JP4749351B2 - 赤外線検出器 - Google Patents
赤外線検出器 Download PDFInfo
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- JP4749351B2 JP4749351B2 JP2007019117A JP2007019117A JP4749351B2 JP 4749351 B2 JP4749351 B2 JP 4749351B2 JP 2007019117 A JP2007019117 A JP 2007019117A JP 2007019117 A JP2007019117 A JP 2007019117A JP 4749351 B2 JP4749351 B2 JP 4749351B2
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- 239000012535 impurity Substances 0.000 claims description 81
- 239000002096 quantum dot Substances 0.000 claims description 80
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 49
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 41
- 239000000463 material Substances 0.000 claims description 21
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 19
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 15
- 239000004020 conductor Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 9
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 6
- 230000035945 sensitivity Effects 0.000 description 29
- 239000000203 mixture Substances 0.000 description 20
- 238000000034 method Methods 0.000 description 13
- 238000005036 potential barrier Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 8
- 238000001451 molecular beam epitaxy Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000002109 crystal growth method Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- -1 for example Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035209—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions comprising a quantum structures
- H01L31/035218—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions comprising a quantum structures the quantum structure being quantum dots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035236—Superlattices; Multiple quantum well structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
- H01L31/109—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the PN heterojunction type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
- H01L31/1844—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Description
素子に印加する電圧をV0としたとき、下部コンタクト層14と不純物導入層16との間の電位障壁の頂点(図中、A点)からみた不純物導入層16の端部との電位差V1(図6参照)は、ポアソン方程式を解くことにより、
V1=(1/2)(eNd/ε)t2+(t/L)V0
と求めることができる。なお、ここでは、V1≪V0とした近似を用いている。
なお、式(1)の左辺第1項は、一様な空間電荷状態での電位分布を示すものであり、x=tでの電位と電界=0という境界条件によりポアソン方程式から求められるものである。この境界条件が、上述のV1≪V0とする近似に該当する。また、式(1)の左辺第2項は、この近似に対する補正項であり、x=0からx=tでの間でのバイアス電圧V0による電位変化分(線形近似)を考慮したものである。
V2=((V0−V1)/(L−t))×l
であるから、
V0−((L−t)/l)E0<(1/2)(eNd/ε)t2+(t/L)V0 …(2)
を満たすことが、より望ましい。上記式(2)は、AlGaAs不純物導入層16に導入すべき不純物の濃度Nd及びその領域幅tの上限値を与える。
V0−((L−t)/l)E0<(1/2)(eNd/ε)t2+(t/L)V0
本実施形態による赤外線検出器では、素子長Lが500nm、量子ドット20の1周期相当の距離(中間層22の厚さ)が50nm、不純物導入層16の厚さtが10nm、不純物導入層16の不純物濃度Ndが8.5×1017cm−3、AlGaAs層のAl組成が15%では、中間層22の比誘電率が12.7、Γ伝導帯とX伝導帯又はL伝導帯との間のエネルギー差E0が163mVであるため、素子に印加する電圧V0を1Vとすると、
V1=(1/2)(eNd/ε)t2+(t/L)V0=78.8mV
となり、上記式(1)の関係を満たしている。また、
V2=V0−((L−t)/l)×E0=−628mV
となり、上記式(2)の関係も満たしている。
V1=(1/2)(eNd/ε)t2+(t/L)V0=105mV
V2=V0−((L−t)/l)×E0=572mV
となり、式(1)の関係は満たすが、式(2)の関係は満たしていない。しかしながら、図7から明らかなように、不純物導入層16を形成した本発明の試料では、不純物導入層16を形成しない従来構造の試料と比較して、低電流領域での相対的な感度の低下を抑制できていることが判る。
本発明は上記実施形態に限らず種々の変形が可能である。
12…緩衝層
14…下部コンタクト層
16…不純物導入層
18…下地層
20…量子ドット
22…中間層
24…量子ドット積層体
26…上部コンタクト層
28…下部電極層
30…上部電極層
Claims (8)
- 半導体基板上に形成された第1のコンタクト層と、
前記第1のコンタクト層上に形成され、第1の半導体材料よりなる複数の中間層と、前記第1の半導体材料よりもバンド幅の狭い第2の半導体材料よりなる複数の量子ドットとが交互に繰り返して積層されてなる量子ドット層と、
前記量子ドット層上に形成された第2のコンタクト層とを有し、
複数の前記中間層のうち前記第1のコンタクト層に接する前記中間層は、前記第1のコンタクト層との間の界面側にN型不純物が導入された不純物導入領域を有する
ことを特徴とする赤外線検出器。 - 請求項1記載の赤外線検出器において、
前記不純物導入領域は、前記第1のコンタクト層と前記第2のコンタクト層との間に駆動電圧を印加した状態において、前記不純物導入領域による電位降下量をV1、前記中間層内におけるΓ伝導体とΓ伝導体に近接する他の伝導帯とのエネルギー差をE0として、
V1<E0
の関係を満たすように、厚さ及び不純物濃度が規定されている
ことを特徴とする赤外線検出器。 - 請求項1記載の赤外線検出器において、
前記不純物導入領域は、前記第1のコンタクト層と前記第2のコンタクト層との間に駆動電圧を印加した状態において、電荷素量をe、前記不純物導入領域の不純物濃度をNd、前記中間層の誘電率をε、前記不純物導入領域の厚さをt、前記第1のコンタクト層と前記第2のコンタクト層との間隔をL、前記駆動電圧をV0、前記中間層内におけるΓ伝導体とΓ伝導体に近接する他の伝導帯とのエネルギー差をE0として、
(1/2)(eNd/ε)t2+(t/L)V0<E0
の関係を満たすように、厚さt及び不純物濃度Ndが規定されている
ことを特徴とする赤外線検出器。 - 請求項1乃至3のいずれか1項に記載の赤外線検出器において、
前記不純物導入領域は、前記第1のコンタクト層と前記第2のコンタクト層との間に駆動電圧を印加した状態において、前記駆動電圧をV0、前記不純物導入領域による電位降下量をV1、前記中間層の厚さをl、前記第1のコンタクト層と前記第2のコンタクト層との間隔をL、前記不純物導入領域の厚さをt、前記中間層内におけるΓ伝導体とΓ伝導体に近接する他の伝導帯とのエネルギー差をE0として、
((V0−V1)l)/(L−t)<E0
の関係を満たすように、厚さ及び不純物濃度が規定されている
ことを特徴とする赤外線検出器。 - 請求項1乃至3のいずれか1項に記載の赤外線検出器において、
前記不純物導入領域は、前記第1のコンタクト層と前記第2のコンタクト層との間に駆動電圧を印加した状態において、前記駆動電圧をV0、前記第1のコンタクト層と前記第2のコンタクト層との間隔をL、前記不純物導入領域の厚さをt、前記中間層内におけるΓ伝導体とΓ伝導体に近接する他の伝導帯とのエネルギー差をE0、電荷素量をe、前記不純物導入領域の不純物濃度をNd、前記中間層の誘電率をεとして、
V0−((L−t)/l)E0<(1/2)(eNd/ε)t2+(t/L)V0
の関係を満たすように、厚さt及び不純物濃度Ndが規定されている
ことを特徴とする赤外線検出器。 - 請求項3乃至5のいずれか1項に記載の赤外線検出器において、
前記Γ伝導体に近接する他の伝導帯は、X伝導帯又はL伝導帯である
ことを特徴とする赤外線検出器。 - 請求項1乃至6のいずれか1項に記載の赤外線検出器において、
前記第1の半導体材料は、GaAs又はAlGaAsであり、
ことを特徴とする赤外線検出器。 - 請求項1乃至7のいずれか1項に記載の赤外線検出器において、
前記第2の半導体材料は、InAs又はInGaAsである
ことを特徴とする赤外線検出器。
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JP2007019117A JP4749351B2 (ja) | 2007-01-30 | 2007-01-30 | 赤外線検出器 |
US12/010,584 US8368045B2 (en) | 2007-01-30 | 2008-01-28 | Infrared photodetector |
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JP2007019117A JP4749351B2 (ja) | 2007-01-30 | 2007-01-30 | 赤外線検出器 |
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JP2008187003A JP2008187003A (ja) | 2008-08-14 |
JP4749351B2 true JP4749351B2 (ja) | 2011-08-17 |
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JP2018190935A (ja) * | 2017-05-11 | 2018-11-29 | シャープ株式会社 | 量子ドット型赤外線検出器 |
JP7041337B2 (ja) * | 2017-07-13 | 2022-03-24 | 富士通株式会社 | 赤外線検出器、撮像素子、及び撮像システム |
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