31 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
US9349751B2 (en) 2013-12-12 2016-05-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2014060451A (ja) * 2013-12-18 2014-04-03 Semiconductor Energy Lab Co Ltd 発光装置
TWI642186B (zh) 2013-12-18 2018-11-21 日商半導體能源研究所股份有限公司 半導體裝置
US9379192B2 (en) 2013-12-20 2016-06-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6444714B2 (ja) 2013-12-20 2018-12-26 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP6306343B2 (ja) * 2013-12-25 2018-04-04 株式会社半導体エネルギー研究所 ソースフォロワ
KR102283814B1 (ko) 2013-12-25 2021-07-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR20160102295A (ko) 2013-12-26 2016-08-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR102529174B1 (ko) 2013-12-27 2023-05-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR102306200B1 (ko) 2014-01-24 2021-09-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2015114476A1 (en) 2014-01-28 2015-08-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR102325158B1 (ko) 2014-01-30 2021-11-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 전자 기기, 및 반도체 장치의 제작 방법
US9929279B2 (en) 2014-02-05 2018-03-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
CN111524967B (zh) 2014-02-21 2024-07-12 株式会社半导体能源研究所 半导体膜、晶体管、半导体装置、显示装置以及电子设备
US10096489B2 (en) 2014-03-06 2018-10-09 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP6607681B2 (ja) 2014-03-07 2019-11-20 株式会社半導体エネルギー研究所 半導体装置
US9443872B2 (en) 2014-03-07 2016-09-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR102450562B1 (ko) 2014-03-13 2022-10-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 촬상 장치
US9917110B2 (en) 2014-03-14 2018-03-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US10361290B2 (en) 2014-03-14 2019-07-23 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device comprising adding oxygen to buffer film and insulating film
SG11201606647PA (en) 2014-03-14 2016-09-29 Semiconductor Energy Lab Co Ltd Circuit system
SG11201606536XA (en) 2014-03-18 2016-09-29 Semiconductor Energy Lab Co Ltd Semiconductor device and manufacturing method thereof
WO2015145292A1 (en) 2014-03-28 2015-10-01 Semiconductor Energy Laboratory Co., Ltd. Transistor and semiconductor device
JP6541398B2 (ja) 2014-04-11 2019-07-10 株式会社半導体エネルギー研究所 半導体装置
WO2015159179A1 (en) 2014-04-18 2015-10-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device
KR102380829B1 (ko) 2014-04-23 2022-03-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 촬상 장치
JP6486712B2 (ja) 2014-04-30 2019-03-20 株式会社半導体エネルギー研究所 酸化物半導体膜
US10043913B2 (en) 2014-04-30 2018-08-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor film, semiconductor device, display device, module, and electronic device
TWI686899B (zh) 2014-05-02 2020-03-01 日商半導體能源研究所股份有限公司 半導體裝置、觸控感測器、顯示裝置
JP6537341B2 (ja) 2014-05-07 2019-07-03 株式会社半導体エネルギー研究所 半導体装置
TWI772799B (zh) 2014-05-09 2022-08-01 日商半導體能源研究所股份有限公司 半導體裝置
TWI672804B (zh) 2014-05-23 2019-09-21 Semiconductor Energy Laboratory Co., Ltd. 半導體裝置的製造方法
US9874775B2 (en) 2014-05-28 2018-01-23 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic device
WO2015181997A1 (en) 2014-05-30 2015-12-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
TWI646658B (zh) 2014-05-30 2019-01-01 日商半導體能源研究所股份有限公司 半導體裝置
WO2015182000A1 (en) * 2014-05-30 2015-12-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method thereof, and electronic device
US9881954B2 (en) * 2014-06-11 2018-01-30 Semiconductor Energy Laboratory Co., Ltd. Imaging device
WO2015189731A1 (en) 2014-06-13 2015-12-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device including the semiconductor device
KR20150146409A (ko) 2014-06-20 2015-12-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 표시 장치, 입출력 장치, 및 전자 기기
US9461179B2 (en) 2014-07-11 2016-10-04 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor device (TFT) comprising stacked oxide semiconductor layers and having a surrounded channel structure
WO2016017519A1 (ja) 2014-07-29 2016-02-04 Dic株式会社 液晶表示素子
WO2016017521A1 (ja) 2014-07-29 2016-02-04 Dic株式会社 液晶表示素子
US10147747B2 (en) 2014-08-21 2018-12-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method thereof, and electronic device
WO2016046685A1 (en) 2014-09-26 2016-03-31 Semiconductor Energy Laboratory Co., Ltd. Imaging device
JP6570417B2 (ja) 2014-10-24 2019-09-04 株式会社半導体エネルギー研究所 撮像装置および電子機器
JP2016092413A (ja) 2014-10-29 2016-05-23 株式会社半導体エネルギー研究所 撮像装置および電子機器
TWI711165B (zh) 2014-11-21 2020-11-21 日商半導體能源研究所股份有限公司 半導體裝置及電子裝置
KR102524983B1 (ko) 2014-11-28 2023-04-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 모듈, 및 전자 기기
JP6647841B2 (ja) 2014-12-01 2020-02-14 株式会社半導体エネルギー研究所 酸化物の作製方法
US9773832B2 (en) 2014-12-10 2017-09-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device
US10522693B2 (en) 2015-01-16 2019-12-31 Semiconductor Energy Laboratory Co., Ltd. Memory device and electronic device
JP6857447B2 (ja) 2015-01-26 2021-04-14 株式会社半導体エネルギー研究所 半導体装置
TWI792065B (zh) 2015-01-30 2023-02-11 日商半導體能源研究所股份有限公司 成像裝置及電子裝置
TWI732383B (zh) 2015-02-06 2021-07-01 日商半導體能源研究所股份有限公司 裝置及其製造方法以及電子裝置
KR20250143145A (ko) 2015-02-06 2025-09-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
US10439068B2 (en) 2015-02-12 2019-10-08 Semiconductor Energy Laboratory Co., Ltd. Oxide semiconductor film and semiconductor device
US9685560B2 (en) 2015-03-02 2017-06-20 Semiconductor Energy Laboratory Co., Ltd. Transistor, method for manufacturing transistor, semiconductor device, and electronic device
TWI686870B (zh) 2015-03-03 2020-03-01 日商半導體能源研究所股份有限公司 半導體裝置、顯示裝置及使用該顯示裝置之電子裝置
CN107406966B (zh) 2015-03-03 2020-11-20 株式会社半导体能源研究所 氧化物半导体膜、包括该氧化物半导体膜的半导体装置以及包括该半导体装置的显示装置
CN114546158A (zh) 2015-03-17 2022-05-27 株式会社半导体能源研究所 触摸屏
JP6765199B2 (ja) 2015-03-17 2020-10-07 株式会社半導体エネルギー研究所 タッチパネル
KR102582523B1 (ko) 2015-03-19 2023-09-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 전자 기기
JP6662665B2 (ja) 2015-03-19 2020-03-11 株式会社半導体エネルギー研究所 液晶表示装置及び該液晶表示装置を用いた電子機器
US9634048B2 (en) 2015-03-24 2017-04-25 Semiconductor Energy Laboratory Co., Ltd. Imaging device and electronic device
US10429704B2 (en) 2015-03-26 2019-10-01 Semiconductor Energy Laboratory Co., Ltd. Display device, display module including the display device, and electronic device including the display device or the display module
TWI880211B (zh) 2015-03-27 2025-04-11 日商半導體能源研究所股份有限公司 觸控面板
US9716852B2 (en) 2015-04-03 2017-07-25 Semiconductor Energy Laboratory Co., Ltd. Broadcast system
US9685476B2 (en) 2015-04-03 2017-06-20 Semiconductor Energy Laboratory Co., Ltd. Imaging device and electronic device
US10389961B2 (en) 2015-04-09 2019-08-20 Semiconductor Energy Laboratory Co., Ltd. Imaging device and electronic device
US10372274B2 (en) 2015-04-13 2019-08-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and touch panel
US9848146B2 (en) 2015-04-23 2017-12-19 Semiconductor Energy Laboratory Co., Ltd. Imaging device and electronic device
DE102016206922A1 (de) 2015-05-08 2016-11-10 Semiconductor Energy Laboratory Co., Ltd. Touchscreen
US9912897B2 (en) 2015-05-11 2018-03-06 Semiconductor Energy Laboratory Co., Ltd. Imaging device and electronic device
US10684500B2 (en) 2015-05-27 2020-06-16 Semiconductor Energy Laboratory Co., Ltd. Touch panel
US10139663B2 (en) 2015-05-29 2018-11-27 Semiconductor Energy Laboratory Co., Ltd. Input/output device and electronic device
KR102553553B1 (ko) 2015-06-12 2023-07-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 촬상 장치, 및 그 동작 방법 및 전자 기기
JP2017003976A (ja) 2015-06-15 2017-01-05 株式会社半導体エネルギー研究所 表示装置
TWI713367B (zh) 2015-07-07 2020-12-11 日商半導體能源研究所股份有限公司 成像裝置及其運作方法
CN105140271B (zh) * 2015-07-16 2019-03-26 深圳市华星光电技术有限公司 薄膜晶体管、薄膜晶体管的制造方法及显示装置
US9887218B2 (en) 2015-07-16 2018-02-06 Semiconductor Energy Laboratory Co., Ltd. Imaging device, operating method thereof, and electronic device
US9876946B2 (en) 2015-08-03 2018-01-23 Semiconductor Energy Laboratory Co., Ltd. Imaging device and electronic device
US10373991B2 (en) 2015-08-19 2019-08-06 Semiconductor Energy Laboratory Co., Ltd. Imaging device, operating method thereof, and electronic device
WO2017037564A1 (en) 2015-08-28 2017-03-09 Semiconductor Energy Laboratory Co., Ltd. Oxide semiconductor, transistor, and semiconductor device
US10090344B2 (en) 2015-09-07 2018-10-02 Semiconductor Energy Laboratory Co., Ltd. Imaging device, method for operating the same, module, and electronic device
KR102544169B1 (ko) 2015-09-10 2023-06-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 촬상 장치, 모듈, 전자 기기, 및 촬상 장치의 동작 방법
JP6807683B2 (ja) 2015-09-11 2021-01-06 株式会社半導体エネルギー研究所 入出力パネル
US10896923B2 (en) 2015-09-18 2021-01-19 Semiconductor Energy Laboratory Co., Ltd. Method of operating an imaging device with global shutter system
JP2017063420A (ja) 2015-09-25 2017-03-30 株式会社半導体エネルギー研究所 半導体装置
KR20180063084A (ko) 2015-09-30 2018-06-11 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 전자 기기
US10109667B2 (en) 2015-10-09 2018-10-23 Semiconductor Energy Laboratory Co., Ltd. Imaging device, module, and electronic device
WO2017064590A1 (en) 2015-10-12 2017-04-20 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP6851166B2 (ja) 2015-10-12 2021-03-31 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP6864456B2 (ja) 2015-10-15 2021-04-28 株式会社半導体エネルギー研究所 半導体装置
US10559697B2 (en) 2015-11-20 2020-02-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method of the semiconductor device, or display device including the semiconductor device
US11329166B2 (en) 2015-11-20 2022-05-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device including the semiconductor device, and an electronic device including the semiconductor device
KR20170061602A (ko) 2015-11-26 2017-06-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 전자 기기
JP6917700B2 (ja) 2015-12-02 2021-08-11 株式会社半導体エネルギー研究所 半導体装置
KR20180093000A (ko) 2015-12-11 2018-08-20 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 분리 방법
JP6802701B2 (ja) 2015-12-18 2020-12-16 株式会社半導体エネルギー研究所 表示装置、モジュール及び電子機器
US10020336B2 (en) 2015-12-28 2018-07-10 Semiconductor Energy Laboratory Co., Ltd. Imaging device and electronic device using three dimentional (3D) integration
KR102617041B1 (ko) 2015-12-28 2023-12-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 장치, 텔레비전 시스템, 및 전자 기기
US10027896B2 (en) 2016-01-15 2018-07-17 Semiconductor Energy Laboratory Co., Ltd. Image display system, operation method of the same, and electronic device
KR20250044456A (ko) 2016-01-29 2025-03-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 및 상기 반도체 장치를 가지는 표시 장치
JP7020783B2 (ja) 2016-02-03 2022-02-16 株式会社半導体エネルギー研究所 撮像装置
US10115741B2 (en) 2016-02-05 2018-10-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device
KR20170096956A (ko) 2016-02-17 2017-08-25 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 전자 기기
US10347681B2 (en) 2016-02-19 2019-07-09 Semiconductor Energy Laboratory Co., Ltd. Imaging device
US10573621B2 (en) 2016-02-25 2020-02-25 Semiconductor Energy Laboratory Co., Ltd. Imaging system and manufacturing apparatus
US10263114B2 (en) 2016-03-04 2019-04-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, method for manufacturing the same, or display device including the same
WO2017149413A1 (en) 2016-03-04 2017-09-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US10014325B2 (en) 2016-03-10 2018-07-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device
US9882064B2 (en) 2016-03-10 2018-01-30 Semiconductor Energy Laboratory Co., Ltd. Transistor and electronic device
KR102721654B1 (ko) 2016-03-11 2024-10-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 복합체 및 트랜지스터
KR102917764B1 (ko) 2016-03-11 2026-01-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 입출력 패널, 입출력 장치
KR102370488B1 (ko) 2016-03-15 2022-03-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치, 모듈, 및 전자 기기
WO2017158478A1 (ja) 2016-03-18 2017-09-21 株式会社半導体エネルギー研究所 撮像装置および電子機器
US10333004B2 (en) 2016-03-18 2019-06-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, semiconductor wafer, module and electronic device
KR102448587B1 (ko) 2016-03-22 2022-09-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 및 상기 반도체 장치를 포함하는 표시 장치
US10096720B2 (en) 2016-03-25 2018-10-09 Semiconductor Energy Laboratory Co., Ltd. Transistor, semiconductor device, and electronic device
JP6863803B2 (ja) 2016-04-07 2021-04-21 株式会社半導体エネルギー研究所 表示装置
WO2017175095A1 (en) 2016-04-08 2017-10-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US10032918B2 (en) 2016-04-22 2018-07-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP6968567B2 (ja) 2016-04-22 2021-11-17 株式会社半導体エネルギー研究所 半導体装置の作製方法
KR102492209B1 (ko) 2016-05-19 2023-01-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 복합 산화물 반도체 및 트랜지스터
JP7109887B2 (ja) 2016-05-20 2022-08-01 株式会社半導体エネルギー研究所 表示システム
CN114664949A (zh) 2016-06-03 2022-06-24 株式会社半导体能源研究所 场效应晶体管
US10461197B2 (en) 2016-06-03 2019-10-29 Semiconductor Energy Laboratory Co., Ltd. Sputtering target, oxide semiconductor, oxynitride semiconductor, and transistor
US10078243B2 (en) 2016-06-03 2018-09-18 Semiconductor Energy Laboratory Co., Ltd. Display device
TWI712029B (zh) 2016-06-17 2020-12-01 日商半導體能源研究所股份有限公司 顯示裝置,及顯示裝置的驅動方法
KR102330605B1 (ko) 2016-06-22 2021-11-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
TWI709952B (zh) 2016-07-01 2020-11-11 日商半導體能源研究所股份有限公司 電子裝置、電子裝置的驅動方法
TWI737665B (zh) 2016-07-01 2021-09-01 日商半導體能源硏究所股份有限公司 半導體裝置以及半導體裝置的製造方法
TWI720097B (zh) 2016-07-11 2021-03-01 日商半導體能源硏究所股份有限公司 濺射靶材及濺射靶材的製造方法
WO2018020350A1 (en) 2016-07-26 2018-02-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6962731B2 (ja) 2016-07-29 2021-11-05 株式会社半導体エネルギー研究所 半導体装置、表示システム及び電子機器
KR102458660B1 (ko) 2016-08-03 2022-10-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
US10205008B2 (en) 2016-08-03 2019-02-12 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
US10678078B2 (en) 2016-08-05 2020-06-09 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing the display device
JP6298116B2 (ja) * 2016-08-05 2018-03-20 株式会社半導体エネルギー研究所 半導体装置
KR20180016271A (ko) 2016-08-05 2018-02-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
WO2018033822A1 (ja) 2016-08-17 2018-02-22 株式会社半導体エネルギー研究所 表示装置
JP2018032018A (ja) 2016-08-17 2018-03-01 株式会社半導体エネルギー研究所 半導体装置、表示モジュール及び電子機器
CN109565280B (zh) 2016-08-19 2023-02-17 株式会社半导体能源研究所 半导体装置的电源控制方法
TW202129783A (zh) 2016-08-24 2021-08-01 日商半導體能源研究所股份有限公司 半導體裝置及其製造方法
WO2018042285A1 (en) 2016-08-30 2018-03-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device, and electronic device
US9978879B2 (en) 2016-08-31 2018-05-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2018051208A1 (en) 2016-09-14 2018-03-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method of the same
KR102372150B1 (ko) 2016-09-30 2022-03-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 시스템 및 전자 기기
KR20180037105A (ko) 2016-10-03 2018-04-11 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치, 표시 모듈, 및 표시 장치의 제작 방법
US10411003B2 (en) 2016-10-14 2019-09-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR102384624B1 (ko) 2016-10-21 2022-04-11 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
TW202129966A (zh) 2016-10-21 2021-08-01 日商半導體能源研究所股份有限公司 複合氧化物及電晶體
KR20180048327A (ko) 2016-11-01 2018-05-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 및 반도체 장치의 제작 방법
US10955950B2 (en) 2016-11-09 2021-03-23 Semiconductor Energy Laboratory Co., Ltd. Display device, display module, electronic device, and method for manufacturing the display device
CN109937443A (zh) 2016-11-10 2019-06-25 株式会社半导体能源研究所 显示装置及显示装置的驱动方法
KR20180055701A (ko) 2016-11-17 2018-05-25 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
US10790318B2 (en) 2016-11-22 2020-09-29 Semiconductor Energy Laboratory Co., Ltd. Display device, method for manufacturing the same, and electronic device
JP7050460B2 (ja) 2016-11-22 2022-04-08 株式会社半導体エネルギー研究所 表示装置
US11726376B2 (en) 2016-11-23 2023-08-15 Semiconductor Energy Laboratory Co., Ltd. Display device, display module, and electronic device
US20180145096A1 (en) 2016-11-23 2018-05-24 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device
US10756118B2 (en) 2016-11-30 2020-08-25 Semiconductor Energy Laboratory Co., Ltd. Display device, display module, and electronic device
US10748479B2 (en) 2016-12-07 2020-08-18 Semiconductor Energy Laboratories Co., Ltd. Semiconductor device, display system, and electronic device
US10147681B2 (en) 2016-12-09 2018-12-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP2017058700A (ja) * 2016-12-15 2017-03-23 株式会社半導体エネルギー研究所 半導体装置及び液晶表示装置
US10319743B2 (en) 2016-12-16 2019-06-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display system, and electronic device
CN108307131B (zh) 2016-12-27 2021-08-03 株式会社半导体能源研究所 摄像装置及电子设备
WO2018130899A1 (en) 2017-01-11 2018-07-19 Semiconductor Energy Laboratory Co., Ltd. Display device
CN110178170B (zh) 2017-01-16 2021-12-07 株式会社半导体能源研究所 显示装置
JP7110116B2 (ja) 2017-01-16 2022-08-01 株式会社半導体エネルギー研究所 半導体装置
TWI748035B (zh) 2017-01-20 2021-12-01 日商半導體能源硏究所股份有限公司 顯示系統及電子裝置
WO2018138619A1 (en) 2017-01-30 2018-08-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US10608017B2 (en) 2017-01-31 2020-03-31 Semiconductor Energy Laboratory Co., Ltd. Display device, display module, and electronic device
WO2018167593A1 (ja) 2017-03-13 2018-09-20 株式会社半導体エネルギー研究所 複合酸化物、およびトランジスタ
KR102608086B1 (ko) 2017-03-29 2023-11-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 반도체 장치의 제작 방법
JP6498715B2 (ja) * 2017-04-05 2019-04-10 三星ディスプレイ株式會社Samsung Display Co.,Ltd. 表示装置
WO2018197994A1 (en) 2017-04-28 2018-11-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method of semiconductor device
WO2019003026A1 (en) 2017-06-27 2019-01-03 Semiconductor Energy Laboratory Co., Ltd. DISPLAY SYSTEM AND METHOD FOR PROCESSING DATA
KR102637403B1 (ko) 2017-07-26 2024-02-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
KR102472837B1 (ko) 2017-08-11 2022-11-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
WO2019038664A1 (ja) 2017-08-25 2019-02-28 株式会社半導体エネルギー研究所 半導体装置、および半導体装置の作製方法
WO2019043483A1 (en) 2017-08-31 2019-03-07 Semiconductor Energy Laboratory Co., Ltd. DISPLAY DEVICE AND ELECTRONIC DEVICE
WO2019048966A1 (ja) * 2017-09-05 2019-03-14 株式会社半導体エネルギー研究所 表示システム
KR102614815B1 (ko) 2017-09-15 2023-12-20 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
US11296085B2 (en) 2017-09-15 2022-04-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR20250159074A (ko) 2017-11-02 2025-11-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
DE112018005399T5 (de) 2017-11-09 2020-06-25 Semiconductor Energy Laboratory Co., Ltd. Anzeigevorrichtung, Betriebsverfahren dafür und elektronisches Gerät
US10957720B2 (en) 2017-11-09 2021-03-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device, and electronic device
WO2019123288A1 (ja) 2017-12-22 2019-06-27 株式会社半導体エネルギー研究所 表示装置および電子機器
US11733574B2 (en) 2018-01-05 2023-08-22 Semiconductor Energy Laboratory Co., Ltd. Display device, display module, and electronic device
US11204533B2 (en) 2018-03-06 2021-12-21 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device
US12276889B1 (en) 2018-04-06 2025-04-15 Semiconductor Energy Laboratory Co., Ltd. Display device, operation method of display device, and electronic device
CN116631356B (zh) 2018-04-26 2026-02-17 株式会社半导体能源研究所 显示装置及电子设备
JP7337782B2 (ja) 2018-04-26 2023-09-04 株式会社半導体エネルギー研究所 半導体装置
CN119208351A (zh) 2018-05-17 2024-12-27 株式会社半导体能源研究所 显示装置
CN112136173B (zh) 2018-05-25 2025-02-28 株式会社半导体能源研究所 显示装置及电子设备
CN119403406A (zh) 2018-06-06 2025-02-07 株式会社半导体能源研究所 显示装置、显示模块及电子设备
KR102799415B1 (ko) 2018-07-05 2025-04-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
CN112567446B (zh) 2018-08-21 2024-09-20 株式会社半导体能源研究所 显示装置及电子设备
US11435637B2 (en) 2018-09-21 2022-09-06 Semiconductor Energy Laboratory Co., Ltd. Display apparatus and electronic device
CN113196366A (zh) 2018-09-28 2021-07-30 株式会社半导体能源研究所 显示装置的制造方法、显示装置的制造装置
KR20210081365A (ko) 2018-10-26 2021-07-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 및 반도체 장치의 제작 방법
US11774816B2 (en) 2018-11-02 2023-10-03 Semiconductor Energy Laboratory Co., Ltd. Display device, display module, and electronic device
CN112955946B (zh) 2018-11-09 2025-05-02 株式会社半导体能源研究所 显示装置及电子设备
KR20210102249A (ko) 2018-12-19 2021-08-19 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
KR102841341B1 (ko) * 2018-12-21 2025-07-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 그리고 전자 기기 및 인공위성
US11107929B2 (en) 2018-12-21 2021-08-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2020136494A1 (ja) 2018-12-26 2020-07-02 株式会社半導体エネルギー研究所 表示装置および電子機器
CN113348501A (zh) 2019-02-05 2021-09-03 株式会社半导体能源研究所 显示装置及电子设备
KR102936835B1 (ko) 2019-05-10 2026-03-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
JP7486480B2 (ja) 2019-05-30 2024-05-17 株式会社半導体エネルギー研究所 表示装置および電子機器
JP7508454B2 (ja) 2019-06-21 2024-07-01 株式会社半導体エネルギー研究所 記憶回路
US11210048B2 (en) 2019-10-04 2021-12-28 Semiconductor Energy Laboratory Co., Ltd. Display device, display module, and electronic device
US20230255060A1 (en) 2020-07-09 2023-08-10 Semiconductor Energy Laboratory Co., Ltd. Display apparatus and electronic device
TWI907464B (zh) 2020-08-12 2025-12-11 日商半導體能源研究所股份有限公司 顯示裝置、其工作方法以及電子裝置
KR20230078700A (ko) 2020-10-01 2023-06-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
US12009432B2 (en) 2021-03-05 2024-06-11 Semiconductor Energy Laboratory Co., Ltd. Transistor and display device
TW202320033A (zh) 2021-11-05 2023-05-16 日商半導體能源研究所股份有限公司 顯示裝置及電子裝置
US20250004337A1 (en) 2021-11-26 2025-01-02 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device
JP7790950B2 (ja) 2021-12-09 2025-12-23 株式会社Magnolia White Tft基板及びtft基板の製造方法
TW202329259A (zh) 2021-12-16 2023-07-16 日商半導體能源研究所股份有限公司 顯示裝置及電子裝置
KR20250160964A (ko) 2023-03-17 2025-11-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 표시 장치의 제작 방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6278127B1 (en) * 1994-12-09 2001-08-21 Agere Systems Guardian Corp. Article comprising an organic thin film transistor adapted for biasing to form a N-type or a P-type transistor
JP4085438B2 (ja) * 1996-10-17 2008-05-14 松下電器産業株式会社 有機薄膜トランジスタ及び液晶素子と有機発光素子
JP2002502128A (ja) * 1998-02-02 2002-01-22 ユニアックス コーポレイション X−yアドレス指定可能な電気的マイクロスイッチアレイとこれを使用したセンサマトリックス
JP3276930B2 (ja) * 1998-11-17 2002-04-22 科学技術振興事業団 トランジスタ及び半導体装置
JP2003037268A (ja) * 2001-07-24 2003-02-07 Minolta Co Ltd 半導体素子及びその製造方法
JP4267243B2 (ja) * 2002-03-05 2009-05-27 出光興産株式会社 電界効果トランジスター、その製造方法及び該電界効果トランジスターを製造するための積層体
US7105360B2 (en) * 2002-03-08 2006-09-12 International Business Machines Corporation Low temperature melt-processing of organic-inorganic hybrid
US6667215B2 (en) * 2002-05-02 2003-12-23 3M Innovative Properties Method of making transistors
JP2003347400A (ja) * 2002-05-30 2003-12-05 Asahi Kasei Corp 半導体パターンの形成方法
US7067843B2 (en) * 2002-10-11 2006-06-27 E. I. Du Pont De Nemours And Company Transparent oxide semiconductor thin film transistors
JP4166105B2 (ja) * 2003-03-06 2008-10-15 シャープ株式会社 半導体装置およびその製造方法
JP2004311702A (ja) * 2003-04-07 2004-11-04 Sumitomo Heavy Ind Ltd 薄膜トランジスタの製造方法および薄膜トランジスタ
US7511421B2 (en) * 2003-08-25 2009-03-31 Semiconductor Energy Laboratory Co., Ltd. Mixed metal and organic electrode for organic device

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8729547B2 (en) 2008-08-08 2014-05-20 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8343817B2 (en) 2008-08-08 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US9082857B2 (en) 2008-09-01 2015-07-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising an oxide semiconductor layer
US8501555B2 (en) 2008-09-12 2013-08-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US9048320B2 (en) 2008-09-19 2015-06-02 Semiconductor Energy Laboratory Co., Ltd. Display device including oxide semiconductor layer
US9343517B2 (en) 2008-09-19 2016-05-17 Semiconductor Energy Laboratory Co., Ltd. Display device
US9082688B2 (en) 2008-10-03 2015-07-14 Semiconductor Energy Laboratory Co., Ltd. Display device
US8907335B2 (en) 2008-10-03 2014-12-09 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing the same
US8344372B2 (en) 2008-10-03 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing the same
US8313980B2 (en) 2008-10-10 2012-11-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8158975B2 (en) 2008-10-10 2012-04-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8980685B2 (en) 2008-10-24 2015-03-17 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing thin film transistor using multi-tone mask
US8686417B2 (en) 2008-10-24 2014-04-01 Semiconductor Energy Laboratory Co., Ltd. Oxide semiconductor device formed by using multi-tone mask
US8343799B2 (en) 2008-10-24 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8878178B2 (en) 2008-10-24 2014-11-04 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8741702B2 (en) 2008-10-24 2014-06-03 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8759167B2 (en) 2008-10-31 2014-06-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8633492B2 (en) 2008-10-31 2014-01-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8426868B2 (en) 2008-10-31 2013-04-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8748887B2 (en) 2008-11-13 2014-06-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8298858B2 (en) 2008-11-13 2012-10-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8907348B2 (en) 2008-11-21 2014-12-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8552434B2 (en) 2008-11-28 2013-10-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8546182B2 (en) 2008-11-28 2013-10-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8344387B2 (en) 2008-11-28 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8704216B2 (en) 2009-02-27 2014-04-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US9293566B2 (en) 2009-06-30 2016-03-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8389326B2 (en) 2009-06-30 2013-03-05 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US9029191B2 (en) 2009-09-24 2015-05-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US9171938B2 (en) 2009-09-24 2015-10-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor element and method for manufacturing the same
US8400187B2 (en) 2009-10-16 2013-03-19 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device
US9006729B2 (en) 2009-11-13 2015-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US8492759B2 (en) 2009-12-11 2013-07-23 Semiconductor Energy Laboratory Co., Ltd. Field effect transistor
US9054134B2 (en) 2009-12-28 2015-06-09 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8686425B2 (en) 2009-12-28 2014-04-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8916865B2 (en) 2010-06-18 2014-12-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8921948B2 (en) 2011-01-12 2014-12-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US9166026B2 (en) 2011-01-12 2015-10-20 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
US8890150B2 (en) 2011-01-27 2014-11-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8901557B2 (en) 2012-06-15 2014-12-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US9153649B2 (en) 2012-11-30 2015-10-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for evaluating semiconductor device
US9337343B2 (en) 2013-02-27 2016-05-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, driver circuit, and display device

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