US20120146172A1 - High Speed Photosensitive Devices and Associated Methods - Google Patents

High Speed Photosensitive Devices and Associated Methods Download PDF

Info

Publication number
US20120146172A1
US20120146172A1 US13/164,630 US201113164630A US2012146172A1 US 20120146172 A1 US20120146172 A1 US 20120146172A1 US 201113164630 A US201113164630 A US 201113164630A US 2012146172 A1 US2012146172 A1 US 2012146172A1
Authority
US
United States
Prior art keywords
silicon material
electromagnetic radiation
array
optoelectronic device
doped region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/164,630
Other languages
English (en)
Inventor
James Carey
Drake Miller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SiOnyx LLC
Original Assignee
SiOnyx LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SiOnyx LLC filed Critical SiOnyx LLC
Priority to US13/164,630 priority Critical patent/US20120146172A1/en
Assigned to SIONYX, INC. reassignment SIONYX, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MILLER, DRAKE, CAREY, JAMES
Publication of US20120146172A1 publication Critical patent/US20120146172A1/en
Priority to US14/580,143 priority patent/US9761739B2/en
Priority to US15/679,827 priority patent/US10505054B2/en
Priority to US16/708,335 priority patent/US20200111922A1/en
Priority to US17/514,775 priority patent/US12040415B2/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/02016—Circuit arrangements of general character for the devices
    • H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02024—Position sensitive and lateral effect photodetectors; Quadrant photodiodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/1446—Devices controlled by radiation in a repetitive configuration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H01L27/14629—Reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Definitions

  • Imaging applications such as hands-free gesture control, video games, medical, and machine vision, as well as communication applications utilize various optoelectronic devices, such as photodetectors and imaging arrays of photodetectors.
  • Communication applications typically use, for example, fiber optical networks because such networks perform well in the near infrared wavelengths of light where optical fibers experience lower signal loss.
  • Applications for laser marking and range finding commonly use lasers with near infrared wavelengths such 1064 nm.
  • Other applications such as depth perception applications utilize imagers that can detect near infrared wavelengths such as 850 nm or 940 nm. These wavelengths are commonly generated from light emitting diodes or laser diodes made with gallium arsenide (GaAs).
  • GaAs gallium arsenide
  • a high speed optoelectronic device can include a silicon material having an incident light surface, a first doped region and a second doped region forming a semiconductive junction in the silicon material, and a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation.
  • the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.
  • the optoelectronic device has a responsivity of greater than or equal to about 0.5 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm. In yet another aspect, the optoelectronic device has a responsivity of greater than or equal to about 0.45 A/W for electromagnetic radiation having a wavelength of about 850 nm.
  • the silicon material has a thickness of from about 1 ⁇ m to about 100 ⁇ m. In yet a further aspect, dark current of the device during operation is from about 100 pA/cm 2 to about 10 nA/cm 2 .
  • a high speed optoelectronic device can include a silicon material having an incident light surface, a first doped region and a second doped region forming a semiconductive junction in the silicon material, and a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation.
  • the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.3 A/W for electromagnetic radiation having a wavelength of about 940 nm.
  • high speed optoelectronic device can include a silicon material having an incident light surface, a first doped region and a second doped region forming a semiconductive junction in the silicon material, and a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation.
  • the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.05 A/W for electromagnetic radiation having a wavelength of about 1060 nm.
  • a photodiode array can include a silicon material having an incident light surface, at least two photodiodes in the silicon material, each photodiode including a first doped region and a second doped region forming a junction, and a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation.
  • the photodiode array has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.
  • the silicon material has a thickness of from about 1 ⁇ m to about 100 ⁇ m.
  • a method of increasing the speed of an optoelectronic device can include doping at least two regions in a silicon material to form at least one junction, and texturing the silicon material to form a textured region positioned to interact with electromagnetic radiation.
  • the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.
  • the device can include a further doped region intended to quickly bring carriers from the side opposite junction to the junction region.
  • FIG. 1 is a graphical representation of the absorption characteristics of a fast (or thin) photodetector device based on standard silicon compared to the absorption characteristics of a photodetecting device based on silicon but having a textured region in accordance with one aspect of the present disclosure
  • FIG. 2 is a schematic view of a photosensitive device in accordance with another aspect of the present disclosure.
  • FIG. 3 is a schematic view of a photosensitive device in accordance with yet another aspect of the present disclosure.
  • FIG. 4 is a schematic view of a photosensitive device in accordance with a further aspect of the present disclosure.
  • FIG. 5 is a schematic view of a photosensitive device in accordance with yet a further aspect of the present disclosure.
  • FIG. 6 is a schematic view of a photosensitive device in accordance with another aspect of the present disclosure.
  • FIG. 7 is a schematic view of a photosensitive device in accordance with yet another aspect of the present disclosure.
  • FIG. 8 is a schematic view of a photosensitive array device in accordance with a further aspect of the present disclosure.
  • FIG. 9 is an illustration of a time of flight measurement in accordance with another aspect of the present disclosure.
  • FIG. 10 a is a schematic view of a pixel configuration for a photoimager array in accordance with another aspect of the present disclosure
  • FIG. 10 b is a schematic view of a pixel configuration for a photoimager array in accordance with another aspect of the present disclosure
  • FIG. 10 c is a schematic view of a pixel configuration for a photoimager array in accordance with another aspect of the present disclosure.
  • FIG. 11 is a schematic diagram of a six transistor imager in accordance with another aspect of the present disclosure.
  • FIG. 12 is a schematic diagram of an eleven transistor imager in accordance with another aspect of the present disclosure.
  • FIG. 13 is a schematic view of a photosensitive array device in accordance with yet a further aspect of the present disclosure.
  • FIG. 14 is a schematic view of a photosensitive array device in accordance with another aspect of the present disclosure.
  • FIG. 15 is a depiction of a method of increasing the speed of an optoelectronic device in accordance with yet another aspect of the present disclosure.
  • QE quantum efficiency
  • EQE quantum efficiency
  • responsivity is a measure of the input-output gain of a detector system.
  • responsivity is a measure of the electrical output per optical input. Responsivity of a photodetector is expressed in amperes per watt of incident radiant power. Additionally, responsivity is a function of the wavelength of the incident radiation and of the properties of the device, such as the bandgap of the material of which the device is made.
  • R ⁇ One expression for responsivity (R ⁇ ) is shown in Equation I, where ⁇ is the external quantum efficiency of the detector for a given wavelength ( ⁇ ), q is the charge of an electron, h is Planks constant, and ⁇ is the frequency of light.
  • electromagnetic radiation and “light” can be used interchangeably, and can represent wavelengths across a broad range, including visible wavelengths (approximately 350 nm to 800 nm) and non-visible wavelengths (longer than about 800 nm or shorter than 350 nm).
  • the infrared spectrum is often described as including a near infrared portion of the spectrum including wavelengths of approximately 800 to 1300 nm, a short wave infrared portion of the spectrum including wavelengths of approximately 1300 nm to 3 micrometers, and a mid to long wave infrared (or thermal infrared) portion of the spectrum including wavelengths greater than about 3 micrometers up to about 30 micrometers.
  • infrared portions of the electromagnetic spectrum unless otherwise noted.
  • response time refers to the rise time or fall time of a detector device.
  • “rise time” is the time difference between the 10% point and the 90% point of the peak amplitude output on the leading edge of the electrical signal generated by the interaction of light with the device.
  • “Fall time” is measured as the time difference between the 90% point and the 10% point of the trailing edge of the electrical signal.
  • fall time can be referred to as the decay time.
  • the terms “disordered surface” and “textured surface” can be used interchangeably, and refer to a surface having a topology with nano- to micron-sized surface variations.
  • a surface topology can be formed by the irradiation of a laser pulse or laser pulses, chemical etching, lithographic patterning, interference of multiple simultaneous laser pulses, or reactive ion etching. While the characteristics of such a surface can be variable depending on the materials and techniques employed, in one aspect such a surface can be several hundred nanometers thick and made up of nanocrystallites (e.g. from about 10 to about 50 nanometers) and nanopores.
  • such a surface can include micron-sized structures (e.g. about 1 ⁇ m to about 60 ⁇ m). In yet another aspect, the surface can include nano-sized and/or micron-sized structures from about 5 nm and about 500 ⁇ m.
  • fluence refers to the amount of energy from a single pulse of laser radiation that passes through a unit area. In other words, “fluence” can be described as the energy density of one laser pulse.
  • surface modifying and “surface modification” refer to the altering of a surface of a semiconductor material using laser irradiation, chemical etching, reactive ion etching, lithographic patterning, etc.
  • surface modification can include processes using primarily laser radiation or laser radiation in combination with a dopant, whereby the laser radiation facilitates the incorporation of the dopant into a surface of the semiconductor material.
  • surface modification includes doping of a semiconductor material.
  • target region refers to an area of a semiconductor material that is intended to be doped or surface modified.
  • the target region of a semiconductor material can vary as the surface modifying process progresses. For example, after a first target region is doped or surface modified, a second target region may be selected on the same semiconductor material.
  • detection refers to the sensing, absorption, and/or collection of electromagnetic radiation.
  • the term “substantially” refers to the complete or nearly complete extent or degree of an action, characteristic, property, state, structure, item, or result.
  • an object that is “substantially” enclosed would mean that the object is either completely enclosed or nearly completely enclosed.
  • the exact allowable degree of deviation from absolute completeness may in some cases depend on the specific context. However, generally speaking the nearness of completion will be so as to have the same overall result as if absolute and total completion were obtained.
  • the use of “substantially” is equally applicable when used in a negative connotation to refer to the complete or near complete lack of an action, characteristic, property, state, structure, item, or result.
  • compositions that is “substantially free of” particles would either completely lack particles, or so nearly completely lack particles that the effect would be the same as if it completely lacked particles.
  • a composition that is “substantially free of” an ingredient or element may still actually contain such item as long as there is no measurable effect thereof.
  • the term “about” is used to provide flexibility to a numerical range endpoint by providing that a given value may be “a little above” or “a little below” the endpoint.
  • a photodetector used in applications such as communicating data, laser range finding, laser marking, time of flight imaging, and the like can be a limiting factor in how fast data can be transmitted.
  • a photodetector having a faster responsivity can receive data at a correspondingly higher rate.
  • the speed of many optoelectronic devices such as photodetectors is dependent, at least in part, on the speed with which charge carriers are swept from the photodetector.
  • the speed at which carriers are swept from a photodetector can depend on the distance a carrier has to travel, whether the carriers are generated in a region of the device with an electric field, and the likelihood of a carrier being trapped or slowed in a defect within the device layer.
  • a bias can be applied to the photodetector to decrease the response time by increasing the drift velocity of the carriers.
  • many traditional data communication applications utilize electromagnetic radiation in the red and infrared spectrum as a data carrier. In a typical silicon device, electromagnetic radiation in the red and infrared spectrum generate carriers deep into the silicon device, thus increasing the distance the carrier has to travel to be collected. Thus it can be beneficial for a photodetector to absorb infrared radiation in a thin device in order to increase communication speeds and to reduce dark current.
  • Silicon is one material that can be used as a photodetector semiconductor.
  • Thin silicon photodetectors are limited, however, in their ability to detect infrared wavelengths, particularly when functioning at higher data communication speeds.
  • Traditional silicon materials require substantial absorption depths to detect photons having wavelengths longer than about 700 nm. While visible light can be absorbed at relatively shallow depths in silicon, absorption of longer wavelengths (e.g. 900 nm) in silicon of a thin wafer depth (e.g. approximately 100 ⁇ m) is poor if at all. Because short wave infrared light is mostly transparent to silicon-based photodetectors, other materials (e.g. InGaAs) have traditionally been used to detect infrared electromagnetic radiation having wavelengths greater than about 1100 nm.
  • InGaAs InGaAs
  • the present disclosure provides optoelectronic devices and associated methods that increase the electromagnetic radiation absorption range of thin silicon devices into the infrared region, thus allowing the absorption of visible and infrared light by such devices. Additionally, such devices can be configured to operate at much higher data rates and have increased external quantum efficiencies and responsivities as compared to traditional thin silicon devices operating in the infrared spectrum.
  • a silicon photodetector is provided that includes a textured region to increase the absorption, external quantum efficiency, and to decrease response times in the infrared wavelengths. Such unique and novel devices can operate at high data rates in the visible and infrared spectrums.
  • Such an increased sensitivity in a silicon-based device can thus reduce processing cost of photodetectors, reduce the power needed in light sources, increase the depth resolution in 3D types imaging, increase the distance over which data can be transmitted, improve laser range finding, and increases opportunities to use longer wavelengths of electromagnetic radiation for communicating data.
  • a high speed optoelectronic device can include a silicon material having an incident light surface, a first doped region and a second doped region forming a semiconductive junction in the silicon material, and a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation.
  • the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm. For example, FIG.
  • the dashed line 12 represents the absorption characteristics of a photodetector device based on standard fast silicon device and the solid line 14 represents the absorption characteristics of a photodetecting device based on silicon but having a textured region.
  • the absorption of a standard fast silicon photodiode in the infrared i.e. the 800 nm to 1200 nm region, results in relatively low responsivity.
  • the response time of the optoelectronic device is from about 1 picosecond to about 1 nanosecond. In another aspect, the response time of the optoelectronic device is from about 1 picosecond to about 500 picoseconds.
  • the optoelectronic device has a responsivity of greater than or equal to about 0.5 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm. In yet another aspect, the optoelectronic device has a responsivity of greater than or equal to about 0.45 A/W for electromagnetic radiation having a wavelength of about 850 nm. In a further aspect, the optoelectronic device has a responsivity of greater than or equal to about 0.3 A/W for electromagnetic radiation having a wavelength of about 940 nm. In yet a further aspect, the optoelectronic device has a responsivity of greater than or equal to about 0.05 A/W for electromagnetic radiation having a wavelength of about 1060 nm.
  • the thickness of the device can dictate the responsivity and response time.
  • standard silicon devices need to be thick, i.e. greater than 100 ⁇ m in order to detect wavelengths in the infrared spectrum, and such detection with thick devices results in a slow response and high dark current.
  • a textured region positioned to interact with electromagnetic radiation can increase the absorption of infrared light in a device, thereby improving the infrared responsivity while allowing for fast operation. Diffuse scattering and reflection can result in increased path lengths for absorption, particularly if combined with total internal reflection, resulting in large improvements of responsivity in the infrared for silicon photodiodes, photodetectors, photodiode arrays, and the like.
  • thinner silicon materials can be used to absorb electromagnetic radiation up into the infrared regions.
  • One advantage of thinner silicon material devices is that charge carriers are more quickly swept from the device, thus decreasing the response time. Conversely, thick silicon material devices sweep charge carriers therefrom more slowly, at least in part due to diffusion.
  • the devices of the present disclosure increase the absorption path length of silicon materials by increasing the absorption path length for longer wavelengths as compared to traditional silicon devices.
  • the absorption depth in silicon photodetectors is the depth into silicon at which the radiation intensity is reduced to about 36% of the value at the surface of the silicon material.
  • the increased absorption path length results in an apparent reduction in the absorption depth, or a reduced apparent or effective absorption depth.
  • the effective absorption depth of silicon can be reduced such that longer wavelengths can be absorbed at depths of less than or equal to about 100 ⁇ m.
  • the response time can be decreased using thinner semiconductor materials.
  • optoelectronic devices provide, among other things, enhanced response in the infrared light portion of the optical spectrum and improved response and quantum efficiency in converting electromagnetic radiation to electrical signals.
  • high quantum efficiencies and high speeds can be obtained in the infrared for devices thinner than about 100 ⁇ m. In other words, the response is higher than that found in thicker devices at infrared wavelengths.
  • an optoelectronic device can include a silicon material 22 having a first doped region 24 and a second doped region 26 associated therewith.
  • the first and second doped regions thus form a semiconductive junction.
  • the first and second doped regions can be distinct from one another, contacting one another, overlapping one another, etc.
  • an intrinsic region can be located at least partially between the first and second doped regions.
  • the optoelectronic device can also include a textured region 28 coupled to the silicon material 22 and positioned to interact with incoming electromagnetic radiation 29 .
  • the textured region is located on a side of the silicon material that is opposite to the first doped region 24 and the second doped region 26 . Electromagnetic radiation that passes through the silicon material to contact the textured region can be reflected back through the silicon material, thus effectively increasing the absorption path length of the silicon material.
  • the textured region can be associated with an entire surface of the silicon material or only a portion thereof. Additionally, in some aspects the textured region can be specifically positioned to maximize the absorption path length of the silicon material. In other aspects, a third doping can be included near the textured region to improve the collection of carriers generated near the'textured region.
  • the silicon material can be of any thickness that allows electromagnetic radiation detection and conversion functionality, and thus any such thickness of silicon material is considered to be within the present scope. Although any thickness of the silicon material is considered to be within the present scope, thin silicon layer materials can be particularly beneficial in decreasing the response time and/or the capacitance of the device. As has been described, charge carriers can be more quickly swept from thinner silicon material layers as compared to thicker silicon material layers. The thinner the silicon, the less material the electron/holes have to traverse in order to be collected, and the lower the probability of a generated charge carrier encountering a defect that could trap or slow the collection of the carrier. Thus one objective to implementing a fast photo response is to utilize a thin silicon material for the body region of the photodiode.
  • Such a device can be nearly depleted of charge carriers by the built in potential of the photodiode and any applied bias to provide for a fast collection of the photo generated carriers by drift in an electric field.
  • Charge carriers remaining in any undepleted region of the photodiode are collected by diffusion transport, which is slower than drift transport. For this reason, it is desirable to have the thickness of any region where diffusion may dominate to be much thinner than the depleted drift regions.
  • silicon materials having the proper doping provides a depletion region of about 10 ⁇ m with no applied bias. As such, in some aspects it can be useful to utilize a silicon material layer having a thickness less of less than about 100 ⁇ m, or less than about 10 ⁇ m.
  • the silicon material can have a thickness and substrate doping concentration such that an applied bias generates an electrical field sufficient for saturation velocity of the charge carriers. It should be noted that operating a photodiode, as disclosed herein, at a zero bias can result in low noise but at a longer response time. When bias is applied however, the dark current is increased, resulting in higher noise, but with a decreased response time. The increased dark current can be compensated if the incident radiation signal is strong. The amount of dark current increase can be minimized, however, with a thinner device layer.
  • the silicon material has a thickness of from about 1 ⁇ m to about 100 ⁇ m. In another aspect, the silicon material has a thickness of from about 1 ⁇ m to about 50 ⁇ m. In yet another aspect, the silicon material has a thickness of from about 5 ⁇ m to about 10 ⁇ m. In a further aspect, the silicon material has a thickness of from about 1 ⁇ m to about 5 ⁇ m.
  • the response time of an optoelectronic device is limited by the transit time of the photo generated carriers across the thickness of the substrate.
  • the RC time constant of the load resistance, (R) and the capacitance (C) of the entire electronic device structure can be kept less than this transit time value by using small load resistors and keeping the capacitance of the photodiodes small by limiting the doping density of the silicon material and area of the photodiodes.
  • photodiodes doped at 10 15 /cm 3 can have a capacitance that may be 10 nF/cm 2 without any applied bias.
  • Small area photodiodes with 50 ohm load resistors can have very fast RC time constants.
  • the response time is bound by an upper limit of 2 ⁇ s.
  • the resultant upper response time limit is about 20 ns.
  • the responsivity can be on the order 10% or 0.3 Ampere/Watt.
  • an optoelectronic device has a response time of from about 100 picoseconds to about 1 nanosecond.
  • an optoelectronic device has a responsivity of from about 0.4 A/W to about 0.55 A/W for at least one wavelength of from about 800 nm to about 1200 nm relative to standard silicon.
  • an optoelectronic device has a responsivity of from about 0.1 A/W to about 0.55 A/W for at least one wavelength of from about 1000 nm to about 1200 nm relative to standard silicon.
  • the optoelectronic device has an increased external quantum efficiency of at least 10% for at least one wavelength of from about 550 nm to about 1200 nm relative to a silicon device with comparable thickness and response time.
  • an optoelectronic device has a data rate greater than or equal to about 1 Gbs. In a further aspect, an optoelectronic device has a data rate greater than or equal to about 2 Gbs.
  • optoelectronic devices can exhibit lower levels of dark current as compared to traditional devices. Although a variety of reasons are possible, one exemplary reason may be that a thinner silicon material layer can have fewer crystalline defects responsible for the generation of dark current.
  • the dark current of an optoelectronic device during operation is from about 100 pA/cm 2 to about 10 nA/cm 2 .
  • the maximum dark current of an optoelectronic device during operation is less than about 1 nA/cm 2 .
  • the silicon material is monocrystalline.
  • the silicon material is multicrystalline.
  • the silicon material is microcrystalline.
  • the silicon materials of the present disclosure can also be made using a variety of manufacturing processes. In some cases the manufacturing procedures can affect the efficiency of the device, and may be taken into account in achieving a desired result.
  • Exemplary manufacturing processes can include Czochralski (Cz) processes, magnetic Czochralski (mCz) processes, Float Zone (FZ) processes, epitaxial growth or deposition processes, and the like.
  • the silicon material is epitaxially grown.
  • the textured region can function to diffuse electromagnetic radiation, to redirect electromagnetic radiation, and to absorb electromagnetic radiation, thus increasing the QE of the device.
  • the textured region can include surface features to increase the effective absorption length of the silicon material.
  • the surface features can be cones, pyramids, pillars, protrusions, microlenses, quantum dots, inverted features and the like.
  • Factors such as manipulating the feature sizes, dimensions, material type, dopant profiles, texture location, etc. can allow the diffusing region to be tunable for a specific wavelength.
  • tuning the device can allow specific wavelengths or ranges of wavelengths to be absorbed.
  • tuning the device can allow specific wavelengths or ranges of wavelengths to be reduced or eliminated via filtering.
  • a textured region can allow a silicon material to experience multiple passes of incident electromagnetic radiation within the device, particularly at longer wavelengths (i.e. infrared). Such internal reflection increases the effective absorption length to be greater than the thickness of the semiconductor substrate. This increase in absorption length increases the quantum efficiency of the device, leading to an improved signal to noise ratio.
  • the textured region can be associated with the surface nearest the impinging electromagnetic radiation, or the textured region can be associated with a surface opposite in relation to impinging electromagnetic radiation, thereby allowing the radiation to pass through the silicon material before it hits the textured region.
  • the textured region can be doped. In one aspect, the textured region can be doped to the same or similar doping polarity as the silicon substrate so as to provide a doped contact region on the backside of the device.
  • the textured region can be formed by various techniques, including lasing, chemical etching (e.g. anisotropic etching, isotropic etching), nanoimprinting, additional material deposition, reactive ion etching, and the like.
  • One effective method of producing a textured region is through laser processing. Such laser processing allows discrete locations of the semiconductor substrate to be textured.
  • a variety of techniques of laser processing to form a textured region are contemplated, and any technique capable of forming such a region should be considered to be within the present scope.
  • Laser treatment or processing can allow, among other things, enhanced absorption properties and thus increased electromagnetic radiation focusing and detection.
  • a target region of the silicon material can be irradiated with laser radiation to form a textured region.
  • Examples of such processing have been described in further detail in U.S. Pat. Nos. 7,057,256, 7,354,792 and 7,442,629, which are incorporated herein by reference in their entireties.
  • a surface of a silicon material is irradiated with laser radiation to form a textured or surface modified region.
  • Such laser processing can occur with or without a dopant material.
  • the laser can be directed through a dopant carrier and onto the silicon surface. In this way, dopant from the dopant carrier is introduced into the target region of the silicon material.
  • the target region typically has a textured surface that increases the surface area of the laser treated region and increases the probability of radiation absorption via the mechanisms described herein.
  • such a target region is a substantially textured surface including micron-sized and/or nano-sized surface features that have been generated by the laser texturing.
  • irradiating the surface of the silicon material includes exposing the laser radiation to a dopant such that irradiation incorporates the dopant into the semiconductor.
  • dopant materials are known in the art, and are discussed in more detail herein. It is also understood that in some aspects such laser processing can occur in an environment that does not substantially dope the silicon material (e.g. an argon atmosphere).
  • the surface of the silicon material that forms the textured region is chemically and/or structurally altered by the laser treatment, which may, in some aspects, result in the formation of surface features appearing as nanostructures, microstructures, and/or patterned areas on the surface and, if a dopant is used, the incorporation of such dopants into the semiconductor material.
  • such features can be on the order of 50 nm to 20 ⁇ m in size and can assist in the absorption of electromagnetic radiation.
  • the textured surface can increase the probability of incident radiation being absorbed by the silicon material.
  • the type of laser radiation used to surface modify a silicon material can vary depending on the material and the intended modification. Any laser radiation known in the art can be used with the devices and methods of the present disclosure. There are a number of laser characteristics, however, that can affect the surface modification process and/or the resulting product including, but not limited to the wavelength of the laser radiation, pulse width, pulse fluence, pulse frequency, polarization, laser propagation direction relative to the silicon material, etc.
  • a laser can be configured to provide pulsatile lasing of a silicon material.
  • a short-pulsed laser is one capable of producing femtosecond, picosecond and/or nanosecond pulse durations.
  • Laser pulses can have a central wavelength in a range of about from about 10 nm to about 12 ⁇ m, and more specifically from about 200 nm to about 1600 nm.
  • the pulse width of the laser radiation can be in a range of from about tens of femtoseconds to about hundreds of nanoseconds.
  • laser pulse widths can be in the range of from about 50 femtoseconds to about 50 picoseconds.
  • laser pulse widths can be in the range of from about 50 picoseconds to 100 nanoseconds.
  • laser pulse widths are in the range of from about 50 to 500 femtoseconds.
  • the number of laser pulses irradiating a target region can be in a range of from about 1 to about 5000. In one aspect, the number of laser pulses irradiating a target region can be from about 2 to about 1000. Further, the repetition rate or frequency of the pulses can be selected to be in a range of from about 10 Hz to about 10 MHz, or in a range of from about 1 kHz to about 1 MHz, or in a range from about 10 Hz to about 10 kHz. Moreover, the fluence of each laser pulse can be in a range of from about 1 kJ/m 2 to about 20 kJ/m 2 , or in a range of from about 3 kJ/m 2 to about 8 kJ/m 2 .
  • dopants are contemplated, and any such material that can be used in doping the first doped region, the second doped region, the textured region, or any other doped portion of the optoelectronic device is considered to be within the present scope. It should be noted that the particular dopant utilized can vary depending on the silicon material being laser treated, as well as the intended uses of the resulting silicon material.
  • a dopant can be either electron donating or hole donating.
  • dopants can include S, F, B, P, N, As, Se, Te, Ge, Ar, Ga, In, Sb, and combinations thereof.
  • the scope of dopants should include, not only the dopants themselves, but also materials in forms that deliver such dopants (i.e. dopant carriers).
  • S dopants includes not only S, but also any material capable being used to dope S into the target region, such as, for example, H 2 S, SF 6 , SO 2 , and the like, including combinations thereof.
  • the dopant can be S.
  • Sulfur can be present at an ion dosage level of between about 5 ⁇ 10 14 and about 1 ⁇ 10 16 ions/cm 2 .
  • fluorine-containing compounds can include ClF 3 , PF 5 , F 2 SF 6 , BF 3 , GeF 4 , WF 6 , SiF 4 , HF, CF 4 , CHF 3 , CH 2 F 2 , CH 3 F, C 2 F 6 , C 2 HF 5 , C 3 F 8 , C 4 F 8 , NF 3 , and the like, including combinations thereof.
  • Non-limiting examples of boron-containing compounds can include B(CH 3 ) 3 , BF 3 , BCl 3 , BN, C 2 B 10 H 12 , borosilica, B 2 H 6 , and the like, including combinations thereof.
  • Non-limiting examples of phosphorous-containing compounds can include PF 5 , PH 3 , and the like, including combinations thereof.
  • Non-limiting examples of chlorine-containing compounds can include Cl 2 , SiH 2 Cl 2 , HCl, SiCl 4 , and the like, including combinations thereof.
  • Dopants can also include arsenic-containing compounds such as AsH 3 and the like, as well as antimony-containing compounds. Additionally, dopant materials can include mixtures or combinations across dopant groups, i.e.
  • the dopant material can have a density that is greater than air.
  • the dopant material can include Se, H 2 S, SF 6 , or mixtures thereof.
  • the dopant can be SF 6 and can have a predetermined concentration range of about 5.0 ⁇ 10 ⁇ 8 mol/cm 3 to about 5.0 ⁇ 10 ⁇ 4 mol/cm 3 .
  • SF 6 gas is a good carrier for the incorporation of sulfur into the semiconductor material via a laser process without significant adverse effects on the silicon material.
  • dopants can also be liquid solutions of n-type or p-type dopant materials dissolved in a solution such as water, alcohol, or an acid or basic solution. Dopants can also be solid materials applied as a powder or as a suspension dried onto the wafer.
  • the first doped region and the second doped region can be doped with an electron donating or hole donating species to cause the regions to become more positive or negative in polarity as compared to each other and/or the silicon substrate.
  • either doped region can be p-doped.
  • either doped region can be n-doped.
  • the first doped region can be negative in polarity and the second doped region can be positive in polarity by doping with p+ and n ⁇ dopants.
  • n( ⁇ ), n( ⁇ ), n(+), n(++), p( ⁇ ), p( ⁇ ), p(+), or p(++) type doping of the regions can be used.
  • the silicon material can be doped in addition to the first and second doped regions.
  • the silicon material can be doped to have a doping polarity that is different from one or more of the first and second doped regions, of the silicon material can be doped to have a doping polarity that is the same as one or more of the first and second doped regions.
  • the silicon material can be doped to be p-type and one or more of the first and second doped regions can be n-type.
  • the silicon material can be doped to be n-type and one or more of the first and second doped regions can be p-type. In one aspect, at least one of the first or second doped regions has a surface area of from about 0.1 ⁇ m 2 to about 32 ⁇ m 2 .
  • At least a portion of the textured region and/or the silicon material can be doped with a dopant to generate a back surface field.
  • a back surface field can function to repel generated charge carriers from the backside of the device and toward the junction to improve collection efficiency and speed.
  • the addition of a back surface field can increase charge carrier collection and depletion.
  • the presence of a back surface field also acts to suppress dark current contribution from the surface of a device.
  • an optoelectronic device can include a silicon material 32 having a first doped region 34 and a second doped region 36 associated therewith, where the first and second doped regions form a semiconductive photodiode junction.
  • a textured region 38 is coupled to the silicon material, and is positioned to interact with electromagnetic radiation.
  • the optoelectronic device can also include a first contact 37 to provide electrical contact to one side of the device, and a second contact 39 to provide electrical contact with the other side of the device.
  • the first contact and the second contact are opposite in voltage polarity from one another. Note that in some aspects, the first and second contacts can be on the same side of the device (not shown).
  • a support substrate 35 can be coupled to the device in order to provide structural stability thereto.
  • the one of the contacts can be a doped portion of the textured region. Either a portion of the textured region or the entire textured region can be doped to create one of the contacts.
  • a reverse bias is applied across the first and second contacts.
  • Such a reverse bias can function to decrease the response time of the device by more quickly sweeping charge carriers from the silicon material. Accordingly, for those situations whereby a bias is used, any bias voltage capable of sweeping charge carriers from the silicon material is considered to be within the present scope.
  • the reverse bias is from about 0.001 V to about 20 V. In another aspect, the reverse bias is from about 0.001 V to about 10 V. In yet another aspect, the reverse bias is from about 0.001 V to about 5 V. In a further aspect, the reverse bias is from about 0.001 V to about 3 V.
  • the reverse bias is from about 3 V to about 5 V.
  • the reverse bias can be absent, or in other words, 0 V is applied across the first and second contacts.
  • the charge carriers can be depleted from the silicon material by the junction potential created by the first and second doped regions.
  • the first and second doped regions can be on opposite sides of the silicon material.
  • a silicon material 42 can include a first doped region 44 associated with one surface of the silicon material and a second doped region 46 associated with the opposite side of the silicon material.
  • the textured region can be associated with either doped region.
  • a silicon material 52 can include a first doped region 54 associated with one surface of the silicon material and a second doped region 56 associated with the opposite side of the silicon material, where a textured region 58 is associated with the first doped region.
  • the textured region is associated with the second doped region (not shown).
  • a textured region can be associated with each doped region (not shown).
  • a silicon material 62 can have a first doped region 64 and a second dope region 66 on one surface, and a textured region 68 on an opposing surface. In this case, electromagnetic radiation 69 is incident on the side of the silicon material having the textured surface.
  • a silicon material 72 can have a first doped region 74 and a second doped region 76 on an opposing surface to a textured region 78 .
  • An antireflective layer 77 can be coupled to the silicon material on the opposite surface to the textured layer. In some aspects, the antireflective layer can be on the same side of the silicon material as the textured region (not shown).
  • a lens can be optically coupled to the silicon material and positioned to focus incident electromagnetic radiation into the silicon material.
  • a photodiode array can include a silicon material having an incident light surface, at least two photodiodes in the silicon material, where each photodiode includes a first doped region and a second doped region forming a junction, and a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation.
  • the textured region can be a single textured region or multiple textured regions.
  • the photodiode array has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.
  • a silicon material 88 can include at least two photodiodes 83 each having a first doped region 84 and a second doped region 86 .
  • a textured region 88 is positioned to interact with electromagnetic radiation.
  • FIG. 8 shows a separate textured region for each photodiode.
  • a single textured region can be used to increase the absorption path lengths of multiple photodiodes in the array.
  • an isolation structure 57 can be positioned between the photodiodes to electrically and/or optically isolate the photodiodes from one another.
  • the photodiode array can be electronically coupled to electronic circuitry to process the signals generated by each photodiode.
  • isolation structures can be shallow or deep trench isolation. Furthermore, the isolation structure can include depths between traditional shallow and deep isolation, depending on the device design. Isolation structures can include dielectric materials, reflective materials, conductive materials, and combinations thereof, including textured regions and other light diffusing features. Thus the isolation structure can be configured to reflect incident electromagnetic radiation, in some cases until it is absorbed, thereby increasing the effective absorption length of the device.
  • Photodiode arrays can have a variety of uses.
  • such an array can be an imager.
  • Numerous types of imagers are contemplated, and any such imager or imaging application is considered to be within the present scope.
  • Non-limiting examples include 3D imaging, machine vision, night vision, security and surveillance, various commercial applications, laser range finding and marking, and the like.
  • the array is operable to detect a phase delay between a reflected and an emitted optical signal.
  • various applications can benefit from depth information, such as hands-free gesture control, video games, medical applications, machine vision, etc.
  • Time-of-flight is a technique developed for use in radar and LIDAR (Light Detection and Ranging) systems to provide depth information.
  • the basic principle of TOF involves sending a signal and measuring a property of the returned signal from a target. The measured property is used to determine the TOF. Distance to the target is therefore derived by multiplication of half the TOF and the velocity of the signal.
  • FIG. 9 illustrates a time of flight measurement with a target having multiple surfaces that are separated spatially. Equation (III) can be used to measure the distance to a target where d is the distance to the target and c is the speed of light.
  • a TOF measurement can utilize a modulated LED light pulse and measure the phase delay between emitted light and received light. Based on the phase delay and the LED pulse width, the TOF can be derived.
  • TOF concept has been utilized in both CMOS and CCD sensor to obtain depth information from each pixel.
  • an infrared LED or laser emits a modulated light pulse to illuminate a target.
  • the measured phase shift between emitted and received light can be used to derive the depth information.
  • Such methods can have various problematic issues. For example, ambiguity (e.g. aliasing) occurs if the TOF difference between two targets is equal to half period of light source modulation frequency. To solve the ambiguity issue, an often used approach is to measure the same scene with multiple modulation frequencies.
  • a 3D pixel such as a TOF 3D pixel with enhanced infrared response can improve depth accuracy.
  • a photoimager array can include at least one 3D infrared detecting pixel and at least one visible light detecting pixel arranged monolithically in relation to each other.
  • FIGS. 10 a - c show non-limiting example configurations of pixel arrangements of such arrays.
  • FIG. 10 a shows one example of a pixel array arrangement having a red pixel 102 , a blue pixel 104 , and a green pixel 106 .
  • two 3D TOF pixels ( 108 and 109 ) having enhanced responsivity or detectability in the infrared regions of the light spectrum are included.
  • FIG. 10 b the pixel arrangement shown includes an imager as described in FIG. 10 a and three arrays of a red pixel, a blue pixel, and two green pixels.
  • one TOF pixel ( 108 and 109 ) replaces one quadrant of a RGGB pixel design.
  • the addition of several green pixels allows for the capture of more green wavelengths that is needed for green color sensitivity need for the human eye, while at the same time capturing the infrared light for depth perception.
  • FIG. 10 c shows another arrangement of pixels according to yet another aspect.
  • Non-limiting examples of such components can include a carrier wafer, an antireflective layer, a dielectric layer, circuitry layer, a via(s), a transfer gate, an infrared filter, a color filter array (CFA), an infrared cut filter, an isolation feature, and the like. Additionally, such devices can have light absorbing properties and elements as has been disclosed in U.S. patent application Ser. No. 12/885,158, filed on Sep. 17, 2010 which is incorporated by reference in its entirety.
  • a TOF pixel can have an on-pixel optical narrow band pass filter.
  • the narrow band pass filter design can match the modulated light source (either LED or laser) emission spectrum and may significantly reduce unwanted ambient light that can further increase the signal to noise ratio of modulated infrared light.
  • Another benefit of increased infrared QE is the possibility of high frame rate operation for high speed 3D image capture.
  • An integrated infrared cut filter can allow a high quality visible image with high fidelity color rendering. Integrating an infrared cut filter onto the sensor chip can also reduce the total system cost of a camera module (due to the removal of typical IR filter glass) and reduce module profile (good for mobile applications).
  • the thickness and responsivity of a QE enhanced imager can have significant impact on a TOF pixel operation, due to the increased speed and detection.
  • the increased QE will contribute to higher image signal to noise, which will greatly reduce depth error.
  • increased QE on a silicon material having a thickness of less than about 100 ⁇ m can allow the pixel to reduce the diffusion component of signal so that the charge collection and transfer speed can be increased, which is good for TOF pixel operation.
  • the photo-generated carrier created inside pixel will depend on two mechanisms for collection: drift and diffusion. For light having shorter wavelengths, most of the charge carriers will be generated in a shallow region of the device and within the depletion region of the diode. Those carriers can be collected relatively fast, via drift.
  • a high QE can be achieved within a thin (i.e. less than 100 ⁇ m) layer of silicon material. Therefore, substantially all of the carriers generated can be collected via drift mechanism. This allows a fast charge collection and transfer.
  • FIG. 11 shows an exemplary schematic for a six-transistor (6-T) architecture which will allow global shutter operation according to one aspect of the present disclosure.
  • the pixel can include a photodiode (PD), a global reset (Global_RST), a global transfer gate (Global_TX), a storage node, a transfer gate (TX 1 ), reset (RST), source follower (SF), floating diffusion (FD), row select transistor (RS), power supply (Vaapix) and voltage out (Vout).
  • PD photodiode
  • Global_RST global reset
  • GX 1 global transfer gate
  • RST reset
  • SF floating diffusion
  • RS row select transistor
  • Vaapix power supply
  • Vout voltage out
  • FIG. 12 shows an exemplary schematic of a 3D TOF pixel according to one aspect of the present disclosure.
  • the 3D TOF pixel can have 11 transistors for accomplishing the depth measurement of the target.
  • the 3D pixel can comprise a photodiode (PD), a global reset (Global_RST), a first global transfer gate (Global_TX 1 ), a first storage node, a first transfer gate (TX 1 ), a first reset (RST 1 ), a first source follower (SF 1 ), a first floating diffusion (FD 1 ), a first row select transistor (RS 1 ), a second global transfer gate (Global_TX 2 ), a second storage node, a second transfer gate (TX 2 ), a second reset (RST 2 ), a second source follower (SF 2 ), a second floating diffusion (FD 2 ), a second row select transistor (RS 2 ), power supply (Vaapix) and voltage out (Vout).
  • Other transistors can be included in the 3D
  • a photodiode array can be used in various communication applications.
  • the array can be used to detect pulsed optical signals.
  • pulsed signals can be used to carry data at high speeds.
  • the pulsed optical signals can have pulse widths from about 1 femtosecond to about 1 microsecond.
  • the at least two photodiodes are operable to transmit data at a rate of at least 1 Gbps.
  • the at least two photodiodes are operable to transmit data at a rate of at least 2 Gbps.
  • an array of four photodiodes forming a quad photodiode array (quad array) is provided.
  • a quad array can be used in a variety of applications, including communications, laser range finding, laser alignment, and the like.
  • the four photodiodes can have uniform photo response, or in other words, are selective to the same wavelength range. It can also be beneficial to have little to no electrical and/or optical cross talk between the photodiodes in the quad array. For this reason, isolation structures can be disposed between the photodiodes can be beneficial. Some application can also benefit from the high speed operation of the photodiodes according to aspects of the present disclosure.
  • FIGS. 13 and 14 show exemplary configurations of quad arrays. FIG.
  • FIG. 13 shows a quad array of four photodiodes 130 including a silicon material 132 and a doped region 134 .
  • the doped region is made up of multiple doped regions forming a junction.
  • An isolation structure 136 is located between the photodiodes to electrically and/or optically isolate the photodiodes against undesirable cross talk.
  • FIG. 14 shows a similar arrangement in a circular configuration.
  • This array includes four photodiodes 140 including a silicon material 142 , a doped region 144 , and an isolation structure 146 .
  • the isolation structure can include a dielectric material for electrical isolation and a metal material for a high reflectivity to the light incidence on the walls of the trench.
  • the sides and surfaces of the diode between the isolation regions can be more heavily doped than the silicon material in order to pin the Fermi level at the band edge and reduce the dark current.
  • the photodiode can also include a buried layer of opposite conductivity type to the silicon material.
  • the doping of the silicon material can be kept low and the thickness can be thinned to provide a fast response time to the optical signal.
  • a textured region can function to backside scatter light that passes through the silicon material, thus improving near infrared responsivity.
  • a method of increasing the speed of an optoelectronic device can include doping at least two regions in a silicon material to form at least one junction 152 and texturing the silicon material to form a textured region positioned to interact with electromagnetic radiation 154 .
  • the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Light Receiving Elements (AREA)
US13/164,630 2010-06-18 2011-06-20 High Speed Photosensitive Devices and Associated Methods Abandoned US20120146172A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US13/164,630 US20120146172A1 (en) 2010-06-18 2011-06-20 High Speed Photosensitive Devices and Associated Methods
US14/580,143 US9761739B2 (en) 2010-06-18 2014-12-22 High speed photosensitive devices and associated methods
US15/679,827 US10505054B2 (en) 2010-06-18 2017-08-17 High speed photosensitive devices and associated methods
US16/708,335 US20200111922A1 (en) 2010-06-18 2019-12-09 High speed photosensitive devices and associated methods
US17/514,775 US12040415B2 (en) 2010-06-18 2021-10-29 High speed photosensitive devices and associated methods

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35653610P 2010-06-18 2010-06-18
US13/164,630 US20120146172A1 (en) 2010-06-18 2011-06-20 High Speed Photosensitive Devices and Associated Methods

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/580,143 Continuation US9761739B2 (en) 2010-06-18 2014-12-22 High speed photosensitive devices and associated methods

Publications (1)

Publication Number Publication Date
US20120146172A1 true US20120146172A1 (en) 2012-06-14

Family

ID=45348930

Family Applications (5)

Application Number Title Priority Date Filing Date
US13/164,630 Abandoned US20120146172A1 (en) 2010-06-18 2011-06-20 High Speed Photosensitive Devices and Associated Methods
US14/580,143 Active US9761739B2 (en) 2010-06-18 2014-12-22 High speed photosensitive devices and associated methods
US15/679,827 Active US10505054B2 (en) 2010-06-18 2017-08-17 High speed photosensitive devices and associated methods
US16/708,335 Abandoned US20200111922A1 (en) 2010-06-18 2019-12-09 High speed photosensitive devices and associated methods
US17/514,775 Active 2031-08-14 US12040415B2 (en) 2010-06-18 2021-10-29 High speed photosensitive devices and associated methods

Family Applications After (4)

Application Number Title Priority Date Filing Date
US14/580,143 Active US9761739B2 (en) 2010-06-18 2014-12-22 High speed photosensitive devices and associated methods
US15/679,827 Active US10505054B2 (en) 2010-06-18 2017-08-17 High speed photosensitive devices and associated methods
US16/708,335 Abandoned US20200111922A1 (en) 2010-06-18 2019-12-09 High speed photosensitive devices and associated methods
US17/514,775 Active 2031-08-14 US12040415B2 (en) 2010-06-18 2021-10-29 High speed photosensitive devices and associated methods

Country Status (4)

Country Link
US (5) US20120146172A1 (zh)
EP (1) EP2583312A2 (zh)
CN (2) CN106449684B (zh)
WO (1) WO2011160130A2 (zh)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110291213A1 (en) * 2009-02-25 2011-12-01 Hamamatsu Photonics K.K. Photodiode manufacturing method and photodiodes
US8736008B2 (en) 2012-01-04 2014-05-27 General Electric Company Photodiode array and methods of fabrication
US20150381907A1 (en) * 2014-06-26 2015-12-31 Semiconductor Components Industries, Llc Imaging systems for infrared and visible imaging with patterned infrared cutoff filters
US20170256069A1 (en) * 2016-03-01 2017-09-07 Magic Leap, Inc. Depth sensing systems and methods
US20180308328A1 (en) * 2017-04-20 2018-10-25 Ring Inc. Automatic adjusting of day-night sensitivity for motion detection in audio/video recording and communication devices
US10134926B2 (en) * 2015-02-03 2018-11-20 Microsoft Technology Licensing, Llc Quantum-efficiency-enhanced time-of-flight detector
US10264242B2 (en) * 2016-12-12 2019-04-16 Commissariat à l'Energie Atomique et aux Energies Alternatives Image sensor for capturing 2D image and depth
US20200098299A1 (en) * 2018-09-20 2020-03-26 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel and method of driving the same
WO2020062825A1 (en) * 2018-09-28 2020-04-02 Boe Technology Group Co., Ltd. Photodetector, display substrate including photodetector, method of fabricating photodetector, and display panel
WO2020092471A1 (en) 2018-10-30 2020-05-07 Sense Photonics, Inc. High quantum efficiency geiger-mode avalanche diodes including high sensitivity photon mixing structures and arrays thereof
US11978754B2 (en) 2018-02-13 2024-05-07 Sense Photonics, Inc. High quantum efficiency Geiger-mode avalanche diodes including high sensitivity photon mixing structures and arrays thereof

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7442629B2 (en) 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
EP2847797B1 (en) 2012-05-11 2018-04-04 Nxp B.V. Integrated circuit with directional light sensor, device including such an ic
EP2662895B1 (en) 2012-05-11 2014-06-25 Nxp B.V. Integrated circuit including a directional light sensor
US9713437B2 (en) 2013-01-26 2017-07-25 Cianna Medical, Inc. Microwave antenna apparatus, systems, and methods for localizing markers or tissue structures within a body
US10660542B2 (en) 2013-01-26 2020-05-26 Cianna Medical, Inc. RFID markers and systems and methods for identifying and locating them
US11426256B2 (en) * 2016-03-03 2022-08-30 Cianna Medical, Inc. Implantable markers, and systems and methods for using them
CN104900666B (zh) * 2015-05-07 2017-08-11 重庆鹰谷光电有限公司 深槽隔离防串扰的光电探测器及其制作方法
US10163948B2 (en) * 2015-07-23 2018-12-25 Semiconductor Energy Laboratory Co., Ltd. Imaging device and electronic device
EP3147954A1 (en) * 2015-09-22 2017-03-29 Nokia Technologies Oy Photodetector with conductive channel made from two dimensional material and its manufacturing method
US10886309B2 (en) 2015-11-06 2021-01-05 Artilux, Inc. High-speed light sensing apparatus II
US10254389B2 (en) 2015-11-06 2019-04-09 Artilux Corporation High-speed light sensing apparatus
US10418407B2 (en) 2015-11-06 2019-09-17 Artilux, Inc. High-speed light sensing apparatus III
US10827949B2 (en) 2016-04-06 2020-11-10 Cianna Medical, Inc. Reflector markers and systems and methods for identifying and locating them
US11226402B2 (en) * 2016-06-09 2022-01-18 Ams Sensors Singapore Pte. Ltd. Optical ranging systems including optical cross-talk reducing features
US10469775B2 (en) * 2017-03-31 2019-11-05 Semiconductor Components Industries, Llc High dynamic range storage gate pixel circuitry
WO2018191808A1 (en) 2017-04-20 2018-10-25 Huawei Technologies Co., Ltd. Optical pulse clipper for lidar
US10224364B2 (en) * 2017-07-05 2019-03-05 Omnivision Technologies, Inc. CMOS image sensor having enhanced near infrared quantum efficiency and modulation transfer function
EP3658962A4 (en) * 2017-07-26 2021-02-17 Shenzhen Xpectvision Technology Co., Ltd. RADIATION DETECTOR AND METHOD OF MANUFACTURING THEREOF
US11482553B2 (en) 2018-02-23 2022-10-25 Artilux, Inc. Photo-detecting apparatus with subpixels
US11105928B2 (en) 2018-02-23 2021-08-31 Artilux, Inc. Light-sensing apparatus and light-sensing method thereof
TWI788246B (zh) * 2018-02-23 2022-12-21 美商光程研創股份有限公司 光偵測裝置
DE102018106970A1 (de) 2018-03-23 2019-09-26 Osram Opto Semiconductors Gmbh Optoelektronisches Halbleiterbauelement und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauelements
US11883150B2 (en) 2018-09-06 2024-01-30 Cianna Medical, Inc. Systems for identifying and locating reflectors using orthogonal sequences of reflector switching
TR201819952A2 (tr) * 2018-12-20 2020-07-21 Hacettepe Ueniversitesi Geni̇ş bant araliğinda çalişan bi̇r yarii̇letken fotodi̇yot ve elde etme yöntemi̇
FI20195457A1 (en) * 2019-05-31 2020-12-01 Elfys Oy Radiation sensor element and method
TWI711027B (zh) * 2019-12-04 2020-11-21 友達光電股份有限公司 畫素補償電路與顯示裝置
CA3187572A1 (en) * 2020-06-24 2021-12-30 SenoGen GmbH Systems, methods, and apparatus for ocular laser therapy

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060231914A1 (en) * 2001-05-25 2006-10-19 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
US20090242032A1 (en) * 2008-03-28 2009-10-01 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and method for manufacturing the same

Family Cites Families (739)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3487223A (en) 1968-07-10 1969-12-30 Us Air Force Multiple internal reflection structure in a silicon detector which is obtained by sandblasting
US4017887A (en) 1972-07-25 1977-04-12 The United States Of America As Represented By The Secretary Of The Air Force Method and means for passivation and isolation in semiconductor devices
US3973994A (en) 1974-03-11 1976-08-10 Rca Corporation Solar cell with grooved surface
US3922571A (en) 1974-06-12 1975-11-25 Bell Telephone Labor Inc Semiconductor voltage transformer
US3994012A (en) 1975-05-07 1976-11-23 The Regents Of The University Of Minnesota Photovoltaic semi-conductor devices
JPS52109884A (en) 1976-03-11 1977-09-14 Nec Corp Stripe type hetero junction semoonductor laser
GB1573309A (en) 1976-03-24 1980-08-20 Mullard Ltd Semiconductor devices and their manufacture
US4201450A (en) 1978-04-03 1980-05-06 Polaroid Corporation Rigid electro-optic device using a transparent ferroelectric ceramic element
US4176365A (en) 1978-05-08 1979-11-27 Sperry Rand Corporation Josephson tunnel junction device with hydrogenated amorphous silicon, germanium or silicon-germanium alloy tunneling barrier
GB2030766A (en) 1978-09-02 1980-04-10 Plessey Co Ltd Laser treatment of semiconductor material
US4181538A (en) 1978-09-26 1980-01-01 The United States Of America As Represented By The United States Department Of Energy Method for making defect-free zone by laser-annealing of doped silicon
JPS55120175A (en) 1979-03-12 1980-09-16 Clarion Co Ltd Variable capacitance diode with plural super-capacitance variable electrode structures
US4277793A (en) * 1979-07-16 1981-07-07 Rca Corporation Photodiode having enhanced long wavelength response
GB2207801B (en) 1979-07-30 1989-05-24 Secr Defence Thermal imaging devices
US4242149A (en) 1979-07-31 1980-12-30 The United States Of America As Represented By The Secretary Of The Army Method of making photodetectors using ion implantation and laser annealing
US4253882A (en) 1980-02-15 1981-03-03 University Of Delaware Multiple gap photovoltaic device
US4322571A (en) 1980-07-17 1982-03-30 The Boeing Company Solar cells and methods for manufacture thereof
US4343832A (en) 1980-10-02 1982-08-10 Motorola, Inc. Semiconductor devices by laser enhanced diffusion
US4346164A (en) 1980-10-06 1982-08-24 Werner Tabarelli Photolithographic method for the manufacture of integrated circuits
JPS5771188A (en) 1980-10-21 1982-05-01 Mitsubishi Electric Corp Amorphous solar cell
US4568960A (en) 1980-10-23 1986-02-04 Rockwell International Corporation Blocked impurity band detectors
US4452826A (en) 1980-11-24 1984-06-05 Hughes Aircraft Company Use of polysilicon for smoothing of liquid crystal MOS displays
JPS57173966A (en) 1981-04-20 1982-10-26 Fuji Photo Film Co Ltd Solid state image pickup device
US4546945A (en) 1981-04-30 1985-10-15 Sea Co Services Limited Freight-carrying platforms
US4593303A (en) * 1981-07-10 1986-06-03 Fairchild Camera & Instrument Corporation Self-aligned antiblooming structure for charge-coupled devices
EP0078541B1 (en) 1981-11-04 1991-01-16 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Flexible photovoltaic device
US4419533A (en) 1982-03-03 1983-12-06 Energy Conversion Devices, Inc. Photovoltaic device having incident radiation directing means for total internal reflection
US4514582A (en) 1982-09-17 1985-04-30 Exxon Research And Engineering Co. Optical absorption enhancement in amorphous silicon deposited on rough substrate
US4663188A (en) 1982-09-27 1987-05-05 Rca Corporation Method for making a photodetector with enhanced light absorption
JPS59127879A (ja) 1983-01-12 1984-07-23 Semiconductor Energy Lab Co Ltd 光電変換装置およびその作製方法
US4493942A (en) 1983-01-18 1985-01-15 Exxon Research And Engineering Co. Solar cell with two-dimensional reflecting diffraction grating
US4536608A (en) 1983-04-25 1985-08-20 Exxon Research And Engineering Co. Solar cell with two-dimensional hexagonal reflecting diffraction grating
JPH0785135B2 (ja) 1983-09-05 1995-09-13 オリンパス光学工業株式会社 内視鏡装置
DE3437561A1 (de) 1983-10-13 1985-04-25 Canon K.K., Tokio/Tokyo Bildaufnahmevorrichtung
AU565214B2 (en) 1983-12-23 1987-09-10 Unisearch Limited Laser grooved solar cell
JPS60138918A (ja) 1983-12-27 1985-07-23 Toshiba Corp 半導体装置の製造方法
US4617593A (en) 1984-08-07 1986-10-14 Texas Instruments Incorporated Visible and near infrared imaging system
US4703996A (en) 1984-08-24 1987-11-03 American Telephone And Telegraph Company, At&T Bell Laboratories Integrated optical device having integral photodetector
AU560866B2 (en) 1984-09-25 1987-04-16 Matsushita Electric Works Ltd. Passive infrared detector
US4679068A (en) 1985-07-25 1987-07-07 General Electric Company Composite visible/thermal-infrared imaging system
US4648936A (en) 1985-10-11 1987-03-10 The United States Of America As Represented By The United States Department Of Energy Dopant type and/or concentration selective dry photochemical etching of semiconductor materials
US4673770A (en) 1985-10-21 1987-06-16 Joseph Mandelkorn Glass sealed silicon membrane solar cell
US4777490A (en) 1986-04-22 1988-10-11 General Electric Company Monolithic antenna with integral pin diode tuning
JPS63153A (ja) 1986-05-26 1988-01-05 Fujitsu Ltd 電荷転送装置
JPH0642291B2 (ja) 1986-08-25 1994-06-01 キヤノン株式会社 集積化光ヘツド
US4723086A (en) 1986-10-07 1988-02-02 Micronix Corporation Coarse and fine motion positioning mechanism
JPS63116421A (ja) 1986-11-05 1988-05-20 Mitsubishi Electric Corp 半導体装置の製造方法
US4894526A (en) 1987-01-15 1990-01-16 American Telephone And Telegraph Company, At&T Bell Laboratories Infrared-radiation detector device
GB8703743D0 (en) 1987-02-18 1987-03-25 British Telecomm Semiconductor laser structures
US4775425A (en) 1987-07-27 1988-10-04 Energy Conversion Devices, Inc. P and n-type microcrystalline semiconductor alloy material including band gap widening elements, devices utilizing same
US4751571A (en) 1987-07-29 1988-06-14 General Electric Company Composite visible/thermal-infrared imaging apparatus
US4773944A (en) 1987-09-08 1988-09-27 Energy Conversion Devices, Inc. Large area, low voltage, high current photovoltaic modules and method of fabricating same
US4968354A (en) 1987-11-09 1990-11-06 Fuji Electric Co., Ltd. Thin film solar cell array
US5146296A (en) 1987-12-03 1992-09-08 Xsirius Photonics, Inc. Devices for detecting and/or imaging single photoelectron
WO1989006051A1 (en) 1987-12-17 1989-06-29 Unisearch Limited Improved optical properties of solar cells using tilted geometrical features
US4886958A (en) 1988-03-25 1989-12-12 Texas Instruments Incorporated Autofocus system for scanning laser inspector or writer
US5182231A (en) 1988-04-07 1993-01-26 Hitachi, Ltd. Method for modifying wiring of semiconductor device
US4838952A (en) 1988-04-29 1989-06-13 Spectrolab, Inc. Controlled reflectance solar cell
US4965784A (en) 1988-05-31 1990-10-23 Sandia Corporation Method and apparatus for bistable optical information storage for erasable optical disks
US6048588A (en) 1988-07-08 2000-04-11 Cauldron Limited Partnership Method for enhancing chemisorption of material
US5081049A (en) 1988-07-18 1992-01-14 Unisearch Limited Sculpted solar cell surfaces
DE3827433C2 (de) 1988-08-12 1994-04-21 Deutsche Aerospace Verfahren zur Herstellung eines flexiblen Trägersubstrates
US5873821A (en) 1992-05-18 1999-02-23 Non-Invasive Technology, Inc. Lateralization spectrophotometer
JPH02152226A (ja) 1988-12-02 1990-06-12 Fujitsu Ltd 半導体装置の製造方法
JP2864518B2 (ja) 1989-03-09 1999-03-03 ソニー株式会社 半導体装置の製造方法
JP2738557B2 (ja) 1989-03-10 1998-04-08 三菱電機株式会社 多層構造太陽電池
US5101260A (en) 1989-05-01 1992-03-31 Energy Conversion Devices, Inc. Multilayer light scattering photovoltaic back reflector and method of making same
US5383217A (en) 1989-05-09 1995-01-17 Nikon Corporation Exposure apparatus with laser source requiring new gas introduction
JPH03131083A (ja) 1989-10-17 1991-06-04 Mitsubishi Electric Corp 半導体レーザ装置の製造方法
JPH0795602B2 (ja) 1989-12-01 1995-10-11 三菱電機株式会社 太陽電池及びその製造方法
JP2647982B2 (ja) 1989-12-11 1997-08-27 日本電気株式会社 光記憶体
WO1991014284A1 (en) 1990-03-06 1991-09-19 Unisearch Limited Schottky junction charge coupled device
US5164324A (en) 1990-03-29 1992-11-17 The United States Of America As Represented By The Secretary Of The Navy Laser texturing
US5322988A (en) 1990-03-29 1994-06-21 The United States Of America As Represented By The Secretary Of The Navy Laser texturing
JP3154418B2 (ja) 1990-06-21 2001-04-09 キヤノン株式会社 半導体光増幅装置、光通信システム、双方向光通信システム、光通信ネットワーク、及び集積型光ノード
JP2689698B2 (ja) 1990-07-19 1997-12-10 国際電信電話株式会社 αパラメータ符号を反転させた半導体素子
GB9018957D0 (en) 1990-08-31 1990-10-17 Champion Spark Plug Europ Electronic switch comprising a photosensitive semiconductor
US5114876A (en) 1990-12-07 1992-05-19 The United States Of America As Represented By The United States Department Of Energy Selective epitaxy using the gild process
US5223043A (en) 1991-02-11 1993-06-29 The United States Of America As Represented By The United States Department Of Energy Current-matched high-efficiency, multijunction monolithic solar cells
US5234790A (en) 1991-03-04 1993-08-10 E. I. Du Pont De Nemours And Company Peel-apart photosensitive element
JPH04318970A (ja) 1991-04-17 1992-11-10 Mitsubishi Electric Corp 光検知装置の製造方法
US5413100A (en) 1991-07-17 1995-05-09 Effets Biologiques Exercice Non-invasive method for the in vivo determination of the oxygen saturation rate of arterial blood, and device for carrying out the method
US5705828A (en) 1991-08-10 1998-01-06 Sanyo Electric Co., Ltd. Photovoltaic device
JP3047666B2 (ja) 1993-03-16 2000-05-29 富士電機株式会社 シリコンオキサイド半導体膜の成膜方法
US5507881A (en) 1991-09-30 1996-04-16 Fuji Electric Co., Ltd. Thin-film solar cell and method of manufacturing same
DE4134110A1 (de) 1991-10-15 1993-04-22 Wacker Chemitronic Verfahren zum rotationssaegen sproedharter werkstoffe, insbesondere solcher mit durchmessern ueber 200 mm in duenne scheiben vermittels innenlochsaege und vorrichtung zur durchfuehrung des verfahrens
GB2261079B (en) 1991-10-31 1995-06-14 Asahi Optical Co Ltd Surface reflecting mirror
JPH05267695A (ja) 1991-11-06 1993-10-15 Mitsubishi Electric Corp 赤外線撮像装置
JP3048732B2 (ja) 1991-11-25 2000-06-05 三洋電機株式会社 光起電力装置
US5356488A (en) 1991-12-27 1994-10-18 Rudolf Hezel Solar cell and method for its manufacture
FR2687009B1 (fr) 1992-01-31 1994-04-29 Sgs Thomson Microelectronics Composant de protection pour circuit automobile.
US5397897A (en) 1992-04-17 1995-03-14 Terumo Kabushiki Kaisha Infrared sensor and method for production thereof
US5923071A (en) 1992-06-12 1999-07-13 Seiko Instruments Inc. Semiconductor device having a semiconductor film of low oxygen concentration
JP3194021B2 (ja) 1992-07-03 2001-07-30 経済産業省産業技術総合研究所長 レ−ザアニ−リング装置
JPH0690014A (ja) 1992-07-22 1994-03-29 Mitsubishi Electric Corp 薄型太陽電池及びその製造方法，エッチング方法及び自動エッチング装置，並びに半導体装置の製造方法
JPH0653538A (ja) 1992-07-28 1994-02-25 Toshiba Corp 半導体受光素子
US5244817A (en) 1992-08-03 1993-09-14 Eastman Kodak Company Method of making backside illuminated image sensors
US5296045A (en) 1992-09-04 1994-03-22 United Solar Systems Corporation Composite back reflector for photovoltaic device
JPH06104414A (ja) 1992-09-18 1994-04-15 Toshiba Corp 固体撮像装置
DE4234471C1 (de) 1992-10-13 1994-01-20 Fraunhofer Ges Forschung Vorrichtung zur Absorption infraroter Strahlung
US5346850A (en) 1992-10-29 1994-09-13 Regents Of The University Of California Crystallization and doping of amorphous silicon on low temperature plastic
JP3431647B2 (ja) 1992-10-30 2003-07-28 株式会社半導体エネルギー研究所 半導体装置とその作製方法およびメモリ装置の作製方法およびレーザードーピング処理方法
FR2699015B1 (fr) 1992-12-04 1995-02-24 Sgs Thomson Microelectronics Dispositif de protection contre des surtensions.
JP3200484B2 (ja) 1992-12-04 2001-08-20 富士ゼロックス株式会社 自己倍周波レーザー素子
US5373182A (en) 1993-01-12 1994-12-13 Santa Barbara Research Center Integrated IR and visible detector
JP3526308B2 (ja) 1993-02-18 2004-05-10 株式会社日立製作所 受光素子
JP3315191B2 (ja) 1993-03-22 2002-08-19 株式会社半導体エネルギー研究所 薄膜トランジスタの作製方法
FR2704094B1 (fr) 1993-04-13 1995-07-07 Sgs Thomson Microelectronics Réseau de diodes monolithique.
US20020037517A1 (en) 1993-05-28 2002-03-28 Hutchens T. William Methods for sequencing biopolymers
JP2590690B2 (ja) 1993-06-15 1997-03-12 日本電気株式会社 半導体装置
US5473138A (en) 1993-07-13 1995-12-05 Singh; Rajiv K. Method for increasing the surface area of ceramics, metals and composites
US5381431A (en) 1993-08-13 1995-01-10 Massachusetts Institute Of Technology Picosecond Q-switched microlasers
FR2710455B1 (fr) 1993-09-24 1995-12-15 Frederic Ghirardi Procédé de réalisation d'une structure intégrée monolithique incorporant des composants opto-électroniques et structure ainsi réalisée.
FR2711276B1 (fr) 1993-10-11 1995-12-01 Neuchatel Universite Cellule photovoltaïque et procédé de fabrication d'une telle cellule.
TW299897U (en) 1993-11-05 1997-03-01 Semiconductor Energy Lab A semiconductor integrated circuit
US5714404A (en) 1993-11-18 1998-02-03 Regents Of The University Of California Fabrication of polycrystalline thin films by pulsed laser processing
JP3271222B2 (ja) 1994-02-22 2002-04-02 ソニー株式会社 固体撮像装置
US5792280A (en) 1994-05-09 1998-08-11 Sandia Corporation Method for fabricating silicon cells
US5600130A (en) 1994-06-17 1997-02-04 The Regents Of The University Of Colorado Two-dimensional optoelectronic array module
US5523570A (en) 1994-07-15 1996-06-04 Loral Infrared & Imaging Systems, Inc. Double direct injection dual band sensor readout input circuit
US5510271A (en) 1994-09-09 1996-04-23 Georgia Tech Research Corporation Processes for producing low cost, high efficiency silicon solar cells
JP3119090B2 (ja) 1994-10-05 2000-12-18 株式会社日立製作所 水中レーザ加工装置及びその装置を用いた水中施工方法
FI97186C (fi) 1994-11-11 1996-10-25 Nokia Telecommunications Oy Ylikuormituksen esto tietoliikenneverkon solmussa
FR2727571A1 (fr) 1994-11-25 1996-05-31 Sgs Thomson Microelectronics Thyristor a sensibilite en retournement controlee
US5627081A (en) 1994-11-29 1997-05-06 Midwest Research Institute Method for processing silicon solar cells
US5589704A (en) 1995-01-27 1996-12-31 Lucent Technologies Inc. Article comprising a Si-based photodetector
JP3211604B2 (ja) 1995-02-03 2001-09-25 株式会社日立製作所 半導体装置
CA2168484C (en) 1995-03-13 2000-12-05 Mehmet Reha Civanlar Client-server architecture using internet and public switched networks
US5626687A (en) 1995-03-29 1997-05-06 The United States Of America As Represented By The United States Department Of Energy Thermophotovoltaic in-situ mirror cell
JP3287173B2 (ja) 1995-04-07 2002-05-27 三菱電機株式会社 赤外線検出素子
US5569624A (en) 1995-06-05 1996-10-29 Regents Of The University Of California Method for shallow junction formation
US5758644A (en) 1995-06-07 1998-06-02 Masimo Corporation Manual and automatic probe calibration
FR2735225B1 (fr) 1995-06-12 1997-09-05 Motorola Semiconducteurs Capteur de position optoelectronique et systeme de compensation pour un tel capteur
DE19522539C2 (de) 1995-06-21 1997-06-12 Fraunhofer Ges Forschung Solarzelle mit einem, eine Oberflächentextur aufweisenden Emitter sowie Verfahren zur Herstellung derselben
FR2735907B1 (fr) 1995-06-22 1997-09-05 Sgs Thomson Microelectronics Assemblage monolitique de composants semiconducteurs incluant une diode rapide
JP3143591B2 (ja) 1995-09-14 2001-03-07 キヤノン株式会社 表示装置
GB9520901D0 (en) 1995-10-12 1995-12-13 Philips Electronics Nv Electronic device manufacture
US5641362A (en) 1995-11-22 1997-06-24 Ebara Solar, Inc. Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell
JP3416364B2 (ja) 1995-11-27 2003-06-16 三洋電機株式会社 光起電力素子及びその製造方法
US5597621A (en) 1995-12-01 1997-01-28 University Of Florida Method of manufacturing photoluminescing semiconductor material using lasers
JP3608858B2 (ja) 1995-12-18 2005-01-12 三菱電機株式会社 赤外線検出器及びその製造方法
EP0793277B1 (en) 1996-02-27 2001-08-22 Canon Kabushiki Kaisha Photovoltaic device provided with an opaque substrate having a specific irregular surface structure
JP3444081B2 (ja) 1996-02-28 2003-09-08 株式会社日立製作所 ダイオード及び電力変換装置
US5641969A (en) 1996-03-28 1997-06-24 Applied Materials, Inc. Ion implantation apparatus
US5766127A (en) 1996-04-15 1998-06-16 Ohmeda Inc. Method and apparatus for improved photoplethysmographic perfusion-index monitoring
JP3516552B2 (ja) 1996-04-30 2004-04-05 シャープ株式会社 受光素子の製造方法
US5871826A (en) 1996-05-30 1999-02-16 Xerox Corporation Proximity laser doping technique for electronic materials
CN1167314C (zh) 1996-06-14 2004-09-15 松下电器产业株式会社 网板印刷方法和网板印刷装置
US6133119A (en) 1996-07-08 2000-10-17 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and method manufacturing same
JP2833588B2 (ja) 1996-07-30 1998-12-09 日本電気株式会社 フォトディテクタおよびその製造方法
DE19637182A1 (de) 1996-09-12 1998-03-19 Wacker Siltronic Halbleitermat Verfahren zur Herstellung von Halbleiterscheiben aus Silicium mit geringer Defektdichte
KR100269287B1 (ko) 1996-11-22 2000-11-01 윤종용 반도체장치의hsg형성방법
US5802091A (en) 1996-11-27 1998-09-01 Lucent Technologies Inc. Tantalum-aluminum oxide coatings for semiconductor devices
JP3917698B2 (ja) 1996-12-12 2007-05-23 株式会社半導体エネルギー研究所 レーザーアニール方法およびレーザーアニール装置
US6080988A (en) 1996-12-20 2000-06-27 Nikon Corporation Optically readable radiation-displacement-conversion devices and methods, and image-rendering apparatus and methods employing same
US5751005A (en) 1996-12-20 1998-05-12 Raytheon Company Low-crosstalk column differencing circuit architecture for integrated two-color focal plane arrays
US5808350A (en) 1997-01-03 1998-09-15 Raytheon Company Integrated IR, visible and NIR sensor and methods of fabricating same
US6106689A (en) 1997-01-20 2000-08-22 Canon Kabushiki Kaisha Process for forming zinc oxide film and processes for producing semiconductor device substrate and photo-electricity generating device using the film
JPH10209168A (ja) 1997-01-24 1998-08-07 Nec Corp 半導体装置の製造方法
JPH10209039A (ja) 1997-01-27 1998-08-07 Nikon Corp 投影露光方法及び投影露光装置
US6907135B2 (en) 1997-03-03 2005-06-14 British Telecommunications Public Limited Company Security check provision
EP0867701A1 (en) 1997-03-28 1998-09-30 Interuniversitair Microelektronica Centrum Vzw Method of fabrication of an infrared radiation detector and more particularly an infrared sensitive bolometer
US6117499A (en) 1997-04-09 2000-09-12 Komag, Inc. Micro-texture media made by polishing of a selectively irradiated surface
US5781392A (en) 1997-05-12 1998-07-14 Tii Industries, Inc. Balanced overvoltage protector for a dual-wire system
JP3924352B2 (ja) 1997-06-05 2007-06-06 浜松ホトニクス株式会社 裏面照射型受光デバイス
US5918140A (en) 1997-06-16 1999-06-29 The Regents Of The University Of California Deposition of dopant impurities and pulsed energy drive-in
DE19729396A1 (de) 1997-07-09 1999-01-14 Siemens Ag Elektrischer Kontakt für ein II-VI-Halbleiterbauelement und Verfahren zum Herstellen des elektrischen Kontaktes
US6107618A (en) 1997-07-14 2000-08-22 California Institute Of Technology Integrated infrared and visible image sensors
US6097031A (en) 1997-07-25 2000-08-01 Honeywell Inc. Dual bandwith bolometer
JPH1177348A (ja) 1997-08-29 1999-03-23 Canon Inc 溶接方法及び光起電力素子
US6107641A (en) 1997-09-10 2000-08-22 Xerox Corporation Thin film transistor with reduced parasitic capacitance and reduced feed-through voltage
EP1028456A4 (en) 1997-09-19 2003-03-05 Nikon Corp PLATINUM, SCANNING ALIGNMENT DEVICE, AND SCANNING EXPOSURE METHOD, AND DEVICE MANUFACTURED THEREBY
JPH1197724A (ja) 1997-09-25 1999-04-09 Citizen Watch Co Ltd 太陽電池およびその製造方法
JP3168961B2 (ja) 1997-10-06 2001-05-21 住友電気工業株式会社 ダイヤモンド基板及びダイヤモンド基板の評価方法並びにダイヤモンド表面弾性波フィルタ
US6041246A (en) 1997-10-14 2000-03-21 Transonic Systems, Inc. Single light sensor optical probe for monitoring blood parameters and cardiovascular measurements
DE19752208A1 (de) 1997-11-25 1999-06-02 Bosch Gmbh Robert Thermischer Membransensor und Verfahren zu seiner Herstellung
JPH11168069A (ja) 1997-12-03 1999-06-22 Nec Corp 半導体装置の製造方法
US6128379A (en) 1997-12-03 2000-10-03 Telcordia Technologies, Inc. Intelligent data peripheral systems and methods
US6229192B1 (en) 1998-01-27 2001-05-08 Ois Optical Imaging Systems, Inc. Image sensor or LCD including switching pin diodes
US6131512A (en) 1998-02-03 2000-10-17 Agfa-Gevaert, N.V. Printing master comprising strain gauges
JP4208281B2 (ja) 1998-02-26 2009-01-14 キヤノン株式会社 積層型光起電力素子
DE19811878C2 (de) 1998-03-18 2002-09-19 Siemens Solar Gmbh Verfahren und Ätzlösung zum naßchemischen pyramidalen Texturätzen von Siliziumoberflächen
JP3592075B2 (ja) 1998-04-16 2004-11-24 松下電器産業株式会社 円板形状体の位置決め装置
US6756104B2 (en) 1998-04-21 2004-06-29 Lsp Technologies, Inc. Surface finishes on laser rods and slabs for laser peening systems
CA2372376C (en) 1998-04-29 2007-11-20 Carnegie Mellon University Apparatus and method of monitoring a subject's eyes using two different wavelengths of light
US6160833A (en) 1998-05-06 2000-12-12 Xerox Corporation Blue vertical cavity surface emitting laser
US6489643B1 (en) 1998-06-27 2002-12-03 Hynix Semiconductor Inc. Photodiode having a plurality of PN junctions and image sensor having the same
AUPP437598A0 (en) 1998-06-29 1998-07-23 Unisearch Limited A self aligning method for forming a selective emitter and metallization in a solar cell
US6198147B1 (en) 1998-07-06 2001-03-06 Intel Corporation Detecting infrared and visible light
DE19838439C1 (de) 1998-08-24 2000-04-27 Fraunhofer Ges Forschung Dünnfilmphotodiode und Verfahren zur Herstellung
US6465860B2 (en) 1998-09-01 2002-10-15 Kabushiki Kaisha Toshiba Multi-wavelength semiconductor image sensor and method of manufacturing the same
EP0986110A1 (de) 1998-09-10 2000-03-15 Electrowatt Technology Innovation AG Lichtempfindliches Halbleiterelement und Verwendung zur Regelung von Flammen
US6721585B1 (en) 1998-10-15 2004-04-13 Sensidyne, Inc. Universal modular pulse oximeter probe for use with reusable and disposable patient attachment devices
US6071796A (en) 1998-10-30 2000-06-06 Sharp Laboratories Of America, Inc. Method of controlling oxygen incorporation during crystallization of silicon film by excimer laser anneal in air ambient
US6121130A (en) 1998-11-16 2000-09-19 Chartered Semiconductor Manufacturing Ltd. Laser curing of spin-on dielectric thin films
US6377699B1 (en) 1998-11-25 2002-04-23 Iridian Technologies, Inc. Iris imaging telephone security module and method
US6111300A (en) 1998-12-01 2000-08-29 Agilent Technologies Multiple color detection elevated pin photo diode active pixel sensor
US6333485B1 (en) 1998-12-11 2001-12-25 International Business Machines Corporation Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam
US6049058A (en) 1998-12-15 2000-04-11 Lsp Technologies, Inc. Laser peening process and apparatus with uniform pressure pulse confinement
WO2000040938A1 (en) 1999-01-08 2000-07-13 Sarnoff Corporation Optical detectors using nulling for high linearity and large dynamic range
US6429036B1 (en) 1999-01-14 2002-08-06 Micron Technology, Inc. Backside illumination of CMOS image sensor
US6514840B2 (en) 1999-04-13 2003-02-04 International Business Machines Corporation Micro heating of selective regions
US6876003B1 (en) 1999-04-15 2005-04-05 Sumitomo Electric Industries, Ltd. Semiconductor light-emitting device, method of manufacturing transparent conductor film and method of manufacturing compound semiconductor light-emitting device
US6331445B1 (en) 1999-05-07 2001-12-18 National Research Council Of Canada Phototonic device with strain-induced three dimensional growth morphology
US6727521B2 (en) 2000-09-25 2004-04-27 Foveon, Inc. Vertical color filter detector group and array
JP2001007381A (ja) 1999-06-24 2001-01-12 Nippon Hoso Kyokai <Nhk> 光電変換膜とその作製方法
EP1198845A4 (en) 1999-07-02 2008-07-02 Digirad Corp INDIRECT CONTACT BY POSTERIOR SURFACE WITH SEMICONDUCTOR DEVICES
JP2001024936A (ja) 1999-07-09 2001-01-26 Matsushita Electric Ind Co Ltd 画像取込装置
US6657178B2 (en) 1999-07-20 2003-12-02 Intevac, Inc. Electron bombarded passive pixel sensor imaging
JP3422290B2 (ja) 1999-07-22 2003-06-30 日本電気株式会社 半導体薄膜の製造方法
US6168965B1 (en) 1999-08-12 2001-01-02 Tower Semiconductor Ltd. Method for making backside illuminated image sensor
US6290713B1 (en) 1999-08-24 2001-09-18 Thomas A. Russell Flexible illuminators for phototherapy
US6313901B1 (en) 1999-09-01 2001-11-06 National Semiconductor Corporation Liquid crystal display fabrication process using a final rapid thermal anneal
US7112545B1 (en) 1999-09-10 2006-09-26 The Board Of Trustees Of The University Of Arkansas Passivation of material using ultra-fast pulsed laser
US6486522B1 (en) 1999-09-28 2002-11-26 Pictos Technologies, Inc. Light sensing system with high pixel fill factor
US6984571B1 (en) 1999-10-01 2006-01-10 Ziptronix, Inc. Three dimensional device integration method and integrated device
US6562705B1 (en) 1999-10-26 2003-05-13 Kabushiki Kaisha Toshiba Method and apparatus for manufacturing semiconductor element
AU1318001A (en) 1999-10-26 2001-05-08 Telefonaktiebolaget Lm Ericsson (Publ) System and method for improved resource management in an integrated telecommunications network having packet-switched network portion and a circuit-switched network portion
EP1096577B9 (en) 1999-10-27 2016-06-01 Kaneka Corporation Method of producing a thin-film photovoltaic device
US6867806B1 (en) 1999-11-04 2005-03-15 Taiwan Advanced Sensors Corporation Interlace overlap pixel design for high sensitivity CMOS image sensors
WO2001035601A1 (en) 1999-11-10 2001-05-17 Rainfinity, Inc. Distributed traffic controlling system and method for network data
US6457478B1 (en) 1999-11-12 2002-10-01 Michael J. Danese Method for treating an object using ultra-violet light
US6272768B1 (en) 1999-11-12 2001-08-14 Michael J. Danese Apparatus for treating an object using ultra-violet light
JP4124396B2 (ja) 1999-12-17 2008-07-23 独立行政法人科学技術振興機構 ホログラムの製造方法および装置
GB9930257D0 (en) * 1999-12-22 2000-02-09 Suisse Electronique Microtech Optoelectronic sensor
US6586318B1 (en) 1999-12-28 2003-07-01 Xerox Corporation Thin phosphorus nitride film as an N-type doping source used in laser doping technology
KR100683390B1 (ko) 1999-12-28 2007-02-15 매그나칩 반도체 유한회사 이미지센서의 제조 방법
JP2001189478A (ja) 1999-12-28 2001-07-10 Sanyo Electric Co Ltd 半導体素子及びその製造方法
US6501065B1 (en) 1999-12-29 2002-12-31 Intel Corporation Image sensor using a thin film photodiode above active CMOS circuitry
US6366804B1 (en) 1999-12-29 2002-04-02 Ge Medical Systems Information Technologies, Inc. Method of and apparatus for Identifying a portion of a waveform representing a physiological event
US6291302B1 (en) 2000-01-14 2001-09-18 Advanced Micro Devices, Inc. Selective laser anneal process using highly reflective aluminum mask
JP3398638B2 (ja) 2000-01-28 2003-04-21 科学技術振興事業団 発光ダイオードおよび半導体レーザーとそれらの製造方法
JP2001236671A (ja) 2000-02-22 2001-08-31 Pioneer Electronic Corp 光ピックアップ装置及びレーザダイオードチップ
KR20010085722A (ko) 2000-02-29 2001-09-07 추후제출 반도체 물질상에서의 선택적인 레이저 어닐
JP2001257927A (ja) 2000-03-09 2001-09-21 Technosonic:Kk 被写体追尾装置
US6830993B1 (en) 2000-03-21 2004-12-14 The Trustees Of Columbia University In The City Of New York Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
FR2807569B1 (fr) 2000-04-10 2004-08-27 Centre Nat Rech Scient Perfectionnement apportes aux diodes schottky
US6483116B1 (en) 2000-04-25 2002-11-19 Innovative Technology Licensing, Llc High performance ultraviolet imager for operation at room temperature
JP2001326201A (ja) 2000-05-16 2001-11-22 Ebara Corp ポリッシング装置
US6682383B2 (en) 2000-05-17 2004-01-27 Electronics And Telecommunications Research Institute Cathode structure for field emission device and method of fabricating the same
JP3713418B2 (ja) 2000-05-30 2005-11-09 光正 小柳 ３次元画像処理装置の製造方法
US6483929B1 (en) 2000-06-08 2002-11-19 Tarian Llc Method and apparatus for histological and physiological biometric operation and authentication
US7211214B2 (en) 2000-07-18 2007-05-01 Princeton University Laser assisted direct imprint lithography
JP2002043594A (ja) 2000-07-21 2002-02-08 Sharp Corp 光透過型薄膜太陽電池モジュール
US6677655B2 (en) 2000-08-04 2004-01-13 Amberwave Systems Corporation Silicon wafer with embedded optoelectronic material for monolithic OEIC
US6388204B1 (en) 2000-08-29 2002-05-14 International Business Machines Corporation Composite laminate circuit structure and methods of interconnecting the same
DE10042733A1 (de) 2000-08-31 2002-03-28 Inst Physikalische Hochtech Ev Multikristalline laserkristallisierte Silicium-Dünnschicht-Solarzelle auf transparentem Substrat
JP2002072980A (ja) 2000-08-31 2002-03-12 Nec Corp カラー映像表示方法および装置
US6580053B1 (en) 2000-08-31 2003-06-17 Sharp Laboratories Of America, Inc. Apparatus to control the amount of oxygen incorporated into polycrystalline silicon film during excimer laser processing of silicon films
JP4919546B2 (ja) 2000-09-18 2012-04-18 東芝モバイルディスプレイ株式会社 多結晶シリコン膜の形成方法
US6900839B1 (en) 2000-09-29 2005-05-31 Rockwell Science Center, Llc High gain detector amplifier with enhanced dynamic range for single photon read-out of photodetectors
IL138884A (en) 2000-10-05 2006-07-05 Conmed Corp Pulse oximeter and a method of its operation
TW466785B (en) 2000-10-11 2001-12-01 Ultratera Corp Thin-type photosensitive semiconductor device
US6689209B2 (en) 2000-11-03 2004-02-10 Memc Electronic Materials, Inc. Process for preparing low defect density silicon using high growth rates
US7352454B2 (en) 2000-11-09 2008-04-01 Canesta, Inc. Methods and devices for improved charge management for three-dimensional and color sensing
JP3994655B2 (ja) 2000-11-14 2007-10-24 住友電気工業株式会社 半導体受光素子
US6498336B1 (en) 2000-11-15 2002-12-24 Pixim, Inc. Integrated light sensors with back reflectors for increased quantum efficiency
WO2002041363A2 (en) 2000-11-16 2002-05-23 Solarflex Technologies, Inc. System and methods for laser assisted deposition
US20020060322A1 (en) 2000-11-20 2002-05-23 Hiroshi Tanabe Thin film transistor having high mobility and high on-current and method for manufacturing the same
JP4461657B2 (ja) 2000-12-07 2010-05-12 セイコーエプソン株式会社 光電変換素子
JP2002190386A (ja) 2000-12-20 2002-07-05 Daicel Chem Ind Ltd 有機エレクトロルミネッセンス素子用材料およびその製造方法
KR20020077484A (ko) 2000-12-20 2002-10-11 다이셀 가가꾸 고교 가부시끼가이샤 유기 전기발광 소자용 재료 및 그의 제조 방법
US6509204B2 (en) 2001-01-29 2003-01-21 Xoptix, Inc. Transparent solar cell and method of fabrication
FR2820883B1 (fr) 2001-02-12 2003-06-13 St Microelectronics Sa Photodiode a grande capacite
US6782154B2 (en) 2001-02-12 2004-08-24 Rensselaer Polytechnic Institute Ultrafast all-optical switch using carbon nanotube polymer composites
US6597025B2 (en) 2001-03-15 2003-07-22 Koninklijke Philips Electronics N.V. Light sensitive semiconductor component
JP2002343993A (ja) 2001-03-15 2002-11-29 Canon Inc 薄膜多結晶太陽電池及びその形成方法
US6734455B2 (en) 2001-03-15 2004-05-11 Micron Technology, Inc. Agglomeration elimination for metal sputter deposition of chalcogenides
JP4433131B2 (ja) 2001-03-22 2010-03-17 キヤノン株式会社 シリコン系薄膜の形成方法
JP2002289879A (ja) 2001-03-27 2002-10-04 Toshiba Corp ダイオード
GB0108795D0 (en) 2001-04-07 2001-05-30 Power Innovations Ltd Overvoltage protection device
WO2002084728A1 (en) 2001-04-11 2002-10-24 Memc Electronic Materials, Inc. Control of thermal donor formation in high resistivity cz silicon
US6586738B2 (en) 2001-04-13 2003-07-01 Mcnc Electromagnetic radiation detectors having a micromachined electrostatic chopper device
US7354792B2 (en) 2001-05-25 2008-04-08 President And Fellows Of Harvard College Manufacture of silicon-based devices having disordered sulfur-doped surface layers
US7390689B2 (en) 2001-05-25 2008-06-24 President And Fellows Of Harvard College Systems and methods for light absorption and field emission using microstructured silicon
US7442629B2 (en) 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
US6796144B2 (en) 2001-05-30 2004-09-28 Battelle Memorial Institute System and method for glass processing and temperature sensing
US6735225B2 (en) 2001-06-07 2004-05-11 Lambda Physik Ag Chirp compensation method and apparatus
US7075079B2 (en) 2001-06-27 2006-07-11 Wood Roland A Sensor for dual wavelength bands
FR2827707B1 (fr) 2001-07-20 2003-11-21 Fr De Detecteurs Infrarouges S Procede de realisation d'un detecteur bolometrique et detecteur realise selon ce procede
US6720595B2 (en) 2001-08-06 2004-04-13 International Business Machines Corporation Three-dimensional island pixel photo-sensor
JP2003058269A (ja) 2001-08-09 2003-02-28 Mitsubishi Heavy Ind Ltd 個人認証システム
JP2003069061A (ja) 2001-08-24 2003-03-07 Sharp Corp 積層型光電変換素子
US6777317B2 (en) 2001-08-29 2004-08-17 Ultratech Stepper, Inc. Method for semiconductor gate doping
KR100390919B1 (ko) 2001-09-05 2003-07-12 주식회사 하이닉스반도체 반도체소자의 제조방법
US6803555B1 (en) 2001-09-07 2004-10-12 Indigo Systems Corporation Two-stage auto-zero amplifier circuit for electro-optical arrays
JP2003104121A (ja) 2001-09-27 2003-04-09 Matsushita Electric Ind Co Ltd 後方視界表示装置
US6607927B2 (en) 2001-09-28 2003-08-19 Agere Systems, Inc. Method and apparatus for monitoring in-line copper contamination
CA2359269A1 (en) 2001-10-17 2003-04-17 Biodentity Systems Corporation Face imaging system for recordal and automated identity confirmation
FR2832224B1 (fr) 2001-11-15 2004-01-16 Commissariat Energie Atomique Dispositif electronique monolithique multicouches et procede de realisation d'un tel dispositif
US7109517B2 (en) 2001-11-16 2006-09-19 Zaidi Saleem H Method of making an enhanced optical absorption and radiation tolerance in thin-film solar cells and photodetectors
US7202102B2 (en) * 2001-11-27 2007-04-10 Jds Uniphase Corporation Doped absorption for enhanced responsivity for high speed photodiodes
US7828983B2 (en) 2001-11-29 2010-11-09 Transform Solar Pty Ltd Semiconductor texturing process
US6759262B2 (en) 2001-12-18 2004-07-06 Agilent Technologies, Inc. Image sensor with pixel isolation system and manufacturing method therefor
FR2834128B1 (fr) 2001-12-21 2005-03-04 St Microelectronics Sa Dispositif de protection bidirectionnel a faible capacite
US6667528B2 (en) * 2002-01-03 2003-12-23 International Business Machines Corporation Semiconductor-on-insulator lateral p-i-n photodetector with a reflecting mirror and backside contact and method for forming the same
US6923625B2 (en) 2002-01-07 2005-08-02 Integrated Sensing Systems, Inc. Method of forming a reactive material and article formed thereby
KR100843001B1 (ko) 2002-01-16 2008-07-01 동화약품공업주식회사 구강점막 부착형 필름제제
JP2003242125A (ja) 2002-02-18 2003-08-29 Canon Inc 携帯情報端末、認証補助端末及び個人認証方法
JP2003258285A (ja) 2002-02-27 2003-09-12 Sharp Corp 表面凹凸構造の作製方法及び太陽電池
US6583936B1 (en) 2002-03-11 2003-06-24 Eastman Kodak Company Patterned roller for the micro-replication of complex lenses
US20050088634A1 (en) 2002-03-15 2005-04-28 Nikon Corporation Exposure system and device production process
JP2003308130A (ja) 2002-04-15 2003-10-31 Matsushita Electric Ind Co Ltd 情報装置
US7012643B2 (en) 2002-05-08 2006-03-14 Ball Aerospace & Technologies Corp. One chip, low light level color camera
JP4123415B2 (ja) 2002-05-20 2008-07-23 ソニー株式会社 固体撮像装置
US6946715B2 (en) 2003-02-19 2005-09-20 Micron Technology, Inc. CMOS image sensor and method of fabrication
JP2004047682A (ja) 2002-07-11 2004-02-12 Toshiba Corp 固体撮像装置
EP1535340A1 (en) 2002-07-16 2005-06-01 STMicroelectronics N.V. Tfa image sensor with stability-optimized photodiode
KR100460066B1 (ko) 2002-07-19 2004-12-04 주식회사 하이닉스반도체 반도체소자의 제조방법
US7078702B2 (en) 2002-07-25 2006-07-18 General Electric Company Imager
GB2392307B8 (en) 2002-07-26 2006-09-20 Detection Technology Oy Semiconductor structure for imaging detectors
US7705349B2 (en) 2002-08-29 2010-04-27 Micron Technology, Inc. Test inserts and interconnects with electrostatic discharge structures
JP4403687B2 (ja) 2002-09-18 2010-01-27 ソニー株式会社 固体撮像装置およびその駆動制御方法
DE60322233D1 (de) 2002-09-19 2008-08-28 Quantum Semiconductor Llc Licht-detektierende vorrichtung
AU2003279758A1 (en) 2002-10-03 2004-04-23 Pan Jit Americas, Inc. Low temperature texturing layer to enhance adhesion of subsequent layers
CA2408483C (en) 2002-10-17 2011-01-04 Yujie Han Laser chemical fabrication of nanostructures
US6929974B2 (en) 2002-10-18 2005-08-16 Motorola, Inc. Feedthrough design and method for a hermetically sealed microdevice
KR20040036087A (ko) 2002-10-23 2004-04-30 주식회사 하이닉스반도체 광의 파장에 따라 포토다이오드의 깊이가 다른 씨모스이미지센서 및 그 제조 방법
JP4387091B2 (ja) 2002-11-05 2009-12-16 株式会社半導体エネルギー研究所 薄膜トランジスタの作製方法
DE10253679A1 (de) 2002-11-18 2004-06-03 Infineon Technologies Ag Optische Einrichtung zur Verwendung bei einem Lithographie-Verfahren, insbesondere zur Herstellung eines Halbleiter-Bauelements, sowie optisches Lithographieverfahren
TW569351B (en) 2002-11-22 2004-01-01 Au Optronics Corp Excimer laser anneal apparatus and the application of the same
US6753585B1 (en) 2002-12-05 2004-06-22 National Semiconductor Corporation Vertical color photo-detector with increased sensitivity and compatible video interface
CN100388511C (zh) 2002-12-10 2008-05-14 北京力诺桑普光伏高科技有限公司 单晶硅太阳能电池的表面结构及其制作方法
JP2004193350A (ja) 2002-12-11 2004-07-08 Sharp Corp 太陽電池セルおよびその製造方法
US7211501B2 (en) 2002-12-12 2007-05-01 Intel Corporation Method and apparatus for laser annealing
US7453129B2 (en) 2002-12-18 2008-11-18 Noble Peak Vision Corp. Image sensor comprising isolated germanium photodetectors integrated with a silicon substrate and silicon circuitry
EP1434264A3 (en) 2002-12-27 2017-01-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method using the transfer technique
DE10305009A1 (de) 2003-02-07 2004-09-02 Robert Bosch Gmbh Vorrichtung und Verfahren zur Bilderzeugung
US7176528B2 (en) 2003-02-18 2007-02-13 Corning Incorporated Glass-based SOI structures
DE10310740A1 (de) 2003-03-10 2004-09-30 Forschungszentrum Jülich GmbH Verfahren zur Herstellung einer spannungsrelaxierten Schichtstruktur auf einem nicht gitterangepassten Substrat, sowie Verwendung eines solchen Schichtsystems in elektronischen und/oder optoelektronischen Bauelementen
JP2004273886A (ja) 2003-03-11 2004-09-30 Hitachi Cable Ltd 結晶薄膜半導体装置および光起電力装置
JP2004273887A (ja) 2003-03-11 2004-09-30 Hitachi Cable Ltd 結晶薄膜半導体装置及び太陽電池素子
EP1605509B1 (en) 2003-03-19 2016-03-16 Fujitsu Semiconductor Limited Semiconductor device, process for producing the same and imaging device
US6864156B1 (en) 2003-04-04 2005-03-08 Xilinx, Inc. Semiconductor wafer with well contacts on back side
IL155536A0 (en) 2003-04-21 2003-11-23 Yissum Res Dev Co Voltage tunable integrated infrared imager
TWI227913B (en) 2003-05-02 2005-02-11 Au Optronics Corp Method of fabricating polysilicon film by excimer laser crystallization process
US7161173B2 (en) 2003-05-20 2007-01-09 Burgener Ii Robert H P-type group II-VI semiconductor compounds
US7273788B2 (en) 2003-05-21 2007-09-25 Micron Technology, Inc. Ultra-thin semiconductors bonded on glass substrates
US7008854B2 (en) 2003-05-21 2006-03-07 Micron Technology, Inc. Silicon oxycarbide substrates for bonded silicon on insulator
US6911375B2 (en) 2003-06-02 2005-06-28 International Business Machines Corporation Method of fabricating silicon devices on sapphire with wafer bonding at low temperature
US20040256561A1 (en) 2003-06-17 2004-12-23 Allyson Beuhler Wide band light sensing pixel array
DE102004031950A1 (de) 2003-06-26 2005-02-10 Kyocera Corp. Halbleiter/Elektroden-Kontaktstruktur und eine solche verwendendes Halbleiterbauteil
US7148528B2 (en) 2003-07-02 2006-12-12 Micron Technology, Inc. Pinned photodiode structure and method of formation
US7247527B2 (en) 2003-07-31 2007-07-24 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device, and laser irradiation apparatus
US7358498B2 (en) 2003-08-04 2008-04-15 Technest Holdings, Inc. System and a method for a smart surveillance system
US6927432B2 (en) 2003-08-13 2005-08-09 Motorola, Inc. Vertically integrated photosensor for CMOS imagers
US6984816B2 (en) 2003-08-13 2006-01-10 Motorola, Inc. Vertically integrated photosensor for CMOS imagers
KR101027318B1 (ko) 2003-08-14 2011-04-06 유니버시티 오브 요하네스버그 Ⅰｂ-ⅲａ-ⅵａ족 4원 또는 그 이상의 고원 합금 반도체필름 제조 방법
JP4442157B2 (ja) 2003-08-20 2010-03-31 ソニー株式会社 光電変換装置及び固体撮像装置
US7067385B2 (en) 2003-09-04 2006-06-27 Micron Technology, Inc. Support for vertically oriented capacitors during the formation of a semiconductor device
EP1519422B1 (en) 2003-09-24 2018-05-16 Panasonic Intellectual Property Management Co., Ltd. Photovoltaic cell and its fabrication method
TWI246783B (en) 2003-09-24 2006-01-01 Matsushita Electric Works Ltd Light-emitting device and its manufacturing method
US7271405B2 (en) 2003-10-14 2007-09-18 Stc.Unm Intersubband detector with avalanche multiplier region
KR100543532B1 (ko) 2003-10-24 2006-01-20 준 신 이 모듈일체형 태양전지 및 그 제조방법
WO2005052633A1 (de) 2003-10-29 2005-06-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Abstandssensor und verfahren zur abstandserfassung
JP4507560B2 (ja) 2003-10-30 2010-07-21 日本電気株式会社 薄膜デバイス基板の製造方法
US7084460B2 (en) 2003-11-03 2006-08-01 International Business Machines Corporation Method for fabricating SiGe-on-insulator (SGOI) and Ge-on-insulator (GOI) substrates
US7285433B2 (en) 2003-11-06 2007-10-23 General Electric Company Integrated devices with optical and electrical isolation and method for making
WO2005048319A2 (en) 2003-11-06 2005-05-26 Yale University Large-area detector
JP4578797B2 (ja) 2003-11-10 2010-11-10 パナソニック株式会社 撮像装置
US20050101160A1 (en) 2003-11-12 2005-05-12 Diwakar Garg Silicon thin film transistors and solar cells on plastic substrates
US7542085B2 (en) 2003-11-26 2009-06-02 Aptina Imaging Corporation Image sensor with a capacitive storage node linked to transfer gate
KR100603318B1 (ko) 2003-11-27 2006-07-20 삼성에스디아이 주식회사 반도체의 레이저 어닐링용 인라인 처리 장치
US7123298B2 (en) 2003-12-18 2006-10-17 Avago Technologies Sensor Ip Pte. Ltd. Color image sensor with imaging elements imaging on respective regions of sensor elements
CA2552015A1 (en) 2003-12-29 2005-07-21 Sherwood Information Partners, Inc. System and method for mass storage using multiple-hard-disk-drive enclosure
JP3729826B2 (ja) 2004-01-09 2005-12-21 松下電器産業株式会社 固体撮像装置の製造方法
US20050150542A1 (en) 2004-01-13 2005-07-14 Arun Madan Stable Three-Terminal and Four-Terminal Solar Cells and Solar Cell Panels Using Thin-Film Silicon Technology
GB0401578D0 (en) 2004-01-24 2004-02-25 Koninkl Philips Electronics Nv Phototransistor
US6897118B1 (en) 2004-02-11 2005-05-24 Chartered Semiconductor Manufacturing Ltd. Method of multiple pulse laser annealing to activate ultra-shallow junctions
US7663057B2 (en) 2004-02-19 2010-02-16 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US7492027B2 (en) 2004-02-20 2009-02-17 Micron Technology, Inc. Reduced crosstalk sensor and method of formation
US7154136B2 (en) 2004-02-20 2006-12-26 Micron Technology, Inc. Isolation structures for preventing photons and carriers from reaching active areas and methods of formation
US7486705B2 (en) 2004-03-31 2009-02-03 Imra America, Inc. Femtosecond laser processing system with process parameters, controls and feedback
JP4317115B2 (ja) 2004-04-12 2009-08-19 国立大学法人東北大学 固体撮像装置、光センサおよび固体撮像装置の動作方法
US7419846B2 (en) 2004-04-13 2008-09-02 The Trustees Of Princeton University Method of fabricating an optoelectronic device having a bulk heterojunction
JP5095073B2 (ja) 2004-04-28 2012-12-12 株式会社イー・エム・ディー 半導体物質の表面改質方法、半導体装置の製造方法
JP5110239B2 (ja) 2004-05-11 2012-12-26 Ｊｓｒ株式会社 有機シリカ系膜の形成方法、膜形成用組成物
JP2005339425A (ja) 2004-05-31 2005-12-08 Sanyo Electric Co Ltd 本人認証装置
US7629234B2 (en) 2004-06-18 2009-12-08 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profiling
US7687740B2 (en) 2004-06-18 2010-03-30 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laterally spaced laser beam spots delivering multiple blows
US7923306B2 (en) 2004-06-18 2011-04-12 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laser beam spots
US7935941B2 (en) 2004-06-18 2011-05-03 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structures
US8466004B2 (en) 2004-06-24 2013-06-18 The Trustees Of Princeton University Solar cells
KR100745985B1 (ko) 2004-06-28 2007-08-06 삼성전자주식회사 이미지 센서
JP4130815B2 (ja) 2004-07-16 2008-08-06 松下電器産業株式会社 半導体受光素子及びその製造方法
JP2006033493A (ja) 2004-07-16 2006-02-02 Matsushita Electric Ind Co Ltd 撮像装置
US7880255B2 (en) 2004-07-19 2011-02-01 Micron Technology, Inc. Pixel cell having a grated interface
DE102004036220B4 (de) 2004-07-26 2009-04-02 Jürgen H. Werner Verfahren zur Laserdotierung von Festkörpern mit einem linienfokussierten Laserstrahl
JP4992424B2 (ja) 2004-08-06 2012-08-08 住友電気工業株式会社 ｐ型半導体領域を形成する方法
KR20060020400A (ko) 2004-08-31 2006-03-06 매그나칩 반도체 유한회사 광 손실을 감소시킨 시모스 이미지센서의 제조방법
KR100652379B1 (ko) 2004-09-11 2006-12-01 삼성전자주식회사 Ｃｍｏｓ 이미지 센서 및 그 제조 방법
US7235812B2 (en) 2004-09-13 2007-06-26 International Business Machines Corporation Method of creating defect free high Ge content (>25%) SiGe-on-insulator (SGOI) substrates using wafer bonding techniques
US7615808B2 (en) 2004-09-17 2009-11-10 California Institute Of Technology Structure for implementation of back-illuminated CMOS or CCD imagers
US7633097B2 (en) 2004-09-23 2009-12-15 Philips Lumileds Lighting Company, Llc Growth of III-nitride light emitting devices on textured substrates
TWI244214B (en) 2004-09-23 2005-11-21 Au Optronics Corp Semiconductor device and method of fabricating a LTPS film
EP1794804B1 (en) 2004-09-24 2010-09-01 The President and Fellows of Harvard College Method for manufacturing of silicon-based detectors having laser-microstructured surface layers having electron-donating constituents
US7259413B2 (en) 2004-09-28 2007-08-21 Micron Technology, Inc. High dynamic range image sensor
CN100344001C (zh) 2004-09-30 2007-10-17 无锡尚德太阳能电力有限公司 一种制备多晶硅绒面的方法
JP4867152B2 (ja) 2004-10-20 2012-02-01 ソニー株式会社 固体撮像素子
WO2006043690A1 (en) 2004-10-20 2006-04-27 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method, laser irradiation apparatus and method for manufacturing semiconductor device
JP4501633B2 (ja) 2004-10-28 2010-07-14 ソニー株式会社 固体撮像素子とその製造方法
KR100682898B1 (ko) 2004-11-09 2007-02-15 삼성전자주식회사 적외선을 이용한 영상 장치 및 그의 영상 식별 방법
EP1812969B1 (en) 2004-11-10 2015-05-06 Canon Kabushiki Kaisha Field effect transistor comprising an amorphous oxide
US7645337B2 (en) 2004-11-18 2010-01-12 The Trustees Of Columbia University In The City Of New York Systems and methods for creating crystallographic-orientation controlled poly-silicon films
US7737053B2 (en) 2004-11-18 2010-06-15 Semiconductor Energy Laboratory Co., Ltd Semiconductor device and manufacturing method of the same
EP1820210A4 (en) 2004-11-24 2014-03-05 Nanosys Inc CONTACT DOPING AND NANOFIL THIN FILM RECOVERY SYSTEMS AND PROCESSES
JP2006147991A (ja) 2004-11-24 2006-06-08 Canon Inc 固体撮像素子及びそれを有する光学機器
US8637340B2 (en) 2004-11-30 2014-01-28 Solexel, Inc. Patterning of silicon oxide layers using pulsed laser ablation
US7446807B2 (en) 2004-12-03 2008-11-04 Micron Technology, Inc. Imager pixel with capacitance for boosting reset voltage
US20060118781A1 (en) 2004-12-03 2006-06-08 Omnivision Technologies, Inc. Image sensor and pixel having a polysilicon layer over the photodiode
US7521326B2 (en) 2004-12-03 2009-04-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US7418115B2 (en) 2004-12-07 2008-08-26 Aoptix Technologies, Inc. Iris imaging using reflection from the eye
JP2006173381A (ja) 2004-12-16 2006-06-29 Toyota Motor Corp 光起電力素子
KR100690880B1 (ko) 2004-12-16 2007-03-09 삼성전자주식회사 픽셀별 광감도가 균일한 이미지 센서 및 그 제조 방법
CN101084290B (zh) 2004-12-21 2012-07-18 日立金属株式会社 荧光材料以及其制造方法，使用荧光材料的放射线检测器，与x射线ct装置
US7342268B2 (en) 2004-12-23 2008-03-11 International Business Machines Corporation CMOS imager with Cu wiring and method of eliminating high reflectivity interfaces therefrom
TWI269355B (en) 2004-12-29 2006-12-21 Ind Tech Res Inst Quantum-dot infrared photodetector
KR100660320B1 (ko) 2004-12-30 2006-12-22 동부일렉트로닉스 주식회사 씨모스 이미지 센서 및 그의 제조방법
JP2006190757A (ja) 2005-01-05 2006-07-20 Konica Minolta Holdings Inc 有機半導体層の形成方法および有機薄膜トランジスタの製造方法
US7551059B2 (en) 2005-01-06 2009-06-23 Goodrich Corporation Hybrid infrared detector array and CMOS readout integrated circuit with improved dynamic range
WO2006074514A1 (en) 2005-01-12 2006-07-20 Resmed Limited Reinforcing member for a patient interface
WO2006078319A1 (en) 2005-01-19 2006-07-27 Massachusetts Institute Of Technology Light trapping in thin film solar cells using textured photonic crystal
US7256112B2 (en) 2005-01-20 2007-08-14 Chartered Semiconductor Manufacturing, Ltd Laser activation of implanted contact plug for memory bitline fabrication
JP2006210701A (ja) 2005-01-28 2006-08-10 Sanyo Electric Co Ltd 固体撮像装置及びその製造方法
US7378635B2 (en) 2005-02-11 2008-05-27 Micron Technology, Inc. Method and apparatus for dark current and hot pixel reduction in active pixel image sensors
US20060180885A1 (en) 2005-02-14 2006-08-17 Omnivision Technologies, Inc. Image sensor using deep trench isolation
JP4839632B2 (ja) 2005-02-25 2011-12-21 ソニー株式会社 撮像装置
US7202543B2 (en) 2005-03-07 2007-04-10 Micron Technology, Inc. Method and structure to reduce optical crosstalk in a solid state imager
US7611060B2 (en) 2005-03-11 2009-11-03 Hand Held Products, Inc. System and method to automatically focus an image reader
WO2006101943A2 (en) 2005-03-16 2006-09-28 Lc Technologies, Inc. System and method for eyeball surface topography as a biometric discriminator
JP4826111B2 (ja) 2005-03-17 2011-11-30 ソニー株式会社 固体撮像素子および固体撮像素子の製造方法および画像撮影装置
US7642205B2 (en) 2005-04-08 2010-01-05 Mattson Technology, Inc. Rapid thermal processing using energy transfer layers
FR2884351A1 (fr) 2005-04-11 2006-10-13 St Microelectronics Sa Procede de fabrication d'un circuit integre comprenant une photodiode et circuit integre correspondant.
US7619670B2 (en) 2005-04-26 2009-11-17 Micron Technology Inc. Rolling shutter for prevention of blooming
JP5289764B2 (ja) 2005-05-11 2013-09-11 三菱電機株式会社 太陽電池およびその製造方法
US7375378B2 (en) 2005-05-12 2008-05-20 General Electric Company Surface passivated photovoltaic devices
EP1882275A1 (en) 2005-05-17 2008-01-30 Interuniversitair Microelektronica Centrum Vzw Method for the production of photovoltaic cells
US7291539B2 (en) 2005-06-01 2007-11-06 International Business Machines Corporation Amorphization/templated recrystallization method for hybrid orientation substrates
EP1896805A4 (en) 2005-06-14 2010-03-31 Steven M Ebstein USES OF LASER-TREATED SUBSTRATE FOR MOLECULAR DIAGNOSIS
US7317579B2 (en) 2005-08-11 2008-01-08 Micron Technology, Inc. Method and apparatus providing graded-index microlenses
US7605397B2 (en) 2005-08-17 2009-10-20 Digirad Corporation Capacitive bypass
US7315014B2 (en) 2005-08-30 2008-01-01 Micron Technology, Inc. Image sensors with optical trench
US7910964B2 (en) 2005-08-30 2011-03-22 National University Corporation Shizuoka University Semiconductor range-finding element and solid-state imaging device
US7432148B2 (en) 2005-08-31 2008-10-07 Micron Technology, Inc. Shallow trench isolation by atomic-level silicon reconstruction
KR100806577B1 (ko) 2005-09-07 2008-02-28 엘지전자 주식회사 생체 신호 측정 장치 및 방법
US20070052050A1 (en) 2005-09-07 2007-03-08 Bart Dierickx Backside thinned image sensor with integrated lens stack
JP4657068B2 (ja) * 2005-09-22 2011-03-23 シャープ株式会社 裏面接合型太陽電池の製造方法
US20080173620A1 (en) 2005-09-26 2008-07-24 Ultratech, Inc. Apparatuses and methods for irradiating a substrate to avoid substrate edge damage
US7666766B2 (en) 2005-09-27 2010-02-23 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus, method for forming film, and method for manufacturing photoelectric conversion device
US7608823B2 (en) 2005-10-03 2009-10-27 Teledyne Scientific & Imaging, Llc Multimode focal plane array with electrically isolated commons for independent sub-array biasing
JP2007122237A (ja) 2005-10-26 2007-05-17 Mitsubishi Electric Corp 偽造判定用撮像装置及び個人識別装置
WO2007056753A2 (en) 2005-11-08 2007-05-18 General Atomics Apparatus and methods for use in flash detection
JP4708965B2 (ja) 2005-11-10 2011-06-22 キヤノン株式会社 撮像装置
US20070115554A1 (en) 2005-11-22 2007-05-24 Breitung Eric M Antireflective surfaces, methods of manufacture thereof and articles comprising the same
US11211510B2 (en) 2005-12-13 2021-12-28 The Boeing Company Multijunction solar cell with bonded transparent conductive interlayer
US7456452B2 (en) 2005-12-15 2008-11-25 Micron Technology, Inc. Light sensor having undulating features for CMOS imager
KR100761829B1 (ko) 2005-12-15 2007-09-28 삼성전자주식회사 반도체 소자, 시모스 이미지 센서, 반도체 소자의 제조방법및 시모스 이미지 센서의 제조방법
US7576404B2 (en) 2005-12-16 2009-08-18 Icemos Technology Ltd. Backlit photodiode and method of manufacturing a backlit photodiode
WO2008091242A2 (en) 2005-12-21 2008-07-31 Uva Patent Foundation Systems and methods of laser texturing and crystallization of material surfaces
EP1964165B1 (en) 2005-12-21 2018-03-14 Sunpower Corporation Fabrication processes of back side contact solar cells
WO2008127807A1 (en) 2007-03-09 2008-10-23 University Of Virginia Patent Foundation Systems and methods of laser texturing of material surfaces and their applications
JP2007180643A (ja) 2005-12-27 2007-07-12 Sony Corp スイッチ装置、信号伝送回路装置及びスイッチング方法
JP2007180642A (ja) 2005-12-27 2007-07-12 Swcc Showa Device Technology Co Ltd 高精細画像シリアルデータ伝送装置
KR100741931B1 (ko) 2005-12-28 2007-07-23 동부일렉트로닉스 주식회사 이미지 센서 및 그의 제조방법
KR101181820B1 (ko) 2005-12-29 2012-09-11 삼성에스디아이 주식회사 태양 전지의 제조 방법
KR100809323B1 (ko) 2006-01-31 2008-03-05 삼성전자주식회사 크로스토크가 감소하고 감도가 증가한 이미지 센서
KR20070081773A (ko) 2006-02-13 2007-08-17 스마트 와이어레스 가부시키가이샤 적외선 얼굴 인증장치, 이를 구비하는 휴대 단말기 및보안장치
EP1989681B1 (en) 2006-02-13 2013-09-25 Max-Viz, Inc. System for and method of synchronous acquisition of pulsed source light in performance of monitoring aircraft flight operation
US7804148B2 (en) 2006-02-16 2010-09-28 International Business Machines Corporation Opto-thermal mask including aligned thermal dissipative layer, reflective layer and transparent capping layer
US7621640B2 (en) 2006-02-17 2009-11-24 Beverly Lloyd Optical device for producing a virtual image
JP5092251B2 (ja) 2006-02-22 2012-12-05 住友電気工業株式会社 光検出装置
JP4992446B2 (ja) 2006-02-24 2012-08-08 ソニー株式会社 固体撮像装置及びその製造方法、並びにカメラ
US20070201859A1 (en) 2006-02-24 2007-08-30 Logitech Europe S.A. Method and system for use of 3D sensors in an image capture device
US7623165B2 (en) 2006-02-28 2009-11-24 Aptina Imaging Corporation Vertical tri-color sensor
US7648851B2 (en) 2006-03-06 2010-01-19 Taiwan Semiconductor Manufacturing Company, Ltd. Method of fabricating backside illuminated image sensor
WO2007102248A1 (ja) 2006-03-08 2007-09-13 Sharp Kabushiki Kaisha 半導体装置及びその製造方法
US7605440B2 (en) 2006-04-07 2009-10-20 Aptina Imaging Corporation Pixel cell isolation of charge storage and floating diffusion regions using doped wells
JP4965151B2 (ja) 2006-04-11 2012-07-04 ルネサスエレクトロニクス株式会社 固体撮像装置
JP2007287860A (ja) 2006-04-14 2007-11-01 Toshiba Corp 半導体装置の製造方法
US7777166B2 (en) 2006-04-21 2010-08-17 Cree, Inc. Solid state luminaires for general illumination including closed loop feedback control
JP4308220B2 (ja) 2006-04-24 2009-08-05 富士通株式会社 個人認識装置
JP4193870B2 (ja) 2006-05-09 2008-12-10 ソニー株式会社 固体撮像素子、撮像装置
US20100171948A1 (en) 2006-06-14 2010-07-08 President And Fellows Of Harvard College Metalized semiconductor substrates for raman spectroscopy
WO2008002405A2 (en) 2006-06-16 2008-01-03 Medtor Llc System and method for a non-invasive medical sensor
US7714368B2 (en) 2006-06-26 2010-05-11 Aptina Imaging Corporation Method and apparatus providing imager pixel array with grating structure and imager device containing the same
US8013919B2 (en) 2006-06-27 2011-09-06 Samsung Electronics Co., Ltd. CMOS image sensor with increased dynamic range based on multiple exposure periods of varying lengths
US20080000522A1 (en) 2006-06-30 2008-01-03 General Electric Company Photovoltaic device which includes all-back-contact configuration; and related processes
US7656024B2 (en) 2006-06-30 2010-02-02 Fairchild Semiconductor Corporation Chip module for complete power train
JP2008021875A (ja) 2006-07-13 2008-01-31 Toshiba Corp 固体撮像装置
US8355545B2 (en) 2007-04-10 2013-01-15 Lumidigm, Inc. Biometric detection using spatial, temporal, and/or spectral techniques
US8034724B2 (en) 2006-07-21 2011-10-11 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US7592593B2 (en) 2006-07-26 2009-09-22 Northrop Grumman Corporation Multi-band focal plane array
DE102006034786B4 (de) 2006-07-27 2011-01-20 Siltronic Ag Monokristalline Halbleiterscheibe mit defektreduzierten Bereichen und Verfahren zur Ausheilung GOI-relevanter Defekte in einer monokristallinen Halbleiterscheibe
KR20080014301A (ko) 2006-08-10 2008-02-14 삼성전자주식회사 딥트렌치 소자분리막을 포함하는 이면 조사형 ｃｍｏｓ이미지 센서 및 그 제조방법
KR100745991B1 (ko) 2006-08-11 2007-08-06 삼성전자주식회사 이미지 센서 및 그 제조 방법
WO2008025057A1 (en) 2006-08-31 2008-03-06 Newsouth Innovations Pty Limited Thin-film diode structure using a sacrificial doped dielectric layer
US8121356B2 (en) 2006-09-15 2012-02-21 Identix Incorporated Long distance multimodal biometric system and method
US20090038669A1 (en) 2006-09-20 2009-02-12 Translucent Photonics, Inc. Thin Film Solar Cell III
FR2906405B1 (fr) 2006-09-22 2008-12-19 Commissariat Energie Atomique Procede de realisation de regions dopees dans un substrat et de cellule photovoltaique
JP4973115B2 (ja) 2006-10-16 2012-07-11 ソニー株式会社 固体撮像装置、固体撮像装置の駆動方法および撮像装置
US7629582B2 (en) 2006-10-24 2009-12-08 Raytheon Company Dual band imager with visible or SWIR detectors combined with uncooled LWIR detectors
US7888159B2 (en) 2006-10-26 2011-02-15 Omnivision Technologies, Inc. Image sensor having curved micro-mirrors over the sensing photodiode and method for fabricating
US20080178932A1 (en) 2006-11-02 2008-07-31 Guardian Industries Corp. Front electrode including transparent conductive coating on patterned glass substrate for use in photovoltaic device and method of making same
US7651880B2 (en) 2006-11-04 2010-01-26 Sharp Laboratories Of America, Inc. Ge short wavelength infrared imager
DE102007012115A1 (de) 2006-11-30 2008-06-05 Osram Opto Semiconductors Gmbh Strahlungsdetektor
WO2008073469A1 (en) 2006-12-11 2008-06-19 Lumenz, Llc Zinc oxide multi-junction photovoltaic cells and optoelectronic devices
US7763913B2 (en) 2006-12-12 2010-07-27 Aptina Imaging Corporation Imaging method, apparatus, and system providing improved imager quantum efficiency
JP5147226B2 (ja) 2006-12-15 2013-02-20 株式会社日立製作所 固体撮像素子、光検出器及びこれを用いた認証装置
US7770841B2 (en) * 2006-12-22 2010-08-10 Calvin Burgess Inverted airfoil pylon for an aircraft
JP2008160730A (ja) 2006-12-26 2008-07-10 Nikon Corp 信号ムラを修正する画像処理装置、較正方法、撮像装置、画像処理プログラム、および画像処理方法
JP4609428B2 (ja) 2006-12-27 2011-01-12 ソニー株式会社 固体撮像装置、固体撮像装置の駆動方法および撮像装置
KR101364997B1 (ko) 2007-01-11 2014-02-19 삼성디스플레이 주식회사 백라이트 어셈블리 및 이를 구비한 표시 장치
US7582515B2 (en) 2007-01-18 2009-09-01 Applied Materials, Inc. Multi-junction solar cells and methods and apparatuses for forming the same
US7808538B2 (en) 2007-01-22 2010-10-05 Omnivision Technologies, Inc. Image sensors with blooming reduction mechanisms
JP2008181970A (ja) 2007-01-23 2008-08-07 Sharp Corp アライメントマーク形成方法、アライメント方法、半導体装置の製造方法および固体撮像装置の製造方法
US20080179762A1 (en) 2007-01-25 2008-07-31 Au Optronics Corporation Layered structure with laser-induced aggregation silicon nano-dots in a silicon-rich dielectric layer, and applications of the same
JP4749351B2 (ja) 2007-01-30 2011-08-17 富士通株式会社 赤外線検出器
US7633629B2 (en) 2007-02-05 2009-12-15 Palo Alto Research Center Incorporated Tuning optical cavities
JP4243870B2 (ja) 2007-02-08 2009-03-25 ソニー株式会社 固体撮像装置及び撮像装置
US7803647B2 (en) 2007-02-08 2010-09-28 Taiwan Semiconductor Manufacturing Company, Ltd. Optical transmission improvement on multi-dielectric structure in advance CMOS imager
US8289430B2 (en) 2007-02-09 2012-10-16 Gentex Corporation High dynamic range imaging device
US20080191310A1 (en) 2007-02-12 2008-08-14 Weng-Jin Wu By-product removal for wafer bonding process
US20080198251A1 (en) 2007-02-15 2008-08-21 Micron Technology, Inc. Method, apparatus, and system providing multiple pixel integration periods
CA2661217A1 (en) 2007-02-16 2008-08-21 Mitsubishi Heavy Industries, Ltd. Photovoltaic device and process for producing same
EP2654089A3 (en) 2007-02-16 2015-08-12 Nanogram Corporation Solar cell structures, photovoltaic modules and corresponding processes
KR100825808B1 (ko) 2007-02-26 2008-04-29 삼성전자주식회사 후면 조명 구조의 이미지 센서 및 그 이미지 센서 제조방법
US7498650B2 (en) 2007-03-08 2009-03-03 Teledyne Licensing, Llc Backside illuminated CMOS image sensor with pinned photodiode
US7468649B2 (en) 2007-03-14 2008-12-23 Flextronics International Usa, Inc. Isolated power converter
US20080223436A1 (en) 2007-03-15 2008-09-18 Guardian Industries Corp. Back reflector for use in photovoltaic device
US8259293B2 (en) 2007-03-15 2012-09-04 Johns Hopkins University Deep submicron and nano CMOS single photon photodetector pixel with event based circuits for readout data-rate reduction communication system
EP2135292A2 (en) 2007-03-16 2009-12-23 BP Corporation North America Inc. Solar cells
EP1976001A3 (en) 2007-03-26 2012-08-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP5049036B2 (ja) * 2007-03-28 2012-10-17 オンセミコンダクター・トレーディング・リミテッド 半導体装置
US7728274B2 (en) 2007-03-30 2010-06-01 Subrahmanyam Pilla Imaging system with negative electron affinity photocathode
WO2008124154A2 (en) 2007-04-09 2008-10-16 Amberwave Systems Corporation Photovoltaics on silicon
US20080251812A1 (en) 2007-04-16 2008-10-16 Woo Sik Yoo Heteroepitaxial Crystal Quality Improvement
EP2143141A4 (en) 2007-04-18 2011-04-13 Invisage Technologies Inc MATERIAL SYSTEMS AND METHOD FOR OPTOELECTRONIC ARRANGEMENTS
KR20080097709A (ko) 2007-05-03 2008-11-06 동부일렉트로닉스 주식회사 이미지 센서 및 그의 제조방법
TWI426602B (zh) 2007-05-07 2014-02-11 Sony Corp A solid-state image pickup apparatus, a manufacturing method thereof, and an image pickup apparatus
JP5163935B2 (ja) 2007-05-17 2013-03-13 ソニー株式会社 イメージセンサ
JP4325703B2 (ja) 2007-05-24 2009-09-02 ソニー株式会社 固体撮像装置、固体撮像装置の信号処理装置および信号処理方法、ならびに撮像装置
DE102007024478A1 (de) 2007-05-25 2008-11-27 Friedrich-Schiller-Universität Jena Fotoempfindliches Halbleiterbauelement
TW200849462A (en) 2007-06-11 2008-12-16 Taiwan Semiconductor Mfg Isolation structure for image sensor device
US20080309913A1 (en) 2007-06-14 2008-12-18 James John Fallon Systems and methods for laser radar imaging for the blind and visually impaired
US7825966B2 (en) 2007-06-29 2010-11-02 Omnivision Technologies, Inc. High dynamic range sensor with blooming drain
KR100870821B1 (ko) 2007-06-29 2008-11-27 매그나칩 반도체 유한회사 후면 조사 이미지 센서
US8013238B2 (en) 2007-07-09 2011-09-06 Energy Related Devices, Inc. Micro concentrators elastically coupled with spherical photovoltaic cells
JP4304638B2 (ja) 2007-07-13 2009-07-29 オムロン株式会社 Ｃｉｓ系太陽電池及びその製造方法
JP4910923B2 (ja) 2007-07-20 2012-04-04 ソニー株式会社 撮像装置、撮像方法及び撮像プログラム
US8194232B2 (en) 2007-07-24 2012-06-05 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method
JP4379500B2 (ja) 2007-07-30 2009-12-09 ソニー株式会社 生体撮像装置
WO2009016846A1 (ja) 2007-08-02 2009-02-05 Panasonic Corporation 虹彩認証装置および虹彩認証システム
US20090039397A1 (en) 2007-08-09 2009-02-12 Micromedia Technology Corp. Image sensor structure
US8386011B2 (en) 2007-08-10 2013-02-26 Koninklijke Philips Electronics N.V. Motion detection in medical systems
JP2009055479A (ja) 2007-08-28 2009-03-12 Panasonic Corp イメージセンサ及び電磁波イメージング装置
US20090056797A1 (en) 2007-08-28 2009-03-05 Blue Square Energy Incorporated Photovoltaic Thin-Film Solar Cell and Method Of Making The Same
US8143514B2 (en) 2007-09-11 2012-03-27 Silicon China (Hk) Limited Method and structure for hydrogenation of silicon substrates with shaped covers
US20090078316A1 (en) 2007-09-24 2009-03-26 Qualcomm Incorporated Interferometric photovoltaic cell
JP5151375B2 (ja) 2007-10-03 2013-02-27 ソニー株式会社 固体撮像装置およびその製造方法および撮像装置
US8446470B2 (en) 2007-10-04 2013-05-21 Magna Electronics, Inc. Combined RGB and IR imaging sensor
US8269181B2 (en) 2007-10-10 2012-09-18 Positron Corporation Avalanche pixel sensors and related methods
US8035343B2 (en) 2007-10-15 2011-10-11 Black & Decker Inc. Method for balancing cells in a battery pack
US20090109305A1 (en) 2007-10-31 2009-04-30 Tiejun Dai One-step black level calibration for image sensors
US20090114630A1 (en) 2007-11-05 2009-05-07 Hawryluk Andrew M Minimization of surface reflectivity variations
US7888168B2 (en) 2007-11-19 2011-02-15 Applied Materials, Inc. Solar cell contact formation process using a patterned etchant material
JP5286046B2 (ja) 2007-11-30 2013-09-11 株式会社半導体エネルギー研究所 光電変換装置の製造方法
JP5248995B2 (ja) 2007-11-30 2013-07-31 株式会社半導体エネルギー研究所 光電変換装置の製造方法
TWI390008B (zh) 2007-12-12 2013-03-21 Solar cells and their light-emitting conversion layer
CN101465361A (zh) 2007-12-18 2009-06-24 台湾积体电路制造股份有限公司 图像传感器元件的隔离结构
JP5167799B2 (ja) 2007-12-18 2013-03-21 ソニー株式会社 固体撮像装置およびカメラ
CN101904013B (zh) 2007-12-19 2013-05-08 欧瑞康太阳能(处贝区市)公司 用于获得沉积于高度纹理化基板上的高性能薄膜装置的方法
US20090242019A1 (en) 2007-12-19 2009-10-01 Silexos, Inc Method to create high efficiency, low cost polysilicon or microcrystalline solar cell on flexible substrates using multilayer high speed inkjet printing and, rapid annealing and light trapping
US7880168B2 (en) 2007-12-19 2011-02-01 Aptina Imaging Corporation Method and apparatus providing light traps for optical crosstalk reduction
US7897942B1 (en) 2007-12-20 2011-03-01 Kla-Tencor Corporation Dynamic tracking of wafer motion and distortion during lithography
DE102008026839A1 (de) 2007-12-20 2009-07-02 Osram Opto Semiconductors Gmbh Verfahren zum Herstellen eines optoelektronischen Bauelements in Dünnschichttechnik
EP2398055B1 (en) 2008-01-10 2012-12-12 Stmicroelectronics Sa Pixel circuit for global electronic shutter
KR101387715B1 (ko) 2008-01-10 2014-04-22 엘지전자 주식회사 나노 텍스쳐링 구조를 갖는 반도체 웨이퍼 기판을 포함하는벌크형 태양전지의 제조방법
US8743247B2 (en) 2008-01-14 2014-06-03 International Business Machines Corporation Low lag transfer gate device
US7982177B2 (en) 2008-01-31 2011-07-19 Omnivision Technologies, Inc. Frontside illuminated image sensor comprising a complex-shaped reflector
EP2240955B1 (en) 2008-01-31 2013-08-14 President and Fellows of Harvard College Engineering flat surfaces on materials doped via pulsed laser irradiation
US8895839B2 (en) * 2008-02-01 2014-11-25 President And Fellows Of Harvard College Multijunction photovoltaic device
US7989859B2 (en) 2008-02-08 2011-08-02 Omnivision Technologies, Inc. Backside illuminated imaging sensor with silicide light reflecting layer
US7741666B2 (en) 2008-02-08 2010-06-22 Omnivision Technologies, Inc. Backside illuminated imaging sensor with backside P+ doped layer
US7800192B2 (en) 2008-02-08 2010-09-21 Omnivision Technologies, Inc. Backside illuminated image sensor having deep light reflective trenches
US20090200631A1 (en) 2008-02-08 2009-08-13 Omnivision Technologies, Inc. Backside illuminated imaging sensor with light attenuating layer
US8063465B2 (en) 2008-02-08 2011-11-22 Omnivision Technologies, Inc. Backside illuminated imaging sensor with vertical pixel sensor
US8183510B2 (en) 2008-02-12 2012-05-22 Omnivision Technologies, Inc. Image sensor with buried self aligned focusing element
KR101028085B1 (ko) 2008-02-19 2011-04-08 엘지전자 주식회사 비대칭 웨이퍼의 식각방법, 비대칭 식각의 웨이퍼를포함하는 태양전지, 및 태양전지의 제조방법
US20090211627A1 (en) 2008-02-25 2009-08-27 Suniva, Inc. Solar cell having crystalline silicon p-n homojunction and amorphous silicon heterojunctions for surface passivation
US7816220B2 (en) 2008-02-27 2010-10-19 President & Fellows Of Harvard College Laser-induced structuring of substrate surfaces
JP2009206356A (ja) 2008-02-28 2009-09-10 Toshiba Corp 固体撮像装置およびその製造方法
US8058615B2 (en) 2008-02-29 2011-11-15 Sionyx, Inc. Wide spectral range hybrid image detector
US20090227061A1 (en) 2008-03-05 2009-09-10 Nicholas Bateman Establishing a high phosphorus concentration in solar cells
US7893464B2 (en) 2008-03-28 2011-02-22 Jds Uniphase Corporation Semiconductor photodiode and method of manufacture thereof
JP4968151B2 (ja) 2008-04-07 2012-07-04 コニカミノルタホールディングス株式会社 光センサ
EP2109143B1 (en) 2008-04-09 2013-05-29 Sony Corporation Solid-state imaging device, production method thereof, and electronic device
US20090256156A1 (en) 2008-04-09 2009-10-15 E-Phocus, Inc Hybrid imaging sensor with approximately equal potential photodiodes
US8077240B2 (en) 2008-04-23 2011-12-13 Inernational Business Machines Corporation Methods for enhancing quality of pixel sensor image frames for global shutter imaging
JP4697258B2 (ja) 2008-05-09 2011-06-08 ソニー株式会社 固体撮像装置と電子機器
US7759755B2 (en) 2008-05-14 2010-07-20 International Business Machines Corporation Anti-reflection structures for CMOS image sensors
JP2009290161A (ja) 2008-06-02 2009-12-10 Mitsubishi Electric Corp 光半導体装置
CN104538507B (zh) 2008-06-02 2017-08-15 Lg伊诺特有限公司 用于制备半导体发光装置的方法
DE102008002270A1 (de) 2008-06-06 2009-12-17 Robert Bosch Gmbh Multispektraler Sensor
KR20110042051A (ko) 2008-06-11 2011-04-22 솔라 임플란트 테크놀로지스 아이엔씨. 주입을 사용하여 솔라 셀의 제작
US7851698B2 (en) 2008-06-12 2010-12-14 Sunpower Corporation Trench process and structure for backside contact solar cells with polysilicon doped regions
US8207444B2 (en) 2008-07-01 2012-06-26 Sunpower Corporation Front contact solar cell with formed electrically conducting layers on the front side and backside
US20100074396A1 (en) 2008-07-07 2010-03-25 Siemens Medical Solutions Usa, Inc. Medical imaging with black silicon photodetector
US20100013036A1 (en) 2008-07-16 2010-01-21 Carey James E Thin Sacrificial Masking Films for Protecting Semiconductors From Pulsed Laser Process
US8159328B2 (en) 2008-07-16 2012-04-17 George William Luckhardt Biometric authentication and verification
US20100013039A1 (en) 2008-07-21 2010-01-21 Omnivision Technologies, Inc. Backside-illuminated imaging sensor including backside passivation
KR20100013649A (ko) 2008-07-31 2010-02-10 삼성전자주식회사 광전소자 및 이의 제조 방법
JP4875033B2 (ja) 2008-08-14 2012-02-15 株式会社東芝 光デバイス
US20100037943A1 (en) * 2008-08-14 2010-02-18 Sater Bernard L Vertical multijunction cell with textured surface
WO2010019161A1 (en) 2008-08-15 2010-02-18 Sionyx, Inc. Wideband semiconducting light detector
CN101656273B (zh) 2008-08-18 2011-07-13 中芯国际集成电路制造(上海)有限公司 选择性发射极太阳能电池单元及其制造方法
US20100044552A1 (en) 2008-08-19 2010-02-25 Lockheed Martin Corporation Automatic simultaneous dual gain readout integrated circuit using threshold voltage shifts of mosfet bulk to source potential
KR101010286B1 (ko) 2008-08-29 2011-01-24 엘지전자 주식회사 태양 전지의 제조 방법
US20100051809A1 (en) 2008-09-02 2010-03-04 Princeton Lightwave, Inc. Monolithic Dual Band Imager
US8679959B2 (en) 2008-09-03 2014-03-25 Sionyx, Inc. High sensitivity photodetectors, imaging arrays, and high efficiency photovoltaic devices produced using ion implantation and femtosecond laser irradiation
US7915154B2 (en) 2008-09-03 2011-03-29 Piwczyk Bernhard P Laser diffusion fabrication of solar cells
FR2935839B1 (fr) 2008-09-05 2011-08-05 Commissariat Energie Atomique Capteur d'images cmos a reflexion lumineuse
US20100059385A1 (en) 2008-09-06 2010-03-11 Delin Li Methods for fabricating thin film solar cells
US7968834B2 (en) 2008-09-22 2011-06-28 Sionyx, Inc. Response-enhanced monolithic-hybrid pixel
WO2010033127A1 (en) 2008-09-22 2010-03-25 Sionyx, Inc. Response-enhanced monolithic-hybrid pixel
US8101856B2 (en) 2008-10-02 2012-01-24 International Business Machines Corporation Quantum well GaP/Si tandem photovoltaic cells
US7875948B2 (en) 2008-10-21 2011-01-25 Jaroslav Hynecek Backside illuminated image sensor
US7915652B2 (en) 2008-10-24 2011-03-29 Sharp Laboratories Of America, Inc. Integrated infrared and color CMOS imager sensor
EP2180513A1 (en) 2008-10-27 2010-04-28 Stmicroelectronics SA Near infrared/color image sensor
CN101404307A (zh) 2008-10-29 2009-04-08 中山大学 一种多晶硅太阳电池绒面制作方法
JP4862878B2 (ja) 2008-10-30 2012-01-25 ソニー株式会社 固体撮像装置、その製造方法および撮像装置
US20100109060A1 (en) 2008-11-06 2010-05-06 Omnivision Technologies Inc. Image sensor with backside photodiode implant
US8125042B2 (en) 2008-11-13 2012-02-28 Samsung Electronics Co., Ltd. Semiconductor package and method of manufacturing the same
US8400537B2 (en) 2008-11-13 2013-03-19 Omnivision Technologies, Inc. Image sensors having gratings for color separation
CN101423942B (zh) 2008-11-13 2012-09-05 蒋冬 一种制备单晶硅绒面的碱腐蚀溶液及方法
JP5353201B2 (ja) 2008-11-21 2013-11-27 ソニー株式会社 固体撮像装置の製造方法
KR20100057983A (ko) 2008-11-24 2010-06-03 한국전자통신연구원 생체 인식 시스템의 다중 영상 획득 장치
US8487351B2 (en) 2008-11-28 2013-07-16 Samsung Electronics Co., Ltd. Image sensor and image sensing system including the same
US8093559B1 (en) 2008-12-02 2012-01-10 Hrl Laboratories, Llc Methods and apparatus for three-color infrared sensors
KR20100064699A (ko) 2008-12-05 2010-06-15 삼성전자주식회사 후면 조명 구조의 이미지 센서
US20100140768A1 (en) 2008-12-10 2010-06-10 Zafiropoulo Arthur W Systems and processes for forming three-dimensional circuits
KR20110105382A (ko) * 2008-12-10 2011-09-26 어플라이드 머티어리얼스, 인코포레이티드 스크린 프린팅 패턴 정렬을 위한 향상된 비젼 시스템
US20100147383A1 (en) 2008-12-17 2010-06-17 Carey James E Method and apparatus for laser-processing a semiconductor photovoltaic apparatus
US8124993B2 (en) 2008-12-17 2012-02-28 Palo Alto Research Center Incorporated Selective decomposition of nitride semiconductors to enhance LED light extraction
CN101478013A (zh) 2008-12-30 2009-07-08 无锡尚德太阳能电力有限公司 一种反应离子刻蚀制备太阳电池硅片绒面的方法以及用该方法制造的太阳电池
US7745901B1 (en) 2009-01-29 2010-06-29 Sionyx, Inc. Highly-depleted laser doped semiconductor volume
JP4816768B2 (ja) 2009-06-22 2011-11-16 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
KR101776955B1 (ko) 2009-02-10 2017-09-08 소니 주식회사 고체 촬상 장치와 그 제조 방법, 및 전자 기기
CN102317951B (zh) 2009-02-11 2015-01-21 数据逻辑扫描公司 利用彩色成像器进行高分辨率光学代码成像的系统和方法
US8953149B2 (en) 2009-02-17 2015-02-10 Microsoft Corporation CMOS three-dimensional image sensor detectors having reduced inter-gate capacitance, and enhanced modulation contrast
EP2399385B1 (en) 2009-02-18 2019-11-06 Google LLC Automatically capturing information, such as capturing information using a document-aware device
JP5185208B2 (ja) 2009-02-24 2013-04-17 浜松ホトニクス株式会社 フォトダイオード及びフォトダイオードアレイ
JP5185207B2 (ja) 2009-02-24 2013-04-17 浜松ホトニクス株式会社 フォトダイオードアレイ
JP5185206B2 (ja) 2009-02-24 2013-04-17 浜松ホトニクス株式会社 半導体光検出素子
JP5185205B2 (ja) 2009-02-24 2013-04-17 浜松ホトニクス株式会社 半導体光検出素子
JP5185157B2 (ja) 2009-02-25 2013-04-17 浜松ホトニクス株式会社 フォトダイオードの製造方法及びフォトダイオード
WO2010104842A1 (en) 2009-03-09 2010-09-16 Sionyx, Inc. Multi-junction semiconductor photovoltaic apparatus and methods
US7964431B2 (en) 2009-03-19 2011-06-21 Twin Creeks Technologies, Inc. Method to make electrical contact to a bonded face of a photovoltaic cell
EP2234387B8 (en) 2009-03-24 2012-05-23 Sony Corporation Solid-state imaging device, driving method of solid-state imaging device, and electronic apparatus
US8604405B2 (en) 2009-03-31 2013-12-10 Taiwan Semiconductor Manufacturing Company, Ltd. Backside illuminated image sensor device with refractive index dependent layer thicknesses and method of forming the same
US8962376B2 (en) 2009-04-21 2015-02-24 The Silanna Group Pty Ltd Optoelectronic device with lateral pin or pin junction
US8207051B2 (en) 2009-04-28 2012-06-26 Sionyx, Inc. Semiconductor surface modification
KR101160112B1 (ko) 2009-04-29 2012-06-26 주식회사 효성 함몰전극형 태양전지의 제조방법
US20100300505A1 (en) 2009-05-26 2010-12-02 Chen Yung T Multiple junction photovolatic devices and process for making the same
US20100300507A1 (en) 2009-06-02 2010-12-02 Sierra Solar Power, Inc. High efficiency low cost crystalline-si thin film solar module
KR100984700B1 (ko) 2009-06-04 2010-10-01 엘지전자 주식회사 태양 전지 및 그 제조 방법
US8076746B2 (en) 2009-06-26 2011-12-13 Omnivision Technologies, Inc. Back-illuminated image sensors having both frontside and backside photodetectors
US8111724B2 (en) 2009-07-07 2012-02-07 International Business Machines Corporation Temperature control device for optoelectronic devices
US8946839B1 (en) * 2009-08-20 2015-02-03 Hrl Laboratories, Llc Reduced volume infrared detector
CN101634027A (zh) 2009-08-26 2010-01-27 北京市太阳能研究所有限公司 一种制备单晶硅绒面的方法
CN101634026A (zh) 2009-08-26 2010-01-27 北京市太阳能研究所有限公司 一种制备单晶硅绒面的腐蚀液及方法
KR101139443B1 (ko) 2009-09-04 2012-04-30 엘지전자 주식회사 이종접합 태양전지와 그 제조방법
US8906670B2 (en) 2009-09-11 2014-12-09 Pacific Bioscience Of California, Inc. Zero-mode waveguides with non-reflecting walls
US8476681B2 (en) 2009-09-17 2013-07-02 Sionyx, Inc. Photosensitive imaging devices and associated methods
JP5961332B2 (ja) 2009-09-17 2016-08-02 サイオニクス、エルエルシー 感光撮像素子および関連方法
US9881965B2 (en) 2009-09-30 2018-01-30 Stmicroelectronics S.A. Back-side image sensor
JP5538811B2 (ja) 2009-10-21 2014-07-02 キヤノン株式会社 固体撮像素子
US20110095387A1 (en) 2009-10-22 2011-04-28 James Carey Semiconductor devices having an enhanced absorption region and associated methods
US20130167915A1 (en) 2009-12-09 2013-07-04 Solexel, Inc. High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using three-dimensional semiconductor absorbers
JP5297997B2 (ja) 2009-12-21 2013-09-25 株式会社日立メディアエレクトロニクス 個人認証装置及び移動通信端末
JP5172819B2 (ja) 2009-12-28 2013-03-27 株式会社東芝 固体撮像装置
KR20110079323A (ko) 2009-12-31 2011-07-07 주식회사 동부하이텍 이미지 센서 및 그 제조방법
JP5351066B2 (ja) 2010-01-25 2013-11-27 浜松ホトニクス株式会社 Ｏｃｔ装置
EP2531884A1 (en) 2010-02-03 2012-12-12 Battelle Memorial Institute Three-dimensional imaging system using a single lens system
US20120068289A1 (en) 2010-03-24 2012-03-22 Sionyx, Inc. Devices Having Enhanced Electromagnetic Radiation Detection and Associated Methods
JP5663925B2 (ja) 2010-03-31 2015-02-04 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
US8389377B2 (en) 2010-04-02 2013-03-05 Taiwan Semiconductor Manufacturing Company, Ltd. Sensor element isolation in a backside illuminated image sensor
CN101818348A (zh) 2010-04-02 2010-09-01 浙江大学 一步法制备单晶硅太阳能电池绒面的方法
US8692198B2 (en) 2010-04-21 2014-04-08 Sionyx, Inc. Photosensitive imaging devices and associated methods
JP5213188B2 (ja) * 2010-04-27 2013-06-19 シャープ株式会社 裏面電極型太陽電池、および裏面電極型太陽電池の製造方法
US20120111396A1 (en) 2010-05-04 2012-05-10 Sionyx, Inc. Photovoltaic Devices and Associated Methods
CN201725796U (zh) 2010-06-01 2011-01-26 格科微电子（上海）有限公司 背面照光的cmos图像传感器
CN102270646A (zh) 2010-06-01 2011-12-07 格科微电子（上海）有限公司 背面照光的cmos图像传感器
CA2786760C (en) 2010-06-01 2018-01-02 Boly Media Communications (Shenzhen) Co., Ltd. Multi-spectrum photosensitive device
US20120001841A1 (en) 2010-06-30 2012-01-05 Jeff Gokingco Identifying ambient light type and illuminance compensation using a plurality of photodetectors
US8390089B2 (en) 2010-07-27 2013-03-05 Taiwan Semiconductor Manufacturing Company, Ltd. Image sensor with deep trench isolation structure
JP5726005B2 (ja) 2010-08-02 2015-05-27 アイメックＩｍｅｃ Ｃｍｏｓ撮像装置アレイの製造方法
DE102010038796B4 (de) 2010-08-02 2014-02-20 Von Ardenne Anlagentechnik Gmbh Dünnschichtsolarzelle und Verfahren zu ihrer Herstellung
US20130206219A1 (en) * 2010-08-06 2013-08-15 Juanita N. Kurtin Cooperative photovoltaic networks and photovoltaic cell adaptations for use therein
US8625013B2 (en) 2010-08-23 2014-01-07 Red.Com, Inc. Multi-exposure imaging
JP5218502B2 (ja) 2010-08-30 2013-06-26 ソニー株式会社 固体撮像装置の製造方法
JP2012054321A (ja) 2010-08-31 2012-03-15 Sony Corp 固体撮像素子及びその製造方法、並びに固体撮像装置及び撮像装置
US8378398B2 (en) 2010-09-30 2013-02-19 Omnivision Technologies, Inc. Photodetector isolation in image sensors
US8723094B2 (en) 2010-12-21 2014-05-13 Sionyx, Inc. Photodetecting imager devices having correlated double sampling and associated methods
FR2969385A1 (fr) 2010-12-21 2012-06-22 St Microelectronics Crolles 2 Capteur d'images a taux d'intermodulation réduit
FR2969384A1 (fr) 2010-12-21 2012-06-22 St Microelectronics Sa Capteur d'image a intermodulation reduite
KR102024495B1 (ko) 2010-12-21 2019-09-23 사이오닉스, 엘엘씨 기판 손상을 감소시키는 반도체 소자 및 관련 방법
JP2012156334A (ja) 2011-01-26 2012-08-16 Sony Corp 固体撮像装置、固体撮像装置の製造方法及び電子機器
KR20120092326A (ko) 2011-02-11 2012-08-21 서울옵토디바이스주식회사 광 결정 구조를 갖는 비극성 발광 다이오드 및 그것을 제조하는 방법
JP2012169530A (ja) 2011-02-16 2012-09-06 Sony Corp 固体撮像装置、および、その製造方法、電子機器
JP5708025B2 (ja) 2011-02-24 2015-04-30 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
JP5810551B2 (ja) 2011-02-25 2015-11-11 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
JP6299058B2 (ja) 2011-03-02 2018-03-28 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法及び電子機器
DE102011013076A1 (de) 2011-03-04 2012-09-06 Rolls-Royce Deutschland Ltd & Co Kg Strahltriebwerksvorrichtung mit einem Nebenstromkanal
JP2012191005A (ja) 2011-03-10 2012-10-04 Sony Corp 固体撮像素子、固体撮像素子の製造方法および撮像装置
JP2012212349A (ja) 2011-03-31 2012-11-01 Hitachi Solutions Ltd 生体認証装置
US9083905B2 (en) 2011-04-26 2015-07-14 Semiconductor Components Industries, Llc Structured light imaging system
US20120291859A1 (en) 2011-05-17 2012-11-22 Christopher Vineis Multi-Junction Semiconductor Photovoltaic Apparatus and Methods
US9496308B2 (en) 2011-06-09 2016-11-15 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
US20120313205A1 (en) 2011-06-10 2012-12-13 Homayoon Haddad Photosensitive Imagers Having Defined Textures for Light Trapping and Associated Methods
EP2725616B1 (en) 2011-06-24 2017-07-26 Boly Media Communications (Shenzhen) Co., Ltd Multi scene depth photo sensitive device, system thereof, scene depth expanding method, and optical imaging system
CN106449676A (zh) 2011-07-19 2017-02-22 索尼公司 半导体装置和电子设备
US20130168792A1 (en) 2011-09-16 2013-07-04 Sionyx, Inc. Three Dimensional Architecture Semiconductor Devices and Associated Methods
JP5794068B2 (ja) 2011-09-16 2015-10-14 ソニー株式会社 固体撮像素子および製造方法、並びに電子機器
US20130168803A1 (en) 2011-09-16 2013-07-04 Sionyx, Inc. Semiconductor-On-Insulator Devices and Associated Methods
US8865507B2 (en) 2011-09-16 2014-10-21 Sionyx, Inc. Integrated visible and infrared imager devices and associated methods
JP2013093553A (ja) 2011-10-04 2013-05-16 Canon Inc 光電変換装置及びその製造方法、並びに光電変換システム
KR101853333B1 (ko) 2011-10-21 2018-05-02 삼성전자주식회사 블랙 레벨 안정화를 위한 이미지 센서
US9593053B1 (en) 2011-11-14 2017-03-14 Hypersolar, Inc. Photoelectrosynthetically active heterostructures
JP5768684B2 (ja) 2011-11-29 2015-08-26 富士通株式会社 ステレオ画像生成装置、ステレオ画像生成方法及びステレオ画像生成用コンピュータプログラム
US9653627B2 (en) 2012-01-18 2017-05-16 Wostec, Inc. Arrangements with pyramidal features having at least one nanostructured surface and methods of making and using
US9373732B2 (en) 2012-02-07 2016-06-21 Semiconductor Components Industries, Llc Image sensors with reflective optical cavity pixels
US8772898B2 (en) 2012-02-09 2014-07-08 Omnivision Technologies, Inc. Lateral light shield in backside illuminated imaging sensors
KR20140138886A (ko) 2012-04-13 2014-12-04 아사히 가세이 이-매터리얼즈 가부시키가이샤 반도체 발광 소자용 광추출체 및 발광 소자
US9659981B2 (en) 2012-04-25 2017-05-23 Taiwan Semiconductor Manufacturing Co., Ltd. Backside illuminated image sensor with negatively charged layer
US9136300B2 (en) 2013-01-11 2015-09-15 Digimarc Corporation Next generation imaging methods and systems
US9293500B2 (en) 2013-03-01 2016-03-22 Apple Inc. Exposure control for image sensors
KR20140147508A (ko) 2013-06-20 2014-12-30 삼성전자주식회사 이미지 센서
US9209345B2 (en) 2013-06-29 2015-12-08 Sionyx, Inc. Shallow trench textured regions and associated methods
US9559215B1 (en) 2015-12-23 2017-01-31 Intel Corporation Method and apparatus for making p-channel thin film transistors for OLED and LED active matrix flat panel displays

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060231914A1 (en) * 2001-05-25 2006-10-19 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
US20090242032A1 (en) * 2008-03-28 2009-10-01 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and method for manufacturing the same

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8564087B2 (en) * 2009-02-25 2013-10-22 Hamamatsu Photonics K.K. Photodiode manufacturing method and photodiodes
US20110291213A1 (en) * 2009-02-25 2011-12-01 Hamamatsu Photonics K.K. Photodiode manufacturing method and photodiodes
US8736008B2 (en) 2012-01-04 2014-05-27 General Electric Company Photodiode array and methods of fabrication
US20150381907A1 (en) * 2014-06-26 2015-12-31 Semiconductor Components Industries, Llc Imaging systems for infrared and visible imaging with patterned infrared cutoff filters
US9699393B2 (en) * 2014-06-26 2017-07-04 Semiconductor Components Industries, Llc Imaging systems for infrared and visible imaging with patterned infrared cutoff filters
US10134926B2 (en) * 2015-02-03 2018-11-20 Microsoft Technology Licensing, Llc Quantum-efficiency-enhanced time-of-flight detector
US10964039B2 (en) 2016-03-01 2021-03-30 Magic Leap, Inc. Depth sensing systems and methods
US20170256069A1 (en) * 2016-03-01 2017-09-07 Magic Leap, Inc. Depth sensing systems and methods
US11475583B2 (en) 2016-03-01 2022-10-18 Magic Leap, Inc. Depth sensing systems and methods
US10565717B2 (en) * 2016-03-01 2020-02-18 Magic Leap, Inc. Depth sensing systems and methods
US10264242B2 (en) * 2016-12-12 2019-04-16 Commissariat à l'Energie Atomique et aux Energies Alternatives Image sensor for capturing 2D image and depth
US10984640B2 (en) * 2017-04-20 2021-04-20 Amazon Technologies, Inc. Automatic adjusting of day-night sensitivity for motion detection in audio/video recording and communication devices
US20180308328A1 (en) * 2017-04-20 2018-10-25 Ring Inc. Automatic adjusting of day-night sensitivity for motion detection in audio/video recording and communication devices
US11978754B2 (en) 2018-02-13 2024-05-07 Sense Photonics, Inc. High quantum efficiency Geiger-mode avalanche diodes including high sensitivity photon mixing structures and arrays thereof
US10748466B2 (en) * 2018-09-20 2020-08-18 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel and method of driving the same
US20200098299A1 (en) * 2018-09-20 2020-03-26 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel and method of driving the same
WO2020062825A1 (en) * 2018-09-28 2020-04-02 Boe Technology Group Co., Ltd. Photodetector, display substrate including photodetector, method of fabricating photodetector, and display panel
US11387290B2 (en) 2018-09-28 2022-07-12 Boe Technology Group Co., Ltd. Photodetector, display substrate including photodetector, method of fabricating photodetector, and display panel
WO2020092471A1 (en) 2018-10-30 2020-05-07 Sense Photonics, Inc. High quantum efficiency geiger-mode avalanche diodes including high sensitivity photon mixing structures and arrays thereof
US11296137B2 (en) 2018-10-30 2022-04-05 Sense Photonics, Inc. High quantum efficiency Geiger-mode avalanche diodes including high sensitivity photon mixing structures and arrays thereof

Also Published As

Publication number Publication date
US10505054B2 (en) 2019-12-10
US20220052210A1 (en) 2022-02-17
CN103081128A (zh) 2013-05-01
CN106449684B (zh) 2019-09-27
US12040415B2 (en) 2024-07-16
WO2011160130A3 (en) 2012-04-05
EP2583312A2 (en) 2013-04-24
WO2011160130A2 (en) 2011-12-22
US20170345951A1 (en) 2017-11-30
CN103081128B (zh) 2016-11-02
US9761739B2 (en) 2017-09-12
US20200111922A1 (en) 2020-04-09
US20150349150A1 (en) 2015-12-03
CN106449684A (zh) 2017-02-22

Similar Documents

Publication Publication Date Title
US12040415B2 (en) High speed photosensitive devices and associated methods
US8698084B2 (en) Three dimensional sensors, systems, and associated methods
US10361232B2 (en) Photosensitive imaging devices and associated methods
US10484855B2 (en) Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
US8476681B2 (en) Photosensitive imaging devices and associated methods
WO2012088338A2 (en) Photodetecting imager devices having correlated double sampling and associated methods
US20210263155A1 (en) Apparatus and method for optical sensing using an optoelectronic device and optoelectronic device arrays
EP4290591A1 (en) Time-of-flight image sensor with quantum dot photodetectors

Legal Events

Date Code Title Description
AS Assignment

Owner name: SIONYX, INC., MASSACHUSETTS

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CAREY, JAMES;MILLER, DRAKE;SIGNING DATES FROM 20110210 TO 20110223;REEL/FRAME:026827/0340

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION